JPS6195258A - Apparatus for testing integrated circuit - Google Patents
Apparatus for testing integrated circuitInfo
- Publication number
- JPS6195258A JPS6195258A JP59217006A JP21700684A JPS6195258A JP S6195258 A JPS6195258 A JP S6195258A JP 59217006 A JP59217006 A JP 59217006A JP 21700684 A JP21700684 A JP 21700684A JP S6195258 A JPS6195258 A JP S6195258A
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- surge voltage
- section
- selection switch
- terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
- G01R31/002—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing where the device under test is an electronic circuit
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Description
【発明の詳細な説明】
（イ）産業上の利用分野
本発明は集積回路（以下ＩＣと称す）の試験装置、より
具体的には、静電気放電などのサージ電圧に対するＩＣ
の耐力をｉｔ＋定するだめの試験装置に関する。DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a testing device for integrated circuits (hereinafter referred to as IC), and more specifically, to test equipment for testing ICs against surge voltages such as electrostatic discharge.
This invention relates to a test device for determining the proof stress of it+.
（ロ）従来の技術
従来より、ＩＣの静電気放電試験としては、各種規格（
Ｍ ＩＬ−ＳＴＤ−８８３Ｃ１旧Ｌ−ＳＴＤ−１６８６
、旧Ｌ−Ｍ−３８５１０、ＢＳ、 ＥＩＡＪ−ＩＣ−１
２１＞にもあるよるに、第２図に示すコンデンサ充電法
が採用されている。即ち、第２図の構成は、抵抗（１）
を介してコンデンサ（２）に充電した電荷を充放電スイ
ッチ（３〉を切換えることにより、抵抗（１）を：′通
して放電し、ＩＣ（４）の所定の端子間にサージ電圧を
加えるものである。(b) Conventional technology Traditionally, various standards (
M IL-STD-883C1 Old L-STD-1686
, former LM-38510, BS, EIAJ-IC-1
21>, the capacitor charging method shown in FIG. 2 is adopted. That is, the configuration of FIG. 2 has a resistor (1)
By switching the charge/discharge switch (3), the electric charge charged in the capacitor (2) via the resistor (1) is discharged through the resistor (1), and a surge voltage is applied between the specified terminals of the IC (4). It is.
この様なＩＣの静電気放電試験装置は、最近一部メーカ
より市販きれているが、それは、サージ電圧印加機能し
か有しておらず、斯るサージ電圧印加後のＩＣの良否判
定は別途性なわねばならない。しかも、サージ電圧発生
部とＩＣとの間の電気的な接続は手動であり、ＩＣ端子
の接続を種々組合わせて試験を行なうことは非常に時間
がかかる。従って、従来、ＩＣの静電気放電試験を行な
う場合、サー′、；電圧の印加、動作チェックを手動で
くり返し行なうことになり、それは極めて繁雑゛である
。Such IC electrostatic discharge test equipment has recently become commercially available from some manufacturers, but it only has a surge voltage application function, and it is not possible to judge whether the IC is good or bad after applying such a surge voltage. Must be. Moreover, electrical connections between the surge voltage generator and the IC are made manually, and it is very time consuming to test various combinations of IC terminal connections. Therefore, conventionally, when performing an electrostatic discharge test on an IC, the application of a voltage and the operation check have to be repeated manually, which is extremely complicated.
そこで、サージ電圧印加後のＩＣの良否判定のために、
半導体用カーブトレーサを用いでＩＣ端子間の電圧電流
特性をＮｊｔｌｌ定する簡易法がしばしば採用きれる。Therefore, in order to determine the quality of the IC after applying a surge voltage,
A simple method of determining the voltage-current characteristics between IC terminals using a semiconductor curve tracer is often adopted.
しかし、この方法の欠点は、ＩＣ端子間の電圧電流特性
がＩＣの標準的な試験項目ではないために、ダイオード
用のカーブトレーサしか使えず、ＩＣの各端子とカーブ
トレーサとの順次切換作業が大変である。また電圧電流
特性測定時、電流値をｌｕ＾〜１貼まで広範囲にチェッ
クする必要があるが、その様な多数回の測定及び良否判
定作業も実用的でない。However, the disadvantage of this method is that because the voltage-current characteristics between IC terminals is not a standard test item for ICs, only a curve tracer for diodes can be used, and it is necessary to sequentially switch between each terminal of the IC and the curve tracer. It's difficult. Furthermore, when measuring voltage-current characteristics, it is necessary to check the current value over a wide range from lu^ to one paste, but such multiple measurements and quality judgment work are not practical.
（ハ）発明が解決しようとする問題点
本発明はサージ電圧の印加、電圧電流特性の測定及びＩ
Ｃの良否判定を自動的に行なえる新規な試験装置を提供
するものである。(c) Problems to be Solved by the Invention The present invention is directed to application of surge voltage, measurement of voltage-current characteristics, and
The purpose of the present invention is to provide a new test device that can automatically determine the quality of C.
（ニ）問題点を解決するための手段
本発明のＩＣ試験装置は、ＩＣの各外部端子に対応して
配置された端子選択スイッチ群、サージ電圧印加部、該
印加部におけるサージ電圧値を設定するサージ電圧設定
部、電圧電流特性測定部、測定選択スイッチ、制御部を
備え、該制御部は、上記サージ電圧設定部に設定サージ
電圧値を指示する操作、上記電圧電流特性測定部に測定
条件を指示する操作、上記端子選択スイッチ群の所定の
選択スイッチをオンさせる操作、上記端子選択スイッチ
群を上記サージ電圧印加部に接続した後、上記電圧電流
特性測定部に接続するべく上記測定選択スイッチを切換
える操作、及び上記電圧電流特性測定部による測定結果
を判定する操作を含むことを特徴とする。(d) Means for solving the problem The IC testing device of the present invention includes a group of terminal selection switches arranged corresponding to each external terminal of the IC, a surge voltage application section, and a surge voltage value set in the application section. The control section includes an operation for instructing the surge voltage setting section to set a surge voltage value, a voltage-current characteristic measuring section, a measurement selection switch, and a control section. an operation of turning on a predetermined selection switch of the terminal selection switch group; and an operation of turning on a predetermined selection switch of the terminal selection switch group; after connecting the terminal selection switch group to the surge voltage application section, the measurement selection switch and an operation of determining a measurement result by the voltage-current characteristic measuring section.
（ホ） 作用
本発明によれば、制御部による一連の操作によりサージ
電圧印加、電圧電流特性の測定及びＩＣの良否判定が自
動的になされ、かつそのためのＩＣ端子切換えも自動的
に行なわれる。(E) Function According to the present invention, application of surge voltage, measurement of voltage-current characteristics, and determination of the quality of the IC are automatically performed by a series of operations by the control section, and IC terminal switching for this purpose is also automatically performed.
（へ）実施例
第１図に本発明の実施例を示す、試料となるサンプルＩ
Ｃはソケット（ｌＯ）に差込まれる。該ソケットに接続
された端子選択スイッチ群（１１）は、ＩＣの各外部端
子、即ちソケットの各端子に対応して各一対ずつ第１、
第２スイツチ（ＳＴＡ）（ＳＴＢ）を有している。(f) Example Sample I, which is a sample, shows an example of the present invention in Figure 1.
C is inserted into the socket (lO). The terminal selection switch group (11) connected to the socket includes a pair of first and second terminal selection switches corresponding to each external terminal of the IC, that is, each terminal of the socket.
It has a second switch (STA) (STB).
マイクロプロセッサ等からなる制御部（１２）は、試験
の手順を指示するプログラムを記憶しており、このプロ
グラムに従って、サージ電圧印加、電圧電流特性の測定
及び良否□判定を実行する。試験条件、例えば、サージ
電圧印加の大きさ、ＩＣの被測定端子番号、電圧極性、
電圧電流特性の測定のための供給電流値、良否判定基準
等のデータはキーボード（１３）から入力される。The control unit (12), which is composed of a microprocessor or the like, stores a program that instructs the test procedure, and executes surge voltage application, measurement of voltage-current characteristics, and pass/fail determination according to this program. Test conditions, such as magnitude of surge voltage application, IC terminal number to be measured, voltage polarity,
Data such as supply current values and pass/fail criteria for measuring voltage-current characteristics are input from the keyboard (13).
制御部（１２）は、まずλカデータに基いて端子選択ス
イッチ群（１１）の所定のスイッチのみをオンきせる。The control unit (12) first turns on only a predetermined switch of the terminal selection switch group (11) based on the λ card data.
例えば、第１端子と第４２端子とが被測定端子として指
定きれているとすると、第１端子に対応する第１スイツ
チ（ＳＴＡ）と第４２端子に対応するｖＩ２スイッチ（
ＳＴＢ）のみがオンに設定される。制御部（１２）は、
更に測定選択スイッチ＜１４）及びサージ電圧印力日部
（１５）の充放電スイッチ（１−６＞を共に接点ａ側に
セットすると共に、入力された電圧極性データに基いて
極性スイッチ（１７）を適宜の極性にセットする。尚、
斯る電圧極性データは、サンプルＩＣに固有の電源極性
によって決められるものである。又、上記各スイッチは
全て水銀リレースイッチで構成され、インターフェース
（２６）を通じる制御部（１２）からの指令でドライバ
（２５）がそれらを駆動する。For example, if the first terminal and the 42nd terminal have been designated as the terminals under test, the first switch (STA) corresponding to the first terminal and the vI2 switch (STA) corresponding to the 42nd terminal
STB) is set on. The control unit (12)
Furthermore, both the measurement selection switch <14) and the charging/discharging switch (1-6> of the surge voltage application part (15) are set to the contact a side, and the polarity switch (17) is set based on the input voltage polarity data. Set the polarity to the appropriate polarity.
Such voltage polarity data is determined by the power supply polarity specific to the sample IC. Furthermore, all of the above switches are composed of mercury relay switches, and the driver (25) drives them in response to commands from the control section (12) through the interface (26).
制御部（１２）は次いで、入力さシた印カロサージ電圧
値データをインターフェース（２６）を通じて、サージ
電圧設定部（１８）に送り込む、サージ電圧設定部（１
８）のＤ／Ａ変換部（１８ａ）は、入力されたサージ電
圧値データがデジタル信号であるため、これをアナログ
値に変換し、それに基いて高圧定電圧電源部（１８ｂ）
が所定の印加用サージ電圧を出力する。このとき、分圧
抵抗（１９ａ）（１９ｂ）による分圧値が’ｙｕａ部（
１８ｂ）にフィードバックされ、出力電圧の安定化がな
きれる。The control unit (12) then sends the inputted calosurge voltage value data to the surge voltage setting unit (18) through the interface (26).
Since the input surge voltage value data is a digital signal, the D/A converter (18a) of 8) converts it into an analog value, and based on it, converts the input surge voltage value data to the high voltage constant voltage power supply unit (18b).
outputs a predetermined applied surge voltage. At this time, the divided voltage value by the voltage dividing resistors (19a) (19b) is 'yua part (
18b), and the output voltage can no longer be stabilized.
サージ電圧印加？Ｊ（１８）の出力する電圧は、極性ス
１′・／チ（１７）を介して適当な極性となり、サージ
電圧印加部（１５）に入力される。即ち、抵抗（３０）
充放電スイッチ（１６）、インダクタンス（３１）、抵
抗（３２）を経てコンデンサ（３３）に所定のサージ電
圧が充電される。Surge voltage applied? The voltage output from J (18) has an appropriate polarity via polarity switch (17), and is input to the surge voltage application section (15). That is, resistance (30)
A predetermined surge voltage is charged to a capacitor (33) via a charge/discharge switch (16), an inductance (31), and a resistor (32).
制御部（１２）は、続く段階として、充放電スイッチ（
１６）を接点す側にセットする。この結果、測定選択ス
イッチ（１４）及び端子選択スイッチ群（１１）を介し
て、ＩＣの第１端子と第４２端子との間にサージ電圧の
印カロが実行されたことになる。As a subsequent step, the control unit (12) controls the charging/discharging switch (
16) on the contact side. As a result, a surge voltage is applied between the first terminal and the 42nd terminal of the IC via the measurement selection switch (14) and the terminal selection switch group (11).
続く試験は、斯るサージ電圧印加によりＩＣの破壊状況
を調べることであり、このためにＩＣの第１端子と第４
２端子との間の！圧電液特性を調べ、良否判定がなされ
る。The next test was to investigate the destruction of the IC by applying such a surge voltage, and for this purpose, the first and fourth terminals of the IC were
Between the two terminals! The piezoelectric liquid characteristics are examined and a pass/fail judgment is made.
即ち、制御部（１２）は、次いで測定選択スイッチ（１
４）を接点す側に切換えた後、入力された電流値データ
をインターフェース（２６）を通じて電圧電流特性測定
部（２０）に送り込む。該（１１１定部のＤ／Ａ変換部
（２０ａ）は、入力された電流値データがデジタル信号
であるため、これをアナログ値に変換し、それに基いて
、電圧測定部（２０ｂ）が定電流源として所定値の電流
をＩＣの第１端子−ＩＣ内部−ＩＣの第４２端子の経路
で流すと共に、これら両端子間の電圧降下量を測定する
。この降下量はＡ／ＤＲｍ部（２１）にてデジタル量に
変換される。That is, the control section (12) then switches the measurement selection switch (1
4) to the contact side, the input current value data is sent to the voltage-current characteristic measuring section (20) through the interface (26). Since the input current value data is a digital signal, the D/A conversion section (20a) of the (111 constant section) converts it into an analog value, and based on this, the voltage measurement section (20b) converts the constant current value to an analog value. A current of a predetermined value is passed through the path from the first terminal of the IC to the inside of the IC to the 42nd terminal of the IC as a source, and the amount of voltage drop between these two terminals is measured.This amount of drop is determined by the A/DRm section (21). is converted into a digital quantity.
制御部（１２）は斯る電圧降下量データと、予２め入力
された良否判定基準データとを比較し、Ｋ者の差が所定
範囲を越えておれば、ＩＣがサージ電圧印加により破壊
したものとして不良表示をＣＲＴ（２２）で表示せしめ
る。The control unit (12) compares the voltage drop amount data with the previously input pass/fail judgment standard data, and if the difference between the two exceeds a predetermined range, it is determined that the IC has been destroyed by the application of the surge voltage. As a precaution, a defective indication is displayed on the CRT (22).
以上の制御例では、Ｄ／Ａ変換部（１８ａ）（２０ａ）
へのデータ設定は、サージ電圧印加及び電圧電流特性の
測定の各段階でなされたが、試験開始初期に −予め行
なってもよく、その場合、制御部（１２）は、上記各段
階時に、改めて、高圧定電源部（１８ｂ）及び電圧測定
部（２０ｂ）に夫々駆動信号を与えること
ｉＪになる。In the above control example, the D/A converter (18a) (20a)
The data settings were made at each stage of applying the surge voltage and measuring the voltage-current characteristics, but they may also be set in advance at the beginning of the test. , giving drive signals to the high voltage constant power source section (18b) and the voltage measuring section (20b), respectively.
Become iJ.
又、上記制御例では、単一のサージ電圧印加と、単一の
電圧を波特性測定とがなされたが、その他、単一の電圧
印加と複数の特性測定への組合わせで行なってもよい。In addition, in the above control example, a single surge voltage was applied and the single voltage was used to measure the wave characteristics, but it may also be performed by combining a single voltage application and measuring multiple characteristics. good.
この場合、単一のサージ電圧印加後、特性測定時に電流
値を順次変化感せていくのである。これにより広い電流
範囲での特性変化が容易に調べられる。又複数のサージ
電圧印加と単一の電圧を波特性測定との組合わせで行な
ってもよい。この場合、−回のサージ電圧印加と続く特
性測定を行なった後、サージ電圧を制定量高めて２回目
のサージＷＥＥと続く特性測定をなし、このくり返しを
ＩＣの破壊まで続けて破壊限界を求めるのである。これ
らの組合せ形態において、ＴＬ電流値サージ電圧の印加
変化は制御部（１２）が自動的に行なうものであり、又
その際得られる測定結果はＣＲＴ（２２）でグラフ表示
することもできる。In this case, after applying a single surge voltage, the current value is sequentially felt to change during characteristic measurement. This allows easy investigation of changes in characteristics over a wide current range. Alternatively, the application of a plurality of surge voltages and a single voltage may be performed in combination with the measurement of wave characteristics. In this case, after applying the surge voltage - times and measuring the characteristics, the surge voltage is increased by a specified amount and the second surge WEE is performed and the characteristics are measured again, and this process is repeated until the IC is destroyed to find the destruction limit. It is. In these combinations, the control section (12) automatically changes the applied TL current value surge voltage, and the measurement results obtained at this time can also be displayed graphically on the CRT (22).
更に上記実施例では、ＩＣの１対の端子間のみ試験され
たが、必要対数につき順次自動的に実行きれてもよい。Further, in the above embodiment, the test was performed only between one pair of terminals of the IC, but the test may be automatically performed sequentially for each required logarithm.
尚、入力データ、測定データ、試験プログラムは必要に
応じてフロッピー装置（２４）に格納でき、又プリンタ
（２３）にて出力できる。Note that the input data, measurement data, and test program can be stored in a floppy device (24) as needed, or outputted by a printer (23).
又、サージ電圧印加部（１５）において、コンデンサ（
３３）あるいはインダクタンス（３１）と抵抗（３２）
との接読体を夫々プラグイン式になして、試験内容に応
じてそれらを差換える様になしてもよい。In addition, in the surge voltage application section (15), a capacitor (
33) Or inductance (31) and resistance (32)
It is also possible to create a plug-in format for each reading text and replace them depending on the content of the test.
（ト） 発明の効果
本発明によれば、制御部による一連の操作によりサージ
電圧印加、電圧電流特性の測定及びＩＣの良否判定が自
動的になされ、かつそのためのＩＣ端子の切換えも自動
的に行なわれるため、ＩＣの静電気放電試験が熟練者で
なくても短時間で実施きれる。(G) Effects of the Invention According to the present invention, application of surge voltage, measurement of voltage-current characteristics, and judgment of IC quality are automatically performed through a series of operations by the control unit, and IC terminal switching for this purpose is also automatically performed. Therefore, even non-experts can perform electrostatic discharge tests on ICs in a short period of time.
第１図は本発明の実施例回路図、第２図は規格による試
験回路図である。
（１１）・・・端子選択スイッチ群、（１２）・・・制
御部、（１４）・・測定選択スイッチ、 （１５）・・
・サージ電圧印加部、（１８）・・・サージ電圧設定部
、（２０）・・・電圧電流特性測定部。FIG. 1 is a circuit diagram of an embodiment of the present invention, and FIG. 2 is a test circuit diagram according to the standard. (11)...Terminal selection switch group, (12)...Control unit, (14)...Measurement selection switch, (15)...
- Surge voltage application section, (18)...Surge voltage setting section, (20)...Voltage-current characteristic measurement section.
Claims (1)
選択スイッチ群、サージ電圧印加部、該印加部における
サージ電圧値を設定するサージ電圧設定部、電圧電流特
性測定部、測定選択スイッチ、制御部を備え、該制御部
は、上記サージ電圧設定部に設定サージ電圧値を指示す
る操作、上記電圧電流特性測定部に測定条件を指示する
操作、上記端子選択スイッチ群の所定の選択スイッチを
オンさせる操作、上記端子選択スイッチ群を上記サージ
電圧印加部に接続した後、上記電圧電流特性測定部に接
続するべく上記測定選択スイッチを切換える操作、及び
上記電圧電流特性測定部による測定結果を判定する操作
を含むことを特徴とする集積回路の試験装置。(1) A group of terminal selection switches arranged corresponding to each external terminal of the integrated circuit, a surge voltage application section, a surge voltage setting section for setting the surge voltage value in the application section, a voltage-current characteristic measurement section, and a measurement selection switch , a control section, the control section is configured to perform an operation of instructing the surge voltage setting section to set a surge voltage value, an operation of instructing the voltage-current characteristic measurement section of measurement conditions, and a predetermined selection switch of the terminal selection switch group. After connecting the terminal selection switch group to the surge voltage applying section, switching the measurement selection switch to connect to the voltage-current characteristic measuring section, and checking the measurement results by the voltage-current characteristic measuring section. An integrated circuit testing device comprising an operation for making a determination.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59217006A JPH0743411B2 (en) | 1984-10-16 | 1984-10-16 | Integrated circuit test equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59217006A JPH0743411B2 (en) | 1984-10-16 | 1984-10-16 | Integrated circuit test equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6195258A true JPS6195258A (en) | 1986-05-14 |
| JPH0743411B2 JPH0743411B2 (en) | 1995-05-15 |
Family
ID=16697341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59217006A Expired - Lifetime JPH0743411B2 (en) | 1984-10-16 | 1984-10-16 | Integrated circuit test equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0743411B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105403795A (en) * | 2015-12-21 | 2016-03-16 | 国网四川省电力公司电力科学研究院 | IC card static test device and test method |
| WO2022004804A1 (en) * | 2020-07-03 | 2022-01-06 | 三菱電機株式会社 | Electrostatic withstand voltage testing device and electrostatic withstand voltage testing method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI442069B (en) * | 2011-04-27 | 2014-06-21 | Sharp Kk | High voltage inspection device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55149886A (en) * | 1979-05-11 | 1980-11-21 | Toshiba Corp | Automatic testing device |
| JPS58144764A (en) * | 1982-02-23 | 1983-08-29 | Victor Co Of Japan Ltd | Automatically measuring inspector for circuit board |
| JPS58186473U (en) * | 1982-06-04 | 1983-12-10 | 三菱電機株式会社 | Electrical voltage test equipment |
-
1984
- 1984-10-16 JP JP59217006A patent/JPH0743411B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55149886A (en) * | 1979-05-11 | 1980-11-21 | Toshiba Corp | Automatic testing device |
| JPS58144764A (en) * | 1982-02-23 | 1983-08-29 | Victor Co Of Japan Ltd | Automatically measuring inspector for circuit board |
| JPS58186473U (en) * | 1982-06-04 | 1983-12-10 | 三菱電機株式会社 | Electrical voltage test equipment |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105403795A (en) * | 2015-12-21 | 2016-03-16 | 国网四川省电力公司电力科学研究院 | IC card static test device and test method |
| WO2022004804A1 (en) * | 2020-07-03 | 2022-01-06 | 三菱電機株式会社 | Electrostatic withstand voltage testing device and electrostatic withstand voltage testing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0743411B2 (en) | 1995-05-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |