JPH0832549B2 - ヘリウム濃縮法 - Google Patents
ヘリウム濃縮法Info
- Publication number
- JPH0832549B2 JPH0832549B2 JP63504696A JP50469688A JPH0832549B2 JP H0832549 B2 JPH0832549 B2 JP H0832549B2 JP 63504696 A JP63504696 A JP 63504696A JP 50469688 A JP50469688 A JP 50469688A JP H0832549 B2 JPH0832549 B2 JP H0832549B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- seconds
- helium
- adsorption
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000001307 helium Substances 0.000 title claims description 87
- 229910052734 helium Inorganic materials 0.000 title claims description 87
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 title claims description 86
- 238000000034 method Methods 0.000 title claims description 64
- 238000001179 sorption measurement Methods 0.000 claims description 93
- 239000007789 gas Substances 0.000 claims description 86
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 42
- 239000000203 mixture Substances 0.000 claims description 30
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 28
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 15
- 229910052757 nitrogen Inorganic materials 0.000 claims description 14
- 238000011067 equilibration Methods 0.000 claims description 12
- 229910052799 carbon Inorganic materials 0.000 claims description 10
- 239000002808 molecular sieve Substances 0.000 claims description 10
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 8
- 239000003345 natural gas Substances 0.000 claims description 8
- 229930195733 hydrocarbon Natural products 0.000 claims description 7
- 150000002430 hydrocarbons Chemical class 0.000 claims description 7
- 239000002912 waste gas Substances 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 5
- 238000011045 prefiltration Methods 0.000 claims description 2
- 239000000047 product Substances 0.000 description 19
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 230000008929 regeneration Effects 0.000 description 3
- 238000011069 regeneration method Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000003463 adsorbent Substances 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000003795 desorption Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000009189 diving Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 150000002371 helium Chemical class 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000013067 intermediate product Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000029058 respiratory gaseous exchange Effects 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/047—Pressure swing adsorption
- B01D53/0476—Vacuum pressure swing adsorption
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/102—Carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/116—Molecular sieves other than zeolites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/25—Coated, impregnated or composite adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/30—Physical properties of adsorbents
- B01D2253/302—Dimensions
- B01D2253/308—Pore size
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2256/00—Main component in the product gas stream after treatment
- B01D2256/18—Noble gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/10—Single element gases other than halogens
- B01D2257/102—Nitrogen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/70—Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
- B01D2257/702—Hydrocarbons
- B01D2257/7022—Aliphatic hydrocarbons
- B01D2257/7025—Methane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40011—Methods relating to the process cycle in pressure or temperature swing adsorption
- B01D2259/40028—Depressurization
- B01D2259/4003—Depressurization with two sub-steps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40011—Methods relating to the process cycle in pressure or temperature swing adsorption
- B01D2259/40035—Equalization
- B01D2259/40041—Equalization with more than three sub-steps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40011—Methods relating to the process cycle in pressure or temperature swing adsorption
- B01D2259/40058—Number of sequence steps, including sub-steps, per cycle
- B01D2259/40071—Nine
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/404—Further details for adsorption processes and devices using four beds
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/20—Capture or disposal of greenhouse gases of methane
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/151—Reduction of greenhouse gas [GHG] emissions, e.g. CO2
- Y02P20/156—Methane [CH4]
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Separation Of Gases By Adsorption (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3716898.3 | 1987-05-20 | ||
| DE19873716898 DE3716898A1 (de) | 1987-05-20 | 1987-05-20 | Verfahren und vorrichtung zur heliumanreicherung |
| PCT/EP1988/000441 WO1988009306A1 (en) | 1987-05-20 | 1988-05-19 | Process for helium enrichment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02503553A JPH02503553A (ja) | 1990-10-25 |
| JPH0832549B2 true JPH0832549B2 (ja) | 1996-03-29 |
Family
ID=6327950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63504696A Expired - Lifetime JPH0832549B2 (ja) | 1987-05-20 | 1988-05-19 | ヘリウム濃縮法 |
Country Status (10)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160137622A (ko) | 2014-03-28 | 2016-11-30 | 스미토모 세이카 가부시키가이샤 | 목적 가스의 정제 방법 및 정제 장치 |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3716899C1 (de) * | 1987-05-20 | 1988-08-04 | Bergwerksverband Gmbh | Verfahren und Vorrichtung zur Heliumgewinnung |
| ZA915939B (en) * | 1990-08-23 | 1992-06-24 | Boc Group Inc | Process for helium purification |
| US5203888A (en) * | 1990-11-23 | 1993-04-20 | Uop | Pressure swing adsorption process with multiple desorption steps |
| US5255519A (en) * | 1992-08-14 | 1993-10-26 | Millennium Technologies, Inc. | Method and apparatus for increasing efficiency and productivity in a power generation cycle |
| US5707425A (en) * | 1994-10-21 | 1998-01-13 | Nitrotec Corporation | Helium recovery from higher helium content streams |
| US5792239A (en) * | 1994-10-21 | 1998-08-11 | Nitrotec Corporation | Separation of gases by pressure swing adsorption |
| US5632803A (en) * | 1994-10-21 | 1997-05-27 | Nitrotec Corporation | Enhanced helium recovery |
| US5542966A (en) * | 1994-10-21 | 1996-08-06 | Nitrotec Corporation | Helium recovery |
| US5536300A (en) * | 1994-10-21 | 1996-07-16 | Nitrotec Corporation | Natural gas enrichment process |
| US5906673A (en) * | 1997-05-15 | 1999-05-25 | Nitrotec Corporation | Pressure swing system with auxiliary adsorbent bed |
| DE19927773A1 (de) * | 1999-06-17 | 2000-12-21 | Otten Ernst Wilhelm | Rückgewinnung von ·3·He |
| DE10007440A1 (de) * | 2000-02-18 | 2001-08-23 | Linde Ag | Verfahren zum Abtrennen einer Helium-reichen Fraktion aus einem wenigstens Methan, Stickstoff und Helium enthaltenden Strom |
| RU2182875C2 (ru) * | 2000-05-10 | 2002-05-27 | ОАО "Востокгазпром" | Способ транспортировки поликомпонентного природного газа и устройство для его осуществления |
| MXPA04000965A (es) * | 2001-07-31 | 2005-02-22 | Praxair Technology Inc | Recuperacion de helio. |
| US20040194513A1 (en) * | 2003-04-04 | 2004-10-07 | Giacobbe Frederick W | Fiber coolant system including improved gas seals |
| US20050217479A1 (en) * | 2004-04-02 | 2005-10-06 | Membrane Technology And Research, Inc. | Helium recovery from gas streams |
| DE102008007925A1 (de) * | 2008-02-07 | 2009-08-13 | Linde Aktiengesellschaft | Verfahren zur Helium-Gewinnung |
| US7780764B2 (en) * | 2008-06-27 | 2010-08-24 | Praxair Technology, Inc. | Methods and systems for helium recovery |
| JP5968252B2 (ja) | 2013-03-04 | 2016-08-10 | 大阪瓦斯株式会社 | メタンガス濃縮方法 |
| US9623370B2 (en) | 2015-02-10 | 2017-04-18 | Praxair Technology, Inc. | Integrated process and apparatus for recovery of helium rich streams |
| US9676628B2 (en) | 2015-02-10 | 2017-06-13 | Praxair Technology, Inc. | Integrated process and apparatus for recovery of helium rich streams |
| JP6384960B2 (ja) * | 2015-03-23 | 2018-09-05 | 住友精化株式会社 | ヘリウムガスの精製方法および精製システム |
| DE102017205598A1 (de) | 2017-04-03 | 2018-10-04 | Inficon Gmbh | Verfahren zur Gewinnung von Helium aus einem Helium und Sauerstoff enthaltenden Gasgemisch |
| EP3687661A2 (en) | 2017-09-27 | 2020-08-05 | Johnson Controls Technology Company | Emission canister system for a hvac&r system |
| US10843121B2 (en) | 2017-12-21 | 2020-11-24 | Air Products And Chemicals, Inc. | Separation process and apparatus for light noble gas |
| US10478770B2 (en) * | 2017-12-21 | 2019-11-19 | Air Products And Chemicals, Inc. | Separation process and apparatus for light noble gas |
| GB201818896D0 (en) * | 2018-11-20 | 2019-01-02 | Gas Recovery And Recycle Ltd | Gas recovery method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3636679A (en) * | 1971-01-04 | 1972-01-25 | Union Carbide Corp | Selective adsorption gas separation process |
| EP0071553A1 (fr) * | 1981-07-28 | 1983-02-09 | COMPAGNIE MARITIME D'EXPERTISES S.A. Société Anonyme dite: | Procédé et installation d'épuration de l'hélium contenu dans un mélange de gaz |
| JPS5954610A (ja) * | 1982-04-21 | 1984-03-29 | ベルクヴエルクスフエアバント・ゲ−エムベ−ハ− | ガス混合物から原子半径の小さい希ガスを分離する方法 |
| JPS6096508A (ja) * | 1983-10-27 | 1985-05-30 | Zenji Hagiwara | 吸着法により酸素ガスを濃縮する方法 |
| JPS6177613A (ja) * | 1984-09-25 | 1986-04-21 | Kobe Steel Ltd | ヘリウムガスの精製方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3430418A (en) * | 1967-08-09 | 1969-03-04 | Union Carbide Corp | Selective adsorption process |
| US3564816A (en) * | 1968-12-30 | 1971-02-23 | Union Carbide Corp | Selective adsorption process |
| FR2135388B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1971-05-03 | 1973-05-11 | Air Liquide | |
| US3738087A (en) * | 1971-07-01 | 1973-06-12 | Union Carbide Corp | Selective adsorption gas separation process |
| GB1449864A (en) * | 1973-10-24 | 1976-09-15 | Boc International Ltd | Adsorption system |
| US4077779A (en) * | 1976-10-15 | 1978-03-07 | Air Products And Chemicals, Inc. | Hydrogen purification by selective adsorption |
| DE3132758A1 (de) * | 1981-08-19 | 1983-03-03 | Linde Ag, 6200 Wiesbaden | Absorptionsverfahren |
| JPS5992907A (ja) * | 1982-11-19 | 1984-05-29 | Seitetsu Kagaku Co Ltd | 高濃度アルゴンの製造方法 |
| DE3716899C1 (de) * | 1987-05-20 | 1988-08-04 | Bergwerksverband Gmbh | Verfahren und Vorrichtung zur Heliumgewinnung |
| US4892565A (en) * | 1987-12-29 | 1990-01-09 | Air Products And Chemicals, Inc. | Adsorptive separation utilizing multiple adsorption beds |
| US4790858A (en) * | 1988-01-29 | 1988-12-13 | Air Products And Chemicals, Inc. | Fractionation of multicomponent gas mixtures by pressure swing adsorption |
| US4913709A (en) * | 1989-02-17 | 1990-04-03 | Ravi Kumar | Adsorption process for recovering two high purity gas products from multicomponent gas mixtures |
| US4914218A (en) * | 1989-02-17 | 1990-04-03 | Ravi Kumar | Adsorptive process for separating multicomponent gas mixtures |
-
1987
- 1987-05-20 DE DE19873716898 patent/DE3716898A1/de active Granted
-
1988
- 1988-05-19 AU AU19307/88A patent/AU604140B2/en not_active Ceased
- 1988-05-19 EP EP88904951A patent/EP0358714A1/de active Pending
- 1988-05-19 ES ES88108030T patent/ES2023976B3/es not_active Expired - Lifetime
- 1988-05-19 DE DE8888108030T patent/DE3863391D1/de not_active Expired - Fee Related
- 1988-05-19 JP JP63504696A patent/JPH0832549B2/ja not_active Expired - Lifetime
- 1988-05-19 US US07/445,716 patent/US5089048A/en not_active Expired - Fee Related
- 1988-05-19 EP EP88108030A patent/EP0291975B1/de not_active Expired - Lifetime
- 1988-05-19 DD DD88315903A patent/DD270125A5/de not_active IP Right Cessation
- 1988-05-19 WO PCT/EP1988/000441 patent/WO1988009306A1/de not_active Application Discontinuation
- 1988-05-20 PL PL1988272594A patent/PL160299B1/pl unknown
-
1989
- 1989-11-17 RU SU894742428A patent/RU1816229C/ru active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3636679A (en) * | 1971-01-04 | 1972-01-25 | Union Carbide Corp | Selective adsorption gas separation process |
| EP0071553A1 (fr) * | 1981-07-28 | 1983-02-09 | COMPAGNIE MARITIME D'EXPERTISES S.A. Société Anonyme dite: | Procédé et installation d'épuration de l'hélium contenu dans un mélange de gaz |
| JPS5954610A (ja) * | 1982-04-21 | 1984-03-29 | ベルクヴエルクスフエアバント・ゲ−エムベ−ハ− | ガス混合物から原子半径の小さい希ガスを分離する方法 |
| JPS6096508A (ja) * | 1983-10-27 | 1985-05-30 | Zenji Hagiwara | 吸着法により酸素ガスを濃縮する方法 |
| JPS6177613A (ja) * | 1984-09-25 | 1986-04-21 | Kobe Steel Ltd | ヘリウムガスの精製方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160137622A (ko) | 2014-03-28 | 2016-11-30 | 스미토모 세이카 가부시키가이샤 | 목적 가스의 정제 방법 및 정제 장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| US5089048A (en) | 1992-02-18 |
| DE3716898A1 (de) | 1988-12-15 |
| ES2023976B3 (es) | 1992-02-16 |
| RU1816229C (ru) | 1993-05-15 |
| EP0291975B1 (de) | 1991-06-26 |
| DE3863391D1 (de) | 1991-08-01 |
| AU1930788A (en) | 1988-12-21 |
| PL160299B1 (en) | 1993-02-26 |
| JPH02503553A (ja) | 1990-10-25 |
| EP0358714A1 (de) | 1990-03-21 |
| DD270125A5 (de) | 1989-07-19 |
| EP0291975A1 (de) | 1988-11-23 |
| DE3716898C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-01-17 |
| WO1988009306A1 (en) | 1988-12-01 |
| AU604140B2 (en) | 1990-12-06 |
| PL272594A1 (en) | 1989-03-06 |
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