JPH08359Y2 - カーボン蒸着装置 - Google Patents
カーボン蒸着装置Info
- Publication number
- JPH08359Y2 JPH08359Y2 JP1990402932U JP40293290U JPH08359Y2 JP H08359 Y2 JPH08359 Y2 JP H08359Y2 JP 1990402932 U JP1990402932 U JP 1990402932U JP 40293290 U JP40293290 U JP 40293290U JP H08359 Y2 JPH08359 Y2 JP H08359Y2
- Authority
- JP
- Japan
- Prior art keywords
- carbon
- sample
- time
- heating current
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052799 carbon Inorganic materials 0.000 title claims description 67
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims description 66
- 230000008021 deposition Effects 0.000 title description 4
- 238000010438 heat treatment Methods 0.000 claims description 24
- 238000007740 vapor deposition Methods 0.000 claims description 20
- 238000000151 deposition Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000009413 insulation Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 4
- 239000004698 Polyethylene Substances 0.000 description 3
- 229920006248 expandable polystyrene Polymers 0.000 description 3
- -1 polyethylene Polymers 0.000 description 3
- 229920000573 polyethylene Polymers 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990402932U JPH08359Y2 (ja) | 1990-12-12 | 1990-12-12 | カーボン蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990402932U JPH08359Y2 (ja) | 1990-12-12 | 1990-12-12 | カーボン蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0489544U JPH0489544U (cs) | 1992-08-05 |
| JPH08359Y2 true JPH08359Y2 (ja) | 1996-01-10 |
Family
ID=31880780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990402932U Expired - Lifetime JPH08359Y2 (ja) | 1990-12-12 | 1990-12-12 | カーボン蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08359Y2 (cs) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0730674Y2 (ja) * | 1989-04-04 | 1995-07-12 | サンユー電子株式会社 | カーボン蒸着装置 |
-
1990
- 1990-12-12 JP JP1990402932U patent/JPH08359Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0489544U (cs) | 1992-08-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |