JPH08359Y2 - Carbon deposition equipment - Google Patents

Description

[Detailed description of the device]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carbon vapor deposition apparatus for vapor depositing carbon on a sample surface.

[0002]

2. Description of the Related Art In conventional carbon vapor deposition, carbon rods are made into contact with each other by narrowing their tips, and a large current is passed between them to raise the temperature of the carbon bonding surface to sublimate the carbon and place it around it. The sample is vapor-deposited on the sample.

[0003]

For this reason, the longer the vapor deposition time, the more the carbon rod is red-heated, not only the tip of the carbon rod, and the metal fittings that hold the carbon rod and the surroundings are heated to a high temperature. In the case of a sample that is easily damaged by heat and has good thermal insulation, the temperature of the sample surface rises and thermal deformation occurs. In order to avoid a temperature rise on the tip of the carbon rod, the entire carbon rod, and the sample surface due to heating of the holder due to the long deposition time, for example, as shown in FIG. It is possible to repeat vapor deposition of carbon for several seconds and cooling time for several seconds. However, when carbon vapor deposition is actually performed, there is a problem that thermal damage such as deformation occurs in a foamed polystyrene or a thin polyethylene film that is easily damaged by heat and has good thermal insulation.

The present invention repeats the steps of vapor deposition for a short time in order to suppress the temperature rise of the sample surface as much as possible and then providing a temperature cooling time for the sample surface, and the carbon coating of the sample which is easily damaged by heat and has a good thermal insulation property. The purpose is to enable automatically and easily.

[0005]

[Means for Solving the Problems] Means for solving the problems will be described with reference to FIG. In FIG. 1, the intermittent oscillator 1 is an oscillator that generates a signal for repeatedly supplying a heating current to the carbon rod 6 for a short time and stopping the supply of the heating current for the next time.

The switch 2-1 is a switch for controlling ON / OFF of the heating current supplied to the carbon rod 6 based on the signal generated by the intermittent oscillator 1.

[0007]

According to the present invention, as shown in FIG. 1, in response to a carbon vapor deposition start instruction, the intermittent oscillator 1 supplies a signal for supplying a heating current for a short time, and supplies a heating current for the next time. Generate a signal to stop and switch 2-1 based on this signal.
ON / OFF control is performed to supply the heating current to the carbon rod 6 for a short time to sublimate the sample to deposit carbon on the sample. During the next time, the supply of the heating current is stopped to cool the sample surface temperature. I try to repeat that. Further, the short time for supplying the heating current to the carbon rod 6 and the next time for not supplying the heating current can be arbitrarily set, and / or the heating current to be supplied to the carbon rod 6 can be set to an arbitrary value. .

Therefore, in order to suppress the temperature rise of the sample surface as much as possible, by repeating the vapor deposition for a short time and then providing the temperature cooling time of the sample surface, the carbon coating of the sample which is easily damaged by heat and has a good thermal insulation property. Can be performed automatically and easily.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the construction and operation of an embodiment of the present invention will be described in detail with reference to FIGS. In FIG. 1, the intermittent oscillator 1 generates a signal for repeatedly supplying a heating current to the carbon rod 6 for a short time and stopping the heating current supply for the next time. ,
The operation starts when the switch SW1 is turned ON, and the ON time is set and turned OFF by adjusting the ON time setting resistor 1-1.
This is an oscillator in which the OFF time can be set by adjusting the time setting resistor 1-2.

The relay 2 drives the switch 2-1 ON / OFF by a signal generated by the intermittent oscillator 1 to control ON / OFF the current I passing through the carbon rod 6. The slidac 3 is a power source (for example, 100AC)
This is for adjusting an heating current (current I) flowing through the carbon rod 6 by extracting an arbitrary AC voltage from.

The transformer 4 receives the AC voltage extracted by the sliderac 3 via the switch 2-1 and supplies a low voltage, large current I to the carbon rod 6 to heat it for heating. It is a transformer. The vacuum chamber 5 is a chamber that is evacuated by a pump, and is used for accommodating the carbon rod 6, the sample 7, and the like in the chamber for vapor deposition of carbon.

The carbon rod 6 is for directing a current I to directly heat it to sublimate the carbon and deposit carbon on the surface of the sample 7 arranged in the vicinity. Next, the operation of the configuration of FIG. 1 will be described in detail with reference to the waveform chart of FIG. In FIG. 2, a switch SW1 is a switch that operates the intermittent oscillator 1 to start carbon vapor deposition.

The relay supplies a heating current (current I) to the carbon rod 6 based on a signal from the intermittent oscillator 1 (ON).
It is started or stopped (OFF). The ON time T _ON and the OFF time T _OFF are adjusted by adjusting the ON time setting resistor 1-1 and the OFF time setting resistor 1-2 of the intermittent oscillator 1. The current I is a heating current flowing through the carbon rod 6. The magnitude of the current I is adjusted by adjusting the slidac 3. Although not shown, the voltage may be adjusted using an automatic voltage regulator or SCR.

The coating thickness of the sample is the carbon rod 6
This is the thickness of carbon deposited on the surface of the sample 7 arranged in the vicinity thereof. The sample surface temperature is the surface temperature of the sample 7 to be vapor-deposited with carbon when the carbon rod 6 is heated to vapor-deposit carbon. The operation of the configuration of FIG. 1 will be described in detail below.

(1) An operator turns on the switch SW1 ((A) of the switch SW1 in FIG. 2), and the intermittent oscillator 1
(2) In response to turning on the switch SW1 in (1), the intermittent oscillator 1 is set to the ON time setting resistor 1
-1 corresponding to ON time T _ON and OFF time corresponding to the OFF time setting resistor 1-2 corresponding to OFF time T _OFF are generated, and the relay 2 is ON-OFF controlled as shown in the figure (waveform of the relay in FIG. 2). reference).

(3) During the T _ON time by the relay 2 of (2), the current I is passed through the carbon rod 6 to heat it (see the waveform of the current I in FIG. 2), and the carbon is sublimated to make the sample 7 Evaporate on the surface. As a result, the sample coating film thickness becomes thicker as shown and the sample surface temperature gradually rises. (4) During the time T _OFF by the relay 2 in (2), the flow of the current I through the carbon rod 6 is stopped, the sample surface temperature is gradually lowered, and the sample is cooled.

(5) Similarly, the steps (3) and (4) are repeated, and the carbon deposition is desired while suppressing the sample surface temperature from rising due to heat radiation from the carbon rod 6 during carbon deposition as much as possible. Continue automatically until the coating thickness is reached. Incidentally, the stop is automatically stopped after repeating a predetermined number of times, or when a desired film thickness is obtained by a film thickness meter (not shown) (for example, a carbon film is formed on the film thickness detection plate arranged near the sample 7). When the frequency change amount due to vapor deposition reaches a predetermined value), it is automatically stopped. Further, the magnitude of the current I supplied to the carbon rod 6 is an optimum value obtained in advance by experiments in consideration of the sample surface temperature rise and the carbon vapor deposition film thickness (for example, the current I for a sample which is easily damaged by heat and has good thermal insulation). To (smaller).

Next, a specific example of the present invention will be described with reference to FIG. FIG. 3A shows the relationship between the carbon conduction current I and the sample temperature during normal intermittent vapor deposition. Here, ON time T _ON = 2 seconds and OFF time T _OFF = 5 seconds are set, and the sample temperature when carbon is vapor-deposited on the sample by repeating this is schematically shown. In this example, the foamed polystyrene, polyethylene film, or the like, which is Sample 7, was deformed at the temperature shown in (B).

On the other hand, FIG. 3B shows the relationship between the carbon current I and the sample temperature during the intermittent vapor deposition of the present invention. Here, ON time T _ON = 0.3 seconds, OFF time T
_OFF = 2 seconds, and this is repeated to schematically show the sample temperature when carbon is vapor-deposited on the sample. In this example,
The temperature did not rise to the temperature shown in (C), and the foamed polystyrene and the polyethylene film, which were sample 7, were not deformed, and carbon could be vapor-deposited cleanly. As described above, the present invention supplies the heating current to the carbon rod 6 only for an extremely short time, for example, for 1 second or less, and then for several seconds.
By setting a rest period and repeating this, it was possible to vapor-deposit carbon on a sample which is easily damaged by heat and has a good heat insulating property without being deformed.

[0020]

As described above, according to the present invention,
Carbon coating of a sample that is easily damaged by heat and has good thermal insulation properties because it adopts a configuration in which vapor deposition is repeated for a short time to suppress temperature rise on the sample surface as much as possible, and then temperature cooling time for the sample surface is repeated. Could be done automatically and easily.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an embodiment of the present invention.

FIG. 2 is an operation waveform diagram of the present invention.

FIG. 3 is a waveform chart during intermittent vapor deposition.

[Explanation of symbols]

 1: Intermittent oscillator 1-1: ON time setting resistance 1-2: OFF time setting resistance 2: Relay 2-1: Switch 3: Slidac 4: Transformer 5: Vacuum chamber 6: Carbon rod 7: Sample

Claims (2)

[Scope of utility model registration request] 1. A carbon vapor deposition apparatus for vapor depositing carbon on a sample surface, wherein a heating current is supplied to a carbon rod (6) for 1 second or less ,
An intermittent oscillator (1) that generates a signal for repeating the supply of the heating current for the next time, and a carbon rod (6) based on the signal generated by the intermittent oscillator (1). A carbon vapor deposition device comprising a switch (2-1) for controlling ON / OFF of a heating current to be supplied. 2. A time of 1 second or less for supplying a heating current to the carbon rod (6) and a time for not supplying a heating current are arbitrarily set, and / or a heating current supplied to the carbon rod (6) is set. The carbon vapor deposition device according to claim 1, wherein the carbon vapor deposition device is configured to be set to an arbitrary value.