JPH08980Y2 - 有害・有毒ガス配管装置 - Google Patents

有害・有毒ガス配管装置

Info

Publication number
JPH08980Y2
JPH08980Y2 JP1987097853U JP9785387U JPH08980Y2 JP H08980 Y2 JPH08980 Y2 JP H08980Y2 JP 1987097853 U JP1987097853 U JP 1987097853U JP 9785387 U JP9785387 U JP 9785387U JP H08980 Y2 JPH08980 Y2 JP H08980Y2
Authority
JP
Japan
Prior art keywords
gas
toxic gas
harmful
pipe
toxic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987097853U
Other languages
English (en)
Japanese (ja)
Other versions
JPS645639U (US06272168-20010807-M00014.png
Inventor
隆 秋元
Original Assignee
日電アネルバ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日電アネルバ株式会社 filed Critical 日電アネルバ株式会社
Priority to JP1987097853U priority Critical patent/JPH08980Y2/ja
Publication of JPS645639U publication Critical patent/JPS645639U/ja
Application granted granted Critical
Publication of JPH08980Y2 publication Critical patent/JPH08980Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Thermal Insulation (AREA)
  • Rigid Pipes And Flexible Pipes (AREA)
JP1987097853U 1987-06-25 1987-06-25 有害・有毒ガス配管装置 Expired - Lifetime JPH08980Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987097853U JPH08980Y2 (ja) 1987-06-25 1987-06-25 有害・有毒ガス配管装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987097853U JPH08980Y2 (ja) 1987-06-25 1987-06-25 有害・有毒ガス配管装置

Publications (2)

Publication Number Publication Date
JPS645639U JPS645639U (US06272168-20010807-M00014.png) 1989-01-12
JPH08980Y2 true JPH08980Y2 (ja) 1996-01-17

Family

ID=31323606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987097853U Expired - Lifetime JPH08980Y2 (ja) 1987-06-25 1987-06-25 有害・有毒ガス配管装置

Country Status (1)

Country Link
JP (1) JPH08980Y2 (US06272168-20010807-M00014.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100801843B1 (ko) * 2006-08-22 2008-02-11 동부일렉트로닉스 주식회사 가스 처리 장치

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2511363B2 (ja) * 1992-07-06 1996-06-26 株式会社荏原製作所 真空処理装置
JP2001053066A (ja) * 1999-05-28 2001-02-23 Tokyo Electron Ltd オゾン処理装置およびその方法
US6515290B1 (en) * 2000-09-05 2003-02-04 Axcelis Technologies, Inc. Bulk gas delivery system for ion implanters
JP7273665B2 (ja) * 2019-09-11 2023-05-15 東京エレクトロン株式会社 熱媒体循環システム及び基板処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6286598U (US06272168-20010807-M00014.png) * 1985-11-20 1987-06-02

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100801843B1 (ko) * 2006-08-22 2008-02-11 동부일렉트로닉스 주식회사 가스 처리 장치

Also Published As

Publication number Publication date
JPS645639U (US06272168-20010807-M00014.png) 1989-01-12

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