JPH08506383A - 拡散バリヤー層 - Google Patents
拡散バリヤー層Info
- Publication number
- JPH08506383A JPH08506383A JP6517846A JP51784694A JPH08506383A JP H08506383 A JPH08506383 A JP H08506383A JP 6517846 A JP6517846 A JP 6517846A JP 51784694 A JP51784694 A JP 51784694A JP H08506383 A JPH08506383 A JP H08506383A
- Authority
- JP
- Japan
- Prior art keywords
- diffusion barrier
- layer
- metal
- reaction
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12861—Group VIII or IB metal-base component
- Y10T428/12875—Platinum group metal-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12861—Group VIII or IB metal-base component
- Y10T428/12944—Ni-base component
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Laminated Bodies (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.耐熱性金属製品上に安定な連続金属間化合物拡散バリヤーを製造する方法で あって、 少なくとも第1金属からなる第1層を製品の表面上に堆積するステップ; 少なくとも第2金属からなる第2層を製品の表面上に、所定のモル比の前記第 1金属及び第2金属を与えるのに十分な深さに堆積するステップ:及び 前記第1金属と第2金属とを化合させて金属間化合物種を形成する反応処理を 実施するステップ からなる方法。 2.前記反応ステップの前に、多数回の堆積ステップを順次行い、必要な厚さの 第1及び第2金属を積層する請求項1に記載の方法。 3.種々の組成を有する複数の拡散バリヤーを順次堆積し、多種の拡散に対する バリヤーとして作用させる請求項1または2に記載の方法。 4.前記反応処理が、堆積層を、拡散バリヤー前駆体の構成金属間で発熱反応を 起こすのに十分な温度に加熱することからなる請求項1から3のいずれか一項に 記載の方法。 5.前記反応処理が、レーザービームまたはプラズマ処理のごとき高エネルギー 表面処理によって堆積層を熱励起することからなる請求項1から4のいずれか一 項に記載の方法。 6.前記反応処理ステップの前に、最も外側の拡散バリヤー層にオーバーレイコ ーティングを付与することによって、金属製品基板、拡散バリヤー層及びオーバ ーレイコーティングからなる完全保護系の部分を形成し、その完全保護系をその 場で反応処理する請求項1から5のいずれか一項に記載の方法。 7.前記反応処理ステップを非周囲圧力で実施する請求項1から6のいずれか一 項に記載の方法。 8.0.1μm〜10μmの全厚を有する請求項1から7のいずれか一項に記載 の方法によって製造された拡散バリヤー。 9.0.8μm〜3.0μmの全厚を有する請求項8に記載の拡散バリヤー。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB939302978A GB9302978D0 (en) | 1993-02-15 | 1993-02-15 | Diffusion barrier layers |
GB9302978.3 | 1993-02-15 | ||
PCT/GB1994/000301 WO1994018359A1 (en) | 1993-02-15 | 1994-02-15 | Diffusion barrier layers |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH08506383A true JPH08506383A (ja) | 1996-07-09 |
JP3258663B2 JP3258663B2 (ja) | 2002-02-18 |
Family
ID=10730453
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51784694A Expired - Fee Related JP3258663B2 (ja) | 1993-02-15 | 1994-02-15 | 拡散バリヤー層 |
Country Status (10)
Country | Link |
---|---|
US (1) | US5741604A (ja) |
EP (1) | EP0683826B1 (ja) |
JP (1) | JP3258663B2 (ja) |
CA (1) | CA2156081C (ja) |
DE (1) | DE69403320T2 (ja) |
ES (1) | ES2105640T3 (ja) |
GB (2) | GB9302978D0 (ja) |
MY (1) | MY110954A (ja) |
RU (1) | RU2131482C1 (ja) |
WO (1) | WO1994018359A1 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9612811D0 (en) * | 1996-06-19 | 1996-08-21 | Rolls Royce Plc | A thermal barrier coating for a superalloy article and a method of application thereof |
FR2757181B1 (fr) * | 1996-12-12 | 1999-02-12 | Snecma | Procede de realisation d'un revetement protecteur a haute efficacite contre la corrosion a haute temperature pour superalliages, revetement protecteur obtenu par ce procede et pieces protegees par ce revetement |
JP3735461B2 (ja) * | 1998-03-27 | 2006-01-18 | 株式会社シンクロン | 複合金属の化合物薄膜形成方法及びその薄膜形成装置 |
US20020098294A1 (en) * | 2000-02-07 | 2002-07-25 | Yuk-Chiu Lau | Method of providing a protective coating on a metal substrate, and related articles |
US7433948B2 (en) * | 2002-01-23 | 2008-10-07 | Cisco Technology, Inc. | Methods and apparatus for implementing virtualization of storage within a storage area network |
US20100068556A1 (en) * | 2005-12-09 | 2010-03-18 | General Electric Company | Diffusion barrier layer and methods of forming |
DE102008052247A1 (de) * | 2008-10-18 | 2010-04-22 | Mtu Aero Engines Gmbh | Bauteil für eine Gasturbine und Verfahren zur Herstellung des Bauteils |
US9103009B2 (en) | 2012-07-04 | 2015-08-11 | Apple Inc. | Method of using core shell pre-alloy structure to make alloys in a controlled manner |
US10065396B2 (en) | 2014-01-22 | 2018-09-04 | Crucible Intellectual Property, Llc | Amorphous metal overmolding |
TW201739704A (zh) * | 2016-01-20 | 2017-11-16 | 康寧公司 | 塑形玻璃基材料之具高溫用途之塗層之模具 |
CN112323066B (zh) * | 2020-09-21 | 2023-01-17 | 中国航发沈阳黎明航空发动机有限责任公司 | 一种适用于大型构件的扩散阻挡层制备方法 |
GB202118927D0 (en) * | 2021-12-23 | 2022-02-09 | Rolls Royce Plc | Method of forming protective coating, protective coating, and coated article |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1900273B2 (de) * | 1968-01-03 | 1972-03-16 | E I du Pont de Nemours and Co, Wilmington, Del (VStA) | Verfahren zum herstellen eines mehrschichtigen metallkoerpers aus eienm stahlpartner und einem aluminiumpartner durch sprengplattieren |
US3979273A (en) * | 1975-05-27 | 1976-09-07 | United Technologies Corporation | Method of forming aluminide coatings on nickel-, cobalt-, and iron-base alloys |
US4198442A (en) * | 1977-10-31 | 1980-04-15 | Howmet Turbine Components Corporation | Method for producing elevated temperature corrosion resistant articles |
US4284688A (en) * | 1978-12-21 | 1981-08-18 | Bbc Brown, Boveri & Company Limited | Multi-layer, high-temperature corrosion protection coating |
SE8000480L (sv) * | 1979-02-01 | 1980-08-02 | Johnson Matthey Co Ltd | Artikel lemplig for anvendning vid hoga temperaturer |
US4305998A (en) * | 1980-02-04 | 1981-12-15 | The United States Of America As Represented By The Secretary Of The Navy | Protective coating |
JPS57155364A (en) * | 1981-03-20 | 1982-09-25 | Hitachi Ltd | Heat resistant alloy member |
GB8711697D0 (en) * | 1987-05-18 | 1987-06-24 | Secr Defence Brit | Coated titanium articles(ii) |
GB2230792A (en) * | 1989-04-21 | 1990-10-31 | Secr Defence | Multiple source physical vapour deposition. |
US5270081A (en) * | 1990-02-02 | 1993-12-14 | Mtu Motoren-Und Turbinen-Union Muenchen Gmbh | Iron-base alloy structural component having a corrosion-inhibiting coating, and method of producing the coating |
JP2767972B2 (ja) * | 1990-05-14 | 1998-06-25 | トヨタ自動車株式会社 | TiAl系金属間化合物層の製造方法 |
US5198043A (en) * | 1991-07-22 | 1993-03-30 | The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of The University Of Oregon | Making amorphous and crystalline alloys by solid state interdiffusion |
DE4222211C1 (ja) * | 1992-07-07 | 1993-07-22 | Mtu Muenchen Gmbh | |
GB9218858D0 (en) * | 1992-09-05 | 1992-10-21 | Rolls Royce Plc | High temperature corrosion resistant composite coatings |
US5500252A (en) * | 1992-09-05 | 1996-03-19 | Rolls-Royce Plc | High temperature corrosion resistant composite coatings |
WO1995002900A1 (en) * | 1993-07-15 | 1995-01-26 | Astarix, Inc. | Aluminum-palladium alloy for initiation of electroless plating |
-
1993
- 1993-02-15 GB GB939302978A patent/GB9302978D0/en active Pending
-
1994
- 1994-02-15 MY MYPI94000323A patent/MY110954A/en unknown
- 1994-02-15 US US08/505,198 patent/US5741604A/en not_active Expired - Fee Related
- 1994-02-15 RU RU95119009/02A patent/RU2131482C1/ru not_active IP Right Cessation
- 1994-02-15 ES ES94906325T patent/ES2105640T3/es not_active Expired - Lifetime
- 1994-02-15 GB GB9515701A patent/GB2290309B/en not_active Expired - Fee Related
- 1994-02-15 EP EP94906325A patent/EP0683826B1/en not_active Expired - Lifetime
- 1994-02-15 DE DE69403320T patent/DE69403320T2/de not_active Expired - Fee Related
- 1994-02-15 CA CA002156081A patent/CA2156081C/en not_active Expired - Fee Related
- 1994-02-15 WO PCT/GB1994/000301 patent/WO1994018359A1/en active IP Right Grant
- 1994-02-15 JP JP51784694A patent/JP3258663B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69403320D1 (de) | 1997-06-26 |
MY110954A (en) | 1999-07-31 |
ES2105640T3 (es) | 1997-10-16 |
DE69403320T2 (de) | 1997-11-06 |
US5741604A (en) | 1998-04-21 |
JP3258663B2 (ja) | 2002-02-18 |
CA2156081A1 (en) | 1994-08-18 |
EP0683826A1 (en) | 1995-11-29 |
GB2290309B (en) | 1996-10-30 |
CA2156081C (en) | 2004-07-27 |
GB9302978D0 (en) | 1993-03-31 |
EP0683826B1 (en) | 1997-05-21 |
RU2131482C1 (ru) | 1999-06-10 |
GB2290309A (en) | 1995-12-20 |
WO1994018359A1 (en) | 1994-08-18 |
GB9515701D0 (en) | 1995-10-04 |
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