JPH09327779A - Method for forming crack in ceramic film, and ceramic film parts formed by the method - Google Patents
Method for forming crack in ceramic film, and ceramic film parts formed by the methodInfo
- Publication number
- JPH09327779A JPH09327779A JP8145663A JP14566396A JPH09327779A JP H09327779 A JPH09327779 A JP H09327779A JP 8145663 A JP8145663 A JP 8145663A JP 14566396 A JP14566396 A JP 14566396A JP H09327779 A JPH09327779 A JP H09327779A
- Authority
- JP
- Japan
- Prior art keywords
- cracks
- ceramic film
- heat
- film
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Laser Beam Processing (AREA)
- Coating By Spraying Or Casting (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ガスタービン等の
高温部品の遮熱用に適用されるセラミック皮膜の割れ形
成方法及び同方法によるセラミック皮膜部品に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming cracks in a ceramic coating applied for heat shielding of high temperature components such as gas turbines, and a ceramic coated component according to the method.
【０００２】[0002]
【従来の技術】ガスタービンの翼、燃焼筒等の高温使用
機器は、主にＮｉ基耐熱合金が用いられているが、１０
００℃をこえる高温ガスに曝される部分では、そのまま
では耐熱性が十分でなく、下地にＭＣｒＡｌＹ（ＭはＣ
ｏ又はＮｉ）合金をプラズマ溶射した上に、ジルコニア
（ＺｒＯ2 ）をプラズマ溶射し、耐熱性表面層を形成し
て使用されている。2. Description of the Related Art Ni-base heat-resistant alloys are mainly used for high temperature equipment such as gas turbine blades and combustion tubes.
In the part exposed to the high temperature gas exceeding 00 ° C, the heat resistance is not sufficient as it is, and MCrAlY (M is C
It is used by plasma-spraying an o or Ni) alloy and then plasma-spraying zirconia (ZrO 2 ) to form a heat-resistant surface layer.
【０００３】[0003]
【発明が解決しようとする課題】高温使用機器のＮｉ基
耐熱合金にＭＣｒＡｌＹ合金及びＺｒＯ2 をプラズマ溶
射して高温で長時間使用（熱くり返しあり）した場合、
ＭＣｒＡｌＹ溶射皮膜とＺｒＯ2 溶射皮膜の界面ではく
りを生じ、長期使用上問題があった。When a Ni-based heat-resistant alloy of a high-temperature equipment is plasma-sprayed with MCrAlY alloy and ZrO 2 and used at high temperature for a long time (with repeated heat),
The interface between the MCrAlY sprayed coating and the ZrO 2 sprayed coating caused peeling, which was a problem for long-term use.
【０００４】[0004]
【課題を解決するための手段】本発明は上記課題を解決
するため次の手段を講ずる。The present invention employs the following means to solve the above-mentioned problems.
【０００５】（１） セラミック皮膜を持つ耐熱部品の
同セラミック皮膜上へレーザビームを局部的に照射して
同セラミック皮膜に割れを発生させる。(1) A laser beam is locally irradiated onto the ceramic coating of a heat-resistant component having the ceramic coating to cause cracks in the ceramic coating.
【０００６】以上において、セラミック皮膜上へレーザ
ビームが局部的に順次照射される。すると照射部は局部
的に熱膨張するので、照射部およびその周囲に割れ（縦
割れ）が発生する。In the above, the laser beam is locally and sequentially irradiated onto the ceramic coating. Then, the irradiation part locally thermally expands, so that cracks (vertical cracks) occur in the irradiation part and its surroundings.
【０００７】このようにして、セラミック皮膜上の全面
にほぼ一様に分布した割れが容易に形成される。In this way, cracks that are substantially uniformly distributed are easily formed on the entire surface of the ceramic coating.
【０００８】表面に無数の縦割れを持つセラミック皮膜
は、下地との間に膨張率の差異があっても、高温使用時
に、延び差が割れ部で吸収され、はく離の発生が有効に
抑えられる。A ceramic coating having innumerable vertical cracks on its surface has a difference in expansion coefficient from that of a base material, and the difference in elongation is absorbed by the cracked portion at the time of high temperature use, so that the occurrence of peeling is effectively suppressed. .
