JPH0917635A - Multilayer type electronic component and its manufacture - Google Patents

Multilayer type electronic component and its manufacture

Info

Publication number
JPH0917635A
JPH0917635A JP7162370A JP16237095A JPH0917635A JP H0917635 A JPH0917635 A JP H0917635A JP 7162370 A JP7162370 A JP 7162370A JP 16237095 A JP16237095 A JP 16237095A JP H0917635 A JPH0917635 A JP H0917635A
Authority
JP
Japan
Prior art keywords
holes
internal electrode
hole
electronic component
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7162370A
Other languages
Japanese (ja)
Inventor
Kazuyoshi Uchiyama
一義 内山
Masatoshi Arishiro
政利 有城
Masahiko Kawaguchi
正彦 川口
Shingo Okuyama
晋吾 奥山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP7162370A priority Critical patent/JPH0917635A/en
Publication of JPH0917635A publication Critical patent/JPH0917635A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a small-sized multilayer type electronic component wherein unacceptable form and lamination deviation are scarcely generated, the number of processes is little, and the term necessary for production is short. CONSTITUTION: Trenches for inner electrodes and holes for through holes are formed in insulating sheets 121 -12n , by using a means like laser working. Conductive paste is spread and buried in the trenches for inner electrodes and the holes for through holes by a printing means. The conductive paste buried in the trenches for inner electrodes is turned into inner electrodes 131 -13n . The conductive paste buried in the holes for through holes is turned into through holes 201 , 202 , 203 .... The insulating sheets 121 -12n in which the inner electrodes 131 -13n and the through holes 201 , 202 ... are formed are laminated and baked to be unified in a body.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、積層型電子部品、例え
ば積層型インダクタ等の積層型電子部品及びその製造方
法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated electronic component, for example, a laminated electronic component such as a laminated inductor and a method for manufacturing the same.

【0002】[0002]

【従来の技術】従来の積層型電子部品は、例えばインダ
クタを例にして説明すると、図5に示すように内部電極
52〜56をそれぞれ表面に設けた絶縁性シート51を
積み重ねて積層体を構成し、絶縁性シート51に設けた
スルーホール57a〜57dを介して内部電極52〜5
6を電気的に直列に接続することによってコイルを形成
するものであった。
2. Description of the Related Art A conventional laminated type electronic component will be explained, taking an inductor as an example. As shown in FIG. 5, an insulating sheet 51 having internal electrodes 52 to 56 on its surface is stacked to form a laminated body. The internal electrodes 52 to 5 through the through holes 57a to 57d provided in the insulating sheet 51.
The coil was formed by electrically connecting 6 in series.

【0003】あるいは、これとは別に、図6に示すよう
に、絶縁膜61の表面に内部電極71を形成した後(図
6(a)参照)、内部電極71の先端部71aを露出さ
せるようにして絶縁膜61上の左側略半分に絶縁膜62
を形成する(図6(b)参照)。次に、絶縁膜61上の
右側半分に内部電極72を形成した後(図6(c)参
照)、内部電極72の先端部72aを露出させるように
して絶縁膜61上の右側略半分に絶縁膜63を形成する
(図6(d)参照)。さらに、絶縁膜62,63の表面
に内部電極73を形成する(図6(e)参照)。以上の
ように、絶縁膜と内部電極を交互に形成することによっ
てコイルを形成するものであった。
Alternatively, as shown in FIG. 6, after forming the internal electrode 71 on the surface of the insulating film 61 (see FIG. 6A), the tip portion 71a of the internal electrode 71 is exposed. The insulating film 62 is formed on the left half of the insulating film 61.
Are formed (see FIG. 6B). Next, after the internal electrode 72 is formed on the right half of the insulating film 61 (see FIG. 6C), the tip 72a of the internal electrode 72 is exposed to insulate the approximately right half of the insulating film 61. The film 63 is formed (see FIG. 6D). Further, the internal electrodes 73 are formed on the surfaces of the insulating films 62 and 63 (see FIG. 6E). As described above, the coil is formed by alternately forming the insulating film and the internal electrode.

【0004】[0004]

【発明が解決しようとする課題】従来の技術で述べたも
ののうち前者においては、Q特性を確保するために、内
部電極52〜56の断面積を大きくして抵抗を小さくし
たい場合、内部電極52〜56の幅を大きくすると製品
サイズが大きくなるため、通常、内部電極52〜56の
厚みを厚くして断面積を大きくする。しかしながら、絶
縁性シート51の厚みに対して内部電極が厚くなってく
ると、内部電極52〜56が配設されている部分の積層
体の厚さと、内部電極52〜56が配設されていない部
分の積層体の厚さとが大きく異なるようになる。この結
果、製品形状が太鼓形になり、印刷回路基板に実装不可
能になるという問題点や、絶縁性シート51の積層ずれ
が発生し易くなり、コイルのインダクタンス値の狭偏差
化が困難になるという問題点を有していた。
In the former of those described in the prior art, in order to secure the Q characteristic, when it is desired to increase the cross-sectional area of the internal electrodes 52 to 56 to reduce the resistance, the internal electrode 52 is reduced. Since increasing the width of ~ 56 increases the product size, the internal electrodes 52 to 56 are usually made thicker to increase the cross-sectional area. However, when the internal electrodes become thicker than the thickness of the insulating sheet 51, the thickness of the laminated body in the portion where the internal electrodes 52 to 56 are provided and the internal electrodes 52 to 56 are not provided. The thickness of the laminated body of the portion is greatly different. As a result, the product shape becomes a drum shape and cannot be mounted on the printed circuit board, and the stacking of the insulating sheets 51 is likely to occur, making it difficult to narrow the inductance value of the coil. Had the problem.

【0005】また、後者においては、Q特性を確保する
ために内部電極71〜73の厚みを厚くしても製品形状
が太鼓形になる心配はないものの、絶縁膜61〜63と
内部電極71〜73をインダクタの右側又は左側半分に
交互に積層するため工程数が多く、又生産に要する期間
も長かった。さらに、絶縁膜61〜63と内部電極71
〜73は印刷で形成されるが、厚膜印刷に精度限界があ
るため、内部電極71〜73の細線化が難しく、製品サ
イズの小型化に対応できないという問題点を有してい
た。
In the latter case, although the thickness of the internal electrodes 71 to 73 is increased to secure the Q characteristic, the product shape does not become a drum shape, but the insulating films 61 to 63 and the internal electrodes 71 to 71. Since 73 is alternately laminated on the right or left half of the inductor, the number of steps is large, and the period required for production is long. Furthermore, the insulating films 61 to 63 and the internal electrode 71
Nos. 73 to 73 are formed by printing, but there is a problem that it is difficult to thin the internal electrodes 71 to 73 due to the accuracy limitation of thick film printing, and it is not possible to cope with the reduction in product size.

【0006】そこで、本発明の目的は、形状不良や積層
ずれが発生しにくく、しかも工程数が少なく生産に要す
る期間も短い小型の積層型電子部品及びその製造方法を
提供することにある。
Therefore, an object of the present invention is to provide a small-sized laminated electronic component which is less likely to cause shape defects and stacking misalignment, and has a small number of steps and a short production period, and a manufacturing method thereof.

【0007】[0007]

【課題を解決するための手段】以上の目的を達成するた
め、本発明に係る積層型電子部品は、導電材が充填され
ている内部電極用溝と、この内部電極用溝の底面に設け
られかつ導電材が充填されているスルーホール用孔とを
有した絶縁性シートを複数枚積層し、前記内部電極用溝
に充填されている導電材相互が前記スルーホール用孔に
充填されている導電材を介して電気的に接続されている
ことを特徴とする。
In order to achieve the above object, a laminated electronic component according to the present invention is provided with an internal electrode groove filled with a conductive material and a bottom surface of the internal electrode groove. And a plurality of insulating sheets having through-holes filled with a conductive material are stacked, and the conductive materials filled in the internal electrode grooves are filled with each other in the through-hole holes. It is characterized in that it is electrically connected through a material.

