JP3422134B2 - Laminated electronic component and method of manufacturing the same - Google Patents

Laminated electronic component and method of manufacturing the same

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Publication number
JP3422134B2
JP3422134B2 JP16236895A JP16236895A JP3422134B2 JP 3422134 B2 JP3422134 B2 JP 3422134B2 JP 16236895 A JP16236895 A JP 16236895A JP 16236895 A JP16236895 A JP 16236895A JP 3422134 B2 JP3422134 B2 JP 3422134B2
Authority
JP
Japan
Prior art keywords
holes
insulating sheet
hole
internal electrodes
electronic component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16236895A
Other languages
Japanese (ja)
Other versions
JPH0917678A (en
Inventor
晋吾 奥山
政利 有城
忠洋 中川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP16236895A priority Critical patent/JP3422134B2/en
Publication of JPH0917678A publication Critical patent/JPH0917678A/en
Application granted granted Critical
Publication of JP3422134B2 publication Critical patent/JP3422134B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、積層型電子部品、例え
ば積層型インダクタ等の積層型電子部品及びその製造方
法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated electronic component, for example, a laminated electronic component such as a laminated inductor and a method for manufacturing the same.

【0002】[0002]

【従来の技術】従来の積層型電子部品は、例えばインダ
クタを例にして説明すると、図4に示すように内部電極
52〜56をそれぞれ表面に設けた絶縁性シート51を
積み重ねて積層体を構成し、絶縁性シート51に設けた
スルーホール57a〜57dを介して内部電極52〜5
6を電気的に直列に接続することによってコイルを形成
するものであった。
2. Description of the Related Art A conventional laminated electronic component will be described by taking an inductor as an example. As shown in FIG. 4, an insulating sheet 51 having internal electrodes 52 to 56 on its surface is stacked to form a laminated body. The internal electrodes 52 to 5 through the through holes 57a to 57d provided in the insulating sheet 51.
The coil was formed by electrically connecting 6 in series.

【0003】あるいは、これとは別に、図5に示すよう
に、絶縁膜61の表面に内部電極71を形成した後(図
5(a)参照)、内部電極71の先端部71aを露出さ
せるようにして絶縁膜61上の左側略半分に絶縁膜62
を形成する(図5(b)参照)。次に、絶縁膜61上の
右側半分に内部電極72を形成した後(図5(c)参
照)、内部電極72の先端部72aを露出させるように
して絶縁膜61上の右側略半分に絶縁膜63を形成する
(図5(d)参照)。さらに、絶縁膜62,63の表面
に内部電極73を形成する(図5(e)参照)。以上の
ように、絶縁膜と内部電極を交互に形成することによっ
てコイルを形成するものであった。
Alternatively, as shown in FIG. 5, after the internal electrode 71 is formed on the surface of the insulating film 61 (see FIG. 5A), the tip 71a of the internal electrode 71 is exposed. The insulating film 62 is formed on the left half of the insulating film 61.
Are formed (see FIG. 5B). Next, after forming the internal electrode 72 on the right half of the insulating film 61 (see FIG. 5C), insulating the substantially right half of the insulating film 61 by exposing the tip portion 72a of the internal electrode 72. The film 63 is formed (see FIG. 5D). Further, the internal electrode 73 is formed on the surfaces of the insulating films 62 and 63 (see FIG. 5E). As described above, the coil is formed by alternately forming the insulating film and the internal electrode.

【0004】[0004]

【発明が解決しようとする課題】従来の技術で述べたも
ののうち前者においては、Q特性を確保するために、内
部電極52〜56の断面積を大きくして抵抗を小さくし
たい場合、内部電極52〜56の幅を大きくすると製品
サイズが大きくなるため、通常、内部電極52〜56の
厚みを厚くして断面積を大きくする。しかしながら、絶
縁性シート51の厚みに対して内部電極が厚くなってく
ると、内部電極52〜56が配設されている部分の積層
体の厚さと、内部電極52〜56が配設されていない部
分の積層体の厚さとが大きく異なるようになる。この結
果、製品形状が太鼓形になり、印刷回路基板に実装不可
能になるという問題点や、絶縁性シート51の積層ずれ
が発生し易くなり、コイルのインダクタンス値の狭偏差
化が困難になるという問題点を有していた。
In the former of those described in the prior art, when it is desired to increase the cross-sectional area of the internal electrodes 52 to 56 to reduce the resistance in order to secure the Q characteristic, the internal electrode 52 is required. Since increasing the width of ~ 56 increases the product size, the internal electrodes 52 to 56 are usually made thicker to increase the cross-sectional area. However, when the internal electrodes become thicker than the thickness of the insulating sheet 51, the thickness of the laminated body in the portion where the internal electrodes 52 to 56 are provided and the internal electrodes 52 to 56 are not provided. The thickness of the laminated body of the portion is greatly different. As a result, the product shape becomes a drum shape and cannot be mounted on the printed circuit board, and the stacking of the insulating sheets 51 is likely to occur, making it difficult to narrow the inductance value of the coil. Had the problem.

【0005】また、後者においては、Q特性を確保する
ために内部電極71〜73の厚みを厚くしても製品形状
が太鼓形になる心配はないものの、絶縁膜61〜63と
内部電極71〜73をインダクタの右側又は左側略半分
に交互に積層するため工程数が多く、又生産に要する期
間も長かった。さらに、絶縁膜61〜63と内部電極7
1〜73は印刷で形成されるが、厚膜印刷に精度限界が
あるため、内部電極71〜73の細線化が難しく、製品
サイズの小型化に対応できないという問題点を有してい
た。
Further, in the latter case, although the thickness of the internal electrodes 71 to 73 is increased to secure the Q characteristic, there is no concern that the product shape becomes a drum shape, but the insulating films 61 to 63 and the internal electrodes 71 to 71. Since 73 is alternately laminated on the right side or substantially the left side of the inductor, the number of steps is large and the period required for production is long. Further, the insulating films 61 to 63 and the internal electrode 7
Although 1 to 73 are formed by printing, there is a problem that it is difficult to thin the internal electrodes 71 to 73 and it is not possible to reduce the product size because the accuracy of thick film printing is limited.

【0006】そこで、本発明の目的は、形状不良や積層
ずれが発生しにくく、しかも工程数が少なく生産に要す
る期間も短い小型の積層型電子部品及びその製造方法を
提供することにある。
Therefore, an object of the present invention is to provide a small-sized laminated electronic component which is less likely to cause shape defects and stacking misalignment, and has a small number of steps and a short production period, and a manufacturing method thereof.

【0007】[0007]

【課題を解決するための手段】以上の目的を達成するた
め、本発明に係る積層型電子部品は、内部電極用の貫通
孔が設けられた第1絶縁性シートとスルーホール用の貫
通孔が設けられた第2絶縁性シートとを接合するととも
に、内部電極用の貫通孔およびスルーホール用の貫通孔
に導電材を充填して内部電極およびスルーホールを形成
した複合絶縁性シートを複数枚積層して積層体を構成
し、該積層体内において内部電極相互がスルーホール
介して電気的に接続されていることを特徴とする。
In order to achieve the above object, a laminated electronic component according to the present invention is provided with a through electrode for an internal electrode.
A first insulating sheet having a hole and a through hole
When joining the second insulating sheet provided with the through holes,
Through hole for internal electrode and through hole for through hole
Filled with conductive material to form internal electrodes and through holes
Multiple laminated insulating sheets are laminated to form a laminate
However, the internal electrodes are electrically connected to each other through the through holes in the laminated body .

【0008】また、本発明に係る積層型電子部品の製造
方法は、 (a)第1絶縁性シートに内部電極用の貫通孔を設ける
工程と、 (b)第2絶縁性シートにスルーホール用の貫通孔を設
ける工程と、 (c)第1絶縁性シートと第2絶縁性シートを接合し
後、導電材を内部電極用の貫通孔とスルーホール用の貫
孔に同時に充填して内部電極およびスルーホールを有
した複合絶縁性シートを形成する工程と、 (d)複合絶縁性シートを積み重ねて積層体を構成し、
該積層体内において内部電極相互をスルーホールを介し
て電気的に接続する工程と、を備えていることを特徴と
する。内部電極用の貫通孔とスルーホール用の貫通孔
は、例えばレーザ加工により形成される。また、第1絶
縁性シートと第2絶縁性シートはそれぞれ樹脂フィルム
により裏打ちされており、第1絶縁性シートと第2絶縁
性シートは向かい合うように接合される。
The method of manufacturing a laminated electronic component according to the present invention includes (a) a step of providing through holes for internal electrodes in the first insulating sheet, and (b) through holes in the second insulating sheet. a step of providing a through-hole, (c) after bonding the first insulating sheet and the second insulating sheet, through holes for internal electrodes a conductive material and transmural for through-hole
Fills the through holes at the same time and has internal electrodes and through holes
Forming a composite insulating sheets, and forming the laminated body by stacking (d) is a composite insulating sheet,
Electrically connecting the internal electrodes to each other through the through holes in the stack . Through holes for internal electrodes and through holes
Are formed by laser processing, for example. Also, the first
The edge sheet and the second insulating sheet are resin films, respectively.
Lined with a first insulation sheet and a second insulation
The sex sheets are joined to face each other.

【0009】[0009]

【作用】第1絶縁性シートに設けた内部電極用の貫通
に充填された導電材が内部電極とされ、第2絶縁性シー
トに設けたスルーホール用の貫通孔に充填された導電材
がスルーホールとされる。これら内部電極やスルーホー
ルはそれぞれの絶縁性シート内に設けられているため、
絶縁性シートの表面は平坦である。従って、絶縁性シー
トはその積層枚数が多くなっても、均一な厚さに積み重
ねられる。
The conductive material filled in the through holes for the internal electrodes provided in the first insulating sheet is used as the internal electrode, and the conductive material filled in the through holes for the through holes provided in the second insulating sheet is It is considered as a through hole. Since these internal electrodes and through holes are provided in each insulating sheet,
The surface of the insulating sheet is flat. Therefore, the insulating sheets can be stacked with a uniform thickness even if the number of laminated sheets is large.

【0010】[0010]

【実施例】以下、本発明に係る積層型電子部品及びその
製造方法の一実施例について添付図面を参照して説明す
る。図1(a)に示すように、ポリエチレンテレフタレ
ート等の樹脂フィルム1に裏打ちされた第1絶縁性シー
ト2を準備する。第1絶縁性シート2の材料としては、
例えばフェライト、誘電体、絶縁体等のセラミックが使
用される。第1絶縁性シート2の厚みは後述の内部電極
の厚みと等しい寸法に設定する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a laminated electronic component and a manufacturing method thereof according to the present invention will be described below with reference to the accompanying drawings. As shown in FIG. 1A, a first insulating sheet 2 lined with a resin film 1 such as polyethylene terephthalate is prepared. As the material of the first insulating sheet 2,
For example, ceramics such as ferrite, dielectrics and insulators are used. The thickness of the first insulating sheet 2 is set to be equal to the thickness of the internal electrodes described later.

【0011】次に、図1(b)に示すように、第1絶縁
性シート2及び樹脂フィルム1にレーザ加工を施し、所
定の形状の内部電極用孔3を形成する。同様にして、図
1(c)に示すように、ポリエチレンテレフタレート等
の樹脂フィルム4に裏打ちされた第2絶縁性シート5を
準備する。第2絶縁性シート5の材料としては、通常、
第1絶縁性シート2と同種類のものが使用される。第2
絶縁性シート5の厚みは、隣接する内部電極間の絶縁に
必要な厚さと等しい寸法に設定する。
Next, as shown in FIG. 1 (b), the first insulating sheet 2 and the resin film 1 are subjected to laser processing to form internal electrode holes 3 having a predetermined shape. Similarly, as shown in FIG. 1C, a second insulating sheet 5 backed by a resin film 4 such as polyethylene terephthalate is prepared. The material of the second insulating sheet 5 is usually
The same type as the first insulating sheet 2 is used. Second
The thickness of the insulating sheet 5 is set to be equal to the thickness required for insulation between adjacent internal electrodes.

【0012】図1(d)に示すように、第2絶縁性シー
ト5及び樹脂フィルム4にレーザ加工を施し、所定の位
置にスルーホール用孔6を形成する。次に、図1(e)
に示すように、第1絶縁性シート2と第2絶縁性シート
5を接合し、仮圧着する。次に、図1(f)に示すよう
に、Ag,Pd,Ag−Pd,Cu等の導電性ペースト
7を内部電極用孔3及びスルーホール用孔6に印刷法に
て塗り込み、充填乾燥する。第1及び第2絶縁性シート
2,5の表面には樹脂フィルム1,4が貼られているの
で、この樹脂フィルム1,4を印刷パターンマスクとし
て機能させることができる。従って、印刷工程におい
て、印刷パターンマスクを準備する必要がなくなり、製
造コストを抑えることができる。なお、この樹脂フィル
ム1,4を印刷パターンマスクとして利用することは必
ずしも必要なことではなく、印刷の際に樹脂フィルム
1,4を剥し、別に作製した印刷パターンマスクを利用
して印刷してもよい。
As shown in FIG. 1D, the second insulating sheet 5 and the resin film 4 are laser-processed to form through-hole holes 6 at predetermined positions. Next, FIG. 1 (e)
As shown in (1), the first insulating sheet 2 and the second insulating sheet 5 are joined and temporarily pressure-bonded. Next, as shown in FIG. 1 (f), a conductive paste 7 such as Ag, Pd, Ag-Pd, or Cu is applied to the internal electrode holes 3 and the through hole holes 6 by a printing method, and then filled and dried. To do. Since the resin films 1 and 4 are attached to the surfaces of the first and second insulating sheets 2 and 5, the resin films 1 and 4 can function as a print pattern mask. Therefore, it is not necessary to prepare a print pattern mask in the printing process, and the manufacturing cost can be suppressed. It is not always necessary to use the resin films 1 and 4 as a print pattern mask, and the resin films 1 and 4 may be peeled off at the time of printing and printed by using a separately prepared print pattern mask. Good.

【0013】こうして、内部電極用孔3に充填された導
電性ペースト7は内部電極とされ、スルーホール用孔6
に充填された導電性ペースト7はスルーホールとされ
る。この後、図1(g)に示すように、樹脂フィルム
1,4を剥す。得られた第1及び第2絶縁性シート2,
5からなる絶縁性シートは内部電極やスルーホールを内
蔵し、その表面は平坦である。
Thus, the conductive paste 7 filled in the internal electrode holes 3 becomes internal electrodes, and the through hole holes 6 are formed.
The conductive paste 7 filled in is a through hole. Then, as shown in FIG. 1 (g), the resin films 1 and 4 are peeled off. The obtained first and second insulating sheets 2,
The insulating sheet of No. 5 contains internal electrodes and through holes, and its surface is flat.

【0014】図2は、こうして得られた絶縁性シートを
複数枚積層してコイルを形成したものである。各絶縁性
シート121,122,123,…12nはそれぞれ内部電
極131,132,133,…13n及びスルーホール20
1,202,203,…を内蔵している。内部電極131
一方の端部13aは絶縁性シート121の左側端面に露
出し、内部電極13nの一方の端部13bは絶縁性シー
ト12nの右側端面に露出している。そして、絶縁性シ
ート121〜12nが積層された状態では内部電極131
〜13nはスルーホール201,202,…を介して電気
的に直列に接続されコイルを形成する。
FIG. 2 shows a coil formed by laminating a plurality of insulating sheets thus obtained. The insulating sheets 12 1 , 12 2 , 12 3 , ... 12 n have internal electrodes 13 1 , 13 2 , 13 3 , ... 13 n and through holes 20 respectively.
Built-in 1 , 20 2 , 20 3 , ... One end 13a of the internal electrode 13 1 is exposed on the left end surface of the insulating sheet 12 1 , and one end 13b of the internal electrode 13 n is exposed on the right end surface of the insulating sheet 12 n . Then, when the insulating sheets 12 1 to 12 n are stacked, the internal electrodes 13 1
˜13 n are electrically connected in series through through holes 20 1 , 20 2 , ... Forming a coil.

