JPH09196998A - Measuring apparatus for output resistance of driver ic - Google Patents

Measuring apparatus for output resistance of driver ic

Info

Publication number
JPH09196998A
JPH09196998A JP8027329A JP2732996A JPH09196998A JP H09196998 A JPH09196998 A JP H09196998A JP 8027329 A JP8027329 A JP 8027329A JP 2732996 A JP2732996 A JP 2732996A JP H09196998 A JPH09196998 A JP H09196998A
Authority
JP
Japan
Prior art keywords
voltage
dut
output
driver
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8027329A
Other languages
Japanese (ja)
Other versions
JP3638697B2 (en
Inventor
Masato Nagashima
眞人 長島
Yoshio Nagato
喜雄 長門
Munenori Ono
宗範 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP02732996A priority Critical patent/JP3638697B2/en
Priority to TW085114963A priority patent/TW315417B/zh
Priority to CN97102239A priority patent/CN1115565C/en
Priority to KR1019970000971A priority patent/KR100248918B1/en
Publication of JPH09196998A publication Critical patent/JPH09196998A/en
Application granted granted Critical
Publication of JP3638697B2 publication Critical patent/JP3638697B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/08Measuring resistance by measuring both voltage and current
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/31712Input or output aspects
    • G01R31/31713Input or output interfaces for test, e.g. test pins, buffers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/319Tester hardware, i.e. output processing circuits
    • G01R31/31903Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31905Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a measuring apparatus by which an output resistance can be measured with high accuracy by installing a threshold voltage source group used to set a voltage which is higher than the output voltage of a device (DUT) to be tested and a threshold voltage source group used to set a lower voltage. SOLUTION: Respective output pins of a DUT 20 are connected to input terminals of a high-speed scanner 16, the high-speed scanner 16 scans voltages of the respective input terminals, and a voltage measuring device 17 reads out their voltage values sequentially. Respective groups of threshold voltage sources VT1's, VT2's at a plurality of programmable loads PL's 20i (where i=1 to m) are installed alternately. In the group of the VT1's, a voltage which is by a definite value higher than the output voltage of the DUT 10 can be set, and a voltage which is a definite voltage lower, can be set at the group of the VT2's. Consequently, a constant load current flows out to the side of the DUT 10 from the PL's at the VT2's, and a constant load current flows into the PL's at the VT2's. Since the constant load current which is taken into by the DUT 10 and the constant load current which is discharged are of the same quantity, the currents are balanced so as not to interfere.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】この発明は、例えばLCD
(液晶)ドライバICやバブルジェットプリンタドライ
バICのような多数出力ピンを有するドライバICの出
力抵抗を測定する出力抵抗測定器に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an LCD, for example.
The present invention relates to an output resistance measuring device for measuring the output resistance of a driver IC having multiple output pins such as a (liquid crystal) driver IC and a bubble jet printer driver IC.

【0002】[0002]

【従来の技術】図3に多数ピンを有するドライバIC1
0の一例を示す。ピン数は種類により異なるが、160
ピンから300ピンの物が多い。電源端子VDDやVEE
電圧電源を接続し、グランド端子GNDを接地してIC
を駆動させる。複数の入力端子INi(i=1〜n)に
は、外部からの制御信号により出力ピン名とその出力電
圧が指令される。例えば、出力電圧値は8ビットの信号
で256階調で指令される。多数の出力ピンOUTi
(i=1〜m)からはその指令された出力ピンから指定
された一定電圧値を外部の負荷に供給する。
2. Description of the Related Art FIG. 3 shows a driver IC 1 having a large number of pins.
An example of 0 is shown. The number of pins depends on the type, but 160
There are many things with 300 to 300 pins. Connect a voltage power supply to the power supply terminals V DD and V EE and ground the ground terminal GND to the IC
Drive. An output pin name and its output voltage are commanded to the plurality of input terminals INi (i = 1 to n) by a control signal from the outside. For example, the output voltage value is an 8-bit signal and is instructed in 256 gradations. Many output pins OUTi
From (i = 1 to m), the specified constant voltage value is supplied from the commanded output pin to the external load.

【0003】この多数ピンを有するドライバIC(以下
「DUT」という)10の多数の出力ピンOUTiは、
制御信号により指令された電圧電流を正しく負荷に供給
しなければならない。そして出力抵抗もスペック通りで
ある必要がある。そこで従来からDUT10の製造過程
や製造後あるいは受入検査で、個々のDUT10の出力
電圧、出力電流や出力抵抗の測定をして、そのDUT1
0の良否を検査している。
A large number of output pins OUTi of the driver IC (hereinafter referred to as "DUT") 10 having a large number of pins are
The voltage and current commanded by the control signal must be correctly supplied to the load. And the output resistance must also be as specified. Therefore, conventionally, the output voltage, the output current, and the output resistance of each DUT 10 are measured during the manufacturing process of the DUT 10, after the manufacturing, or in the acceptance inspection, and the DUT 1 is measured.
The quality of 0 is inspected.

【0004】図4に従来の検査の方式を示す。DC測定
ユニット15は定電流源を内蔵する電圧測定器である。
そして任意値の定電流をスイッチを通して吐き出すこと
も吸い込むこともできるので、DUT10の出力電圧V
O も出力電流IL も、また出力抵抗RO も測定すること
ができる。出力抵抗RO は出力電圧値VO と負荷電圧値
M の差電圧を負荷電流値ILで除した値である。数式
で示すと、RO =(VO −VM )/IL となる。負荷電
圧値VM は電圧測定器で測定する。
FIG. 4 shows a conventional inspection method. The DC measuring unit 15 is a voltage measuring device with a built-in constant current source.
Since a constant current of an arbitrary value can be discharged or drawn through the switch, the output voltage V of the DUT 10
Both O, the output current I L and the output resistance R O can be measured. The output resistance R O is a value obtained by dividing the difference voltage between the output voltage value V O and the load voltage value V M by the load current value I L. When shown in a formula, the R O = (V O -V M ) / I L. The load voltage value V M is measured with a voltage measuring device.

【0005】図4(A)は、DUT10の多数の出力ピ
ンOUTiの出力電圧を電流印加電圧測定モードで、1
つのDC測定ユニット15でもって、1ピンづつ切替な
がら試験するという方法である。DC測定ユニット15
が1つであるので、安価であるが、測定時間が掛かり過
ぎて遅すぎる。
FIG. 4A shows the output voltage of a large number of output pins OUTi of the DUT 10 in the current applied voltage measurement mode.
This is a method in which one DC measurement unit 15 is tested while switching one pin at a time. DC measurement unit 15
Since it is one, it is inexpensive, but the measurement time is too long and too slow.

【0006】図4(B)は、DC測定ユニット15をN
ch(チャンネル)分設けてNchを電流印加電圧測定
モードでもって同時に測定し、Nピン毎に切り替えて測
定するものである。測定時間は図4(A)に比べて1/
Nとなるが、NchのDC測定ユニット15j(j=1
〜N)を必要とするので高価となる。
FIG. 4B shows the DC measurement unit 15 with N
The number of channels (channels) is provided and N channels are simultaneously measured in the current applied voltage measurement mode, and the measurement is performed by switching every N pins. Measurement time is 1 / compared to Fig. 4 (A)
N, but the Nch DC measurement unit 15j (j = 1
.About.N) are required, it is expensive.

【0007】図4(C)は、DUT10の全出力ピンO
UTi(i=1〜m)分のDC測定ユニット15iを有
して電流印加電圧測定モードで全出力ピンOUTiを一
度で試験するものである。よって、測定時間は非常に高
速になるが、DC測定ユニット15を全出力ピンOUT
i分設けるので価格も非常に高価となる。
FIG. 4C shows all output pins O of the DUT 10.
It has a DC measurement unit 15i for UTi (i = 1 to m) and tests all the output pins OUTi at once in the current applied voltage measurement mode. Therefore, although the measurement time becomes very fast, the DC measurement unit 15 is connected to all output pins OUT.
Since i minutes are provided, the price becomes very expensive.