【0008】また、本発明に係る積層型電子部品の製造
方法は、(a)絶縁性シートに内部電極用溝を設けると
共に、この内部電極用溝の底面にスルーホール用孔を設
ける工程と、(b)前記内部電極用溝と前記スルーホー
ル用孔に導電材を充填する工程と、(c)前記絶縁性シ
ートを複数枚積み重ね、前記内部電極用溝に充填されて
いる導電材相互を前記スルーホール用孔に充填されてい
る導電材を介して電気的に接続する工程と、を備えてい
ることを特徴とする。
In the method of manufacturing a laminated electronic component according to the present invention, (a) a step of providing a groove for an internal electrode on the insulating sheet and a hole for a through hole on the bottom surface of the groove for an internal electrode, (B) filling the groove for internal electrode and the hole for through hole with a conductive material, and (c) stacking a plurality of the insulating sheets, and filling the conductive material in the groove for internal electrode with each other. And a step of electrically connecting via a conductive material filled in the through hole.

【0009】[0009]

【作用】絶縁性シートに設けた内部電極用溝に充填され
た導電材が内部電極とされ、内部電極用溝の底面に設け
たスルーホール用孔に充填された導電材がスルーホール
とされる。これら内部電極やスルーホールは絶縁性シー
ト内に設けられているため、絶縁性シートの表面は平坦
である。従って、絶縁性シートはその積層枚数が多くな
っても、均一な厚さに積み重ねられる。
The conductive material filled in the groove for the internal electrode provided on the insulating sheet is used as the internal electrode, and the conductive material filled in the hole for the through hole provided in the bottom surface of the groove for the internal electrode is used as the through hole. . Since these internal electrodes and through holes are provided in the insulating sheet, the surface of the insulating sheet is flat. Therefore, the insulating sheets can be stacked with a uniform thickness even if the number of laminated sheets is large.

【0010】[0010]

【実施例】以下、本発明に係る積層型電子部品及びその
製造方法の一実施例について添付図面を参照して説明す
る。図1(a)に示すように、ポリエチレンテレフタレ
ート等の樹脂フィルム1に裏打ちされた絶縁性シート2
を準備する。絶縁性シート2の材料としては、例えばフ
ェライト、誘電体、絶縁体等のセラミックが使用され
る。絶縁性シート2の厚みT1は、後述の内部電極の厚
みT2と隣接する内部電極間の絶縁に必要な厚みT3を
加えた寸法に設定する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a laminated electronic component and a manufacturing method thereof according to the present invention will be described below with reference to the accompanying drawings. As shown in FIG. 1 (a), an insulating sheet 2 lined with a resin film 1 such as polyethylene terephthalate.
Prepare As a material for the insulating sheet 2, for example, a ceramic such as ferrite, a dielectric, or an insulator is used. The thickness T1 of the insulating sheet 2 is set to a dimension including a thickness T2 of an internal electrode described later and a thickness T3 necessary for insulation between adjacent internal electrodes.

【0011】次に、図1(b)に示すように、絶縁性シ
ート2にレーザ加工を施し、所定の形状の内部電極用溝
3を形成する。内部電極用溝3の深さは、所望の内部電
極の厚みT2に等しい寸法である。さらに、図1(c)
に示すように、この内部電極用溝3の所定の位置にスル
ーホール用孔4をレーザ加工にて形成する。スルーホー
ル用孔4は樹脂フィルム1にも形成する。こうすること
により、後工程で導電性ペーストを内部電極用溝3やス
ルーホール用孔4に充填する際に、内部電極用溝3やス
ルーホール用孔4内に空気溜りが発生せず、内部電極用
溝3やスルーホール用孔4に導電性ペーストが確実に充
填される。
Next, as shown in FIG. 1B, the insulating sheet 2 is subjected to laser processing to form the internal electrode grooves 3 having a predetermined shape. The depth of the internal electrode groove 3 is equal to the desired thickness T2 of the internal electrode. Furthermore, FIG. 1 (c)
As shown in, a through hole 4 is formed at a predetermined position of the internal electrode groove 3 by laser processing. The through hole 4 is also formed in the resin film 1. By doing so, when the conductive paste is filled in the internal electrode grooves 3 and the through hole holes 4 in a later step, no air pool is generated in the internal electrode grooves 3 and the through hole holes 4, and The electrode paste 3 and the through-hole 4 are reliably filled with the conductive paste.

【0012】次に、絶縁性シート2の上面に印刷パター
ンマスクを被せた後、図1(d)に示すように、Ag,
Pd,Ag−Pd,Cu等の導電性ペースト5を内部電
極用溝3及びスルーホール用孔4に印刷法にて塗り込
み、充填、乾燥する。こうして、内部電極用溝3に充填
された導電性ペースト5は内部電極とされ、スルーホー
ル用孔4に充填された導電性ペースト5はスルーホール
とされる。そして、内部電極用溝3の底面から絶縁性シ
ート2の下面までの距離が、隣接する内部電極間の絶縁
に必要な厚みT3に相当する。
Next, after covering the upper surface of the insulating sheet 2 with a print pattern mask, as shown in FIG. 1 (d), Ag,
A conductive paste 5 of Pd, Ag-Pd, Cu or the like is applied to the internal electrode groove 3 and the through hole hole 4 by a printing method, filled and dried. In this way, the conductive paste 5 filled in the internal electrode groove 3 becomes an internal electrode, and the conductive paste 5 filled in the through hole hole 4 becomes a through hole. The distance from the bottom surface of the internal electrode groove 3 to the lower surface of the insulating sheet 2 corresponds to the thickness T3 required for insulation between adjacent internal electrodes.

【0013】この後、図1(e)に示すように、樹脂フ
ィルム1を剥す。得られた絶縁性シート2は内部電極や
スルーホールを内蔵し、その表面は平坦である。図2
は、こうして得られた絶縁性シートを複数枚積層してコ
イルを形成したものである。各絶縁性シート121,1
2,123,…12nはそれぞれ内部電極131,1
2,133,…13n及びスルーホール201,202
203,…を内蔵している。内部電極131の一方の端部
13aは絶縁性シート121の左側端面に露出し、内部
電極13nの一方の端部13bは絶縁性シート12nの右
側端面に露出している。そして、絶縁性シート121
12nが積層された状態では内部電極131〜13nはス
ルーホール201,202,…を介して電気的に直列に接
続されコイルを形成する。
Thereafter, as shown in FIG. 1 (e), the resin film 1 is peeled off. The obtained insulating sheet 2 contains internal electrodes and through holes, and its surface is flat. FIG.
Is a laminate in which a plurality of insulating sheets thus obtained are laminated to form a coil. Each insulating sheet 12 1 , 1
2 2 , 12 3 , ... 12 n are internal electrodes 13 1 , 1 respectively
3 2 , 13 3 , ... 13 n and through holes 20 1 , 20 2 ,
20 3 , ... Are built in. One end 13a of the internal electrode 13 1 is exposed on the left end surface of the insulating sheet 12 1 , and one end 13b of the internal electrode 13 n is exposed on the right end surface of the insulating sheet 12 n . Then, the insulating sheet 12 1 to
When 12 n are stacked, the internal electrodes 13 1 to 13 n are electrically connected in series via the through holes 20 1 , 20 2 , ... Forming a coil.

