JPH0489544U - - Google Patents

Info

Publication number
JPH0489544U
JPH0489544U JP40293290U JP40293290U JPH0489544U JP H0489544 U JPH0489544 U JP H0489544U JP 40293290 U JP40293290 U JP 40293290U JP 40293290 U JP40293290 U JP 40293290U JP H0489544 U JPH0489544 U JP H0489544U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP40293290U
Other languages
Japanese (ja)
Other versions
JPH08359Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990402932U priority Critical patent/JPH08359Y2/ja
Publication of JPH0489544U publication Critical patent/JPH0489544U/ja
Application granted granted Critical
Publication of JPH08359Y2 publication Critical patent/JPH08359Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1990402932U 1990-12-12 1990-12-12 カーボン蒸着装置 Expired - Lifetime JPH08359Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990402932U JPH08359Y2 (ja) 1990-12-12 1990-12-12 カーボン蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990402932U JPH08359Y2 (ja) 1990-12-12 1990-12-12 カーボン蒸着装置

Publications (2)

Publication Number Publication Date
JPH0489544U true JPH0489544U (cs) 1992-08-05
JPH08359Y2 JPH08359Y2 (ja) 1996-01-10

Family

ID=31880780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990402932U Expired - Lifetime JPH08359Y2 (ja) 1990-12-12 1990-12-12 カーボン蒸着装置

Country Status (1)

Country Link
JP (1) JPH08359Y2 (cs)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02132654U (cs) * 1989-04-04 1990-11-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02132654U (cs) * 1989-04-04 1990-11-05

Also Published As

Publication number Publication date
JPH08359Y2 (ja) 1996-01-10

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term