JPH087459Y2 - スカベンジヤの熱排気自動制御装置 - Google Patents
スカベンジヤの熱排気自動制御装置Info
- Publication number
- JPH087459Y2 JPH087459Y2 JP1987116379U JP11637987U JPH087459Y2 JP H087459 Y2 JPH087459 Y2 JP H087459Y2 JP 1987116379 U JP1987116379 U JP 1987116379U JP 11637987 U JP11637987 U JP 11637987U JP H087459 Y2 JPH087459 Y2 JP H087459Y2
- Authority
- JP
- Japan
- Prior art keywords
- scavenger
- temperature
- adjusting device
- duct air
- heat exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002516 radical scavenger Substances 0.000 title claims description 27
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 230000007423 decrease Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
- Feedback Control In General (AREA)
- Control Of Temperature (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987116379U JPH087459Y2 (ja) | 1987-07-29 | 1987-07-29 | スカベンジヤの熱排気自動制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987116379U JPH087459Y2 (ja) | 1987-07-29 | 1987-07-29 | スカベンジヤの熱排気自動制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6421413U JPS6421413U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-02-02 |
| JPH087459Y2 true JPH087459Y2 (ja) | 1996-03-04 |
Family
ID=31358862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987116379U Expired - Lifetime JPH087459Y2 (ja) | 1987-07-29 | 1987-07-29 | スカベンジヤの熱排気自動制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH087459Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52147253U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1976-05-04 | 1977-11-08 | ||
| JPS628633U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1985-07-01 | 1987-01-19 | ||
| JPS6266627A (ja) * | 1985-09-19 | 1987-03-26 | Oki Electric Ind Co Ltd | 半導体熱処理装置 |
-
1987
- 1987-07-29 JP JP1987116379U patent/JPH087459Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6421413U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-02-02 |
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