JPH085160Y2 - 基板移し替え治具 - Google Patents
基板移し替え治具Info
- Publication number
- JPH085160Y2 JPH085160Y2 JP1989055402U JP5540289U JPH085160Y2 JP H085160 Y2 JPH085160 Y2 JP H085160Y2 JP 1989055402 U JP1989055402 U JP 1989055402U JP 5540289 U JP5540289 U JP 5540289U JP H085160 Y2 JPH085160 Y2 JP H085160Y2
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- fork
- jig
- substrates
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 41
- 239000000428 dust Substances 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 125000002066 L-histidyl group Chemical group [H]N1C([H])=NC(C([H])([H])[C@](C(=O)[*])([H])N([H])[H])=C1[H] 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Liquid Crystal (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989055402U JPH085160Y2 (ja) | 1989-05-15 | 1989-05-15 | 基板移し替え治具 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989055402U JPH085160Y2 (ja) | 1989-05-15 | 1989-05-15 | 基板移し替え治具 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02145240U JPH02145240U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-12-10 |
JPH085160Y2 true JPH085160Y2 (ja) | 1996-02-14 |
Family
ID=31578320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989055402U Expired - Lifetime JPH085160Y2 (ja) | 1989-05-15 | 1989-05-15 | 基板移し替え治具 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH085160Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61291335A (ja) * | 1985-06-19 | 1986-12-22 | Denkoo:Kk | 半導体移換え装置 |
JPS6265843A (ja) * | 1985-09-12 | 1987-03-25 | Denkoo:Kk | 半導体ウエハ取出し装置 |
JPS63102236U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-12-23 | 1988-07-02 |
-
1989
- 1989-05-15 JP JP1989055402U patent/JPH085160Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH02145240U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-12-10 |