【０００９】（２） 上記（１）のセラミック皮膜の割
れ形成方法によりＭＣｒＡｌＹ皮膜の上にＺｒＯ2 皮膜
を持つ耐熱部品の同ＺｒＯ2 皮膜に割れを形成したセラ
ミック皮膜部品。(2) A ceramic coating component in which a crack is formed in the ZrO 2 coating of the heat-resistant component having the ZrO 2 coating on the MCrAlY coating by the method for forming a crack in the ceramic coating of (1) above.
【００１０】以上において、局部的な割れを全面に持つ
ＺｒＯ2 皮膜はＭＣｒＡｌＹとの間に膨張率の差異があ
っても、高温使用時に、延び差が割れ部で吸収され、は
く離の発生が有効に抑えられる。In the above, even if the ZrO 2 film having local cracks on the entire surface has a difference in expansion coefficient between MCrAlY and MCrAlY, the difference in elongation is absorbed by the cracks at the time of high temperature use, and the occurrence of peeling is effective. Can be suppressed to.
【００１１】このようにして、耐熱耐久性が大幅に向上
する。In this way, the heat resistance and durability are greatly improved.
【００１２】[0012]
【発明の実施の形態】本発明の実施の一形態を図１〜図
６により説明する。本発明は以下の考察をもとになされ
たものである。DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to FIGS. The present invention is based on the following consideration.
【００１３】ＺｒＯ2 溶射皮膜のはく離に対する寿命は
ＺｒＯ2 溶射皮膜中に気孔を多く含む方が長くなる傾向
があることはわかっているが、通常プラズマ溶射皮膜中
の気孔量は断面でみて１〜３％程度であり、限界があ
る。[0013] While the life against peeling of ZrO 2 thermal spray coating we know that there is a tendency that people containing many pores in ZrO 2 sprayed coating becomes longer, the pore volume of normal plasma sprayed coating is viewed in cross-section 1 It is about 3%, and there is a limit.
【００１４】ＺｒＯ2 溶射皮膜の線膨張率は１０〜１１
×１０-6／Ｋであるのに対してＭＣｒＡｌＹ合金及び母
材であるＮｉ基耐熱合金は約１６×１０-6／Ｋであり、
ＺｒＯ2 溶射皮膜とＭＣｒＡｌＹ合金溶射皮膜の界面で
は熱応力の発生がＺｒＯ2 溶射皮膜のはく離の原因であ
る。したがって、このはく離の原因を緩和するため、以
下の形態を実施する。The linear expansion coefficient of the ZrO 2 sprayed coating is 10-11.
X10 -6 / K, whereas the MCrAlY alloy and the base Ni-base heat-resistant alloy are approximately 16 x 10 -6 / K,
The occurrence of thermal stress at the interface between the ZrO 2 sprayed coating and the MCrAlY alloy sprayed coating is the cause of delamination of the ZrO 2 sprayed coating. Therefore, in order to mitigate the cause of this peeling, the following mode is implemented.
【００１５】図１に示すように、母材（Ｎｉ基耐熱合
金）１にＭＣｒＡｌＹ合金の溶射皮膜２およびＺｒＯ2
溶射皮膜３を順次持つ耐熱部品０１の皮膜３表面上にレ
ーザビーム４の焦点をあわせる。そして所定の移動速度
でレーザビーム４を照射する。すると照射部は局部的に
熱膨張するので照射部およびその周囲に割れ（縦割れ）
５が発生する。As shown in FIG. 1, a base material (Ni-based heat-resistant alloy) 1 is provided with a sprayed coating 2 of MCrAlY alloy and ZrO 2.
The laser beam 4 is focused on the surface of the coating 3 of the heat-resistant component 01 having the sprayed coating 3 in sequence. Then, the laser beam 4 is emitted at a predetermined moving speed. Then, the irradiated part thermally expands locally, causing cracks (vertical cracks) in the irradiated part and its surroundings.
5 occurs.
【００１６】このようにして、ＺｒＯ2 皮膜３上の全面
にほぼ一様に分布した割れが容易に形成される。In this way, cracks distributed almost uniformly are easily formed on the entire surface of the ZrO 2 film 3.
