JPH09180965A - Manufacture of electrode foil for aluminum electrolytic capacitor - Google Patents

Manufacture of electrode foil for aluminum electrolytic capacitor

Info

Publication number
JPH09180965A
JPH09180965A JP33649195A JP33649195A JPH09180965A JP H09180965 A JPH09180965 A JP H09180965A JP 33649195 A JP33649195 A JP 33649195A JP 33649195 A JP33649195 A JP 33649195A JP H09180965 A JPH09180965 A JP H09180965A
Authority
JP
Japan
Prior art keywords
etching
aqueous solution
foil
aluminum
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP33649195A
Other languages
Japanese (ja)
Other versions
JP3480164B2 (en
Inventor
Kazuaki Nakanishi
和明 中西
Takeshi Torii
健 鳥居
Masahiko Taihei
雅彦 太平
Koichi Kojima
浩一 小島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP33649195A priority Critical patent/JP3480164B2/en
Publication of JPH09180965A publication Critical patent/JPH09180965A/en
Application granted granted Critical
Publication of JP3480164B2 publication Critical patent/JP3480164B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To uniformly generate pits on aluminum material foil by impregnating the aluminum foil with aqueous solution which generates film on the aluminum foil surface prior to the pre-etching or in the middle of the pre-etching. SOLUTION: An aluminum material foil is impregnated with phosphoric aqueous solution with concentration of 0.2-10% for approximately one minute prior to pre-etching. Then, the aluminum material foil is impregnated with acid aqueous solution, direct current is applied and pre-etching is performed or in the middle of pre-etching, namely during the pre-etching, the aluminum material foil is impregnated with phosphoric aqueous solution with concentration of 0.2-10% approximately for one minute. Then, the pre-etching is performed again. Then, the aluminum material foil is impregnated with hydrochloric aqueous solution, direct current is applied and the latter etching, namely, the final etching, is performed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明はアルミ電解コンデン
サ用電極箔の製造方法に関するもので、特に中高圧用の
陽極アルミニウム箔のエッチング技術に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an electrode foil for an aluminum electrolytic capacitor, and more particularly to a technique for etching an anode aluminum foil for medium and high voltage.

【0002】[0002]

【従来の技術】近年、セットの小形化、高信頼性化に伴
い、アルミ電解コンデンサに対するユーザーからのニー
ズ(小形化、コストダウン)が急速に高まっているた
め、アルミ電解コンデンサ用電極箔(以下電極箔と称
す)も従来以上に単位面積当たりの静電容量を高める必
要が生じている。
2. Description of the Related Art In recent years, with the miniaturization and high reliability of sets, the need for aluminum electrolytic capacitors from users (miniaturization and cost reduction) has been rapidly increasing. Also referred to as electrode foil), it is necessary to increase the capacitance per unit area more than ever before.

【0003】以下に従来の電極箔の製造方法について説
明する。電極箔はアルミ電解コンデンサの小形化を図る
ために、アルミ箔を電気化学的、あるいは化学的にエッ
チングして有効表面積を拡大したものが使用されてい
る。この表面積の拡大のために種々のエッチング方法が
研究されているが、一般にアルミ箔を数種類の異なるエ
ッチング槽に連続的に挿入し、各エッチング槽内で電流
印加、あるいは科学溶解によってアルミ箔の表面積を徐
々に拡大し、そして最終洗浄を行うことにより製造され
ている。特に、微量の不純物や自然酸化皮膜、圧延傷等
で不均一になっているアルミ原箔表面からいかに効率よ
く均一にピットを生成させるかが、単位面積当たりの静
電容量を高くする重要なポイントとなる。従来において
は、アルミ原箔の圧延焼鈍段階で、鉄、シリコン、銅、
あるいはそれらの金属間化合物を表面に均一に分散させ
てエッチングの開始点を増やしてから、塩素イオンを含
む酸性水溶液中での電気エッチングによってピットを発
生させていた。
A conventional method for manufacturing an electrode foil will be described below. In order to reduce the size of the aluminum electrolytic capacitor, an electrode foil is used that has an effective surface area enlarged by electrochemically or chemically etching the aluminum foil. Various etching methods have been studied to expand this surface area.In general, aluminum foil is continuously inserted into several different etching tanks, and current is applied in each etching tank or the surface area of aluminum foil is changed by chemical dissolution. Is gradually expanded, and a final wash is performed. In particular, how to efficiently and evenly generate pits from the surface of the aluminum raw foil, which is uneven due to trace impurities, natural oxide film, rolling scratches, etc., is an important point to increase the capacitance per unit area. Becomes Conventionally, iron, silicon, copper,
Alternatively, these intermetallic compounds are uniformly dispersed on the surface to increase the starting point of etching, and then pits are generated by electroetching in an acidic aqueous solution containing chlorine ions.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、上記し
た従来の技術では、ピット発生工程においてアルミ原箔
に含まれる微量の不純物や自然酸化皮膜、圧延傷等の影
響を受けてしまうとともに、また、実際の電極箔製造工
程では、エッチングのピット発生工程の途中で電流の中
断が入ってしまい、その結果、アルミ原箔の表面から均
一にピットを発生させることは困難となっていた。
However, the above-mentioned conventional technique is affected by a slight amount of impurities contained in the aluminum original foil, a natural oxide film, rolling scratches, etc. in the pit generation process, and in addition, actually, In the electrode foil manufacturing process, the current was interrupted during the etching pit generation process, and as a result, it was difficult to uniformly generate pits from the surface of the aluminum original foil.

【0005】本発明は上記従来の問題点を解決するもの
で、単位面積当たりの静電容量の高い電極箔を製造する
ことができるアルミ電解コンデンサ用電極箔の製造方法
を提供することを目的とするものである。
The present invention solves the above-mentioned conventional problems, and an object of the present invention is to provide a method of manufacturing an electrode foil for an aluminum electrolytic capacitor, which can manufacture an electrode foil having a high capacitance per unit area. To do.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するため
に、本発明のアルミ電解コンデンサ用電極箔の製造方法
は、エッチング処理を前段、後段の少なくとも2段階に
分けて行うことにより製造するアルミ電解コンデンサ用
電極箔の製造方法において、前段のエッチングを行う
前、あるいは前段のエッチングの途中段階で、アルミ箔
表面に皮膜を生成させる水溶液中にアルミ箔を浸漬する
ようにしたもので、この製造方法によれば、単位面積当
たりの静電容量の高い電極箔を製造することができるも
のである。
In order to achieve the above object, the method for producing an electrode foil for an aluminum electrolytic capacitor according to the present invention is an aluminum foil produced by performing an etching treatment in at least two stages, a first stage and a second stage. In the method for manufacturing the electrode foil for electrolytic capacitors, the aluminum foil is immersed in an aqueous solution that forms a film on the surface of the aluminum foil before the etching in the previous step or in the middle of the etching in the previous step. According to the method, an electrode foil having a high capacitance per unit area can be manufactured.

【0007】[0007]

【発明の実施の形態】本発明の請求項1に記載の発明
は、エッチング処理を前段、後段の少なくとも2段階に
分けて行うことにより製造するアルミ電解コンデンサ用
電極箔の製造方法において、前段のエッチングを行う
前、あるいは前段のエッチングの途中段階で、アルミ箔
表面に皮膜を生成させる水溶液中にアルミ箔を浸漬する
ようにしたもので、前段のエッチングを行う前に、アル
ミ箔表面に皮膜を生成させる水溶液中にアルミ箔を浸漬
した場合は、アルミ箔表面に不均一に存在する不純物、
自然酸化皮膜を溶解除去して、さらに新たに均一な皮膜
を形成することができ、また前段のエッチングの途中段
階で、アルミ箔表面に皮膜を生成させる水溶液中にアル
ミ箔を浸漬した場合は、電流が中断されるまでのエッチ
ングで不均一になっていたアルミ箔表面の皮膜が、水溶
液への浸漬により再び均一に生成されることになって、
ピット発生起点が均一に分布するため、アルミ箔の表面
から均一に、かつ高密度にピットが生成されて、単位面
積当たりの静電容量の高い電極箔を得ることができるも
のである。
BEST MODE FOR CARRYING OUT THE INVENTION The invention according to claim 1 of the present invention is a method for producing an electrode foil for an aluminum electrolytic capacitor, which is produced by performing an etching treatment in at least two stages of a former stage and a latter stage. The aluminum foil is immersed in an aqueous solution that forms a film on the surface of the aluminum foil before etching or in the middle of the previous etching. When the aluminum foil is immersed in the aqueous solution to be generated, impurities present unevenly on the aluminum foil surface,
When the natural oxide film is dissolved and removed, a new uniform film can be formed, and when the aluminum foil is immersed in an aqueous solution that forms a film on the surface of the aluminum foil during the previous etching step, The film on the aluminum foil surface, which had been non-uniform due to etching until the current was interrupted, was to be uniformly generated again by immersion in an aqueous solution.
Since the starting points of the pits are uniformly distributed, pits are uniformly and densely formed on the surface of the aluminum foil, and an electrode foil having a high capacitance per unit area can be obtained.

【0008】請求項2に記載の発明は、アルミ箔表面に
皮膜を生成させる水溶液として、リンを含む酸、シュウ
酸のうちから選択された1種類の酸、それらの混酸、あ
るいはその塩を用いるようにしたものである。
According to the second aspect of the invention, as the aqueous solution for forming a film on the surface of the aluminum foil, one kind of acid selected from phosphorus-containing acid and oxalic acid, a mixed acid thereof, or a salt thereof is used. It was done like this.

【0009】請求項3に記載の発明は、アルミ箔表面に
皮膜を生成させる水溶液の濃度を0.2〜10%の範囲
に設定したもので、濃度が0.2%より小さいと、浸漬
により生成された皮膜が均一とならず、一方、10%よ
り大きくなると、多量の酸により表面溶解が促進される
ため、均一な皮膜が生成されないものである。
According to the third aspect of the present invention, the concentration of the aqueous solution for forming a film on the surface of the aluminum foil is set within the range of 0.2 to 10%. The formed film is not uniform. On the other hand, when it exceeds 10%, a large amount of acid promotes surface dissolution, so that a uniform film is not formed.

【0010】以下、本発明の実施の形態について説明す
る。 (実施の形態1)純度99.98%、厚み100μmの
アルミ原箔を、前段のエッチングを行う前に、液温50
℃、濃度1%のリン酸水溶液に1分間浸漬する。この
後、液温85℃の酸性水溶液(塩酸濃度10%、硫酸濃
度10%)中に浸漬し、電流密度20A/dm2の直流
を200秒印加して前段のエッチングを行う。この後、
液温80℃、濃度5%の塩酸水溶液中に浸漬し、かつ電
流密度15A/dm2の直流を600秒印加して後段、
すなわち最終段のエッチングを行う。
Hereinafter, embodiments of the present invention will be described. (Embodiment 1) A raw aluminum foil having a purity of 99.98% and a thickness of 100 μm is heated to a liquid temperature of 50 before the etching of the former stage.
Immerse in a phosphoric acid aqueous solution having a concentration of 1% at a temperature of 1 minute. After that, the substrate is immersed in an acidic aqueous solution (hydrochloric acid concentration 10%, sulfuric acid concentration 10%) having a liquid temperature of 85 ° C., and a direct current having a current density of 20 A / dm 2 is applied for 200 seconds to perform the former etching. After this,
After immersing in a hydrochloric acid aqueous solution having a liquid temperature of 80 ° C. and a concentration of 5%, and applying a direct current having a current density of 15 A / dm 2 for 600 seconds, the latter stage,
That is, the final stage etching is performed.

【0011】(実施の形態2)実施の形態1と同一のア
ルミ原箔で同一のエッチングを行うが、この実施の形態
2では、前段のエッチングの途中段階、すなわち前段の
エッチングが100秒経過したところで、実施の形態1
と同一のリン酸水溶液に1分間浸漬する。その後、前段
のエッチングを再び100秒行う。
(Embodiment 2) The same aluminum original foil as in Embodiment 1 is used for the same etching. In Embodiment 2, however, 100 seconds have elapsed in the middle stage of the pre-stage etching, that is, the pre-stage etching. By the way, Embodiment 1
Immerse in the same phosphoric acid aqueous solution for 1 minute. Then, the etching of the former stage is performed again for 100 seconds.

