JPH083402Y2 - 基板載置搬送装置の停止機構 - Google Patents

基板載置搬送装置の停止機構

Info

Publication number
JPH083402Y2
JPH083402Y2 JP8930590U JP8930590U JPH083402Y2 JP H083402 Y2 JPH083402 Y2 JP H083402Y2 JP 8930590 U JP8930590 U JP 8930590U JP 8930590 U JP8930590 U JP 8930590U JP H083402 Y2 JPH083402 Y2 JP H083402Y2
Authority
JP
Japan
Prior art keywords
elastic body
tip
substrate
piston rod
stopper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8930590U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0446046U (enrdf_load_stackoverflow
Inventor
英治 奥野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP8930590U priority Critical patent/JPH083402Y2/ja
Publication of JPH0446046U publication Critical patent/JPH0446046U/ja
Application granted granted Critical
Publication of JPH083402Y2 publication Critical patent/JPH083402Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Registering Or Overturning Sheets (AREA)
JP8930590U 1990-08-27 1990-08-27 基板載置搬送装置の停止機構 Expired - Lifetime JPH083402Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8930590U JPH083402Y2 (ja) 1990-08-27 1990-08-27 基板載置搬送装置の停止機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8930590U JPH083402Y2 (ja) 1990-08-27 1990-08-27 基板載置搬送装置の停止機構

Publications (2)

Publication Number Publication Date
JPH0446046U JPH0446046U (enrdf_load_stackoverflow) 1992-04-20
JPH083402Y2 true JPH083402Y2 (ja) 1996-01-31

Family

ID=31823192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8930590U Expired - Lifetime JPH083402Y2 (ja) 1990-08-27 1990-08-27 基板載置搬送装置の停止機構

Country Status (1)

Country Link
JP (1) JPH083402Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0446046U (enrdf_load_stackoverflow) 1992-04-20

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