TW315417B - - Google Patents

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Publication number
TW315417B
TW315417B TW085114963A TW85114963A TW315417B TW 315417 B TW315417 B TW 315417B TW 085114963 A TW085114963 A TW 085114963A TW 85114963 A TW85114963 A TW 85114963A TW 315417 B TW315417 B TW 315417B
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TW
Taiwan
Prior art keywords
voltage
dut
pin
output
fixed
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TW085114963A
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Chinese (zh)
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Zenshin Test Co
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/08Measuring resistance by measuring both voltage and current
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/31712Input or output aspects
    • G01R31/31713Input or output interfaces for test, e.g. test pins, buffers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/319Tester hardware, i.e. output processing circuits
    • G01R31/31903Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31905Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture

Description

經濟部中央標準局員工消費合作社印製 315417 A7 _B7 ·_ 五、發明説明(1 ) 〔發明之領域〕 本發明係關於用以測定譬如具有如LCD (液晶)驅動 1C及噴射印表機驅動1C之多數翰出銷之驅動1C之輸出電阻 的_出電阻測定器及測定方法。 〔發明之背景〕 第3圈係顯示具有多數銷之驅動1C10之一例。銷數係 依據種類而不同,但由160銷到300銷者為多。在電源端子 V 等連接霄壓電源,將接地端子GND加Μ接地,使1C驅動 。在複數之綸入端子INi(i = 1〜η),係由外部外加控制信 號,並藉由該控制信號指令_出銷名及其輪出電壓。譬如 ,_出電壓值係8 bit之信號Μ 256等级指令。由多數之輪 出銷0UTi(i=l〜係由被其指令後之_出銷,將被指定 後之固定電壓值供應到外部之負荷。 具有該多數銷之驅動1C (以下稱為「DUT」)10之多 數翰出銷OUTi,係藉由控制信號將披指令後之電壓電流必 需正確供應至負荷。而且輪出霄阻也必要依照規格。於此 ,以往係在DUT 10之製造遇程或製造後或入料檢査時*進 行各掴之DUT10之輸出電壓、繪出電流或輪出電阻之測定 ,用Μ檢査該DUT10之良否。 第4圓係顯示先前之檢査方式。 DC測定装置15係内藏有定電滾源之電壓澜定器。而且 可将任意值之定電流通遇開两吐出或吸入,所Μ可設定輸 出電滾I ,也可拥定DUT10之輸出電壓V ,且可测定輪出 霣阻R 。輪出電阻R係將無負荷時之輪出電壓值V及負荷 時之霄壓值V的差《壓除Μ負荷電流值I之值。Μ數式表 本紙張尺度適用中國國家標準(CNS ) Α4規格(210Χ297公釐) (請先閲讀背面之注意事項再填寫本頁) .裝· 訂 315417 A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明(2 ) 示,則RQ= (ν〇- VM>/I L。負荷電壓值VM係使用霣壓測 定器加以澜定。 第4(A)園係將DUT10之多數輸出銷OUTi之輪出電壓Μ 電流外加電壓测定祺式,Μ—個DC測定装置15,1銷更換 並進行試驗之方法。因DC測定裝置15爲1錮,所Μ廉價, 但澜定時間遇久太慢。 第4(B)圔係將DC測定装置15Nch (頻道 > 分設,將Nch 使用電流外加霣壓測定模式同時捆定,每次MN銷進行更 換拥定。澜定時間比起第4(A)曬成為1/N,但需要Nch之DC 澜定装置15j(j = 1〜N),所Μ較鑤貴。 第4(C)圖係具有DUT10之全输出銷OUTi (i= 1〜Β)份之DC 測定裝置15i,使用霄流外加電壓測定模式将全ftjl出銷OUT i 以一次進行試驗。因此,測定時間變得非常高速,但將DC 测定装置15全輸出銷OUT i分設所以價格也成為非常昴貴。 第4(D)圔係對DDT10之全输出銷OUTi (i = 1〜〇〇分別連 接用Μ準備可程式炱載PL20i。而且,DUT10之各自綸出銷 係連接於高速掃描器16之各輪入端子。對DUT10之外加電 滾係進行PL20i,電壓測定係通過高速掃描器16,使用1 台之霣麽测定器17進行。在電壓澜定器17钿係為了不使電 流流通可使用高速掃描器。該方法係可較高速試驗,而且 較廉價。 可程式負載PL20係如第5圖所示,係由二極醱電路* ILL及ILH之2傾定電滾源,及VT之»霣壓源所構成。由於 有二極鱷霄橋所Μ連接於DUT10之一端a之霣壓係與連接 本紙張尺度適用中國國家揉準(CNS ) A4規格(210 X 297公釐) ---------^------、訂------i (請先閲坎背面1之注意事項再填寫本頁) 經濟部中央標準局員工消費合作杜印製 A7 ^ __^ _B7 ·_ i'發明説明(3) 於VT之他端b的電壓相等。因此藉由可變閾電壓源VT之電 K,可Μ使DUTlOfll之一端a之電壓可變。 將DUT10之輪出電平,假如做為Η(高)電平V0H,及L (低〉電平V0L*將VT之電壓值設定於其中間值,亦即VT = (V0H + V0L>/2,則使01^10之_出電平在Η電平時係由輪 出銷使負荷電滾ILH滾出到PL20。相反地,使輪出電平在 L霄平時係由PL20供使負荷電流ILL滾入到DUT10拥。負荷 電流ILH及ILL係選擇規格說明書圖表中之值,並滾通固定負 荷霣滾ILH或ILL。 習知之驅動1C之輸出電阻的拥定方式,係如上述,由 第4A到4D圔。以任何拥定方式均可測定輸出電阻,其值係 依據DUT之種類而不同,但約有由300Ω到數ΚΩ,一般而 言在數百Ω左右。但是,以各自之測定方式之測定值雖有 再現性,但若變更方式,則其澜定值大部份均不同。 測定方法*係皆由全部之輪出銷OUT i_出固定電壓, 使用開鼷切換加以測定,或同時加以澜定。輪出霣阻值之 測定方法所產生的測定值之差》係表示±100 Ω左右。此 為在輪出霄阻值有必要附記拥定方式,有所不便,而且為 不正確之測定值。 其原因係由於DUT10之種類或設計,但各_出銷之霄 源及_出電阻並非獨立,已知在_出部門之幾傾E段内係 相互具有两連,並互相干擾箸。在此所諝干S ,並非僅是 由於霣感或霣容所產生之電磁感應等之干擾,大部份係分 思霣阻電路等之關勒方面所產生之干擾。而且,在上述之 本紙張尺度適用中國國家揉準(CNS ) A4規格(210X297公釐) ----------------、玎------0 (請先閱讀背面之注意事項再填寫本頁) 6 ___87 · ·_ ___87 · ·_ 經濟部中央樣準局負工消費合作社印製 A7 五、發明説明(4 ) 测定方式,第4A圖之方式在繪出銷間無干擾,已知可正確 測定。因此》從第4B到4D圖之測定方式,有必要在測定值 附加修正值。 本發明,係檢討習知之測定方式,提供一種驅動1C之 輪出電阻测定器,爲了取得與第4A圖之測定結果相同值, 所Μ改良第4D圚之方式,使輪出銷間無干擾,可構成高精 確度,高速而且較廉價。 又,提供一種驅動1C之輪出霣阻測定方式,為了取得 與第4Α圈之拥定結果相同值,所Κ改良測定方式,而使_ 出銷間無干擾,可構成高箱確度,离速而且較廉價。 本發明係檢討習知澜定方式之第4D圖的電路方式,經 重複實驗,利用高速掃描器,使用1台霣壓測定器,可高 精確度,較高速测定之方式。 又,提供一種驅動1(:之_出«阻測定方法,係改良測 定方法,使綸出銷間無干擾,可構成高精確度*高速。 首先,對於驅動1C之粬出«阻拥定器,加以說明。 該電路方式,悌将可程式負載PL之Μ電壓源設置2条 統,以消除DUT內部之電流干擾,1条统之閩電鼷VT1係比 DUT之輸出電壓更高出固定電壓,另外条統之VT2係相反低 於固定霣壓,將該VT1及VT22«思糸统PLM交替方式,或 每2艟,或每3儸配列設置於DUT之輸出銷之配列,由PL 將霄流流入或強迫輪入到DUT內部,以消除DUT内部之電流 干擾。 DUT内部之電路構成係依據種類,或依據製造公司之 本紙張尺度適用中國國家標準(CNS ) A4洗格(210X297公釐) I 裝I I I I I 訂 ^ (請先閱讀背面之注意事項再填寫本頁) 7315417 A7 _B7 · _ Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 5. Description of the invention (1) [Field of the invention] The present invention relates to measuring, for example, with LCD (liquid crystal) drive 1C and jet printer drive 1C Most of the manufacturers sell 1C output resistance measuring devices and measuring methods. [Background of the invention] The third circle shows an example of a drive 1C10 with a majority of pins. The number of pins varies depending on the type, but the number is from 160 to 300. Connect a low-voltage power supply to the power supply terminal V, etc., add GND to the ground terminal GND to drive 1C. At the multiple input terminals INi (i = 1 ~ η), a control signal is externally applied, and the control signal is used to instruct _sell name and its turn-out voltage. For example, the output voltage value is an 8-bit signal M 256 level command. The output of the majority wheel is 0UTi (i = l ~ is issued by the command _, and the specified fixed voltage value is supplied to the external load. The drive with the majority pin 1C (hereinafter referred to as "DUT ”) Most of the 10 exporters of OUTi use the control signal to supply the voltage and current after the command correctly to the load. And the wheel resistance must also be in accordance with the specifications. Here, in the past, it was the manufacturing process of DUT 10. Or after manufacturing or during material inspection *, measure the output voltage, drawn current or wheel resistance of each slap DUT10, and use M to check the quality of the DUT10. Circle 4 shows the previous inspection method. DC Measuring Device 15 It is a voltage stabilizer with a fixed electric roller source built in. It can spit out or inhale a constant current of any value, so the output electric roller I can be set, and the output voltage V of DUT10 can also be supported, and The wheel resistance R can be measured. The wheel resistance R is the difference between the voltage value V at the time of no load and the voltage value V at the time of load "the value of the load current value I divided by the pressure. The number is expressed on paper The scale is applicable to China National Standard (CNS) Α4 specification (210Χ297mm) (please Read the precautions on the back and fill in this page). Binding · Order 315417 A7 B7 Printed by the Employee Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Invention Instructions (2), then RQ = (ν〇- VM> / IL. Load voltage The value VM is determined by using a pressure tester. The fourth (A) park is to measure the outgoing voltage of the majority of the output pins OUTi of the DUT 10, the current and the applied voltage to determine the type, M—a DC measuring device 15, one pin is replaced and replaced The method of conducting the test. Since the DC measuring device 15 is 1 kΩ, it is cheap, but the settling time is too slow. Section 4 (B) is to separate the DC measuring device 15Nch (channel>), and add Nch to the current. The pressure measurement mode is bound at the same time, and the MN pin is replaced every time. The Landing time is 1 / N compared to the 4th (A), but the Nch DC Landing device 15j (j = 1 ~ N) is required. Figure 4 (C) is a DC measuring device 15i with a full output pin OUTi (i = 1 ~ B) of DUT10. The test is performed. Therefore, the measurement time becomes very high, but since the DC measurement device 15 has all output pins OUT i divided, the price becomes Chang Penggui. The 4th (D) is the full output pin OUTi of DDT10 (i = 1 to 〇〇, respectively connected with M to prepare the programmable load PL20i. Moreover, each of the DUT10's nylon pin is connected to the high-speed scanner Each of the input terminals of 16. Carry out the PL20i on the powered roller system outside DUT10, and the voltage measurement is carried out by using a high-speed scanner 16, using a single measuring device 17. The voltage setting device 17 is used to prevent current flow. A high-speed scanner can be used. This method can be tested at a higher speed and is cheaper. The programmable load PL20 is shown in Fig. 5, which is composed of a 2-pole electric circuit source of ILL and ILH, and a voltage source of VT. Because there is a two-pole crocodile bridge connected to one end of the DUT10, the corner pressure system is connected to this paper. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) --------- ^ ------, order ------ i (please read the notes on the back of the first page before filling in this page) A7 printed by the consumer cooperation of the Central Standards Bureau of the Ministry of Economic Affairs ^ __ ^ _B7 · _ i 'Description of the invention (3) The voltage at the other end b of the VT is equal. Therefore, by changing the voltage K of the variable threshold voltage source VT, the voltage at the terminal a of the DUT 10L can be made variable. Set the DUT10's round-off level, if it is Η (high) level V0H, and L (low> level V0L *) set the voltage value of VT at its middle value, that is, VT = (V0H + V0L> / 2 , When the output level of 01 ^ 10 is at the H level, the load electric roller ILH is rolled out to the PL20 by the wheel-out pin. On the contrary, the load current ILL is supplied by the PL20 when the wheel-out level is at L Xiaoping Roll in to DUT10. The load currents ILH and ILL are the values in the specification chart, and roll through the fixed load to roll ILH or ILL. The conventional way of driving the output resistance of 1C is as described above, from 4A Up to 4D. The output resistance can be measured by any support method, and its value varies according to the type of DUT, but it ranges from 300Ω to several KΩ, generally around hundreds of Ω. However, each measurement method Although the measured value is reproducible, if the method is changed, most of its fixed value will be different. The measuring method * is to determine the fixed voltage by all the wheels OUT i_ out, and use the open switch to measure, or At the same time, it is determined. The difference of the measured values produced by the method of measuring the resistance value in turn is ± 100 Ω. This is because it is necessary to add the support method in the round of the resistance value, which is inconvenient and is an incorrect measured value. The reason is due to the type or design of DUT10, but each _sells the Xiaoyuan and _resistance It is not independent, it is known that there are two interconnections in the E section of the tilting section of the _ out of the department, and they interfere with each other. The purpose of the S here is not only due to the interference of the electromagnetic induction caused by the sensation or enchantment. Most of them are the interference caused by the consideration of the resistance circuit, etc. In addition, the above paper standard is applicable to the Chinese National Standard (CNS) A4 specification (210X297mm) ------- --------- 、 玎 ------ 0 (Please read the precautions on the back before filling in this page) 6 ___87 · · _ ____87 · · _ The Ministry of Economic Affairs Central Bureau of Samples and Consumers Cooperative Printed A7 5. Description of the invention (4) Measurement method, the method in Figure 4A has no interference between the pins, and it is known that it can be measured accurately. Therefore, the measurement method from Figure 4B to 4D must be added to the measured value Correction value. The present invention is to review the conventional measurement method and provide a wheel resistance measuring device that drives 1C. Obtain the same value as the measurement result in Figure 4A. The method of improving the fourth 4D pressure so that there is no interference between the wheel and the pin can be constructed with high accuracy, high speed and low cost. In addition, it provides a wheel drive resistance that drives 1C In order to obtain the same value as the conclusive result of circle 4A, the measurement method was improved by K, so that there is no interference between _ sales, which can constitute high box accuracy, off speed and relatively cheap. The present invention is a review of the conventional method The circuit method of Figure 4D, after repeated experiments, uses a high-speed scanner and uses a single pressure measuring device, which can be measured with higher accuracy and higher speed. In addition, to provide a drive 1 (: _ out of «resistance measurement method, is an improved measurement method, so that there is no interference between the export of nylon fiber, can form a high accuracy * high speed. First, for the drive 1C 粬 出« blocker , To explain. In this circuit mode, the M voltage source of the programmable load PL is set to 2 systems to eliminate the current interference inside the DUT. The 1 system of the Fujian Electric Power VT1 is higher than the output voltage of the DUT by a fixed voltage On the other hand, the VT2 of the system is lower than the fixed pressure. On the other hand, the VT1 and VT22 «Situ system PLM alternate mode, or every 2 艟, or every 3 㑩 configuration is set in the output pin of the DUT, PL will Xiao Flow into or forced into the DUT to eliminate current interference inside the DUT. The circuit structure inside the DUT is based on the type, or according to the paper standard of the manufacturing company. China National Standard (CNS) A4 wash (210X297 mm) I Pack IIIII Order ^ (Please read the notes on the back before filling this page) 7

經濟部中央標準局員工消費合作社印製 i'發明説明(5) 設計而不同。有使DUT内部之電壓源舆_出銷對應成1對 1,使鑰出電阻成為固定之情形,但大部份係將輓出銷分 割成幾値匾段,在1匾段,將1值電歷源的電壓分壓,並 對應於後數之_出銷。電路方式係各式各樣。因此,即使 有任何之電路方式但求出具有再現性之測定值,係採取DUT 内部之霣滾平衡邸可。 因此,在繪出電阻之測定中,由DUT輪出固定之霣滾 ,又給舆同量之電滾,則在DUT内部之電滾分布不會產生 干攫,可知可正確拥定_出霣阻。同時,在每1S段有同 置之電流出入為較佳。於此,依DUT之輪出銷的配列順序 ,交替進行出入,或每2銷進行,或每複數銷進行也可, 但由於1匾段之幢出銷數不明確,所以每1銷交替進行爲 較佳。 