【００１７】このようにして形成されたセラミック皮膜
３は下地層との間に膨張率の差異があっても、高温使用
時に、延び差が割れ部で吸収され、はく離の発生が有効
に抑えられる。Even if there is a difference in expansion coefficient between the ceramic film 3 formed in this manner and the base layer, the difference in elongation is absorbed by the cracked portion during use at high temperature, and the occurrence of peeling is effectively suppressed. .
【００１８】上記形態を試験片に適用した場合を図２と
図３に示す。試験片０２は丸棒母材１ａの上に、上記と
同様溶射皮膜２，３を行ったものである。A case where the above-mentioned embodiment is applied to a test piece is shown in FIGS. 2 and 3. The test piece 02 has the thermal spray coatings 2 and 3 formed on the round bar base material 1a in the same manner as described above.
【００１９】レーザ照射条件を表１に示す。Table 1 shows the laser irradiation conditions.
【００２０】[0020]
【表１】 [Table 1]
【００２１】なお、出力波形は図４に示す。The output waveform is shown in FIG.
【００２２】表１の条件でＺｒＯ2 溶射皮膜３にレーザ
ビーム４を照射するとＭＣｒＡｌＹ合金からなる下地層
２に影響を与えることなく、ＺｒＯ2 溶射皮膜３に縦割
れ５を容易に挿入することができることが分った。When the laser beam 4 is applied to the ZrO 2 sprayed coating 3 under the conditions shown in Table 1, the vertical cracks 5 can be easily inserted into the ZrO 2 sprayed coating 3 without affecting the underlayer 2 made of the MCrAlY alloy. I knew what I could do.
【００２３】なお、図２は丸棒１ａにＭＣｒＡｌＹ合金
及びＺｒＯ2 をプラズマ溶射し、その後レーザ照射しＺ
ｒＯ2 表面に、亀甲割れ（縦割れ５）を生じさせた状態
を示している。図３は丸棒１ａの断面状態であり、Ｚｒ
Ｏ2 溶射皮膜３の中に縦割れ５が入っている状態を示し
ている。In FIG. 2, the rod 1a is plasma-sprayed with MCrAlY alloy and ZrO 2 and then laser-irradiated to Z.
It shows a state in which a hexagonal crack (longitudinal crack 5) is caused on the rO 2 surface. FIG. 3 shows a cross-sectional state of the round bar 1a, Zr
It shows a state where vertical cracks 5 are contained in the O 2 sprayed coating 3.
【００２４】次に耐熱耐久性効果を確認するために、上
記の試験片０２と従来の方法により製作した試験片７を
図５と図６（ａ），（ｂ）に示すように、加熱炉８によ
って９９０℃まで３分で加熱後、冷却ガス９によって６
０℃まで４分で冷却をくり返す熱衝撃試験を実施した。
その結果を表２に示す。Next, in order to confirm the effect of heat resistance and durability, the test piece 02 and the test piece 7 manufactured by the conventional method are heated in a heating furnace as shown in FIGS. 5 and 6 (a) and 6 (b). After heating to 990 ° C. for 3 minutes by 8 and cooling gas 9 at 6
A thermal shock test was carried out by repeating cooling to 0 ° C. in 4 minutes.
The results are shown in Table 2.
【００２５】[0025]
【表２】 [Table 2]
【００２６】表２のように従来の方法による試験片７で
は、３０回でＺｒＯ2 溶射皮膜がはく離したが、本形態
による試験片０２では、２０００回まで大幅に寿命が延
びており、ガスタービン部品として十分な耐熱性を有す
ることが確認された。As shown in Table 2, in the test piece 7 by the conventional method, the ZrO 2 sprayed coating was peeled off after 30 times, but in the test piece 02 according to this embodiment, the life was greatly extended to 2000 times, and the gas turbine It was confirmed to have sufficient heat resistance as a part.
【００２７】[0027]
【発明の効果】以上に説明したように、本発明によれ
ば、耐熱部品のセラミック皮膜上に容易に局部的な割れ
を発生できる。また局部的な割れを全面に持つセラミッ
ク皮膜は、高温時のはく離防止効果が大で、耐熱、耐久
性が大幅に向上する。As described above, according to the present invention, local cracks can be easily generated on the ceramic coating of the heat resistant component. Moreover, the ceramic coating having local cracks on the entire surface has a great effect of preventing peeling at high temperatures, and the heat resistance and durability are greatly improved.
【図１】本発明の実施の一形態の断面図である。FIG. 1 is a sectional view of an embodiment of the present invention.
【図２】同一形態による試験片の斜視図である。FIG. 2 is a perspective view of a test piece according to the same form.
【図３】同一形態の図２のＡ−Ａ視図である。FIG. 3 is a view taken along line AA of FIG. 2 showing the same configuration.
【図４】同一形態の図２のレーザ出力波形図である。4 is a laser output waveform diagram of FIG. 2 of the same form.
【図５】同一形態の図２のレーザ熱衝撃試験のサイクル
図である。5 is a cycle diagram of the laser thermal shock test of FIG. 2 of the same form.
【図６】同一形態の図２のレーザ熱衝撃試験の説明図で
ある。6 is an explanatory view of the laser thermal shock test of FIG. 2 of the same form.
０１ 耐熱部品 ０２ 試験片 １，１ａ 母材（Ｎｉ基耐熱合金） ２ ＭＣｒＡｌＹ溶射皮膜（下地層） ３ ＺｒＯ2 溶射皮膜 ４ レーザビーム ５ 縦割れ（亀甲割れ） ６ 気孔 ７ 熱衝撃試験試験片（比較用） ８ 加熱炉 ９ 冷却ガス01 Heat-resistant parts 02 Test piece 1, 1a Base material (Ni-based heat-resistant alloy) 2 MCrAlY sprayed coating (underlayer) 3 ZrO 2 Sprayed coating 4 Laser beam 5 Vertical crack (crack crack) 6 Pore 7 Thermal shock test specimen (comparative) 8) Heating furnace 9 Cooling gas
───────────────────────────────────────────────────── フロントページの続き (72)発明者 伊藤 収二 兵庫県高砂市荒井町新浜２丁目１番１号 三菱重工業株式会社高砂製作所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor, Reiji Ito 2-1-1, Niihama, Arai-cho, Takasago-shi, Hyogo Mitsubishi Heavy Industries, Ltd. Takasago Plant
Claims (2)
ミック皮膜上へレーザビームを局部的に照射して同セラ
ミック皮膜に割れを発生させることを特徴とするセラミ
ック皮膜の割れ形成方法。1. A method for forming cracks in a ceramic coating, which comprises locally irradiating a laser beam on the ceramic coating of a heat-resistant component having the ceramic coating to cause cracks in the ceramic coating.
成方法によりＭＣｒＡｌＹ皮膜の上にＺｒＯ2 皮膜を持
つ耐熱部品の同ＺｒＯ2 皮膜に割れを形成したことを特
徴とするセラミック皮膜部品。2. A ceramic coating components, characterized in that the formation of the cracks in the ZrO 2 film of heat-resistant parts with ZrO 2 coating on the MCrAlY coating by cracking method of forming a ceramic coating of claim 1 wherein.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8145663A JPH09327779A (en) | 1996-06-07 | 1996-06-07 | Method for forming crack in ceramic film, and ceramic film parts formed by the method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8145663A JPH09327779A (en) | 1996-06-07 | 1996-06-07 | Method for forming crack in ceramic film, and ceramic film parts formed by the method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09327779A true JPH09327779A (en) | 1997-12-22 |
Family
ID=15390220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8145663A Withdrawn JPH09327779A (en) | 1996-06-07 | 1996-06-07 | Method for forming crack in ceramic film, and ceramic film parts formed by the method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09327779A (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002530525A (en) * | 1998-11-13 | 2002-09-17 | フォルシュングスツェントルム・ユーリッヒ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | Glass-metal / ceramic-insulation layer |
| JP2004149915A (en) * | 2002-09-06 | 2004-05-27 | Kansai Electric Power Co Inc:The | Heat-shielding ceramic coating parts and manufacturing method thereof |
| JP2007039808A (en) * | 2005-08-04 | 2007-02-15 | United Technol Corp <Utc> | Method of forming segmented ceramic spray coating on substrate, and apparatus for applying segmented ceramic coating |
| US7354663B2 (en) | 2004-04-02 | 2008-04-08 | Mitsubishi Heavy Industries, Ltd. | Thermal barrier coating, manufacturing method thereof, turbine part and gas turbine |
