JPH09300271A - Robot device with cleaning function and cleaning method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the quality of products and reduce the cost thereof by forming the inexpensive clean space where various types of precision machining and assembly devices for manufacturing products in environment cleaner than general environment can be installed in the general environment, and substantial investment and maintenance cost necessary for a clean environment facility such as a general clean room and a clean space passage device are not needed. SOLUTION: This robot device with a cleaning function is formed to have an arm 12 with a holding part 21 to retain a processing object 4, an arm drive means for causing the motion of the arm 12 so as to move the processing object 4 to a processing position 5, and the first nozzle 22 formed to have a blow hole 223 larger than the processing object 4 and to blow cleaning gases in such a state as enveloping the processing object 4 for the isolation thereof from external environment. The processing object 4 is held with the robot device and processed under cleaning.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention enables high-quality processing of objects to be processed such as parts and products even if various precision processing and precision assembling devices for manufacturing parts and products in a clean environment are installed in a general environment. Robot device and cleaning method, specifically, semiconductor or liquid crystal related production equipment, optical disk, plasma display, television or other multimedia related parts, product processing / assembly equipment, and electronic circuit board electronic part mounting / processing In order to install related production equipment in a general environment and perform various processing and assembling operations that dislike dust and unnecessary component substances in the atmosphere, a so-called clean space where dust and unnecessary component substances are extremely small is created. The present invention relates to a robot device with a cleaning function and a cleaning method that can be formed around an object to be processed during processing.

[0002]

2. Description of the Related Art In the manufacture of semiconductor / liquid crystal / electric circuit board manufacturing equipment and other precision products, the presence of fine dust in the air greatly affects the quality performance of the product. Therefore, the manufacturing apparatus used for such manufacturing is installed in a so-called clean room in which dust in the air is removed at an extremely high level.

Such a clean room requires (1) enormous investment in construction of a clean room not directly involved in manufacturing, (2) enormous operation and maintenance cost of the clean room, and (3) poor workability. There are problems such as.
In order to solve the above problems (1) and (2), there has been proposed a clean space device in which the internal volume of a clean room in which a manufacturing device is installed is reduced. In this, a continuous long clean space passage having a required volume and arrangement shape is formed by sequentially connecting a single clean room having a fixed inner volume having a cylindrical shape with both ends open.

However, in a clean room, the manufacturing apparatus is frequently changed in layout or additionally removed in accordance with a change in product model or manufacturing process. In particular, when the manufacturing line is changed, the clean room must be rebuilt, of course, but it is extremely uneconomical to rebuild the entire clean room every time the manufacturing line is slightly changed, and it is also necessary to adapt it to the manufacturing line. Therefore, designing and constructing a clean room is very wasteful in terms of time.

Therefore, the manufacturing apparatus is installed in a general environment,
A clean space path device has been proposed in which only the object to be processed moves in the clean space path. In this clean space path device, a moving path for moving an object to be processed from a manufacturing apparatus to another manufacturing apparatus, and a connecting path connecting the moving path and the processing clean space of the manufacturing apparatus become a clean space. is there. The object to be processed that moves in the clean space path is carried into the manufacturing equipment through the communication path, after processing, is discharged from the device through the communication path, moves in the clean space path, and undergoes the next processing. Handed over to the manufacturing equipment. Workers monitor this process in the general environment. The clean space path of this system is smaller than the above-mentioned clean room, and a space of high cleanliness can be formed relatively inexpensively. Even if there is a change in the production line, this clean space path device can be flexibly responded relatively easily by simply changing the layout of the clean room alone. It is said that the associated economic and time burden can be reduced.

However, in actuality, by connecting each manufacturing apparatus to the clean space passage, a slight change in the air flow state or pressure distribution inside the space causes a local accumulation of air or contamination accumulation. Therefore, consider the volume and shape of the entire clean space including the air filter that removes dust in the space and the cleaning device such as a circulation fan that circulates the air flow and the air conditioner that controls the temperature and humidity. Since it needs to be redesigned and manufactured, and updated to a new clean space that is adapted, it takes a long time to complete the construction, and as a result, the advantage as a clean room space path device is greatly reduced, and it is very effective. There is a problem that can not be obtained.

Further, in the case of such a general clean room or a clean space path device in which a single clean room is connected, a space wider than a local space that requires a truly clean environment must be kept clean. Therefore, there was a limit to downsizing and maintenance of cleaning equipment and air conditioning equipment. In particular, when a clean atmosphere is required only when processing an object to be processed and a very clean environment is not required when the object to be processed is transported, it is not necessary to use such a large scale as the above-mentioned clean environment equipment. There is a desire to secure a cheaper clean space for manufacturing and reduce manufacturing costs without making capital investment by construction and installation of equipment.

[0008]

SUMMARY OF THE INVENTION An object of the present invention is to be able to install various precision machining precision assembly equipment for manufacturing parts and products in a cleaner environment than the general environment,
A local area for processing objects without installing a general clean room that requires a large amount of equipment depreciation costs and clean maintenance costs that are ultimately added to the product price, or a clean space path device that connects clean room units. It is an object of the present invention to provide a robot apparatus with a cleaning function and a cleaning method capable of manufacturing various parts and products with high quality and at low cost by making only a specific space into a clean atmosphere.

[0009]

The invention according to claim 1 is
An arm having a holding portion for holding the object to be processed, an arm driving means for moving the arm so that the object to be processed moves to a processing position, and an outlet larger than the object to be processed, A robot device with a cleaning function, comprising: a first nozzle that blows a clean gas from the air outlet so as to wrap an object and isolate it from the external atmosphere.

According to a second aspect of the present invention, there is provided a robot apparatus having a cleaning function.
The robot apparatus with a cleaning function according to claim 1, wherein the air outlet has a diameter longer than a long side of the object to be processed. The robot apparatus with a cleaning function according to claim 3 is
The robot apparatus with a cleaning function according to claim 1 or 2, further comprising a first nozzle fixing means for fixing the first nozzle to the arm so that the air outlet faces the object to be processed.

According to a fourth aspect of the present invention, there is provided a robot apparatus having a cleaning function,
The robot apparatus with a cleaning function according to claim 3, wherein the second nozzle has a suction port larger than that of the object to be processed, and sucks gas wrapping the object to be processed from the suction port; and the suction port is the air outlet. Second nozzle fixing means for fixing the second nozzle to the arm so as to face each other, and the holding portion holds the object to be processed in a space between the outlet and the inlet. In addition, the clean gas blown out from the blowout port is sucked into the second nozzle from the suction port after wrapping the object to be treated so as to be isolated from the external atmosphere. .

According to a fifth aspect of the present invention, there is provided a robot apparatus having a cleaning function,
The robot apparatus with a cleaning function according to claim 4, wherein the suction port has a diameter longer than a long side of the object to be processed. The robot apparatus with a cleaning function according to claim 6 is
The robot apparatus with a cleaning function according to claim 4 or 5, further comprising a circulation unit that removes dust or unnecessary component substances from the gas sucked into the second nozzle and blows it out from the first nozzle as the clean gas. Characterize.

A robot apparatus with a cleaning function according to a seventh aspect is
The robot apparatus with a cleaning function according to any one of claims 4 to 6, wherein the holding unit holds the object to be processed after it has come out of a space between the air outlet and the suction port and then holds the object to be treated in the space. It is characterized in that it moves so as to position the object to be processed. The robot device with a cleaning function according to claim 8 is the robot device according to claim 1.
The robot apparatus with a cleaning function according to any one of items 1 to 7 is also provided with a gas curtain forming unit that forms a clean gas curtain that wraps the clean gas blown from the outlet in a tubular shape.

A robot apparatus with a cleaning function according to a ninth aspect is
The robot apparatus with a cleaning function according to any one of claims 1 to 8, wherein at least one selected from the group consisting of the concentration of dust or unnecessary component substances, temperature, and humidity in the space between the air outlet and the air inlet. It is characterized by further comprising a control means for controlling one. A robot apparatus with a cleaning function according to a tenth aspect is the robot apparatus with a cleaning function according to any one of the first to ninth aspects, wherein N ₂ or air is supplied as the clean gas.

According to an eleventh aspect of the present invention, an arm having a holding portion for holding an object to be processed, arm driving means for moving the arm to move the object to the processing position, and the object to be processed are provided. And a hood having a large opening, a housing space for housing the object to be processed, and a blowout port that blows a clean gas so as to wrap the object to be processed housed in the housing space and isolate it from the external atmosphere, and the hood. A robot device with a cleaning function, comprising: a hood fixing means for fixing to the arm.

A robot device with a cleaning function according to a twelfth aspect is the robot device with a cleaning function according to the eleventh aspect,
The opening has a diameter longer than a long side of the object to be processed. The robot apparatus with a cleaning function according to claim 13 is the robot apparatus with a cleaning function according to claim 11 or 12, wherein the hood forms a clean gas curtain in the opening so as to cover the clean gas in the accommodation space. It further comprises a curtain forming means and a suction port for sucking gas in the accommodation space.

A robot apparatus with a cleaning function according to a fourteenth aspect is the robot apparatus with a cleaning function according to the thirteenth aspect,
The suction port has a diameter longer than a long side of the object to be processed. A robot device with a cleaning function according to a fifteenth aspect is the robot device with a cleaning function according to the thirteenth or fourteenth aspect, in which dust or unnecessary component substances are removed from the gas sucked from the suction port to obtain the clean gas from the outlet. It is characterized by further comprising a circulating means for blowing out.

A robot apparatus with a cleaning function according to a sixteenth aspect is the robot apparatus with a cleaning function according to any one of the eleventh to fifteenth aspects, wherein after the holding portion comes out of the opening and holds the object to be processed, It is characterized in that it moves so as to house the object to be processed in the housing space. Claim 17
The robot apparatus with a cleaning function according to any one of claims 11 to 16, wherein the robot apparatus with a cleaning function according to any one of claims 11 to 16 has a concentration of dust or an unnecessary component substance, a temperature,
It is characterized by further comprising control means for controlling at least one selected from the group consisting of humidity.

A robot apparatus with a cleaning function according to an eighteenth aspect is the robot apparatus with a cleaning function according to any one of the eleventh to seventeenth aspects, wherein N ₂ or air is supplied as the clean gas. According to a nineteenth aspect of the present invention, an object moving step of moving the object held by a holding part of the arm of the robot apparatus to a processing position by moving the arm is larger than the object moving step. A first nozzle moving step of moving a first nozzle having a blowout port so as to blow out clean gas from the blowout port so as to face the object to be processed; and by blowing out clean gas from the blowout port, A cleaning method comprising wrapping the object to be processed with the clean gas so as to be isolated from the external atmosphere.

A cleaning method according to a twentieth aspect is the cleaning method according to the nineteenth aspect, wherein the outlet has a diameter longer than a long side of the object to be treated. The cleaning method according to claim 21 is the cleaning method according to claim 19 or 20, wherein the first nozzle is fixed to the arm so that the air outlet faces the object to be processed, and the object to be processed is 1
It is characterized in that it is moved to the processing position together with the nozzle.