第1發明,其構成係由:高速掃描器式,具有對應於The i'invention description printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (5) varies in design. There are cases where the voltage source and output pin inside the DUT correspond to a one-to-one, so that the key output resistance becomes fixed, but most of them divide the pull-out pin into several plaque segments. In the 1 plaque segment, the 1 value The voltage of the electronic calendar source is divided and corresponds to the _sales in the following figures. The circuit method is various. Therefore, even if there is any circuit method, the reproducible measurement value can be obtained by using the rolling balance inside the DUT. Therefore, in the measurement of the plotted resistance, the DUT rolls out the fixed rollers and gives the same amount of electric rollers, then the distribution of the electric rollers inside the DUT will not cause dryness, and it can be known that it can be correctly embraced _ 出 霣Hinder. At the same time, it is better to have the same current in and out every 1S segment. Here, according to the arrangement order of the DUT's round sales, alternate entry and exit, or every 2 sales, or every plural sales are possible, but because the number of sales in a plaque segment is not clear, so every 1 sales Is better. The first invention is constituted by a high-speed scanner type, which has a corresponding

I DUT之各輪出銷OUTi(i= 1〜〇〇之_入端子;1B壓測定器, 用以順序測定該高速挿描器之各輸入端子的《壓·*及,2 条統之程式負載PL群,係分別設置於上述DUT之各蠄出銷 OUT i舆上述高速捕描器之各_入端子。 所諝該2糸統之程式負載PL群,係指》電壓羝之霣壓 可設定比DUT之輸出霣壓更高固定霄壓VT1群及更低固定《 IS VT2群之2糸統的程式炱載PL群。而且,由高的固定霣 麽VT1群,将固定負荷《滾由PL流入DUT。又低的固定電壓 VT2群,由DUT_入固定負荷«流。DUT所流出之負荷霄滾 與輪入之負荷霣溁相等時,則在DUT内部係取得霄流之平 本纸張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 裝 訂 線 (請先閱讀背面之注意事項再填寫本頁) 8 經濟部中央標準局員工消f合作社印製 Α7 Β7 五、發明説明(6 ) 衡,成為無干擾。習知之PL的閩電壓源,僅能在DUT之Η電 平與L電平的中間設定Η電壓,所Μ僅能由全銷_入霣流 ,或輸出霣流,故會產生干擾。 第2發明,係由限定第1發明中之閾電壓源之配列的 PL群所構成,其係交替配列VT1及VT2。DUT之設計係如何 構成呢?分成幾傾區段呢? 一般係不得而知。於此,將VT1 及VT2每隔1傾交替配列之.構成,以取得DUT内部之電流平 衡,所Κ係最好的構成。 第3發明,係在DUT之目錄上,具有2種以上之不同 _出電胆之DUT的鑰出電阻之測定器。柑同霣位差,不同 霄阻值時,則流通於該電阻之電流值係與電阻值成反比變 化,為眾所周知。因此,在具有不同输出霣阻之輪出段之 DUT的澜定,PL之定電滾源也需要具有2条统Μ上之定霣 流源。 其次,對於驅動1C之输出霣阻澜定方法加Μ說明。 首先,將》«壓比DUT之輪出霣匯更高的固定電壓VT1 ,設定於程式負載用,又將更低的固定霣壓VT2設定於程 式負載用。 接著,在注目銷連接VT1之PL。而且,在其他銷任意 連接VT2及VT1。但,VT1群之總數,與VT2群之總數一致。 在該狀態下,拥定注目銷之粬出《阻。 同樣,在注目銷連接VT2之PL。而且,在其他銷任意 —接VT1及VT2。但,VT2群之總數,與VT1群之總數一致。 在該狀態下,澜定注目銷之幘出霣阻° 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) I--------裝------訂------線 (請先閱讀背面之注意事項再填寫本頁) 9 315417 經濟部中央標準局員工消費合作社印製 Α7 Β7 五、發明説明(7) 其次*將注目銷分配變更於其他銷,澜定上述之各步 驟。將此重複,Μ拥定全注目銷之輪出電阻。 如此,藉由測定驅動1C之_出電狙,在DUT10中,使 输入固定負荷霣滾及输出固定灸荷電滾為同量,所以在 DUT10内部中,可取得電流平衡,而無干擾,輪出霄阻值 邸可高精確度,良好再現性,高速測定。 又*不使用PL,使用内藏定電流源之DC測定裝置,Μ 同樣之步驟,亦可進行拥定。 〔圖式之簡單說明〕 第1圖係本發明之一實施例的構成圏。 第2圖係本發明之其他實施例的構成画。 第3圜係為了說明DUT之一例的DUT10外觀圓。 第4Α到4D團係為了測定習知之DUT10的輸出電阻之構 成圏。 第5圏係PL20之一例構成園。 第6圄係顯示藉由本發明拥定方法之一實施例滾程圍 Ο 第係顯示藉由本發明其他澜定方法之一實施例流 程圔。 〔發明之實施形態〕 第1圔係顯示本發明之一實施例構成圖,第2圚係顯 示其他實施例構成圈。與第4、 5圖對應之部分係附與同一 符號。 關於第1園加以說明。DUT10之輪出段係由霣歷源111 本紙張尺度適用中國國家標準(CNS ) Α4規格(210X297公釐) ----------裝-- (請先閱请背*-之注意事項再填寫本頁) 訂 -10 - 經濟部中央標準局員工消費合作社印製 A7 ___B7 . _ 五、發明説明(8 ) (i=l〜>0通遇蠄出電阻12i,連接於輪出銷。各輸出銷係 分別與高速掃描器16之輪入端子連接,Μ高速掃描器16掃 描各翰入端子之霣壓,将該霣壓值使用電壓測定器17依順 序讀入。 複數之可程式負載20i,係在DUT10之繪出銷與高速掃 描器16之輸入端子間,分別設置連接。可程式負載20之構 成係如前逑第5圖所示。而且閲«壓源VT係具有VT1群及 VT2群,第1圖中係使VT1及VT2對DUT10之輸出銷的配列, 成交替設置。因此,由VT1之PL20向DUT10流出固定負荷電 流,並向VT2之PL20流入固定炱荷電流。 在DUT10中,若吸入固定炱荷電溁與吐出固定負荷電 流為同量時,則在DUT10内部中,可取得霣滾平衡,而無 干擾,輓出霄阻值可高精確度,再現性良好,高速拥定。 第2圖係顯示在目錄上具有2種Μ上不同蠄出《阻之 DUT10的測定構成圖。第1圖不同點,係可程式負載PL20 之定霣滾源係2条统。亦即包含,具有ILL1及ILH1之組的 定霣流源PL20 ;及具有ILL2及ILH2之组的定«滾源PL20, DUT10之輸出電阻即使不同,也可適切供應固定負荷霄滾 之構造所構成。 第6圔係顯示依據本發明澜定方法之一實施例之滾程 園。 首先*將閾霄壓比DUT之輸出霣壓更髙的固定電壓VT1 設定於程式炱載用(步驟101)。 其次,將閩電壓比DUT之輪出電壓更低的固定電®VT2 本紙張尺度適用中國國家標準(CNS ) Α4規格(210X 297公釐) 11 裝 I 訂—— I I I 線 (請先閱讀背裔之注意事項再填寫本頁) 11 A7 B7 五、發明説明(9 ) 設定於程式負載用(步驟102)。 接著,在注目銷連接VT1之PL。而且,在其他銷任意 連接VT2及VT1。但,使VT1群之總數,與VT2群之總數一致 。在該狀態下,測定注目銷之輪出霄阻(步驟1〇3)。 其次,在注目銷連接VT2之PL。而且,在其他銷任意 逋接VT1及VT2。但,使VT2群之结數,與VT1群之總數一致 。在該狀態下,測定注目銷之鑰出電阻(步驟104)。 接著*將注目銷分配變更於其他銷,拥定上述步思103 〜104。将此重複,對於全注目銷進行輸出霣阻之澜定( 步驟105)。 如此,藉由澜定驅動1C之輸出電阻,在DUT10中,因 餘入固定負荷霣流與_出固定爽荷電滾為同量*所Μ在 DUT10内部中,可取得霣流平衡,而無干擾,幢出電胆值 可高精確度,再現性良好,高速測定。 第7圖係顯示依據本發明拥I定方法另一實施例之滾程 圖。 經濟部中央標準局負工消费合作社印裝 (請先聞諫背面之注意事項再填寫本頁) 在本實施例中,係使用内藏定霣流源之DC測定裝置之 測定情形。卽,顯示對臞於第4(B)及(C)画的硬體構成, 而測定之情形。 首先,將閩電壓比DUT之輪出霣思更高的固定電壓VT1 設定於DC拥定裝置(步«201)。 其次,將囲霣思比DUT之輸出電壓更低的固定電壓VT2 設定於DC澜定装置(步鼸202)。 接著,在注目銷連接VT1。而且,在其他銷任意連接 本纸張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 12 A7 B7 五、發明説明(10 ) VT2及VT1。但,使VT1群之總數,與VT2群之總數一致。在 該狀態下,測定注目銷之繪出霣阻(步驟2〇3) ° 其次,在注目銷連接VT2。而且,在其他銷任意連接 VT1及VT2。但,使VT2群之總數,與VT1群之總數一致。在 該狀態下,測定注目銷之輸出電阻(步驟204) ° 接著,將注目銷分配變更於其他銷,用Μ拥定上述步 驟203-204。将此重複,對於全注目銷進行轅出«咀之测 定(步驟205)。 如此,藉由澜定驅動1(:之_出電阻,在DUT10中,使 鍮入固定負荷霣滾與蝓出固定負荷電流為同量,所以在 DUT10内部中*可取得電流平衡,而無干擾,_出電阻值 可离精度,再現性良好,高速測定。 如Κ上詳細說明,本發明,係如LCD驅動1C或哦射印 表機轚動1C具有多數銷之驅動1C的輸出電阻之拥定器中, 可構成高精確度,再現性良好*較高速,較廉價。 因此,測試成本也可廉價,而且在輪出銷數愈來愈多 之現狀中,其利用價值高,技術性的效果增大。 I I n I I 11 n Ί· n —訂— I I I I 線 (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 本纸張尺度適用中國國家標準(CNS ) A4規格(210X 297公釐) 13 13 - 經濟部中央標準局員工消費合作社印製 ^15417 A7 B7 五、發明説明(11 ) 元件檷號對照 10—— 驅動IC lli… 電壓源 12i… 輸出電阻 15 ____ DC測定裝置 16 ____ 高速掃描器 17 ---- 電壓測定器 20i ... 可程式負載PL IL…· 輸出電流 R 〇 .... 輪出電阻 VDD·..· 電源端子 V〇 .... 輪出電S ▽Μ · · _ _ 電壓值 VT ____ 閟電壓源 裝I 訂 線 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準(CNS ) A4規格(210X 297公釐) 14Each round of I DUT output pin OUTi (i = 1 ~ 〇〇_ input terminal; 1B pressure tester, used to sequentially measure the high-speed interpolator input terminal "pressure · * and, 2 general program The load PL group is set at the OUT pin of the DUT and the input terminal of the high-speed tracer. The load PL group of the program of the 2 systems refers to the voltage of the voltage. Set a higher fixed pressure than the DUT output pressure VT1 group and a lower fixed "IS VT2 group 2 system program load PL group. Moreover, the high fixed VT1 group, the fixed load" roll off PL flows into the DUT. The low fixed voltage VT2 group flows from the DUT_ into the fixed load. When the load rolling out of the DUT is equal to the load of the wheel, the plain paper is obtained inside the DUT The Zhang scale is applicable to the Chinese National Standard (CNS) A4 specification (210X297mm) binding line (please read the precautions on the back before filling in this page) 8 A7 Β7 printed by the employees ’cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Invention description ( 6) Balanced, no interference. The conventional PL Min voltage source can only be at the H level and L level of the DUT In the middle of the setting of the Η voltage, the Μ can only be made by the full pin_inbound flow, or the output flow, so interference will occur. The second invention is composed of the PL group that defines the arrangement of the threshold voltage source in the first invention VT1 and VT2 are alternately arranged. How is the design of the DUT structured? Divided into several tilted sections? It is generally unknown. Here, VT1 and VT2 are alternately arranged every 1 tilt to form the DUT The internal current balance is the best configuration of K. The third invention is in the DUT catalog, which has more than two different types of measuring devices. When the resistance value is different, the current value flowing through the resistance changes in inverse proportion to the resistance value, which is well known. Therefore, in the DUT of the round out section of the wheel with different output resistance, the fixed electric rolling source of PL also It is necessary to have two fixed current sources on the system M. Secondly, add a description to the method of driving the output resistance of the 1C. First, set the fixed voltage VT1 with a higher voltage than the wheel of DUT. For program load, set lower fixed pressure VT2 for program load Next, the PL of VT1 is connected to the attention pin. Furthermore, VT2 and VT1 are arbitrarily connected to other pins. However, the total number of the VT1 group is the same as the total number of the VT2 group. In this state, it is difficult to support the attention pin. Similarly, the PL of VT2 is connected to the attention pin. Moreover, the VT1 and VT2 are connected to other pins at random. However, the total number of VT2 groups is consistent with the total number of VT1 groups. In this state, Landing's attention pin is out of the way. ° The paper size is applicable to China National Standard (CNS) A4 specification (210X297mm) I -------- install ------ order ------ line (please read the notes on the back first (Fill in this page again) 9 315417 Printed Α7 Β7 by the Employee Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. V. Description of Invention (7) Secondly, change the distribution of attention pins to other pins, and set the above steps. Repeating this, MU holds the all-round pin-out resistance. In this way, by measuring the driving output of 1C, in the DUT10, the input fixed load rolling and the output fixed moxibustion charging roll are the same amount, so in the DUT10, the current balance can be achieved without interference, and the wheel out The resistance value can be measured with high accuracy, good reproducibility and high speed. Also * Without using PL, a DC measuring device with a constant current source built in, Μ The same procedure can also be used to support. [Brief Description of Drawings] FIG. 1 is a configuration diagram of an embodiment of the present invention. Fig. 2 is a configuration drawing of another embodiment of the present invention. The third circle is the circular appearance of the DUT 10 in order to explain an example of the DUT. The 4A to 4D groups are used to measure the configuration of the output resistance of the conventional DUT 10. An example of the 5th PL20 is PL20. The sixth frame shows the rolling process by one embodiment of the support method of the present invention. The sixth frame shows the process flow by one embodiment of the other method of the invention. [Embodiment of the invention] The first circle shows a configuration diagram of an embodiment of the present invention, and the second circle shows a circle of other embodiments. The parts corresponding to Figures 4 and 5 are attached with the same symbol. The first garden will be explained. The round out section of DUT10 is composed of Yiliyuan 111. The paper size is in accordance with Chinese National Standard (CNS) Α4 specification (210X297mm) ---------- installed-- (please read first please back * -No. (Notes and then fill out this page) Order -10-A7 ___B7 printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs. _ 5. Description of the invention (8) (i = l ~> 0 Tongyu out resistance 12i, connected to the wheel Each output pin is connected to the in-cycle terminal of the high-speed scanner 16, and the high-speed scanner 16 scans the voltage of each input terminal, and the value of this voltage is read in order using the voltage measuring device 17. The programmable load 20i is connected between the drawing pin of the DUT 10 and the input terminal of the high-speed scanner 16. The composition of the programmable load 20 is as shown in Figure 5 above. VT1 group and VT2 group, in the first figure, VT1 and VT2 are arranged alternately to the output pins of DUT10. Therefore, a fixed load current flows from PL20 of VT1 to DUT10, and a fixed load current flows into PL20 of VT2 In DUT10, if the fixed fixed soot charge and discharge fixed load current are the same amount, then in D In the UT10, the balance of rolling can be achieved without interference, and the resistance value can be pulled out with high accuracy, good reproducibility, and high-speed support. Figure 2 shows that there are 2 different types of resistance on the catalog. The measurement configuration of DUT10. The difference in the first figure is that the program can load the PL20 fixed rolling source system. It includes the fixed flow source PL20 with the group of ILL1 and ILH1; and ILL2 and ILH2. Even if the output resistance of the rolling source PL20 and DUT10 is different, it can be adapted to supply the structure of rolling with fixed load. The sixth circle shows the rolling circle according to one embodiment of the Landing method of the present invention. First * Set the fixed voltage VT1 whose threshold voltage is higher than the output pressure of the DUT to the program load (step 101). Secondly, set the fixed voltage with a lower voltage than the DUT's wheeled voltage VT2 This paper size is applicable China National Standards (CNS) Α4 specification (210X 297mm) 11 Pack I set-III line (please read the precautions of the descendants before filling in this page) 11 A7 B7 5. Invention description (9) Set in the program load Use (step 102). Next, connect the P of VT1 to the attention pin L. In addition, VT2 and VT1 are arbitrarily connected to other pins. However, make the total number of VT1 groups consistent with the total number of VT2 groups. In this state, measure the round resistance of the attention pin (step 103). Second, Connect the PL of VT2 to the attention pin. Also, connect VT1 and VT2 to other pins arbitrarily. However, make the number of VT2 groups consistent with the total number of VT1 groups. In this state, measure the key out resistance of the attention pin (step 104). Then * change the distribution of the attention pin to other pins, and embrace the above steps 103 ~ 104. Repeating this, the output is fixed for the full attention pin (step 105). In this way, by driving the output resistance of 1C in Lan Ding, in DUT10, because the remaining fixed load current and the fixed cooling charge roll are the same amount * In the inside of DUT10, the current balance can be achieved without interference The value of the electric bile can be measured with high accuracy, good reproducibility and high speed. FIG. 7 is a rolling diagram of another embodiment of the method for determining the identity according to the present invention. Printed by the Consumer Labor Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (please listen to the precautions on the back and then fill out this page) In this embodiment, it is a measurement situation using a DC measurement device with a built-in fixed flow source. That is, it shows the situation of the hardware configuration determined in Sections 4 (B) and (C), and the measurement. First, set the fixed voltage VT1 with a higher voltage than the DUT ’s turn to the DC support device (step «201). Secondly, set the fixed voltage VT2, which is lower than the output voltage of the DUT, to the DC Landing device (Stepan 202). Next, connect VT1 to the attention pin. In addition, any other pin can be connected arbitrarily. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297mm) 12 A7 B7 5. Invention description (10) VT2 and VT1. However, make the total number of VT1 groups consistent with the total number of VT2 groups. In this state, measure the draw resistance of the attention pin (step 2〇3) ° Secondly, connect VT2 to the attention pin. Furthermore, VT1 and VT2 are arbitrarily connected to other pins. However, make the total number of VT2 groups consistent with the total number of VT1 groups. In this state, the output resistance of the attention pin is measured (step 204). Next, the distribution of the attention pin is changed to other pins, and the above steps 203-204 are determined by M. This is repeated, and the measurement of the full-out pin is performed for the full-attention pin (step 205). In this way, by Landing drive 1 (: the _ out resistance, in DUT10, the fixed load current into the fixed load and the fixed load current out of the shovel are the same amount, so the current balance in DUT10 * can be achieved without interference The output resistance value can be measured with high accuracy, good reproducibility, and high-speed measurement. As described in detail above, the present invention is based on the LCD driver 1C or the laser printer 1C, which has a majority of pin 1C output resistance. The stator can be constructed with high accuracy, good reproducibility * faster and cheaper. Therefore, the test cost can also be cheaper, and in the current situation where the number of round sales is increasing, its use value is high and technical The effect is increased. II n II 11 n Ί · n —Subscribe— IIII line (please read the precautions on the back before filling out this page) The paper standard printed by the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs is applicable to the Chinese National Standard (CNS ) A4 specification (210X 297 mm) 13 13-Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economy ^ 15417 A7 B7 V. Description of the invention (11) Comparison of component numbers 10-Driver IC lli… Voltage source 12i… Output resistance 15 ___ _ DC measuring device 16 ____ High-speed scanner 17 ---- Voltage measuring device 20i ... Programmable load PL IL ... · Output current R ○ ... Wheel resistance VDD · .. · Power supply terminal V〇 .. .. 電 出 电 S ▽ Μ · _ _ Voltage value VT ____ 鍟 Voltage source installation I binding line (please read the precautions on the back before filling in this page) This paper standard is applicable to China National Standard (CNS) A4 specification (210X 297 mm) 14

Claims (1)

經濟部中央榇準局貞工消費合作社印製 A8 Βδ C8 __ D8 · 六、申請專利範圍 1. 一棰驅動ic之鑰出霣阻拥定器,用以測定具有多數輸 出銷之驅動1C的DUT(10>之直滾特性的_出電阻澜定 器中,其特擞在於具備有: 高速掃描器<16>,具有分別連接於DUT(IO)之各 輸出銷OUTi之鑰入端子; 電壓測定器(17),用Μ依順序測定上述高速掃描 器(16>之各翰入端子的電壓;及 程式負載PL(20i>群,分別設置於上逑DUT<10)之 各蠄出銷OUTi與上述高速掃描器(16)之各蠄入端子之 間,可設定閟«壓比DUT( 10〉之蝻出電壓更高電壓固 定電壓之閎«壓源VT1群,及可設定更低電壓固定電 壓之閾霣壓源VT2群之2条统霣S。 2. 如申請專利範围第1項之驅動10之_出罨阻澜定器, 其中,該程式負載PL(20i>群,係懕源VT1及VT2 交替配列於DUT10之各_出銷OUTi的配列順序之2条 统之程式負載PL<20i)群者。 3. 如申請專利範圍第1項之轚動1C之输出霣阻澜定器, 其中,該程式負載PL(20i>群,係具有定電滾源ILL及 ILH輪出霣滾不同之2条統(ILL1、ILH1及ILL2、ILH2) 以上之定霣滾源的程式負載PL(20i〉群者。 4. -*棰驅動1C之输出電阻拥定方法,係用Μ拥定具有多 數粬出銷之驅動1C的DUT(10>之直滾特性,其特撤在 於: 首先,将囲霣麼比DUT之輪出霣壓更高VT1固定霣 本紙張尺度逋用中國國家標準(CNS ) A4規格(210X297公釐) 裝I I 訂 I I I線 (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局貞工消費合作社印製 A8 B8 C8 D8 六、申請專利範圍 壓,設定於程式負載用,(步驟101) 其次,將閾霣KlrbDUT之輸出電歷更低VT2固定電 壓,設定於程式歲載用,(步驟102) 接著,在注目銷連接VT1之PL,而在其他銷任意 連接VT2及VT4,但,使VT1群之總數,與VT2群之總數 一致,在該狀態下,測定注目銷之綸出電阻,(步驟 103) 其次,在注目銷連接VT2之PL,而在其他銷任意 連接VT1及VT2,但,使VT2群之總數,輿VT1群之總數 一致,在該狀態下,拥定注目銷之_出電阻,(步嫌 104) 接著,將注目銷分配變更於其他銷,用Μ測定上 述步18 (103-104〉*並將此重複》對於全注目銷進行 鑰出«阻之测定,(步«105) 依據上述之步驟*在DUT(10>中,在輸入固定負 荷霣滾與I»出固定負荷電滾在同量之狀態下,拥定驅 動1C之輸出«阻者。 5. —棰驅動1C之鑰出電阻測定方法,係用以拥定具有多 數WJ出銷之驅動1C的DUT(10)之直流特性,其持撤在 於: 首先,將Η霄壓比DUT之輸出轚壓更高VT1固定霣 壓設定於DC測定裝置,(步驟201> 其次,將Μ電壓比DUT之鍮出電壓更低VT2固定電 壓設定於DC測定裝置,(步驟202) 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) I 裝"一 II 訂 I 線 (請先閲請背面之注意事項再填寫本頁) 16 A8 B8 C8 D8 六、申請專利範圍 接著,在注目銷連接VT1,而在其他銷任意連接 VT2及VT1,但,使VT1群之總數,與VT2群之總數一致 ,在該狀態下,測定注目銷之輪出霣阻,(步嫌203) 其次,在注目銷連接VT2,而在其他銷任意連接 VT1及VT2,但,使VT2群之缠數,與VT1群之總數一致 ,在該狀態下,測定注目銷之輸出霄阻,(步驟204) 接著,將注目銷分配變更於其他銷*用Μ測定上 逑步驟(203-204),並將此重複,對於全注目銷進行 _出電阻之測定,(步篇205) 依據上述之步班,在DUT(10>中,在輪入固定負 荷電滾與輸出固定夷荷霣滾在同董之狀態下,拥定驅 動1C之输出電阻者。 II —裝I 訂 線 (請先閲讀背Φ-之注意事項再填寫本頁) 經濟部中央標準局男工消費合作社印製 本紙浪尺度適用中國國家標準(CNS ) A4規格(210X297公釐) -17 -Printed A8 Βδ C8 __ D8 by the Zhengong Consumer Cooperative of the Central Bureau of Economic Affairs of the Ministry of Economic Affairs. 6. Scope of patent application 1. One-key drive ic key-out blocker, used to measure the 1C DUT with most output pins (10> The straight-out characteristic of the _out resistance resistor is characterized in that it includes: a high-speed scanner < 16 > with a key input terminal connected to each output pin OUTi of the DUT (IO); voltage The measuring device (17) measures the voltage of each input terminal of the above high-speed scanner (16>) in sequence with M; and the program load PL (20i > group, which is installed on each output pin OUTi of DUT < 10) Between the input terminals of the above high-speed scanner (16), you can set the «voltage ratio DUT (10>) to the higher voltage of the worm out voltage fixed voltage« voltage source VT1 group, and can set the lower voltage fixed The threshold voltage of the voltage source VT2 group of two sets of S. 2. For example, in the patent application of the first item of the drive 10 of 10_ out of the resistance of the ballast, where the program load PL (20i> group, Department of 懕Sources VT1 and VT2 are alternately arranged in each of DUT10 _sales OUTi's arrangement sequence of 2 unified program loads PL & l t; 20i) group. 3. For example, if the output of the patent application is 1st, the output of the 1C is limited, where the program loads the PL (20i> group), which has a fixed electric rolling source ILL and ILH. The two different systems (ILL1, ILH1 and ILL2, ILH2) of the above-mentioned fixed roll-over source are the program load PL (20i> group). 4.-* The output resistance support method for driving 1C is driven by M. The DUT (10 >), which has the majority of the sales of 1C drive, has a special roll-off characteristic. The special withdrawal is: First, the pressure of the DUT is higher than that of the DUT. The VT1 fixed paper size adopts the Chinese national standard (CNS) A4 specification (210X297mm) Pack II and fix III line (please read the notes on the back before filling this page) A8 B8 C8 D8 printed by Zhengong Consumer Cooperative of Central Bureau of Standards of the Ministry of Economy Set to program load, (step 101) Secondly, set the output voltage of threshold KlrbDUT lower to VT2 fixed voltage, set to program load, (step 102) Next, connect PL of VT1 to the attention pin, and other Pin to connect VT2 and VT4 arbitrarily, but make the total number of VT1 group and the total number of VT2 group Consistently, in this state, measure the out resistance of the attention pin, (step 103) Secondly, connect the PL of VT2 to the attention pin, and connect VT1 and VT2 arbitrarily to other pins, but the total number of VT2 groups and the VT1 group The total number is the same, in this state, support the pin_out resistance, (step 104) Next, change the pin assignment to other pins, use M to measure the above step 18 (103-104> * and repeat this 》 Measure the key out «resistance for the full attention pin (step« 105) According to the above steps * In DUT (10>), the input fixed load rolling and I »output fixed load electric roll are in the same amount , Promise to drive the output of 1C «Resistance. 5. —The key-out resistance measurement method of 1C drive is used to support the DC characteristics of DUT (10) with the majority of WJ sales drive 1C. Its holdings are: First, compare the output of Η with the DUT The higher the pressure is, the fixed VT1 fixed pressure is set in the DC measuring device, (step 201> Secondly, the M voltage is lower than the output voltage of the DUT, and the VT2 fixed voltage is set in the DC measuring device, (step 202) This paper size is applicable to China Standard (CNS) A4 specification (210X297mm) I pack " one II order I line (please read the precautions on the back and then fill in this page) 16 A8 B8 C8 D8 6. Apply for patent scope Then, connect at the attention pin VT1, and VT2 and VT1 are arbitrarily connected to other pins, but the total number of VT1 groups is consistent with the total number of VT2 groups. In this state, the round out resistance of the attention pin is measured, (step 203) Second, in the attention The pin is connected to VT2, and VT1 and VT2 are arbitrarily connected to other pins, but the entanglement number of the VT2 group is consistent with the total number of the VT1 group. In this state, the output resistance of the attention pin is measured (step 204) Next, Attention pin allocation changed to other pins * measured with Μ Steps (203-204), and repeat this, the measurement of the resistance of the full attention pin (step 205) According to the above steps, in the DUT (10>, in the fixed load electric roller and The output is fixed and the load is rolling in the state of the same Dong, and the output resistance of the driver is 1C. II-Install the I line (please read the notes on the back Φ- and then fill out this page) male worker of the Central Standards Bureau of the Ministry of Economy The standard of the paper printed by the consumer cooperative applies the Chinese National Standard (CNS) A4 specification (210X297mm) -17-
TW085114963A 1996-01-22 1996-12-04 TW315417B (en)

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JP5046448B2 (en) * 2001-08-10 2012-10-10 株式会社アドバンテスト Semiconductor test apparatus and test method thereof
US6940301B2 (en) * 2003-12-12 2005-09-06 Au Optronics Corporation Test pad array for contact resistance measuring of ACF bonds on a liquid crystal display panel
JP2005265756A (en) * 2004-03-22 2005-09-29 Yokogawa Electric Corp Ic tester
JP4596264B2 (en) * 2005-10-11 2010-12-08 横河電機株式会社 IC tester
JP5028953B2 (en) * 2006-10-25 2012-09-19 横河電機株式会社 IC tester
JP6765125B2 (en) * 2017-09-27 2020-10-07 日本電産リード株式会社 Resistance measuring device, substrate inspection device, and resistance measuring method

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