【0015】次に、図3に示すように、積み重ねられた
絶縁性シート121〜12nの上下に絶縁性保護シート2
2が配設される。そして、積層された絶縁性シート12
1〜12n及び絶縁性保護シート22は一体焼成された
後、左右の両端部に外部電極25,26をスパッタリン
グ、蒸着、あるいは印刷焼付等の手段にて形成する。外
部電極25は内部電極131の端部13aに電気的に接
続し、外部電極26は内部電極13nの端部13bに電
気的に接続している。
Next, as shown in FIG. 3, the insulating protective sheets 2 are provided above and below the stacked insulating sheets 12 1 to 12 n.
2 are provided. And the laminated insulating sheet 12
After 1 to 12 n and the insulating protective sheet 22 are integrally fired, external electrodes 25 and 26 are formed on both left and right ends by means such as sputtering, vapor deposition, or printing. External electrode 25 is electrically connected to the end portion 13a of the internal electrode 13 1, the external electrode 26 is electrically connected to an end 13b of the inner electrode 13 n.

【0016】こうして得られた積層型インダクタ11
は、絶縁性シート121〜12nの表面が平坦であるの
で、絶縁性シート121〜12nの積層枚数が多くなって
も、あるいは内部電極131〜13nの厚みが厚くなって
も、均一な厚さに積み重ねることができる。この結果、
製品の外形が従来の積層型インダクタのように太鼓形に
ならず、印刷回路基板への実装不良を低減できる。ま
た、絶縁性シート121〜12nの積層ずれも抑えること
ができ、コイルのインダクタンス値の狭偏差化が可能に
なる。さらに、内部電極131〜13nとスルーホール2
1,202…をそれぞれ絶縁性シート121〜12n内に
同一工程で形成すると、工程数が少なくなり、生産に要
する期間も短縮できる。
The laminated inductor 11 thus obtained
Since the surfaces of the insulating sheets 12 1 to 12 n are flat, even if the number of laminated insulating sheets 12 1 to 12 n increases or the thickness of the internal electrodes 13 1 to 13 n increases. Can be stacked to a uniform thickness. As a result,
The outer shape of the product does not have a drum shape unlike the conventional multilayer inductor, and mounting defects on the printed circuit board can be reduced. Further, it is possible to suppress the stacking deviation of the insulating sheets 12 1 to 12 n , and it is possible to narrow the inductance value of the coil. Furthermore, the internal electrodes 13 1 to 13 n and the through holes 2
If 0 1 , 20 2 ... Are formed in the insulating sheets 12 1 to 12 n in the same step, the number of steps is reduced and the period required for production can be shortened.

【0017】なお、本発明に係る積層型電子部品及びそ
の製造方法は前記実施例に限定するものではなく、その
要旨の範囲内で種々に変更することができる。絶縁性シ
ートに内部電極用孔やスルーホール用孔を形成する手段
として、レーザ加工以外に、パンチ加工やサンドブラス
ト加工やダイサー加工等を採用してもよい。あるいは、
フォトリソグラフィ法によってレジスト膜を絶縁性シー
ト表面の所定の部分に形成した後、レジスト膜から露出
した部分の絶縁性シートを溶剤で溶かして内部電極用孔
やスルーホール用孔を形成してもよい。
The laminated electronic component and the method for manufacturing the same according to the present invention are not limited to the above-mentioned embodiment, but can be variously modified within the scope of the gist thereof. As a means for forming the holes for internal electrodes and the holes for through holes in the insulating sheet, punching, sandblasting, dicer processing, or the like may be adopted in addition to laser processing. Alternatively,
After forming a resist film on a predetermined portion of the surface of the insulating sheet by photolithography, the portion of the insulating sheet exposed from the resist film may be dissolved with a solvent to form holes for internal electrodes or through holes. .

【0018】さらに、積層型電子部品は、インダクタ以
外に、コンデンサや抵抗等であってもよい。
Further, the multilayer electronic component may be a capacitor, a resistor or the like other than the inductor.

【0019】[0019]

【発明の効果】以上の説明で明らかなように、本発明に
よれば、第1及び第2絶縁性シートにそれぞれ内部電極
及びスルーホールを内蔵したので、第1及び第2絶縁性
シートの表面は平坦になる。従って、絶縁性シートはそ
の積層枚数が多くなっても、あるいは内部電極の厚みが
厚くなっても均一な厚さに積み重ねられ、製品の外形が
従来の積層型電子部品のように太鼓形にならず、印刷回
路基板への実装不良を低減できる。そして、絶縁性シー
トの積層ずれも抑えることができ、コイルのインダクタ
ンス値の狭偏差化が可能となる。
As is apparent from the above description, according to the present invention, since the internal electrodes and the through holes are built in the first and second insulating sheets, respectively, the surfaces of the first and second insulating sheets are formed. Becomes flat. Therefore, the insulating sheets can be stacked to have a uniform thickness even if the number of laminated sheets is large or the thickness of the internal electrodes is large, and the outer shape of the product does not have a drum shape like a conventional laminated electronic component. Therefore, mounting defects on the printed circuit board can be reduced. Further, it is possible to suppress stacking deviation of the insulating sheets, and it is possible to narrow the deviation of the inductance value of the coil.

【0020】また、内部電極とスルーホールをそれぞれ
第1及び第2絶縁性シート内に同一工程で形成すると、
工程数が少なくなり、生産に要する期間も短縮すること
ができ、製造コストの安価な積層型電子部品となる。さ
らに、内部電極を第1絶縁性シート内に形成しているの
で、容易に内部電極の厚みを厚くすることができ、特に
積層型インダクタの場合にはQ特性に優れた小型のもの
が得られる。
If the internal electrodes and the through holes are formed in the first and second insulating sheets in the same process, respectively,
The number of steps is reduced, the period required for production can be shortened, and the multilayer electronic component can be manufactured at low cost. Furthermore, since the internal electrodes are formed in the first insulating sheet, the thickness of the internal electrodes can be easily increased. In particular, in the case of a laminated inductor, a small one having excellent Q characteristics can be obtained. .

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る積層型電子部品の製造方法の一実
施例を説明するための断面図。
FIG. 1 is a cross-sectional view for explaining one embodiment of a method for manufacturing a multilayer electronic component according to the present invention.

【図2】本発明に係る積層型電子部品の一実施例を示す
分解斜視図。
FIG. 2 is an exploded perspective view showing an embodiment of a laminated electronic component according to the present invention.

【図3】図2に示した積層型電子部品の断面図。FIG. 3 is a sectional view of the multilayer electronic component shown in FIG.

【図4】従来の積層型電子部品を示す分解斜視図。FIG. 4 is an exploded perspective view showing a conventional laminated electronic component.

【図5】別の従来の積層型電子部品を製造する手順を示
す斜視図。
FIG. 5 is a perspective view showing a procedure for manufacturing another conventional laminated electronic component.

【符号の説明】[Explanation of symbols]

2…第1絶縁性シート 3…内部電極用孔 5…第2絶縁性シート 6…スルーホール用孔 7…導電性ペースト 11…積層型インダクタ 121〜12n…絶縁性シート 131〜13n…内部電極 201〜203…スルーホール2 ... first insulating sheet 3 ... internal electrode hole 5 ... second insulating sheet 6 ... through hole hole 7 ... conductive paste 11 ... laminated inductor 12 1 to 12 n ... insulating sheet 13 1 to 13 n ... Internal electrodes 20 1 to 20 3 ... Through holes

フロントページの続き (56)参考文献 特開 平7−130543(JP,A) 特開 平7−106175(JP,A) 特開 平7−66555(JP,A) 特開 平5−299841(JP,A) (58)調査した分野(Int.Cl.7,DB名) H01F 41/04 Continuation of front page (56) Reference JP-A-7-130543 (JP, A) JP-A-7-106175 (JP, A) JP-A-7-66555 (JP, A) JP-A-5-299841 (JP , A) (58) Fields investigated (Int.Cl. 7 , DB name) H01F 41/04

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 内部電極用の貫通孔が設けられた第1絶
縁性シートとスルーホール用の貫通孔が設けられた第2
絶縁性シートとを接合するとともに、前記内部電極用の
貫通孔およびスルーホール用の貫通孔に導電材を充填し
て内部電極およびスルーホールを形成した複合絶縁性シ
ートを複数枚積層して積層体を構成し、該積層体内にお
いて前記内部電極相互が前記スルーホールを介して電気
的に接続されていることを特徴とする積層型電子部品。
1. A first insulator provided with a through hole for an internal electrode.
Second with rim sheet and through holes for through holes
While bonding the insulating sheet, for the internal electrode
Fill the through holes and the through holes for through holes with a conductive material.
Insulation electrodes with internal electrodes and through holes
A plurality of sheets are laminated to form a laminated body, and
In addition , the multilayer electronic component is characterized in that the internal electrodes are electrically connected to each other through the through holes .
【請求項2】 第1絶縁性シートに内部電極用の貫通
を設ける工程と、 第2絶縁性シートにスルーホール用の貫通孔を設ける工
程と、 前記第1絶縁性シートと前記第2絶縁性シートを接合し
た後、導電材を前記内部電極用の貫通孔と前記スルーホ
ール用の貫通孔に同時に充填して内部電極およびスルー
ホールを有した複合絶縁性シートを形成する工程と、 前記複合絶縁性シートを積み重ねて積層体を構成し、該
積層体内において前記内部電極相互を前記スルーホール
を介して電気的に接続する工程と、 を備えていることを特徴とする積層型電子部品の製造方
法。
2. A process in the first insulating sheet provided through holes for internal electrodes, and the step of forming a through hole for a through hole in the second insulating sheet, said second insulated from the first insulating sheet after was joining the sex sheet <br/>, internal electrodes and through the conductive material is filled at the same time the through hole of the through-hole and the through hole for the inner electrode
Configure forming a composite insulating sheet having a hole, a laminate by stacking the composite insulating sheet, said
And a step of electrically connecting the internal electrodes to each other through the through hole in the laminate, the method for producing a laminated electronic component.
【請求項3】 前記内部電極用の貫通孔と前記スルーホ
ール用の貫通孔がレーザ加工により形成されることを特
徴とする請求項2に記載の積層型電子部品の製造方法。
3. A through hole for the internal electrode and the through hole.
It is special that the through holes for the
The method for manufacturing a laminated electronic component according to claim 2, wherein the characteristic is a characteristic.
【請求項4】 前記第1絶縁性シートと前記第2絶縁性
シートがそれぞれ樹脂フィルムにより裏打ちされてお
り、前記第1絶縁性シートと前記第2絶縁性シートは向
かい合うように接合されることを特徴とする請求項2ま
たは請求項3に記載の積層型電子部品の製造方法。
4. The first insulating sheet and the second insulating sheet
Each sheet is lined with a resin film
The first insulating sheet and the second insulating sheet are
3. The joint according to claim 2, wherein the joints are fitted to each other.
Alternatively, the method for manufacturing a multilayer electronic component according to claim 3.
JP16236895A 1995-06-28 1995-06-28 Laminated electronic component and method of manufacturing the same Expired - Lifetime JP3422134B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16236895A JP3422134B2 (en) 1995-06-28 1995-06-28 Laminated electronic component and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16236895A JP3422134B2 (en) 1995-06-28 1995-06-28 Laminated electronic component and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JPH0917678A JPH0917678A (en) 1997-01-17
JP3422134B2 true JP3422134B2 (en) 2003-06-30

Family

ID=15753248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16236895A Expired - Lifetime JP3422134B2 (en) 1995-06-28 1995-06-28 Laminated electronic component and method of manufacturing the same

Country Status (1)

Country Link
JP (1) JP3422134B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4867567B2 (en) * 2006-10-18 2012-02-01 株式会社村田製作所 Method for forming electrode pattern and method for manufacturing laminated electronic component
JP6477608B2 (en) * 2016-06-16 2019-03-06 株式会社村田製作所 Electronic components

Also Published As

Publication number Publication date
JPH0917678A (en) 1997-01-17

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