A cleaning method according to a twenty-second aspect is the cleaning method according to the twenty-first aspect, in which the clean gas is blown out from the outlet while the object to be processed is moved to the processing position together with the first nozzle. Characterize. A cleaning method according to a twenty-third aspect is the cleaning method according to any one of the nineteenth to twenty-second aspects, characterized in that a clean gas is blown out from the air outlet after the object to be processed is moved to the processing position.

A cleaning method according to a twenty-fourth aspect is the cleaning method according to any one of the nineteenth to twenty-third aspects, wherein the arm has a suction port larger than that of the object to be processed, and a gas for wrapping the object to be processed is provided. A second nozzle adapted to suck in is also fixed, and is characterized in that the clean gas is blown out from the outlet and the suction port sucks in gas enclosing the object to be treated.

A cleaning method according to a twenty-fifth aspect is the cleaning method according to the twenty-fourth aspect, wherein the suction port has a diameter longer than a long side of the object to be processed. A cleaning method according to a twenty-sixth aspect is the cleaning method according to the twenty-fourth or twenty-fifth aspect, characterized in that dust or unnecessary component substances are removed from the gas sucked from the suction port, and the purified gas is blown out from the blowout port. .

A cleaning method according to a twenty-seventh aspect is characterized in that, in the cleaning method according to any one of the twenty-fourth to twenty-sixth aspects, a clean gas curtain for wrapping the clean gas blown out from the outlet in a tubular shape is formed. . The cleaning method according to claim 28 is the cleaning method according to any one of claims 24 to 27, wherein after the holding portion has come out of the space between the blowout port and the suction port and holds the object to be processed, It is characterized in that it moves so as to position the object to be processed in the space.

A cleaning method according to a twenty-ninth aspect is the cleaning method according to any one of the nineteenth to twenty-eighth aspects, in which the concentration and temperature of dust or unnecessary component substances in the processing space of the object to be treated isolated from the external atmosphere. The method further comprises the step of controlling at least one selected from the group consisting of: The cleaning method according to claim 30 is the cleaning method according to any one of claims 19 to 29, characterized in that N ₂ or air is supplied as the clean gas.

According to a thirty-first aspect of the present invention, the object to be treated is provided in the accommodation space of the hood fixed to the arm of the robot apparatus, the object having the opening larger than the object to be treated and the accommodation space for accommodating the object to be treated. The processed material is held by the holding portion of the arm,
A moving step of moving the hood to a processing position together with the object to be processed by moving the arm; and a clean gas so as to isolate the object to be processed from an external atmosphere by blowing a clean gas into the accommodation space. A cleaning method including a cleaning step of wrapping.

A cleaning method according to a thirty-second aspect is the cleaning method according to the thirty-first aspect, wherein the opening of the hood has a diameter longer than a long side of the object to be treated. Claim 3
The cleaning method of 3 is the cleaning method of claim 31 or 32, wherein a clean gas curtain is formed in the opening of the hood so as to cover the clean gas in the accommodation space,
The clean gas in the storage space is discharged.

A cleaning method according to a thirty-fourth aspect is the cleaning method according to the thirty-third aspect, wherein dust or unnecessary component substances are removed from the gas discharged from the accommodating space and blown out into the accommodating space as the clean gas. And Claim 3
The cleaning method of 5 is the cleaning method according to any one of claims 31 to 34, wherein after the holding part has come out of the opening of the hood and holds the object to be processed, the object to be processed is placed in the accommodation space. Characterized by moving to accommodate.

A cleaning method according to a thirty-sixth aspect is the cleaning method according to any one of the thirty-first to thirty-fifth aspects, wherein the concentration and temperature of dust or unnecessary component substances in the processing space of the object to be treated which is isolated from the external atmosphere. The method further comprises the step of controlling at least one selected from the group consisting of: A cleaning method according to a thirty-seventh aspect is the cleaning method according to any one of the thirty-first to thirty-sixth aspects, wherein N ₂ or air is supplied as the clean gas.

[0030]

BEST MODE FOR CARRYING OUT THE INVENTION

(First Embodiment) FIGS. 1 and 2 are schematic views showing one embodiment of a robot apparatus with a cleaning function of claim 1. The robot apparatus 1 is installed in a general environment together with the object storage unit 2 and the manufacturing apparatus 3.

The robot apparatus 1 includes a main body 11 and an arm 12.
And A holding portion 21 that holds the workpiece 4 and a blowing nozzle 22 are fixed to the arm 12. With respect to the arm 12, the workpiece 4 is placed in front of the processing position 5 of the manufacturing apparatus 3 by an arm driving means such as a servo motor 13.
Is moved to. The holding unit 21 holds the object to be processed by sandwiching it with two or more fingers, or holds the object to be processed by vacuum suction.

The blow-out nozzle 22 blows out the clean gas supplied through the flow path 221 from the blow-out port 223. The outlet 223 is an opening larger than the object to be processed 4, has a size that covers the object to be processed 4, and is formed to have a diameter longer than the long side of the object to be processed 4, for example. ing. As the clean gas, a gas supplied from a cylinder, a gas taken from the general environment as a clean gas through a filter, a gas taken in from the blowing nozzle 22 as a clean gas through a filter, and the like are used. obtain.