| US7494723B2 (en) | 2005-07-29 | 2009-02-24 | Tocalo Co., Ltd. | Y2O3 spray-coated member and production method thereof |
| US7655326B2 (en) * | 2001-06-15 | 2010-02-02 | Mitsubishi Heavy Industries, Ltd. | Thermal barrier coating material and method for production thereof, gas turbine member using the thermal barrier coating material, and gas turbine |
| JP2010043351A (en) * | 2008-07-29 | 2010-02-25 | General Electric Co <Ge> | Thermal barrier coating and method for production thereof |
| JP2012180549A (en) * | 2011-02-28 | 2012-09-20 | Mitsubishi Heavy Ind Ltd | Method for partially repairing thermal barrier coating |
| WO2013065338A1 (en) * | 2011-11-02 | 2013-05-10 | トーカロ株式会社 | Member for semiconductor manufacturing device |
| JP2015110839A (en) * | 2014-12-15 | 2015-06-18 | 三菱重工業株式会社 | Method for partially repairing heat-shield coating |
| JP2015196176A (en) * | 2014-04-01 | 2015-11-09 | 新日本溶業株式会社 | Surface modification method by ceramics |
| EP3071722B1 (en) | 2013-11-19 | 2018-08-29 | Safran Aircraft Engines | Integrated sintering process for microcracking and erosion resistance of thermal barriers |
-
1996
- 1996-06-07 JP JP8145663A patent/JPH09327779A/en not_active Withdrawn
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002530525A (en) * | 1998-11-13 | 2002-09-17 | フォルシュングスツェントルム・ユーリッヒ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | Glass-metal / ceramic-insulation layer |
| US7655326B2 (en) * | 2001-06-15 | 2010-02-02 | Mitsubishi Heavy Industries, Ltd. | Thermal barrier coating material and method for production thereof, gas turbine member using the thermal barrier coating material, and gas turbine |
| JP2004149915A (en) * | 2002-09-06 | 2004-05-27 | Kansai Electric Power Co Inc:The | Heat-shielding ceramic coating parts and manufacturing method thereof |
| US7354663B2 (en) | 2004-04-02 | 2008-04-08 | Mitsubishi Heavy Industries, Ltd. | Thermal barrier coating, manufacturing method thereof, turbine part and gas turbine |
| US7494723B2 (en) | 2005-07-29 | 2009-02-24 | Tocalo Co., Ltd. | Y2O3 spray-coated member and production method thereof |
| EP2071049A1 (en) | 2005-07-29 | 2009-06-17 | Tocalo Co. Ltd. | Y2O3 Spray-coated member and production method thereof |
| JP2007039808A (en) * | 2005-08-04 | 2007-02-15 | United Technol Corp <Utc> | Method of forming segmented ceramic spray coating on substrate, and apparatus for applying segmented ceramic coating |
| JP2010043351A (en) * | 2008-07-29 | 2010-02-25 | General Electric Co <Ge> | Thermal barrier coating and method for production thereof |
| JP2012180549A (en) * | 2011-02-28 | 2012-09-20 | Mitsubishi Heavy Ind Ltd | Method for partially repairing thermal barrier coating |
| WO2013065338A1 (en) * | 2011-11-02 | 2013-05-10 | トーカロ株式会社 | Member for semiconductor manufacturing device |
| JP2013095973A (en) * | 2011-11-02 | 2013-05-20 | Tocalo Co Ltd | Member for semiconductor manufacturing device |
| EP3071722B1 (en) | 2013-11-19 | 2018-08-29 | Safran Aircraft Engines | Integrated sintering process for microcracking and erosion resistance of thermal barriers |
| JP2015196176A (en) * | 2014-04-01 | 2015-11-09 | 新日本溶業株式会社 | Surface modification method by ceramics |
| JP2015110839A (en) * | 2014-12-15 | 2015-06-18 | 三菱重工業株式会社 | Method for partially repairing heat-shield coating |
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