【0014】次に、図3に示すように、積み重ねられた
絶縁性シート121〜12nの上下に絶縁性保護シート2
2が配設される。そして、積層された絶縁性シート12
1〜12n及び絶縁性保護シート22は一体焼成された
後、左右の両端部に外部電極25,26をスパッタリン
グ、蒸着、あるいは印刷焼付等の手段にて形成する。外
部電極25は内部電極131の端部13aに電気的に接
続し、外部電極26は内部電極13nの端部13bに電
気的に接続している。
Next, as shown in FIG. 3, the insulating protective sheets 2 are placed above and below the stacked insulating sheets 12 1 to 12 n.
2 are provided. And the laminated insulating sheet 12
After 1 to 12 n and the insulating protective sheet 22 are integrally fired, external electrodes 25 and 26 are formed on both left and right ends by means such as sputtering, vapor deposition, or printing. External electrode 25 is electrically connected to the end portion 13a of the internal electrode 13 1, the external electrode 26 is electrically connected to an end 13b of the inner electrode 13 n.

【0015】こうして得られた積層型インダクタ11
は、絶縁性シート121〜12nの表面が平坦であるの
で、絶縁性シート121〜12nの積層枚数が多くなって
も、あるいは内部電極131〜13nの厚みが厚くなって
も、均一な厚さに積み重ねることができる。この結果、
製品の外形が従来の積層型インダクタのように太鼓形に
ならず、印刷回路基板への実装不良を低減できる。ま
た、絶縁性シート121〜12nの積層ずれも抑えること
ができ、コイルのインダクタンス値の狭偏差化が可能に
なる。さらに、内部電極131〜13nとスルーホール2
1,202…をそれぞれ絶縁性シート121〜12n内に
同一工程で形成すると、工程数が少なくなり、生産に要
する期間も短縮できる。
The laminated inductor 11 thus obtained
Since the surfaces of the insulating sheets 12 1 to 12 n are flat, even if the number of laminated insulating sheets 12 1 to 12 n increases or the thickness of the internal electrodes 13 1 to 13 n increases. Can be stacked to a uniform thickness. As a result,
The outer shape of the product does not have a drum shape unlike the conventional multilayer inductor, and mounting defects on the printed circuit board can be reduced. Further, it is possible to suppress the stacking deviation of the insulating sheets 12 1 to 12 n , and it is possible to narrow the inductance value of the coil. Furthermore, the internal electrodes 13 1 to 13 n and the through holes 2
If 0 1 , 20 2 ... Are formed in the insulating sheets 12 1 to 12 n in the same step, the number of steps is reduced and the period required for production can be shortened.

【0016】なお、本発明に係る積層型電子部品及びそ
の製造方法は前記実施例に限定するものではなく、その
要旨の範囲内で種々に変更することができる。絶縁性シ
ートに内部電極用溝やスルーホール用孔を形成する手段
として、レーザ加工以外に、サンドブラスト加工やダイ
サー加工等を採用してもよい。あるいは、フォトリソグ
ラフィ法によってレジスト膜を絶縁性シート表面の所定
の部分に形成した後、レジスト膜から露出した部分の絶
縁性シートを溶剤で溶かして内部電極用溝やスルーホー
ル用孔を形成してもよい。
The laminated electronic component and the method for manufacturing the same according to the present invention are not limited to the above-mentioned embodiment, but can be variously modified within the scope of the gist thereof. As means for forming the internal electrode grooves and the through hole holes in the insulating sheet, sandblasting, dicing or the like may be adopted in addition to laser processing. Alternatively, a resist film is formed on a predetermined portion of the surface of the insulating sheet by a photolithography method, and then the portion of the insulating sheet exposed from the resist film is melted with a solvent to form grooves for internal electrodes and holes for through holes. Good.

【0017】また、図4に示すように、樹脂フィルム1
側からレーザ加工を施し、内部電極用溝3及びスルーホ
ール用孔4を形成してもよい。このようにすれば、導電
性ペーストを内部電極用溝3及びスルーホール用孔4に
印刷法にて塗り込む際、印刷パターンマスクが不要とな
るため更に製造コストを削減できる。さらに、積層型電
子部品は、インダクタ以外に、コンデンサや抵抗等であ
ってもよい。
Further, as shown in FIG. 4, the resin film 1
Laser processing may be performed from the side to form the internal electrode groove 3 and the through hole hole 4. By doing so, when the conductive paste is applied to the internal electrode grooves 3 and the through-hole holes 4 by the printing method, a printing pattern mask is not required, so that the manufacturing cost can be further reduced. Furthermore, the multilayer electronic component may be a capacitor, a resistor, or the like other than the inductor.

【0018】[0018]

【発明の効果】以上の説明で明らかなように、本発明に
よれば、絶縁性シートに内部電極及びスルーホールを内
蔵したので、絶縁性シートの表面は平坦になる。従っ
て、絶縁性シートはその積層枚数が多くなっても、ある
いは内部電極の厚みが厚くなっても均一な厚さに積み重
ねられ、製品の外形が従来の積層型電子部品のように太
鼓形にならず、印刷回路基板への実装不良を低減でき
る。そして、絶縁性シートの積層ずれも抑えることがで
き、コイルのインダクタンス値の狭偏差化が可能とな
る。
As is apparent from the above description, according to the present invention, since the internal electrodes and the through holes are built in the insulating sheet, the surface of the insulating sheet becomes flat. Therefore, the insulating sheets can be stacked to have a uniform thickness even if the number of laminated sheets increases or the thickness of the internal electrodes increases, and the product has a drum-shaped outer shape like a conventional laminated electronic component. Therefore, mounting defects on the printed circuit board can be reduced. Further, it is possible to suppress the stacking deviation of the insulating sheets, and it is possible to narrow the deviation of the inductance value of the coil.

【0019】また、内部電極とスルーホールを絶縁性シ
ート内に同一工程で形成すると、工程数が少なくなり、
生産に要する期間も短縮することができ、製造コストの
安価な積層型電子部品となる。さらに、内部電極を絶縁
性シート内に形成しているので、容易に内部電極の厚み
を厚くすることができ、特に積層型インダクタの場合に
はQ特性に優れた小型のものが得られる。
If the internal electrodes and the through holes are formed in the insulating sheet in the same step, the number of steps is reduced,
The time required for production can be shortened, and the laminated electronic component can be manufactured at low cost. Furthermore, since the internal electrodes are formed in the insulating sheet, the thickness of the internal electrodes can be easily increased. In particular, in the case of a laminated inductor, a small one having excellent Q characteristics can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る積層型電子部品の製造方法の一実
施例を説明するための断面図。
FIG. 1 is a cross-sectional view for explaining one embodiment of a method for manufacturing a multilayer electronic component according to the present invention.

【図2】本発明に係る積層型電子部品の一実施例を示す
分解斜視図。
FIG. 2 is an exploded perspective view showing an embodiment of a laminated electronic component according to the present invention.

【図3】図2に示した積層型電子部品の断面図。FIG. 3 is a sectional view of the multilayer electronic component shown in FIG.

【図4】他の実施例を示す断面図。FIG. 4 is a sectional view showing another embodiment.

【図5】従来の積層型電子部品を示す分解斜視図。FIG. 5 is an exploded perspective view showing a conventional laminated electronic component.

【図6】別の従来の積層型電子部品を製造する手順を示
す斜視図。
FIG. 6 is a perspective view showing a procedure for manufacturing another conventional laminated electronic component.

【符号の説明】[Explanation of symbols]

2…絶縁性シート 3…内部電極用溝 4…スルーホール用孔 5…導電性ペースト 11…積層型インダクタ 121〜12n…絶縁性シート 131〜13n…内部電極 201〜203…スルーホール2 ... insulating sheet 3 ... internal electrode groove 4 ... through hole hole 5 ... conductive paste 11 ... laminated inductor 12 1 to 12 n ... insulating sheet 13 1 to 13 n ... internal electrode 20 1 to 20 3 ... Through hole

───────────────────────────────────────────────────── フロントページの続き (72)発明者 奥山 晋吾 京都府長岡京市天神二丁目26番10号 株式 会社村田製作所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shingo Okuyama 2-10-10 Tenjin, Tenjin, Nagaokakyo, Kyoto Murata Manufacturing Co., Ltd.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 導電材が充填されている内部電極用溝
と、この内部電極用溝の底面に設けられかつ導電材が充
填されているスルーホール用孔とを有した絶縁性シート
を複数枚積層し、前記内部電極用溝に充填されている導
電材相互が前記スルーホール用孔に充填されている導電
材を介して電気的に接続されていることを特徴とする積
層型電子部品。
1. A plurality of insulating sheets having internal electrode grooves filled with a conductive material and through-holes provided in the bottom surface of the internal electrode grooves and filled with a conductive material. A laminated electronic component, wherein the conductive materials filled in the grooves for internal electrodes are electrically connected to each other through the conductive material filled in the holes for through holes.
【請求項2】 絶縁性シートに内部電極用溝を設けると
共に、この内部電極用溝の底面にスルーホール用孔を設
ける工程と、 前記内部電極用溝と前記スルーホール用孔に導電材を充
填する工程と、 前記絶縁性シートを複数枚積み重ね、前記内部電極用溝
に充填されている導電材相互を前記スルーホール用孔に
充填されている導電材を介して電気的に接続する工程
と、 を備えていることを特徴とする積層型電子部品の製造方
法。
2. A step of providing a groove for an internal electrode in an insulating sheet and providing a hole for a through hole in a bottom surface of the groove for an internal electrode, and filling the groove for the internal electrode and the hole for the through hole with a conductive material. And a step of stacking a plurality of the insulating sheets, electrically connecting the conductive materials filled in the internal electrode grooves with each other through the conductive material filled in the through-hole holes, A method of manufacturing a multilayer electronic component, comprising:
JP7162370A 1995-06-28 1995-06-28 Multilayer type electronic component and its manufacture Pending JPH0917635A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7162370A JPH0917635A (en) 1995-06-28 1995-06-28 Multilayer type electronic component and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7162370A JPH0917635A (en) 1995-06-28 1995-06-28 Multilayer type electronic component and its manufacture

Publications (1)

Publication Number Publication Date
JPH0917635A true JPH0917635A (en) 1997-01-17

Family

ID=15753288

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7162370A Pending JPH0917635A (en) 1995-06-28 1995-06-28 Multilayer type electronic component and its manufacture

Country Status (1)

Country Link
JP (1) JPH0917635A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000052975A1 (en) * 1999-03-04 2000-09-08 Sigtronics Limited Circuit board printer
JP2008103482A (en) * 2006-10-18 2008-05-01 Murata Mfg Co Ltd Method for forming electrode pattern, manufacturing method for laminated electronic part, and laminated electronic part
JP2009283695A (en) * 2008-05-22 2009-12-03 Alps Electric Co Ltd Stacked electronic component
CN103632785A (en) * 2013-12-12 2014-03-12 深圳顺络电子股份有限公司 Manufacturing method for inner electrode of chip component
CN110324991A (en) * 2019-07-10 2019-10-11 广东工业大学 A kind of preparation method of composite circuit board
US11493084B2 (en) 2018-11-16 2022-11-08 Liebherr-Components Colmar Sas Trunnion mount for mounting an engine

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000052975A1 (en) * 1999-03-04 2000-09-08 Sigtronics Limited Circuit board printer
JP2008103482A (en) * 2006-10-18 2008-05-01 Murata Mfg Co Ltd Method for forming electrode pattern, manufacturing method for laminated electronic part, and laminated electronic part
JP2009283695A (en) * 2008-05-22 2009-12-03 Alps Electric Co Ltd Stacked electronic component
CN103632785A (en) * 2013-12-12 2014-03-12 深圳顺络电子股份有限公司 Manufacturing method for inner electrode of chip component
US11493084B2 (en) 2018-11-16 2022-11-08 Liebherr-Components Colmar Sas Trunnion mount for mounting an engine
CN110324991A (en) * 2019-07-10 2019-10-11 广东工业大学 A kind of preparation method of composite circuit board

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