When the clean gas supplied from the cylinder is used, the suction nozzle 23 may be omitted, but it is better to have it. When the gas taken in from the general environment is used as a clean gas, the installation position of the suction nozzle 23 is not particularly limited. In the apparatus of FIGS. 1 and 2, the suction nozzle 23 is installed so that the suction port faces the outlet of the blowing nozzle 22, but the nozzle 23 can be installed at another position. However, rather than using the gas taken in from the general environment as the clean gas, taking the clean gas blown out from the blowing nozzle 22 and supplying it to the blowing nozzle 22 through the filter 25 dramatically extends the breakthrough life of the filter 25. It is effective for increasing cleanliness. In this case, as in the device shown in FIGS. 1 and 2, the suction nozzle 23 is installed so that the suction port 233 faces the air outlet 223 of the blowing nozzle 22. Suction port 233
Is an opening larger than the object 4 to be processed, has a size that covers the object 4 to be processed, and has a diameter longer than the long side of the object 4 to be processed, for example.

Gas or blowing nozzle 22 in a general environment
When the clean gas blown from the air is taken in to produce the clean gas, the main body 11 is provided with the fan 24 and the filter 25, and the atmosphere around the object 4 is sucked from the suction nozzle 23 by using the fan 24 as a power source. , A clean atmosphere through the filter 25, and the blowing nozzle 2
The structure is such that it circulates so as to blow out from 2. The gas sucked from the suction nozzle 23 by the operation of the fan 24 passes through the flow path 231 and is filtered by the filter 25 to become a clean gas from which dust or unnecessary component substances are removed. The clean gas is supplied to the blowing nozzle 22 through the flow path 221, and is blown out from the blowout port 223 of the nozzle 22. The blown clean gas traverses a processing position (work space) 5 in which the processing target 4 held by the holding unit 21 is processed. The atmosphere containing dust and the like generated by the operation of the processing operation unit 7 or the like is discharged to the general environment, or is sucked from the suction nozzle 23 and returned to the filter 25 through the flow path 231. As a result, the processing space of the workpiece 4 becomes clean when the fan 24 operates. When it is not necessary to keep the object to be processed 4 in a clean gas, the fan 24 is stopped and the object to be processed 4 is exposed to the general environment. Since the area around the object 4 is an extremely small space as compared with a general clean room, a high cleanliness can be obtained in a short time by increasing the circulating air volume of the atmosphere, and the desired circulating air volume can be controlled. You can create a clean state of. The circulating air volume is adjusted, for example, by controlling the opening and closing of the valves 43a and 43b and the opening degree.

The flow channels 221 and 231 also serve as fixing means for fixing the nozzles 22 and 23 to the arm 12, respectively, but the nozzles 22 and 23 are fixed to the arm 12 by fixing means provided separately from the flow paths. It can be fixed. The dispersion plate 22 is provided upstream of the outlet 223 of the nozzle 22 or downstream of the inlet of the nozzle 23, respectively.
If 2, 232 are provided, the gas is rectified by the dispersion plate and a stable flow can be created.

The body 11 is also not shown,
A control means for controlling the arm driving means is provided. FIG.
As can be seen, the arm 12 is moved to direct the holding part 21 toward the object storage part 2, and if necessary, the holding part 21 is extended or rotated to reach the object 4 to be processed in the storage part 2.
After holding the object 4 to be processed, the holder 21 is contracted or rotated in the opposite direction to hold the object 4 to be processed in the space between the nozzles 22 and 23. If necessary, operate the fan 24 to activate the nozzle 23
The gas around the object to be processed 4 is sucked from the filter 25
After cleaning with, the clean gas is blown out from the nozzle 22 to wrap the object to be processed 4 with the clean gas and isolate it from the external atmosphere. In this isolated state, or with the workpiece 4 exposed to the atmosphere of the general environment, the arm 12 is moved, and as shown in FIG. 1, the arm 12 is positioned at the treatment position 5 and treated by the treatment operation unit 7 of the manufacturing apparatus 3. Process item 4. Fan 2 during this process
4 can be operated to generate the isolated state, and the object 4 to be processed can be processed with high quality in a clean atmosphere. After the processing, it is moved to the next manufacturing apparatus or the processing product storage section in the isolated state or in the state of being exposed to the atmosphere of the general environment.

In order to prevent unnecessary substances such as dust generated by abrasion of the mechanical operation of the processing operation unit 7 from falling onto the object 4 to be adhered, the processing operation unit 7 is located downstream of the air flow. The nozzles 22 and 23 are arranged in consideration of the state of the air flow, such as devising the positions of the air outlet 223 of the blowing nozzle 22 and the suction port 233 of the suction nozzle 23.
A clean atmosphere can be formed.

It is preferable to supply N ₂ or air as a clean gas to be supplied in order to create a local clean space for wrapping the object 4 to be processed. When N ₂ is supplied as a clean gas, the local clean space surrounding the object to be processed 4 can be made an inert atmosphere. Moreover, when air is supplied as a clean gas, the cost can be reduced. Such as dust
Prevent pollutants in the general environment by supplying an amount of clean gas such that the atmosphere around the object to be processed does not engulf the external atmosphere around the object, or by devising the nozzle structure so as not to engulf it. be able to. Therefore, the intake device 16 can supply the clean gas from the gas supply pipe 14 through the cleaning filter 15.
This supply amount is adjusted, for example, by controlling the opening and closing of the valve 43h and the opening degree. If the atmosphere surrounding the object to be processed 4 is made slightly pressurized, invasion of unnecessary substances such as dust in the general environment can be better prevented, and the atmosphere in the processing space during processing can be stably maintained.