【0012】(実施の形態3)実施の形態1と同一のア
ルミ原箔を用いるが、この実施の形態3では、前段のエ
ッチングを2種類のエッチング液で行う。まず、1回目
の前段のエッチングは、液温85℃の酸性水溶液(塩酸
濃度10%、硫酸濃度10%)中に浸漬し、電流密度2
0A/dm2の直流を100秒印加して、その後、液温
50℃、濃度1%のリン酸水溶液に1分間浸漬して行
い、次に、2回目の前段のエッチングを行う。この2回
目の前段のエッチングは、液温85℃の中性塩の水溶液
(塩化ナトリウム濃度5%)中に浸漬し、電流密度20
A/dm2の直流を100秒印加する。そして最後に実
施の形態1と同一の後段のエッチングを行う。
(Embodiment 3) Although the same aluminum original foil as in Embodiment 1 is used, in this Embodiment 3, the etching of the former stage is performed with two kinds of etching solutions. First, the first-stage etching is performed by immersing in an acidic aqueous solution (hydrochloric acid concentration 10%, sulfuric acid concentration 10%) at a liquid temperature of 85 ° C.
A direct current of 0 A / dm 2 is applied for 100 seconds, and thereafter, it is immersed in a phosphoric acid aqueous solution having a liquid temperature of 50 ° C. and a concentration of 1% for 1 minute, and then the second-stage etching of the previous stage is performed. This second etching in the previous stage was performed by immersing in an aqueous solution of a neutral salt (sodium chloride concentration 5%) at a liquid temperature of 85 ° C. to obtain a current density of 20.
A direct current of A / dm 2 is applied for 100 seconds. Finally, the same post-stage etching as in Embodiment 1 is performed.

【0013】(比較例)上記した本発明の実施の形態1
〜3と同一のアルミ原箔で同一のエッチングを行うが、
前段のエッチングを行う前、あるいは前段のエッチング
の途中段階で、リン酸水溶液の浸漬は行わない。
(Comparative Example) The first embodiment of the present invention described above.
The same etching is performed with the same aluminum raw foil as ~ 3,
Immersion of the phosphoric acid aqueous solution is not performed before the first-stage etching or in the middle of the first-stage etching.

【0014】上記した比較例および本発明の実施の形態
1〜3におけるエッチング箔を濃度10%、液温50℃
の硝酸水溶液中で1分間洗浄した後、濃度8%、液温9
0℃の硼酸水溶液中で500V化成を行い、それらの各
試料について静電容量と折り曲げ強度(1.0mmR、5
0g荷重、折り曲げ角90度の条件下1往復で1回とす
る)を測定した結果を(表1)に示す。
The etching foils in the above-mentioned comparative example and the first to third embodiments of the present invention were formed with a concentration of 10% and a liquid temperature of 50 ° C.
After washing for 1 minute in a nitric acid aqueous solution, the concentration is 8% and the temperature is 9
A 500 V chemical conversion was performed in a 0 ° C. boric acid aqueous solution, and the capacitance and bending strength (1.0 mmR, 5
(Table 1) shows the results of measurement of one reciprocation under a condition of 0 g load and a bending angle of 90 degrees.

【0015】[0015]

【表1】 [Table 1]

【0016】この(表1)では、比較例の電極箔特性
と、アルミ箔表面に皮膜を生成する水溶液(リン酸)に
浸漬した実施の形態1〜3の電極箔特性を示している
が、この(表1)から明らかなように、水溶液に浸漬す
ると、アルミ原箔表面のピットが均一に、かつ高密度に
発生することになるため、単位面積当たりの静電容量ア
ップを図ることができるものである。
This Table 1 shows the characteristics of the electrode foil of the comparative example and the characteristics of the electrode foils of the first to third embodiments immersed in an aqueous solution (phosphoric acid) which forms a film on the surface of the aluminum foil. As is clear from this (Table 1), when immersed in an aqueous solution, pits on the surface of the aluminum raw foil are generated uniformly and with high density, so that the capacitance per unit area can be increased. It is a thing.

【0017】上記した本発明の実施の形態1〜3では、
水溶液であるリン酸の濃度を1%としているが、浸漬に
用いる酸、あるいはその塩の濃度は約0.2〜10%の
範囲が好ましい。すなわち、濃度が0.2%より小さい
と浸漬により生成された皮膜が均一とならず、一方、1
0%よりも大きくなると、多量の酸により表面溶解が促
進されて均一な皮膜が生成されず、その結果、静電容量
アップの効果が得られないからである。
In the first to third embodiments of the present invention described above,
The concentration of phosphoric acid, which is an aqueous solution, is 1%, but the concentration of the acid or its salt used for immersion is preferably in the range of about 0.2 to 10%. That is, if the concentration is less than 0.2%, the film formed by dipping will not be uniform, while
When it is more than 0%, a large amount of acid promotes surface dissolution and a uniform film is not formed, and as a result, the effect of increasing the capacitance cannot be obtained.

【0018】以上のように、前段のエッチングを行う
前、あるいは前段のエッチングの途中段階で、アルミ箔
表面に皮膜を生成させる水溶液中にアルミ箔を浸漬する
ことにより、従来法(比較例)に比べて静電容量が最大
で約15%アップした。
As described above, by dipping the aluminum foil in an aqueous solution for forming a film on the surface of the aluminum foil before the etching of the former stage or in the middle of the etching of the former stage, the conventional method (comparative example) is obtained. Compared with this, the maximum capacitance was increased by about 15%.

【0019】なお、上記本発明の実施の形態では、前段
のエッチングの前、あるいはエッチングの途中段階で水
溶液に1回だけ浸漬する場合を示したが、エッチングの
前および途中段階と、何段階に浸漬してエッチングして
もよく、さらにエッチング液がエッチングの段階で変わ
る場合においても、それぞれのエッチング前に浸漬する
ことにより、上記の実施の形態と同様の効果が得られる
ものである。
In the above-described embodiment of the present invention, the case where the substrate is immersed only once in the aqueous solution before the etching in the former stage or in the middle of the etching is shown. It may be immersed for etching, and even when the etching solution changes at the etching stage, the same effect as that of the above-described embodiment can be obtained by immersing before etching.

【0020】[0020]

【発明の効果】以上のように本発明のアルミ電解コンデ
ンサ用電極箔の製造方法によれば、前段のエッチングを
行う前、あるいは前段のエッチングの途中段階で、アル
ミ箔表面に皮膜を生成させる水溶液中にアルミ箔を浸漬
するようにしたもので、前段のエッチングを行う前に、
アルミ箔表面に皮膜を生成させる水溶液中にアルミ箔を
浸漬した場合は、アルミ箔表面に不均一に存在する不純
物、自然酸化皮膜を溶解除去してさらに新たに均一な皮
膜を形成することができ、また前段のエッチングの途中
段階で、アルミ箔表面に皮膜を生成させる水溶液中にア
ルミ箔を浸漬した場合は、電流が中断されるまでのエッ
チングで不均一になっていたアルミ箔表面の皮膜が、水
溶液への浸漬により再び均一に生成されることになっ
て、ピット発生起点が均一に分布するため、アルミ箔の
表面から均一に、かつ高密度にピットが生成され、これ
により、電流箔の表面積が拡大されてその静電容量アッ
プを図ることができるものである。また、この静電容量
アップはアルミ電解コンデンサの小形化、コストダウン
に寄与し得るものである。
As described above, according to the method for manufacturing an electrode foil for an aluminum electrolytic capacitor of the present invention, an aqueous solution for forming a film on the surface of the aluminum foil before the etching of the first stage or in the middle of the etching of the first stage. The aluminum foil is soaked in it.Before the etching of the previous stage,
When the aluminum foil is immersed in an aqueous solution that forms a film on the surface of the aluminum foil, impurities and non-uniform oxides that exist unevenly on the surface of the aluminum foil can be dissolved and removed to form a new uniform film. If the aluminum foil is immersed in an aqueous solution that forms a film on the surface of the aluminum foil during the previous etching process, the film on the surface of the aluminum foil that was not uniform due to etching until the current was interrupted. Since the pits will be uniformly generated again by immersion in the aqueous solution, the pit generation starting points will be evenly distributed, so pits will be generated uniformly and at high density from the surface of the aluminum foil. The surface area is enlarged and the electrostatic capacity can be increased. Further, this increase in capacitance can contribute to downsizing of the aluminum electrolytic capacitor and cost reduction.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 小島 浩一 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Koichi Kojima 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 エッチング処理を前段、後段の少なくと
も2段階に分けて行うことにより製造するアルミ電解コ
ンデンサ用電極箔の製造方法において、前段のエッチン
グを行う前、あるいは前段のエッチングの途中段階で、
アルミ箔表面に皮膜を生成させる水溶液中にアルミ箔を
浸漬することを特徴とするアルミ電解コンデンサ用電極
箔の製造方法。
1. A method of manufacturing an electrode foil for an aluminum electrolytic capacitor, which is manufactured by performing an etching treatment in at least two stages, a first stage and a second stage, in a stage before the first stage etching or in the middle stage of the first stage etching.
A method for producing an electrode foil for an aluminum electrolytic capacitor, which comprises immersing the aluminum foil in an aqueous solution for forming a film on the surface of the aluminum foil.
【請求項2】 アルミ箔表面に皮膜を生成させる水溶液
がリンを含む酸、シュウ酸のうちから選択された1種類
の酸、それらの混酸、あるいはその塩である請求項1記
載のアルミ電解コンデンサ用電極箔の製造方法。
2. The aluminum electrolytic capacitor according to claim 1, wherein the aqueous solution for forming a film on the surface of the aluminum foil is one kind of acid selected from phosphorus-containing acids and oxalic acid, mixed acids thereof, or salts thereof. Of manufacturing electrode foil for automobile.
【請求項3】 アルミ箔表面に皮膜を生成させる水溶液
の濃度を0.2〜10%の範囲とした請求項1または請
求項2記載のアルミ電解コンデンサ用電極箔の製造方
法。
3. The method for producing an electrode foil for an aluminum electrolytic capacitor according to claim 1, wherein the concentration of the aqueous solution for forming a film on the surface of the aluminum foil is in the range of 0.2 to 10%.
JP33649195A 1995-12-25 1995-12-25 Manufacturing method of electrode foil for aluminum electrolytic capacitor Expired - Fee Related JP3480164B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33649195A JP3480164B2 (en) 1995-12-25 1995-12-25 Manufacturing method of electrode foil for aluminum electrolytic capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33649195A JP3480164B2 (en) 1995-12-25 1995-12-25 Manufacturing method of electrode foil for aluminum electrolytic capacitor

Publications (2)

Publication Number Publication Date
JPH09180965A true JPH09180965A (en) 1997-07-11
JP3480164B2 JP3480164B2 (en) 2003-12-15

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Link
JP (1) JP3480164B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100597759B1 (en) * 1998-04-16 2006-07-05 니혼 파커라이징 가부시키가이샤 Metal surface treatment method and metal parts having surface treated by such treatment
JP2007115949A (en) * 2005-10-21 2007-05-10 Nichicon Corp Method of manufacturing aluminum electrode foil for electrolytic capacitor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100597759B1 (en) * 1998-04-16 2006-07-05 니혼 파커라이징 가부시키가이샤 Metal surface treatment method and metal parts having surface treated by such treatment
JP2007115949A (en) * 2005-10-21 2007-05-10 Nichicon Corp Method of manufacturing aluminum electrode foil for electrolytic capacitor
JP4690171B2 (en) * 2005-10-21 2011-06-01 ニチコン株式会社 Method for producing aluminum electrode foil for electrolytic capacitor

Also Published As

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