【0008】図4(D)は、DUT10の全出力ピンO
UTi(i=1〜m)に対してそれぞれ接続するプログ
ラマブルロードPL20iを用意し、DUT10のそれ
ぞれの出力ピンは高速スキャナ16のそれぞれの入力端
子に接続される。DUT10への印加電流はPL20i
が行い、電圧測定は高速スキャナ16を通して1台の電
圧測定器17で行う。電圧測定器17側には電流が流れ
ないために高速スキャナを使用できるのである。この方
式は比較的高速に試験でき、しかも比較的安価である。
FIG. 4D shows all output pins O of the DUT 10.
A programmable load PL20i to be connected to UTi (i = 1 to m) is prepared, and each output pin of the DUT 10 is connected to each input terminal of the high speed scanner 16. The applied current to the DUT 10 is PL20i
The voltage measurement is performed by the single voltage measuring device 17 through the high-speed scanner 16. Since no current flows on the voltage measuring device 17 side, a high speed scanner can be used. This method can be tested at relatively high speed and is relatively inexpensive.

【0009】プログラマブルロードPL20は図5に示
しているように、ダイオードブリッジと、ILLとIL
Hの2つの定電流源と、VTのスレッショルド電圧源で
構成されている。ダイオードブリッジであるからDUT
10に接続されている一端aの電圧はVTに接続されて
いる他端bの電圧と等しい。従ってスレショルド電圧源
VTの電圧を可変することにより、DUT10側の一端
aの電圧を可変することができる。
The programmable load PL20 includes a diode bridge, ILL and IL, as shown in FIG.
It is composed of two H constant current sources and a VT threshold voltage source. DUT because it is a diode bridge
The voltage at one end a connected to 10 is equal to the voltage at the other end b connected to VT. Therefore, by changing the voltage of the threshold voltage source VT, the voltage of the one end a on the DUT 10 side can be changed.

【0010】DUT10の出力レベルを、仮にH(ハ
イ)レベルVOHと、L(ロウ)レベルVOLとし、VTの
電圧値をその中間値、つまりVT=(VOH+VOL)/
2、に設定すると、DUT10の出力レベルがHレベル
のときには出力ピンから負荷電流ILHがPL20に流
れ出る。逆に出力レベレがLレベルのときにはPL20
側からDUT10側に負荷電流ILLが流れ込む。負荷
電流ILH及びILLはスペックシート中の値を選択し
一定負荷電流ILHあるいはILLを流している。
The output level of the DUT 10 is assumed to be H (high) level VOH and L (low) level VOL, and the voltage value of VT is an intermediate value thereof, that is, VT = (VOH + VOL) /
When set to 2, when the output level of the DUT 10 is H level, the load current ILH flows out from the output pin to the PL 20. Conversely, when the output level is L level, PL20
Side, the load current ILL flows into the DUT 10 side. For the load currents ILH and ILL, the values in the spec sheet are selected and the constant load current ILH or ILL is passed.

【0011】[0011]

【発明が解決しようとする課題】従来のドライバICの
出力抵抗の測定方式は、上述のように、図4(A)から
図4(D)のものであった。どの測定方式でも出力抵抗
の測定はでき、その値はDUTの種類によって異なるが
約300Ωから数キロΩであって、一般的に数百Ω程度
である。ところが、それぞれの測定方式での測定値には
再現性があるが、方式を変更するとその測定値が異なる
ことが多かった。
As described above, the conventional method of measuring the output resistance of the driver IC is that shown in FIGS. 4 (A) to 4 (D). The output resistance can be measured by any measurement method, and the value is about 300 Ω to several kilo Ω, which is generally about several hundred Ω, although it varies depending on the type of DUT. However, although the measurement values of each measurement method have reproducibility, the measurement values were often different when the method was changed.

【0012】測定方法は、いずれも全ての出力ピンOU
Tiから一定電圧を出力するようにしてスイッチで切り
替えて測定したり、同時測定を行っている。出力抵抗値
の測定方式による測定値の差は±100Ω程度もあっ
た。これでは出力抵抗値に測定方式を付記する必要があ
り、不便であり、しかも不正確である。
The measuring method is all output pins OU.
A constant voltage is output from Ti, and a switch is used to perform measurement or simultaneous measurement is performed. The difference between the measured values of the output resistance measurement method was about ± 100Ω. This is inconvenient and inaccurate because it is necessary to add a measurement method to the output resistance value.

【0013】その原因はDUT10の種類や設計にもよ
るが、各出力ピンの電源と出力抵抗が独立したものでは
なく、出力部門のいくつかのブロック内では相互に関連
を持ち、干渉していることが判明した。ここで干渉と
は、インダクタンスやキャパシタンスによる電磁誘導等
の干渉のみではなく、分圧抵抗回路等の繋がり方による
干渉が大きいと判断される。そして、上述の測定方式で
は図4(A)の方式が出力ピン間で干渉が無く、正しく
測定できることが判った。従って、図4(B)から図4
(D)までの測定方式では測定値に補正値を付加する必
要があった。
The cause depends on the type and design of the DUT 10, but the power supply and the output resistance of each output pin are not independent, and in some blocks of the output department, they are mutually related and interfere with each other. It has been found. Here, it is determined that the interference is not only interference such as electromagnetic induction due to inductance and capacitance, but also interference due to the way in which the voltage dividing resistance circuit is connected. Then, it was found that in the above-mentioned measurement method, the method of FIG. 4 (A) has no interference between the output pins and can perform correct measurement. Therefore, from FIG. 4 (B) to FIG.
In the measuring methods up to (D), it was necessary to add a correction value to the measured value.

【0014】この発明は、従来測定方式を検討し、図4
(A)の測定結果と同じ値を得るために図4(D)の方
式を改良し、出力ピン間の干渉を無くし、高精度に、高
速にしかも比較的安価に構成できるドライバICの出力
抵抗測定器を提供するものである。
In the present invention, the conventional measurement method is examined, and FIG.
In order to obtain the same value as the measurement result of (A), the method of FIG. 4 (D) is improved, interference between output pins is eliminated, and the output resistance of the driver IC can be configured with high accuracy, high speed, and relatively inexpensively. A measuring instrument is provided.

【0015】[0015]

【課題を解決するための手段】上記目的を達成するため
に、本発明は従来測定方式の図4(D)の回路方式を検
討し、実験を重ね、高速スキャナを利用して電圧測定器
は1台で、高精度に、比較的高速で測定できるようにし
たものである。
In order to achieve the above object, the present invention examines the circuit system of FIG. 4 (D) which is a conventional measuring system, repeats experiments, and uses a high-speed scanner to determine a voltage measuring device. This is a device that enables high-accuracy measurement at a relatively high speed.

【0016】この回路方式は、DUT内部の電流の干渉
を打ち消すようにプログラマブルロードPLのスレッシ
ョルド電圧源を2系統設けるようにし、1系統のスレッ
ショルド電圧VT1はDUTの出力電圧よりも一定電圧
高くし、他の系統のVT2は逆に一定電圧低くし、その
VT1とVT2の電圧系のPLをDUTの出力ピンの配
列に交互に、あるいは2つ毎に、あるいは3つ毎に配列
設置して、PLからDUT内部に電流を流し込みあるい
は引き込んでDUT内部の電流の干渉を打ち消すように
した。
In this circuit system, two threshold voltage sources of the programmable load PL are provided so as to cancel the interference of the current inside the DUT, and the threshold voltage VT1 of one system is made constant higher than the output voltage of the DUT. On the contrary, the VT2 of the other system is lowered by a constant voltage, and the PLs of the VT1 and VT2 voltage systems are alternately arranged in the arrangement of the output pins of the DUT, or arranged every two or three, and the PL is arranged. Therefore, a current is caused to flow in or out of the DUT to cancel the interference of the current inside the DUT.

【0017】DUT内部の回路構成は種類により、ある
いは製造会社により設計が異なっている。DUT内部の
電圧源と出力ピンとが1対1に対応して出力抵抗が一定
の場合もあるが、出力ピンをいくつかのブロックに分割
し1ブロックで1つの電圧源の電圧を分圧して複数の出
力ピンに対応しているのものが多い。回路方式はさまざ
まである。従って、どのような回路方式であっても再現
性のある測定値を求めるには、DUT内部の電流バラン
スをとるのがよい。
The circuit configuration inside the DUT differs in design depending on the type or manufacturing company. There is a case where the voltage resistance inside the DUT and the output pin correspond to each other in a one-to-one manner and the output resistance is constant, but the output pin is divided into several blocks, and the voltage of one voltage source is divided by one block to obtain a plurality of voltages. Many are compatible with the output pin of. There are various circuit systems. Therefore, in order to obtain a reproducible measurement value with any circuit method, it is preferable to balance the current inside the DUT.

【0018】そこで、出力抵抗の測定において、DUT
から一定の電流を引き出し、また同量の電流を与えてや
るとDUT内部の電流分布に干渉が生ぜず、正確な出力
抵抗測定ができることがわかった。これも1ブロック毎
に同量の電流の出し入れがあるのが望ましい。そこでD
UTの出力ピンの配列順に、交互に出し入れを行うか、
2ピン毎に行うか、あるいは複数ピン毎に行ってもよい
が、1ブロックの出力ピン数が不明確であるので、1ピ
ン毎に交互に行うのが望ましい。
Therefore, in measuring the output resistance, the DUT
It was found that when a constant current was drawn from the device and the same amount of current was applied, the current distribution inside the DUT did not interfere, and accurate output resistance measurement was possible. Also in this case, it is desirable that the same amount of current be supplied and output for each block. So D
Whether to take in and out alternately in the order of arrangement of the UT output pins,
It may be performed every two pins or every plural pins, but it is desirable to alternately perform every one pin because the number of output pins in one block is unclear.

【0019】[0019]

【発明の実施の形態】第1の発明は、DUTの各出力ピ
ンOUTi(i=1〜m)に対応する入力端子を有する
高速スキャナと、その高速スキャナの各入力端子の電圧
を順次測定する電圧測定器と、上記DUTの各出力ピン
OUTiと上記高速スキャナの各入力端子にそれぞれ設
置された2系統のプログラムロードPL群で構成されて
いる。
BEST MODE FOR CARRYING OUT THE INVENTION A first aspect of the present invention is a high-speed scanner having an input terminal corresponding to each output pin OUTi (i = 1 to m) of a DUT, and a voltage at each input terminal of the high-speed scanner is sequentially measured. It is composed of a voltage measuring device and two groups of program load PL groups respectively installed at the output pins OUTi of the DUT and the input terminals of the high-speed scanner.

【0020】その2系統のプログラムロードPL群と
は、スレッショルド電圧源の電圧がDUTの出力電圧よ
りも一定電圧高いVT1群と一定電圧低いVT2群の2
系統の電圧を設定できるプログラムロードPL群であ
る。そして、一定電圧高いVT1群からは一定負荷電流
をPLからDUTに流し込む。また一定電圧低いVT2
群はDUTから一定負荷電流を吸い込む。DUTが流し
出す負荷電流と吸い込む負荷電流が等しいとDUT内部
では電流のバランスがとれて、干渉は無くなる。従来の
PLのスレッショルド電圧源は、DUTのHレベルとL
レベルの中間にしかスレショルド電圧を設定できなかっ
たので全ピンからの電流の垂れ流しか吸い込みしかでき
ずに干渉を生じていたのである。
The two groups of program load PL groups are a VT1 group in which the voltage of the threshold voltage source is higher than the DUT output voltage by a constant voltage and a VT2 group in which the voltage is lower than the DUT output voltage.
It is a program load PL group that can set the voltage of the system. Then, a constant load current is fed from PL to the DUT from the VT1 group having a high constant voltage. In addition, VT2 with low constant voltage
The swarm draws a constant load current from the DUT. If the load current discharged by the DUT and the load current absorbed by the DUT are equal, the current is balanced inside the DUT, and the interference is eliminated. Conventional PL threshold voltage sources are DUT H level and L
Since the threshold voltage could be set only in the middle of the level, only the drooping current from all pins could be absorbed, causing interference.

【0021】第2の発明は、第1の発明におけるスレッ
ショルド電圧源の配列をVT1とVT2とを交互に配列
した構成に限定したPL群で成っている。DUTの設計
がどうなっているのか、いくつのブロックに分けられて
いるのか一般にはわからない。そこでVT1とVT2と
を1つ置きに交互に配列する構成がDUT内部の電流バ
ランスをとるのにもっとも良い構成である。
The second invention comprises a PL group in which the arrangement of the threshold voltage sources in the first invention is limited to a configuration in which VT1 and VT2 are alternately arranged. It is generally unknown how the DUT is designed and how many blocks it is divided into. Therefore, a configuration in which every other VT1 and VT2 are alternately arranged is the best configuration for balancing the current inside the DUT.

【0022】第3の発明は、DUTのカタログで2種類
以上の異なる出力抵抗を有するDUTの出力抵抗の測定
器である。電位差が同じであって抵抗値が異なると、そ
の抵抗に流れる電流値は抵抗値に反比例して変化するに
は公知である。従って出力抵抗値が異なる出力段を有す
るDUTの測定ではPLの定電流源も2系統以上の定電
流源を有する必要がある。以下実施例について説明す
る。
A third aspect of the present invention is an output resistance measuring instrument of a DUT having two or more different output resistances in the DUT catalog. It is known that when the potential difference is the same and the resistance value is different, the current value flowing through the resistance changes in inverse proportion to the resistance value. Therefore, in the measurement of a DUT having output stages having different output resistance values, the PL constant current source also needs to have two or more constant current sources. Hereinafter, embodiments will be described.

【0023】[0023]

【実施例】図1には本発明の一実施例の構成図を、図2
には他の実施例の構成図を示す。図4、図5と対応する
部分には同一符号を付す。図1について説明する。DU
T10の出力段は電圧源11i(i=1〜m)から出力
抵抗12iを通して出力ピンに接続されている。各出力
ピンはそれぞれ高速スキャナ16の入力端子と接続さ
れ、高速スキャナ16では各入力端子の電圧をスキャン
してその電圧値を電圧測定器17で順次読み込んでい
る。
1 is a block diagram of an embodiment of the present invention, and FIG.
FIG. 9 shows a configuration diagram of another embodiment. The parts corresponding to those in FIGS. 4 and 5 are designated by the same reference numerals. FIG. 1 will be described. DU
The output stage of T10 is connected to the output pin from the voltage source 11i (i = 1 to m) through the output resistor 12i. Each output pin is connected to an input terminal of the high speed scanner 16, and the high speed scanner 16 scans the voltage of each input terminal and sequentially reads the voltage value by the voltage measuring device 17.

【0024】複数のプログラマブルロード20iは、D
UT10の出力ピンと高速スキャナ16の入力端子の間
にそれぞれ設置されて接続されている。プログラマブル
ロード20の構成は前述の図5の通りである。そしてス
レッショルド電圧源VTはVT1群とVT2群とがあ
り、図1においてはVT1とVT2とがDUT10の出
力ピンの配列に対して交互に設置されている。従って、
VT1のPL20からはDUT10側に一定負荷電流が
流れ出し、VT2のPL20には一定負荷電流が流れ込
む。
The plurality of programmable loads 20i are D
They are installed and connected between the output pin of the UT 10 and the input terminal of the high speed scanner 16, respectively. The configuration of the programmable load 20 is as shown in FIG. The threshold voltage source VT has a VT1 group and a VT2 group, and in FIG. 1, VT1 and VT2 are alternately arranged with respect to the arrangement of the output pins of the DUT 10. Therefore,
A constant load current flows from the PL20 of the VT1 to the DUT10 side, and a constant load current flows into the PL20 of the VT2.

【0025】DUT10において、吸い込む一定負荷電
流と吐き出す一定負荷電流が同量であると、DUT10
内部において電流バランスがとれて、干渉が無くなり、
出力抵抗値は高精度に、再現性よく、高速に測定するこ
とができる。
In the DUT 10, if the constant load current drawn in and the constant load current discharged are the same, the DUT 10
The current is balanced inside and there is no interference,
The output resistance value can be measured with high accuracy, good reproducibility, and high speed.

【0026】図2には、カタログ上で2種類以上の異な
る出力抵抗を有するDUT10の測定の構成図を示す。
図1と異なる点は、プログラマブルロードPL20の定
電流源を2系統有することである。つまり、ILL1と
ILH1の組の定電流源を有するPL20とILL2と
ILH2との組の定電流源を有するPL20とが存在
し、DUT10の出力抵抗が異なっても適切な一定負荷
電流を供給することができる構成となっている。
FIG. 2 shows a measurement configuration diagram of the DUT 10 having two or more different output resistances on the catalog.
The difference from FIG. 1 is that the programmable load PL20 has two constant current sources. That is, there is a PL20 having a constant current source of a set of ILL1 and ILH1 and a PL20 having a constant current source of a set of ILL2 and ILH2, and an appropriate constant load current is supplied even if the output resistance of the DUT 10 is different. It is configured to be able to.

【0027】[0027]

【発明の効果】以上詳細に説明したように、この発明
は、LCDドライバICやバブルジェットプリンタドラ
イバICのように多数ピンを有するドライバICの出力
抵抗を測定する測定器において、高精度に、再現性がよ
く、比較的高速に、比較的安価に構成することができ
る。
As described in detail above, the present invention can be reproduced with high accuracy in a measuring instrument for measuring the output resistance of a driver IC having a large number of pins such as an LCD driver IC and a bubble jet printer driver IC. It has good performance and can be constructed at a relatively high speed and at a relatively low cost.

【0028】従って、テストコストも安価にでき、しか
も益々出力ピン数が多くなっている現状において、その
利用価値は高く、技術的効果は大である。
Therefore, under the present circumstances where the test cost can be reduced and the number of output pins is increasing more and more, its utility value is high and the technical effect is great.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の構成図である。FIG. 1 is a configuration diagram of an embodiment of the present invention.

【図2】本発明の他の実施例の構成図である。FIG. 2 is a configuration diagram of another embodiment of the present invention.

【図3】DUT10を説明するための一例のDUT10
の外観図である。
FIG. 3 is an example DUT 10 for explaining the DUT 10.
FIG.

【図4】図4(A)から図4(D)は、従来のDUT1
0の出力抵抗を測定するための構成図である。
FIG. 4A to FIG. 4D are conventional DUT1s.
It is a block diagram for measuring the output resistance of 0.

【図5】PL20の一例の構成図である。FIG. 5 is a configuration diagram of an example of a PL20.

【符号の説明】[Explanation of symbols]

10 DUT(多数ピンを有するドライバIC) 11i 電圧源 12i 出力抵抗 15i DC測定ユニット 16 高速スキャナ 17 電圧測定器 20i PL(プログラマブルロード) VT スレッショルド電圧源 10 DUT (driver IC having many pins) 11i voltage source 12i output resistance 15i DC measuring unit 16 high-speed scanner 17 voltage measuring device 20i PL (programmable load) VT threshold voltage source

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 多数出力ピンを有するドライバICであ
るDUT(10)の直流特性を測定する出力抵抗測定器
において、 DUT(10)の各出力ピンOUTiにそれぞれ接続す
る入力端子を有する高速スキャナ(16)と、 上記高速スキャナ(16)の各入力端子の電圧を順次測
定する電圧測定器(17)と、 上記DUT(10)の各出力ピンOUTiと上記高速ス
キャナ(16)の各入力端子との間にそれぞれ設置さ
れ、スレッショルド電圧がDUT(10)の出力電圧よ
りも一定電圧高い電圧を設定できるスレッショルド電圧
源VT1群と一定電圧低い電圧を設定できるスレッショ
ルド電圧源VT2群との2系統の電圧を設定できるプロ
グラムロードPL(20i)群と、 を具備することを特徴とするドライバICの出力抵抗測
定器。
1. An output resistance measuring instrument for measuring a DC characteristic of a DUT (10) which is a driver IC having a large number of output pins, comprising: a high-speed scanner having an input terminal connected to each output pin OUTi of the DUT (10). 16), a voltage measuring device (17) for sequentially measuring the voltage of each input terminal of the high speed scanner (16), each output pin OUTi of the DUT (10) and each input terminal of the high speed scanner (16). And a threshold voltage source VT1 group capable of setting a voltage whose threshold voltage is higher than the output voltage of the DUT (10) by a constant voltage and a threshold voltage source VT2 group capable of setting a lower voltage by a constant voltage. Output load measuring instrument for driver IC, comprising:
【請求項2】 請求項1記載のプログラムロードPL
(20i)群は、スレッショルド電圧源VT1とVT2
とがDUT10の各出力ピンOUTiの配列順に交互に
配列されている2系統のプログラムロードPL(20
i)群であることを特徴とするドライバICの出力抵抗
測定器。
2. The program load PL according to claim 1.
The group (20i) includes threshold voltage sources VT1 and VT2.
And program load PL (20) in which and are alternately arranged in the order of arrangement of the output pins OUTi of the DUT 10.
i) An output resistance measuring device of a driver IC, which is a group.
【請求項3】 請求項1記載のプログラムロードPL
(20i)群は、定電流源ILL及びILHが出力電流
の異なる2系統(ILL1、ILH1とILL2、IL
H2)以上の定電流源を有しているプログラムロードP
L(20i)群であることを特徴とするドライバICの
出力抵抗測定器。
3. The program load PL according to claim 1.
In the group (20i), the constant current sources ILL and ILH are two systems (ILL1, ILH1 and ILL2, IL) having different output currents.
H2) Program load P having a constant current source above
An output resistance measuring device for a driver IC, which is an L (20i) group.
JP02732996A 1996-01-22 1996-01-22 Driver IC output resistance measuring instrument Expired - Fee Related JP3638697B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP02732996A JP3638697B2 (en) 1996-01-22 1996-01-22 Driver IC output resistance measuring instrument
TW085114963A TW315417B (en) 1996-01-22 1996-12-04
CN97102239A CN1115565C (en) 1996-01-22 1997-01-15 Output resistance tester for driver integrated circuit and testing method thereof
KR1019970000971A KR100248918B1 (en) 1996-01-22 1997-01-15 Device and method for measuring output resistance of driver ic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02732996A JP3638697B2 (en) 1996-01-22 1996-01-22 Driver IC output resistance measuring instrument

Publications (2)

Publication Number Publication Date
JPH09196998A true JPH09196998A (en) 1997-07-31
JP3638697B2 JP3638697B2 (en) 2005-04-13

Family

ID=12218040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP02732996A Expired - Fee Related JP3638697B2 (en) 1996-01-22 1996-01-22 Driver IC output resistance measuring instrument

Country Status (4)

Country Link
JP (1) JP3638697B2 (en)
KR (1) KR100248918B1 (en)
CN (1) CN1115565C (en)
TW (1) TW315417B (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003057284A (en) * 2001-08-10 2003-02-26 Advantest Corp Apparatus and method of testing semiconductor
JP2005265756A (en) * 2004-03-22 2005-09-29 Yokogawa Electric Corp Ic tester
KR100815537B1 (en) * 2005-10-11 2008-03-20 요코가와 덴키 가부시키가이샤 Ic tester
JP2008107173A (en) * 2006-10-25 2008-05-08 Yokogawa Electric Corp Ic tester
TWI793179B (en) * 2017-09-27 2023-02-21 日商日本電產理德股份有限公司 Resistance measuring device, substrate inspection device, and resistance measuring method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6940301B2 (en) * 2003-12-12 2005-09-06 Au Optronics Corporation Test pad array for contact resistance measuring of ACF bonds on a liquid crystal display panel

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003057284A (en) * 2001-08-10 2003-02-26 Advantest Corp Apparatus and method of testing semiconductor
JP2005265756A (en) * 2004-03-22 2005-09-29 Yokogawa Electric Corp Ic tester
KR100815537B1 (en) * 2005-10-11 2008-03-20 요코가와 덴키 가부시키가이샤 Ic tester
JP2008107173A (en) * 2006-10-25 2008-05-08 Yokogawa Electric Corp Ic tester
TWI793179B (en) * 2017-09-27 2023-02-21 日商日本電產理德股份有限公司 Resistance measuring device, substrate inspection device, and resistance measuring method

Also Published As

Publication number Publication date
CN1164649A (en) 1997-11-12
TW315417B (en) 1997-09-11
CN1115565C (en) 2003-07-23
KR100248918B1 (en) 2000-03-15
KR970059759A (en) 1997-08-12
JP3638697B2 (en) 2005-04-13

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