Since the space around the object to be treated 4 is extremely smaller than that in the clean room, the operating conditions of the circulating air flow rate that determines the number of circulation of the atmosphere and the selection of the filter (the filter is a high performance filter (HEPA depending on the purpose). By selecting a filter), a medium-performance filter, or an activated carbon adsorption filter for removing harmful components), a desired clean atmosphere can be freely provided around the object to be treated. And the frequency of filter replacement
Reduce the amount of clean gas (air, nitrogen, etc.) supplied to the clean space around the object to be processed,
Alternatively, it is possible to reduce the size of power equipment such as a blower fan and save energy.

Further, by using an inexpensive medium performance filter,
There is a method capable of forming an atmosphere having a cleanliness level equal to or higher than that of a high performance filter. For example, the processed object 4
Gas, vapor or fine droplets (mist) of a substance having a function of physically and chemically removing the dust or unnecessary component substance present in the atmosphere for wrapping it, and supplying it for wrapping the object to be treated 4. It is possible to collect the unnecessary substances existing in the atmosphere by mixing them into the clean gas, colliding with and contacting the atmosphere surrounding the object to be processed 4, and discharging them from the periphery of the object to be processed 4 to the outside. In this case, dust or unnecessary component substances existing around the object 4 can be more effectively removed. More specifically, referring to FIGS. 1 and 2, gas, vapor and droplets of a substance having a function of removing dust and unnecessary substances are added to the clean gas supplied from the gas supply pipe 14 by the intake device 16 and passed through the filter 15. Device 29
The gas, vapor and minute droplets generated from the above are mixed and supplied from the blowing nozzle 22 so as to wrap the object to be treated 4. This mixed gas comes into contact with dust or unnecessary component substances existing around the object 4 to be processed, is sucked into the suction nozzle 23, and is exhausted outside the object 4 to be processed. This method can obtain an atmosphere of extremely high cleanliness as compared with the method using only clean gas. (Second Embodiment) A robot apparatus according to the second embodiment is
The embodiment is the same as the embodiment except that the clean gas curtain is provided so as to wrap the space between the blowing nozzle 22 and the suction nozzle 23 in a tubular shape. That is, as shown in FIG. 3, the blowing nozzle 22 has the gas curtain blowing nozzles 39 a, 3
9b is provided, and the clean gas is supplied from the flow path 38 branched from the flow path 221 to the nozzles 39a and 39b and blown out. Further, the suction nozzle 23 has suction nozzles 40a and 40b for gas curtains at the edge of the suction port 233 so that the sucked gas joins the flow channel 231 from the flow channel 42.

In the second embodiment, the nozzles 39a and 39b are provided.
Most of the clean gas blown from the nozzles 40a, 4
Because it is designed to suck in from 0b, the outlet 223
In the clean gas blown from the chamber and directly wrapping the object to be treated 4, dust in the atmosphere of the general environment and unnecessary component substances are hard to be mixed, and a local clean space with extremely high cleanliness compared to the external environment is created. Can be formed.

In FIG. 3, the clean gas generated by passing the gas sucked from the general environment by the suction device through the filter without branching the flow channel 38 from the flow channel 221 is supplied to the blowing nozzles 39a and 39b. Can be a passage, or the passage 42 can be a suction nozzle 40a, 40b
It is possible to provide an exhaust path for exhausting the gas sucked from the outside by the exhaust device without joining the gas into the flow path 231.

Further, instead of the intake device, it is possible to supply clean gas by cylinder supply. further,
The gas exhausted from the exhaust device can be collected and passed through a filter to be a clean gas for reuse. (Third Embodiment) FIG. 4 is a schematic view showing a robot apparatus with a cleaning function according to a third embodiment of the present invention. This robot device does not have the blowing nozzle 22 and the suction nozzle 23 in the device of the first embodiment, and instead the hood 220 is fixed to the arm 12 so as to cover the holding portion 21, and The hood 220 is a clean gas purified from the general environment through the filter 15.
The opening 220a of the plate is blown out toward the atmosphere of the general environment, and the holding part 21 disperses the dispersion plate 220.
It is the same except that it penetrates d. Hood 220
Is an opening 220a larger than the object to be processed 4, a housing space 220b for housing the object to be processed 4, and a clean gas outlet 22.
0c. The workpiece 4 is held by the holding portion 21 in the accommodation space 220b of the hood 220. Opening 220
a has a size that covers the object 4 to be processed, and is formed to have a diameter longer than the long side of the object 4 to be processed, for example.

The holding portion 21 is used as a housing space 22 for the hood 220.
0b extends from the inside to the outside, and if necessary, the holding part 21 is rotated to reach the to-be-processed object storage part to hold the to-be-processed object 4 (indicated by a chain line in the figure), and the holding part 21 is contracted. Alternatively, the workpiece 4 is housed in the housing space 220b of the hood by rotating it in the opposite direction. This structure is useful when there is little generation of dust or unnecessary component substances from the object to be processed or from the processing operation unit, and the structure is simple. The supply amount of the clean gas is adjusted, for example, by controlling the opening and closing of the valves 43a and 43h and the opening degree. (Fourth Embodiment) FIG. 5 is a schematic view showing a robot apparatus with a cleaning function according to a fourth embodiment of the present invention. This robot apparatus is different from the apparatus of the third embodiment in that a clean gas curtain generating means for generating a clean gas curtain is provided so as to close the opening 220a of the hood, and a partition plate 44 is provided in the hood storage space 220b. An air outlet 220c is provided between the hood 220 and the partition plate 44,
It is the same except that the suction port 220d is provided between the partition plates 44, 44. The clean gas curtain generating means has a gas curtain blowing nozzle 39c and a gas curtain suction nozzle 40c at the edge of the opening 220a of the hood,
The clean gas that has passed through the filter 25 is supplied to the nozzle 39c and the air outlet 220c from the flow path 38 by the function of the fan 24 and blown out, and the gas is sucked from the nozzle 40c and the suction port 220d.

In the fourth embodiment, most of the clean gas blown out from the nozzle 39c is sucked in from the nozzle 40c, so that the clean gas blown out from the blowout port 220c and directly wrapping the object 4 to be treated contains a general environment. It is difficult to mix dust and unnecessary component substances in the atmosphere, and it is possible to form a local clean space having an extremely higher degree of cleanliness than the external environment. The clean gas blown out from the air outlet 220c and directly wrapped around the object 4 to be treated is the suction inlet 22.
It is sucked from 0d. The sucked gas passes through the filter 25 to become a clean gas and is blown out from the nozzle 39c and the air outlet 220c. The supply amount of the clean gas is, for example, the valves 43c, 43d, 43e, 43f, 43g.
It is adjusted by controlling the opening / closing and opening of the.

In FIG. 5, the blowing nozzle 39c may be supplied with the clean gas generated by passing the gas sucked from the general environment by the suction device 16 through the filter 15 without supplying the clean gas from the flow path 38. Possible or the gas sucked from the suction nozzle 40c is sucked into the suction port 220d.
It can be exhausted to the outside by an exhaust device without joining with the gas sucked from.

Further, instead of the intake device, it is also possible to supply clean gas by cylinder supply. further,
The gas exhausted from the exhaust device can be collected and passed through a filter to be a clean gas for reuse. 4th
In the embodiment, compared to the third embodiment, the accommodation space 41 can have a stable flow and a high cleanliness atmosphere.

As in the apparatus shown in FIG. 5, by making the accommodation space 41 a stable flow atmosphere, the temperature can be made more uniform over the entire surface of the object 4 to be processed, and more uniform heating can be performed. For example, in the bonding apparatus, the space 41
When processing is performed depending on the position of the atmosphere, if there is a difference in the flow turbulence, the shape of the initial ball (ball made by melting the wire) used for wire bonding becomes unstable above the object 4 to be processed, Alternatively, the initial ball may or may not be formed, and the occurrence of this phenomenon can be prevented. (Fifth Embodiment) A robot apparatus according to the fifth embodiment is
In the embodiment, the detection means for detecting the concentration of dust or unnecessary component substances existing in the atmosphere surrounding the object to be processed 4, the temperature, the humidity, etc., and the cleaning means are controlled by the desired concentration, temperature, humidity and cleanliness. The same thing except that the control means having the function to perform is provided. That is, as shown in FIG. 6, the detection sensor 31a or the like provided in the space between the nozzles 22 and 23 transmits the state of cleanliness, concentration, temperature, humidity and the like of each space portion where these are arranged to the detection device 32. Then, while comparing the actual atmosphere with the desired state that is desired to be maintained in order to process the object 4, the control for finding the operating condition so that the actual state approaches the desired state based on the result of the difference. The device 33 is adapted to transmit operation information to the fan 24, flow rate control valves 43a, 43b, 43h for controlling the flow of gas, the intake device 16, and the like. Also, cleanliness, concentration,
The detection device 32 having a function of monitoring temperature, humidity, etc., or the control device having a function of controlling the fan 24, the flow rate adjusting valves 43a, 43b, 43h for controlling the flow of gas, the intake device 16 and the like is the main body 11 May be outside the.

In the fifth embodiment, the local clean space wrapping the object 4 to be processed can be made close to a desired state, and the processing can be made more appropriate. (Sixth Embodiment) The robot apparatus according to the sixth embodiment is
In the embodiment, the detection means for detecting the concentration of dust or unnecessary component substances existing in the atmosphere surrounding the object to be processed 4, the temperature, the humidity, etc., and the cleaning means are controlled by the desired concentration, temperature, humidity and cleanliness. The same thing except that the control means having the function to perform is provided. That is, as shown in FIG. 7, the detection sensor 31a or the like provided in the space between the nozzles 22 and 23 transmits the state of cleanliness, concentration, temperature, humidity and the like of each space portion where these are arranged to the detection device 32. Then, while comparing the actual atmosphere with the desired state that is desired to be maintained in order to process the object 4, the control for finding the operating condition so that the actual state approaches the desired state based on the result of the difference. The device 33 is adapted to transmit operation information to the fan 24, flow rate control valves 43a, 43b, 43h for controlling the flow of gas, the intake device 16, and the like. Also, cleanliness, concentration,
The detection device 32 having a function of monitoring temperature, humidity, etc., or the control device having a function of controlling the fan 24, the flow rate adjusting valves 43a, 43b, 43h for controlling the flow of gas, the intake device 16 and the like is the main body 11 May be outside the.

In the sixth embodiment, the local clean space wrapping the object to be processed 4 can be made close to a desired state, and the processing can be made more appropriate. (Seventh Embodiment) The robot apparatus according to the seventh embodiment is the third embodiment.
In the embodiment, the detection means for detecting the concentration of dust or unnecessary component substances existing in the atmosphere surrounding the object to be processed 4, the temperature, the humidity, etc., and the cleaning means are controlled by the desired concentration, temperature, humidity and cleanliness. The same thing except that the control means having the function to perform is provided. That is, as shown in FIG. 9, the accommodation space 220 of the hood 220
In order to process the actual atmosphere and the object to be processed 4 by transmitting the state of cleanliness, concentration, temperature, humidity, etc. of each space portion where these are arranged to the detection device 32 by the detection sensor 31a provided in b. Based on the result of the difference while mutually comparing with the desired state that is desired to be maintained at, the control device 33 that finds the operating condition so that the actual state approaches the desired state is a flow rate control valve 43a that controls the gas flow, Four
The operation information is transmitted to 3h, the intake device 16, and the like. Further, the detection device 32 having a function of monitoring cleanliness, concentration, temperature, humidity, etc., or the control device having a function of controlling the flow rate adjusting valves 43a, 43h and the intake device 16 for controlling the flow of gas, It may be outside the body 11.

In the seventh embodiment, the local clean space wrapping the object to be processed 4 can be made close to a desired state, and the processing can be made more appropriate. (Eighth Embodiment) The robot apparatus according to the eighth embodiment is the fourth embodiment.
In the embodiment, the detection means for detecting the concentration of dust or unnecessary component substances existing in the atmosphere surrounding the object to be processed 4, the temperature, the humidity, etc., and the cleaning means are controlled by the desired concentration, temperature, humidity and cleanliness. The same thing except that the control means having the function to perform is provided. That is, as shown in FIG. 9, the accommodation space 220 of the hood 220
In order to process the actual atmosphere and the object to be processed 4 by transmitting the state of cleanliness, concentration, temperature, humidity, etc. of each space portion where these are arranged to the detection device 32 by the detection sensor 31a provided in b. Based on the result of the difference while mutually comparing with the desired state that is desired to be maintained at, the fan 24 and the flow rate control that controls the gas flow by the control device 33 that finds the operating condition so that the actual state approaches the desired state. The operation information is transmitted to the valves 43c, 43d, 43e, 43f, 43g, 43h, the intake device 16, and the like. Further, the detection device 32 having a function of monitoring cleanliness, concentration, temperature, humidity, etc., or the fan 24, and flow rate control valves 43c, 43d, 43 for controlling the flow of gas.
The control device having a function of controlling e, 43f, 43g, 43h, the intake device 16 and the like may be provided outside the main body 11.

In the eighth embodiment, the local clean space surrounding the object to be processed 4 can be made close to a desired state, and the processing can be made more appropriate.

[0053]

According to the present invention, various precision machining and precision assembling apparatus for manufacturing parts and products in a cleaner environment than the general environment can be installed in the general environment, and a general clean room or a clean space in which a clean room is connected alone. A clean space is secured by making only the local space for processing the processed object into a clean atmosphere, without making large-scale construction and investment in equipment for clean environment equipment such as road equipment. With this, the effect of being able to process parts and products of good quality can be obtained.

[Brief description of drawings]

FIG. 1 is a schematic diagram of a robot device with a cleaning function according to a first embodiment of the present invention.

FIG. 2 is a schematic diagram of the first embodiment.

FIG. 3 is a partial schematic diagram of a robot device with a cleaning function according to a second embodiment of the present invention.

FIG. 4 is a partial schematic diagram of a robot device with a cleaning function according to a third embodiment of the present invention.

FIG. 5 is a partial schematic diagram of a robot device with a cleaning function according to a fourth embodiment of the present invention.

FIG. 6 is a schematic diagram of a robot device with a cleaning function according to a fifth embodiment of the present invention.

FIG. 7 is a partial schematic diagram of a robot device with a cleaning function according to a sixth embodiment of the present invention.

FIG. 8 is a partial schematic diagram of a robot device with a cleaning function according to a seventh embodiment of the present invention.

FIG. 9 is a partial schematic diagram of an eighth embodiment of a robot apparatus with a cleaning function of the present invention.

[Explanation of symbols]

1 Robot device with a cleaning function 3 Manufacturing device 4 Processing object 5 Processing position 12 Arm 15 Filter 16 Intake device 21 Holding part 22 Blowing nozzle 23 Suction nozzle 24 Fan 25 Filter 39a, 39b, 39c Blowing nozzle 40a, 40b for gas curtain 40c Suction nozzle for gas curtain 221 Flow path 223 Air outlet 231 Flow path 233 Suction opening

Claims (37)

[Claims] 1. An arm having a holding portion for holding an object to be processed, arm driving means for moving the arm so that the object to be processed moves to a processing position, and an outlet larger than the object to be processed. And a first nozzle that blows a clean gas from the outlet so as to wrap the object to be processed and isolate it from the external atmosphere. 2. The robot apparatus with a cleaning function according to claim 1, wherein the air outlet has a diameter longer than a long side of the object to be processed. 3. The robot apparatus with a cleaning function according to claim 1, further comprising first nozzle fixing means for fixing the first nozzle to the arm so that the air outlet faces the object to be processed. . 4. A second nozzle having a suction opening larger than that of the object to be processed, for sucking gas wrapping the object to be processed from the suction port, and the second nozzle so that the suction port faces the outlet. A second nozzle fixing means for fixing a nozzle to the arm is further provided, and the holding portion holds the object to be processed in a space between the outlet and the inlet, and the outlet. The robot with a cleaning function according to claim 3, wherein the clean gas blown out from the air is wrapped in the object to be treated so as to be isolated from the external atmosphere, and then sucked into the second nozzle from the suction port. apparatus. 5. The robot apparatus with a cleaning function according to claim 4, wherein the suction port has a diameter longer than a long side of the object to be processed. 6. A circulating means is further provided for removing dust or unnecessary component substances from the gas sucked into the second nozzle and blowing out the clean gas from the first nozzle.
The robot apparatus with a cleaning function according to claim 4 or 5. 7. The holding unit moves out of a space between the air outlet and the suction port to hold an object to be processed, and then moves the object to be positioned in the space. 7. The robot apparatus with a cleaning function according to any one of 1 to 6. 8. The cleaning function according to claim 1, further comprising a gas curtain forming means for forming a clean gas curtain that wraps the clean gas blown out from the air outlet in a tubular shape. Robot device. 9. The control means for controlling at least one selected from the group consisting of the concentration of dust or unnecessary component substances, temperature, and humidity in the space between the air outlet and the air inlet. Item 9. A robot device with a cleaning function according to any one of items 1 to 8. 10. The robot apparatus with a cleaning function according to claim 1, wherein N ₂ or air is supplied as the clean gas. 11. An arm having a holding portion for holding an object to be processed, an arm driving means for moving the arm so that the object to be processed is moved to a processing position, an opening larger than the object to be processed, and the A hood having an accommodation space for accommodating an object to be processed and an outlet for blowing a clean gas so as to wrap the object to be processed accommodated in the accommodating space so as to be isolated from an external atmosphere, and a hood for fixing the hood to the arm. Fixing means,
Robot device with cleaning function equipped with. 12. The robot apparatus with a cleaning function according to claim 11, wherein the opening has a diameter longer than a long side of the object to be processed. 13. The hood further includes gas curtain forming means for forming a clean gas curtain in the opening so as to cover the clean gas in the housing space, and a suction port for sucking the gas in the housing space. Claim 11 or 12
The robot device with the cleaning function described in. 14. The robot apparatus with a cleaning function according to claim 13, wherein the suction port has a diameter longer than a long side of the object to be processed. 15. The cleaning function according to claim 13, further comprising a circulation unit that removes dust or unnecessary component substances from the gas sucked from the suction port and blows out as the clean gas from the air outlet. Robot device. 16. The holding unit moves out of the opening to hold an object to be processed, and then moves so as to house the object to be processed in the housing space. Robot device with cleaning function. 17. The control means for controlling at least one selected from the group consisting of the concentration of dust or unnecessary component substances, temperature, and humidity in the accommodation space, further comprising:
The robot apparatus with a cleaning function according to any one of 1 to 16. 18. The robot apparatus with a cleaning function according to claim 11, wherein N ₂ or air is supplied as the clean gas. 19. A processing object moving step of moving a processing object held by a holding part of an arm of a robot apparatus to a processing position by moving the arm, and a blowout port larger than the processing object. A first nozzle moving step of moving a first nozzle, which has a blown out clean gas from the outlet, so as to face the object to be processed, and an object to be processed by blowing out a clean gas from the outlet And a cleaning step of wrapping the cleaning gas with the clean gas so as to be isolated from the external atmosphere. 20. The cleaning method according to claim 19, wherein the air outlet has a diameter longer than a long side of the object to be treated. 21. The first nozzle is fixed to the arm so that the air outlet faces the object to be processed, and the object to be processed is moved to the processing position together with the first nozzle. Or the cleaning method according to 20. 22. The cleaning method according to claim 21, wherein the clean gas is blown out from the outlet while the object to be processed is moved to the processing position together with the first nozzle. 23. The clean gas is blown out from the air outlet after moving the object to be processed to the processing position.
The cleaning method according to any one of 9 to 22. 24. The second nozzle, which has a suction opening larger than that of the object to be processed and is adapted to suck gas enclosing the object to be processed, is also fixed to the arm. 20. The clean gas is blown out and the suction port sucks in the gas wrapping the object to be processed.
The cleaning method according to any one of 3 to 3. 25. The cleaning method according to claim 24, wherein the suction port has a diameter longer than a long side of the object to be processed. 26. The cleaning method according to claim 24 or 25, wherein dust or unnecessary component substances are removed from the gas sucked from the suction port and blown out from the air outlet as the clean gas. 27. A clean gas curtain that wraps the clean gas blown out from the outlet in a tubular shape is formed.
27. The cleaning method according to any one of items 26 to 26. 28. The holding section moves out of a space between the air outlet and the suction port to hold an object to be processed, and then moves to position the object to be processed in the space.
The cleaning method according to any one of 1 to 27. 29. Concentration of dust or unnecessary component substances in the processing space of the object to be processed isolated from the external atmosphere,
The cleaning method according to any one of claims 19 to 28, further comprising controlling at least one selected from the group consisting of temperature and humidity. 30. The cleaning method according to claim 19, wherein N ₂ or air is supplied as the clean gas. 31. The object to be processed is placed in the housing space of a hood fixed to an arm of a robot apparatus, the opening being larger than the object to be processed, and a housing space for housing the object to be processed. A step of moving the hood to a processing position together with the object to be processed by holding the object by moving the arm and separating the object from the external atmosphere by blowing a clean gas into the accommodation space. And a cleaning step of wrapping with the clean gas. 32. The cleaning method according to claim 31, wherein the opening of the hood has a diameter longer than a long side of the object to be processed. 33. The clean gas curtain is formed in the opening of the hood so as to cover the clean gas in the accommodation space, and the clean gas in the accommodation space is discharged. Cleaning method. 34. The cleaning method according to claim 33, wherein dust or unnecessary component substances are removed from the gas discharged from the accommodation space, and the purified gas is blown into the accommodation space. 35. The method according to any one of claims 31 to 34, wherein the holding part moves out of the opening of the hood to hold the object to be processed, and then moves to accommodate the object to be processed in the accommodation space. The cleaning method described in. 36. The concentration of dust or unnecessary component substances in the processing space of the object to be processed, which is isolated from the external atmosphere,
36. The cleaning method according to claim 31, further comprising controlling at least one selected from the group consisting of temperature and humidity. 37. The cleaning method according to claim 31, wherein N ₂ or air is supplied as the clean gas.