JPH088088Y2 - Magnetic green sheet laminating device - Google Patents

Description

[Detailed description of the device]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic green sheet laminating apparatus for laminating magnetic green sheets containing magnetic ceramics, in which a conductor forming an inductor is formed inside a laminated chip of magnetic ceramics. The present invention relates to a green sheet laminating apparatus applicable to manufacturing a laminated chip inductor.

[0002]

2. Description of the Related Art A method of manufacturing a laminated chip inductor by laminating magnetic green sheets containing a magnetic ceramic and embedding a conductor inside thereof is disclosed in, for example, Japanese Patent Laid-Open No. 2-1.
It is known from Japanese Patent No. 51403. A general means for manufacturing this type of laminated chip inductor is, for example, a series of steps as described below.

First, a green sheet made of magnetic powder such as ferrite and an organic binder is formed, and through holes are formed at predetermined positions on the green sheet. Further, a conductive paste is used on one surface of the green sheet to print a coil pattern such as an arc shape or a U-shape, and a conductor is provided in the through hole so as to be electrically connected to one end of the coil pattern. Is printed. Then, the green sheets are laminated so that the coil pattern is sequentially connected between the upper and lower green sheets through the through holes, and the green sheets are thermocompression bonded to be integrated.
Next, the obtained laminated body is cut into chips, separated, and baked. After that, external electrodes are formed on the laminated chip to complete the laminated chip inductor.

On the other hand, an apparatus for cutting and stacking green sheets into a predetermined shape is known, for example, from Japanese Patent Publication No. 2-158306. The step of stacking the green sheets will be described. First, the green sheet obtained by mixing the organic binder and the like is placed on a conveyor device and conveyed. Next, this green sheet
It is cut into a predetermined shape at a predetermined position, and at the same time, it is adsorbed on the lower surface of the laminating head by a vacuum adsorption mechanism, and the cut green sheets are transferred to a laminating table for laminating in a predetermined order and held on it.

Subsequently, the green sheet held by the laminating head is lowered onto the laminating table and temporarily pressure-bonded from the upper surface thereof. The pressing is performed here so that the stacked green sheets are not displaced when the stacking table is moved. Repeat the above operation,
After laminating a predetermined number of green sheets, the obtained laminated body of green sheets is conveyed to a press machine, temporarily press-bonded, and then pressure-bonded by another press machine to be integrated.

[0007]

By the way, in the above prior art, one green sheet is cut in the process of cutting the green sheets into a predetermined shape and then transferring them to a stacking table for stacking a plurality of them. Each time the sheet is placed on the stacking table, the green sheet under the sheet is temporarily pressure-bonded, so that the lower green sheet receives the compressive force more times and is gradually crushed. As a result, the accuracy and reliability of the completed multilayer chip inductor deteriorate, and the accuracy of the inductance value of the inductor formed inside the chip is adversely affected. In addition, there is a problem that the cycle time of the stacking process becomes long due to the time required for temporary pressure bonding each time the green sheet is placed on the stacking table, and the productivity of the multilayer chip inductor is reduced. . Further, in order to improve productivity, when the green sheet is placed on the above-mentioned stacking table without performing the above-mentioned temporary pressure bonding, a deviation occurs between the stacked green sheets, and the obtained stacked chip is obtained. As a result, the characteristics of the inductor deteriorate and the inductance value becomes unstable.

An object of the present invention is to solve the above-mentioned problems in the prior art and to accurately laminate a magnetic green sheet having a predetermined shape on a laminating table with a relatively simple structure without causing misalignment. Another object of the present invention is to provide a magnetic material green sheet laminating apparatus that can be easily discharged and conveyed after further lamination.

[0009]

To achieve the above object, the present invention comprises a stacking head movable horizontally and vertically and a stacking table arranged at a position where the stacking head is movable. A magnetic green sheet laminating apparatus for cutting a green sheet containing a magnetic ceramic with the laminating head, laminating the sheets, placing the laminated green sheets on the laminating table, and discharging the laminated green sheets from the table; There is provided a magnetic green sheet laminating apparatus characterized in that the laminating table comprises a magnetism generating means, a through hole opening to a plate surface, and a compressed air source for ejecting air from the through hole.

[0010]

According to the present invention, when the magnetic green sheet containing the magnetic ceramic is placed on the laminating table by the laminating head, it is generated by the magnetism generating means arranged on the surface of the laminating table. By attracting and holding by using magnetic force, the magnetic material green sheet of a predetermined shape is not subjected to temporary pressure bonding, etc., without displacement,
It is possible to hold it securely. Therefore, in particular, crushing due to temporary pressure bonding in the lower layer of the laminated body and displacement of the laminated position due to displacement or the like are both eliminated. Furthermore, after stacking,
When the magnetic green sheets stacked on the stacking table are conveyed to the next step, air is ejected from the through holes to supply the air between the green sheets and the stacking table surface. As a result, the magnetic green sheet is lifted from the stacking table, so that the stack can be easily discharged from the stacking table and conveyed.

[0012]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 4 shows a schematic configuration of an apparatus for manufacturing a multilayer chip inductor. Reference numeral 1 in the figure denotes a conveyor device, and the conveyor belt 11 supplies the magnetic green sheet 100.

The magnetic green sheet 100 is made of Fe.
Ni-Z containing ₂ O ₃ , ZnO, NiO and CuO as main components
Polyvinyl butyral is used as a binder in n-Cu ferrite powder, and is formed as a long ferrite green sheet having a thickness of 100 μm by means such as a doctor blade method. As shown in FIG. 2, the green sheet 100 is cut into a rectangular shape having a predetermined size, a through hole 101 is formed at a predetermined position, and a coil pattern 102 is formed on the surface of the green sheet 100 using a conductor paste. It In addition to the magnetic green sheet 100 having such a coil pattern 102, a magnetic green sheet having no through hole or coil pattern, that is, a cover green sheet 100C is prepared separately.
These cover green sheets 100C are laminated so as to form the uppermost and lowermost layers of the magnetic green sheet 100, as described later. Reference numeral 24 in the figure is
It is a stacking table on which the above green sheet is placed, which will be described later.

The magnetic green sheet 100 manufactured as described above is placed on the conveying path of the conveyor device 1 shown in FIG. 4 and conveyed to the laminating section 2. This laminated part 2
As shown in FIG. 4, a base 20 arranged below the conveyor belt 11 of the conveyor device 1, a laminating head 21 arranged above the base 20, and an elevating mechanism for vertically elevating the laminating head. 22 and a moving stage device 23 to which the elevating mechanism is attached in order to move the stacking head in the X and Y directions. Reference numeral 12 in the drawing indicates a belt rail.

As shown in FIG. 6, a urethane rubber frame 201 surrounds the outer periphery of the base 20 of the laminated portion 2.
Is attached. Further, a cutter blade 211 is attached to the side of the lower end of the laminated head 21 so as to correspond to the urethane rubber frame 201 of the base 20, and the lower surface of the cutter blade 211 is attached to the holding portion 2 of the magnetic green sheet.
It is 12. As shown in FIG. 7, a plurality of electromagnets 213, 213 ... Are arranged in the holding portion 212 of the laminated head 21. As shown in FIG. 8, the electromagnet 213 includes an electromagnetic coil 213 wound around a core 2131.
1 and a yoke 2 which is annularly drawn from the core 2131
And 133.

As shown in FIG. 5, a laminating table 24 is disposed adjacent to the base 20, and magnetic green sheets are laminated here, as will be described later. FIG.
As shown in FIG. 3, a plurality of magnets 241, 241 ... Are arranged in parallel on the board surface of the stacking table 24 so that the N poles and the S poles alternate. Further, through holes 242, 242, ... Opening on the board surface of the laminating table 24 are arranged between the magnets 241, 241 ,.
As shown in FIG. 3, a compressed air pump 243 is connected to the laminating table 24 via a joint 245, whereby the back surface of the laminating table 24 is pressed and the through holes 242, 242 are formed. Air is ejected from the board surface of the laminating table 24 through.
A breathable release sheet 110 such as paper is laid on the board surface of the laminating table 24 in advance.

In FIG. 4, a pressing device 3 for pressing and pressing the stacked magnetic green sheets is further provided at the destination of the stacked magnetic green sheets carried out from the stacking section 2. Before that, there is provided a cutting device 4 for cutting the pressure-bonded laminated magnetic green sheet into chips, and a firing furnace 5 for firing the chip-divided magnetic laminated green sheets. .

Next, the operation of the manufacturing apparatus of this laminated chip inductor will be described. First, in (a) of FIG. 6, the magnetic green sheet 100 for a laminated chip inductor obtained as described above is conveyed onto the conveyor belt 11 of the conveyor device 1 to be the base of the laminating unit 2. 20 are placed. At this time, the conveyor belt 11
The belt rails 12, 12 that support the magnets are lowered, and the magnetic green sheet 100 is fixed on the base 20. Therefore, as shown in FIG. 6B, the stacking head 21 arranged above the base is lowered to press the magnetic green sheet 100 into a predetermined shape and size, and at the same time, to form the predetermined shape. The cut magnetic green sheet 100 is sucked and held by the holding portion 212 on the lower surface of the stacking head 21. That is, at this time, the holding portion 212 of the stacking head
A plurality of electromagnets 213, 213 ... (See FIG. 8) arranged on the plane are energized, a magnetic field is generated, and a magnetic force is generated. This magnetic flux passes through the magnetic material green sheet 100 as indicated by the broken line arrow in FIG. 8, and thus the magnetic force holds the magnetic material green sheet 100 in close contact with the plane of the holding portion 212.

After that, the laminated head 11 holds the magnetic green sheet cut into a predetermined shape in its holding portion 21.
Ascending and holding in the state of being adsorbed and held by 2 and returning to the original position.
At the same time, the above-mentioned belt rails 12 and 12 are also raised, and the remaining magnetic green sheet 100 having a predetermined shape cut.
Is lifted from the base 20 and moved to the side to be removed.

Then, the next magnetic green sheet 100 is formed.
Are transferred and fed onto the conveyor belt 11, fixed on the base 20 and cut into a predetermined shape in the same manner as described above. At the same time, the magnetic green sheet 100 cut into the predetermined shape is used in the stacking head 21 by the previous operation.
It is laminated under the magnetic material green sheet 100 that is adsorbed and held by the holding portion 212. By repeating this operation a predetermined number of times, the holding portion 212 of the stacking head 21 is
A predetermined number of cover sheets 100C, followed by a magnetic green sheet 100 and a cover sheet 10
0C is sequentially laminated.

The laminated magnetic green sheets 100 laminated in a predetermined number in this manner are then placed on the laminating table 24 disposed adjacent to the laminating head 21, as shown in FIG. To be done. That is, after the stacking head 21 is lifted by the lifting mechanism 22, the stacking table 2 is moved by the moving stage device 23 in the X and Y directions.
4 and then descends and is held by the holding portion 212 of the laminating head 21. The magnetic sheets 100, 100 ...
Are placed on the surface of the laminating table 24. At the same time, the stacking head 21 has the electromagnet 21 of the holding portion 212.
The power supplied to 3, 213 ... Is reduced or cut off. On the other hand, as shown in FIGS. 2 and 3, on the board surface of the laminating table 24, the release sheet 1 having air permeability in advance.
10 is laid, and a plurality of magnets 241, 241, ... Are further provided under the surface of the laminated green sheet 100.
The magnetic force of 1, 241 ... And this magnet 24
The magnetic force of 1, 241, ... Is retained, and displacement does not occur without temporary pressure bonding.

Next, when the magnetic green sheets 100 thus laminated are discharged from the laminating table 22 and sent to the next step, the compressed air pump 243 shown in FIG. Send air to the through hole 2
Air is ejected from 42, and air is supplied between the green sheet 100 and the laminating table surface through the release sheet 110 having air permeability. As a result, the magnetic green sheet floats above the stacking table, so that the stacked green sheet 100 can be easily discharged from the stacking table 24 and conveyed.

Thereafter, the laminated green sheet 100 placed on the laminating table 24 is thermocompression-bonded by the pressing device 3 at a temperature of 100 ° C. and a pressure of 300 kg / cm ² , for example, and then cut. After being cut and divided into chips by the device 4, for example, 900 ° C. in the firing furnace 5.
It is baked at the temperature of. Further, a conductive paste containing Ag or the like as a main component is applied to both end faces of this chip-shaped fired body, and this is baked at a temperature of, for example, 800 ° C. to form external electrodes, and the multilayer chip inductor is completed.

In the above-mentioned embodiment, the laminating head 21 is used.
Although an electromagnet is used as a magnetic generator provided on the plane of the holding portion 212 of, the permanent magnet is used, for example, and compressed air or the like is fed into the gap when the adsorbed laminated green sheet is subsequently removed. It is also possible. Further, the magnet on the laminating table 24 can also be an electromagnet, and in that case, the magnetic force can be turned on and off by turning on and off the electric power to the electromagnet. Further, the laminated head 21 has the holding surface 212 as described above.
In addition to the type in which a plurality of green sheets are stacked and held, a type in which green sheets are stacked one by one on the stacking table 24 can be similarly adopted.

[0025]

As is apparent from the above description, the magnetic green sheet laminating apparatus according to the present invention uses magnetic force and air pressure to have a relatively simple structure.
The magnetic green sheets cut into a predetermined shape can be stacked without pressure bonding, placed on a stacking table, and then smoothly discharged. Therefore, without crushing or shifting in some layers of the laminated magnetic sheets,
A laminated body of high quality magnetic material sheets can be efficiently manufactured.

[Brief description of drawings]

FIG. 1 is a partially enlarged plan view showing a structure of a board surface of a laminating table of a magnetic green sheet laminating apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic perspective view showing a stacking table and a magnetic material green sheet stacked on the stacking table by the multilayer chip inductor manufacturing apparatus.

FIG. 3 is a vertical cross-sectional side view showing a stacking table of the multilayer chip inductor manufacturing apparatus.

FIG. 4 is a schematic configuration diagram illustrating an outline of a laminated chip inductor manufacturing apparatus that employs the magnetic green sheet laminating apparatus.

FIG. 5 is a side view showing an overall structure of a laminated portion of a laminated chip inductor manufacturing apparatus adopting the above magnetic green sheet laminating apparatus.

FIG. 6 is a cross-sectional view of an essential part for explaining the operation of the above magnetic green sheet laminating apparatus.

FIG. 7 is a bottom view showing the bottom structure of the laminated head.

FIG. 8 is a partially enlarged cross-sectional view showing the detailed structure of an electromagnet provided on the bottom surface of the stacking head, for explaining the magnetic green sheet holding structure of the stacking head.

[Explanation of symbols]

 1 Conveyor Device 11 Belt Conveyor 2 Laminating Unit 20 Base 21 Laminating Head 211 Cutter Blade 212 Holding Unit 213 Electromagnet 22 Elevating Device 23 Moving Stage Device 24 Laminating Table 241 Magnet 242 Through Hole 243 Compressed Air Pump 3 Pressing Device 4 Cutting Device 5 Baking furnace 100 Magnetic green sheet 101 Through hole 102 Coil pattern

Claims (2)

[Scope of utility model registration request] 1. A green sheet containing a magnetic ceramic is provided by the laminating head, which comprises a laminating head movable horizontally and vertically and a laminating table arranged at a position where the laminating head can move. In a magnetic green sheet laminating apparatus that cuts and laminates, puts this on the laminating table, and ejects the laminated green sheet from the table, the laminating table has a magnetic generation means and an opening on the plate surface. And a through hole, and a compressed air source for ejecting air from the through hole. 2. The laminating apparatus according to claim 1, wherein magnets and through holes are alternately arranged on the surface of the laminating table.