JPH08969Y2 - ファンフィルタユニット - Google Patents
ファンフィルタユニットInfo
- Publication number
- JPH08969Y2 JPH08969Y2 JP1990085829U JP8582990U JPH08969Y2 JP H08969 Y2 JPH08969 Y2 JP H08969Y2 JP 1990085829 U JP1990085829 U JP 1990085829U JP 8582990 U JP8582990 U JP 8582990U JP H08969 Y2 JPH08969 Y2 JP H08969Y2
- Authority
- JP
- Japan
- Prior art keywords
- casing
- fan
- filter
- unit
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004080 punching Methods 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 238000005286 illumination Methods 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 238000013016 damping Methods 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000030279 gene silencing Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920001084 poly(chloroprene) Polymers 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990085829U JPH08969Y2 (ja) | 1990-08-13 | 1990-08-13 | ファンフィルタユニット |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990085829U JPH08969Y2 (ja) | 1990-08-13 | 1990-08-13 | ファンフィルタユニット |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0445522U JPH0445522U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-04-17 |
JPH08969Y2 true JPH08969Y2 (ja) | 1996-01-17 |
Family
ID=31817209
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990085829U Expired - Fee Related JPH08969Y2 (ja) | 1990-08-13 | 1990-08-13 | ファンフィルタユニット |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH08969Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004321001A (ja) * | 2003-04-21 | 2004-11-18 | Toyo Rice Cleaning Machine Co Ltd | 無洗米の製造方法及びその装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5225936B2 (ja) * | 2009-06-04 | 2013-07-03 | 株式会社日立産機システム | ファンフィルタユニット |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH067773Y2 (ja) * | 1988-11-21 | 1994-03-02 | セイコー電子部品株式会社 | B.b.s.構造のクリーンファン |
-
1990
- 1990-08-13 JP JP1990085829U patent/JPH08969Y2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004321001A (ja) * | 2003-04-21 | 2004-11-18 | Toyo Rice Cleaning Machine Co Ltd | 無洗米の製造方法及びその装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0445522U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-04-17 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |