JPH088429Y2 - 温度分布検知センサ - Google Patents
温度分布検知センサInfo
- Publication number
- JPH088429Y2 JPH088429Y2 JP1989062495U JP6249589U JPH088429Y2 JP H088429 Y2 JPH088429 Y2 JP H088429Y2 JP 1989062495 U JP1989062495 U JP 1989062495U JP 6249589 U JP6249589 U JP 6249589U JP H088429 Y2 JPH088429 Y2 JP H088429Y2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- sheath tube
- sensor
- thermocouple
- sheath
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989062495U JPH088429Y2 (ja) | 1989-05-31 | 1989-05-31 | 温度分布検知センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989062495U JPH088429Y2 (ja) | 1989-05-31 | 1989-05-31 | 温度分布検知センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH034237U JPH034237U (bs) | 1991-01-17 |
JPH088429Y2 true JPH088429Y2 (ja) | 1996-03-06 |
Family
ID=31591697
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989062495U Expired - Fee Related JPH088429Y2 (ja) | 1989-05-31 | 1989-05-31 | 温度分布検知センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH088429Y2 (bs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002107233A (ja) * | 2000-09-27 | 2002-04-10 | Toshiba Corp | 熱電対装置 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4567131B2 (ja) * | 1999-12-27 | 2010-10-20 | 川惣電機工業株式会社 | 連続測温装置 |
JP2002022548A (ja) * | 2000-07-07 | 2002-01-23 | Kawaso Electric Industrial Co Ltd | 連続測温プローブ |
JP2007266439A (ja) * | 2006-03-29 | 2007-10-11 | Matsushita Electric Ind Co Ltd | 基板処理装置および基板処理方法 |
JP5045454B2 (ja) * | 2008-01-22 | 2012-10-10 | 山里産業株式会社 | 管壁への熱電対取付構造及び熱電対取付方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5784324A (en) * | 1980-11-14 | 1982-05-26 | Sukegawa Denki Kogyo Kk | Manufacture of temperature measuring body with multiple measuring points |
JPS607309Y2 (ja) * | 1982-07-22 | 1985-03-11 | 昌明 岡部 | 仕切付の段ボ−ル箱 |
JPS60162896U (ja) * | 1984-04-05 | 1985-10-29 | 株式会社 日向製錬所 | 炉内雰囲気温度分布測定装置 |
JPS618635A (ja) * | 1984-06-25 | 1986-01-16 | Sukegawa Denki Kogyo Kk | シ−ス型測温抵抗体の製作方法 |
JPS6375826U (bs) * | 1986-11-05 | 1988-05-20 |
-
1989
- 1989-05-31 JP JP1989062495U patent/JPH088429Y2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002107233A (ja) * | 2000-09-27 | 2002-04-10 | Toshiba Corp | 熱電対装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH034237U (bs) | 1991-01-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |