JPH087441Y2 - 流量制御装置 - Google Patents

流量制御装置

Info

Publication number
JPH087441Y2
JPH087441Y2 JP6335289U JP6335289U JPH087441Y2 JP H087441 Y2 JPH087441 Y2 JP H087441Y2 JP 6335289 U JP6335289 U JP 6335289U JP 6335289 U JP6335289 U JP 6335289U JP H087441 Y2 JPH087441 Y2 JP H087441Y2
Authority
JP
Japan
Prior art keywords
signal
flow rate
valve
control
function
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6335289U
Other languages
English (en)
Japanese (ja)
Other versions
JPH033001U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
浩 西川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP6335289U priority Critical patent/JPH087441Y2/ja
Publication of JPH033001U publication Critical patent/JPH033001U/ja
Application granted granted Critical
Publication of JPH087441Y2 publication Critical patent/JPH087441Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feedback Control In General (AREA)
  • Flow Control (AREA)
JP6335289U 1989-05-31 1989-05-31 流量制御装置 Expired - Lifetime JPH087441Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6335289U JPH087441Y2 (ja) 1989-05-31 1989-05-31 流量制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6335289U JPH087441Y2 (ja) 1989-05-31 1989-05-31 流量制御装置

Publications (2)

Publication Number Publication Date
JPH033001U JPH033001U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-01-14
JPH087441Y2 true JPH087441Y2 (ja) 1996-03-04

Family

ID=31593318

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6335289U Expired - Lifetime JPH087441Y2 (ja) 1989-05-31 1989-05-31 流量制御装置

Country Status (1)

Country Link
JP (1) JPH087441Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH033001U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-01-14

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