JPH08235933A - Alumina sintered body - Google Patents
Alumina sintered bodyInfo
- Publication number
- JPH08235933A JPH08235933A JP7039793A JP3979395A JPH08235933A JP H08235933 A JPH08235933 A JP H08235933A JP 7039793 A JP7039793 A JP 7039793A JP 3979395 A JP3979395 A JP 3979395A JP H08235933 A JPH08235933 A JP H08235933A
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- Prior art keywords
- alumina
- less
- sintered body
- dielectric loss
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- Inorganic Insulating Materials (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、アルミナ質焼結体に関
するものであり、特に、例えば、通信用ＭＩＣ基板やＭ
ＩＣパッケージ、マイクロ波コンデンサ、マイクロ波通
信装置用部品、高エネルギー粒子加速装置のマイクロ波
透過窓等に用いることができる高周波低損失性のアルミ
ナ質焼結体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an alumina-based sintered body, and particularly to, for example, a MIC substrate for communication or M.
The present invention relates to a high-frequency low-loss alumina sintered body that can be used in IC packages, microwave capacitors, microwave communication device parts, microwave transmission windows of high-energy particle accelerators, and the like.
【０００２】[0002]
【従来技術】従来、例えば、通信用ＭＩＣ基板やＭＩＣ
パッケージ、マイクロ波コンデンサ、マイクロ波通信用
装置用部品、高エネルギー粒子加速装置のマイクロ波透
過窓に用いられるアルミナ質焼結体では、誘電損失は１
０ＧＨｚ程度のマイクロ波帯において１×１０-4以下で
あることが求められる。2. Description of the Related Art Conventionally, for example, a communication MIC substrate or MIC
Dielectric loss is 1 in the alumina sintered body used for the microwave transparent window of the package, microwave capacitor, microwave communication device, high energy particle accelerator.
It is required to be 1 × 10 −4 or less in the microwave band of about 0 GHz.
【０００３】このようなアルミナ質焼結体としては、従
来、誘電損失を１×１０-4以下にするために、不純物の
含有量を元素基準のｐｐｍ単位で、Ｓｉを８０ｐｐｍ以
下、Ｍｇを６０ｐｐｍ以下、Ｓｉ／Ｍｇを１〜５、かつ
他の金属やアルカリ成分等を総量７０ｐｐｍ以下とした
アルミナ質焼結体が知られている（特開平１−２１３９
１０号公報）。Conventionally, as such an alumina-based sintered body, in order to reduce the dielectric loss to 1 × 10 −4 or less, the content of impurities is in the ppm unit of the element standard, Si is 80 ppm or less, and Mg is 60 ppm. Hereinafter, an alumina-based sintered body in which Si / Mg is 1 to 5 and the total amount of other metals and alkali components is 70 ppm or less is known (Japanese Patent Laid-Open No. 1-2139).
No. 10).
【０００４】また、特開平４−３５６９２２号公報で
は、マイクロ波透過窓として、マイクロ波を透過させる
性質を持たせるため、含有しているアルカリ金属（Ｎａ
2 Ｏ、Ｋ2 Ｏ）の総量を１５０ｐｐｍ以下に抑制し、マ
イクロ波帯の誘電損失を１×１０-3以下としたアルミナ
質焼結体が開示されている。Further, in Japanese Patent Laid-Open No. 4-356922, an alkali metal (Na) contained in a microwave transmitting window is added in order to have a microwave transmitting property.
There is disclosed an alumina-based sintered body in which the total amount of 2 O and K 2 O) is suppressed to 150 ppm or less and the dielectric loss in the microwave band is 1 × 10 −3 or less.
【０００５】[0005]
【発明が解決しようとする問題点】一般に、アルミナ質
焼結体の誘電損失の増加に粒界相のガラス質が大きく寄
与していると言われている。このため、低損失磁器を得
るためには、粒界相の生成を制御する必要がある。一般
に粒界相の生成を極力さける目的で、生成原因となる不
純物を避けるために、高純度の原料を用いて不純物の総
量を規制している。It is generally said that the glassy material of the grain boundary phase greatly contributes to the increase of the dielectric loss of the alumina-based sintered body. Therefore, in order to obtain a low loss porcelain, it is necessary to control the generation of the grain boundary phase. In general, in order to prevent the generation of the grain boundary phase as much as possible, the total amount of impurities is regulated by using a high-purity raw material in order to avoid the impurities causing the generation.
【０００６】その中でも、ガラス相を形成しやすいアル
カリ成分は極力避ける必要がある。[0006] Among them, it is necessary to avoid as much as possible an alkaline component which easily forms a glass phase.
【０００７】しかしながら、実際には高純度アルミナ原
料（純度９９．９９９％程度）を用いても、必ずしも誘
電損失が１×１０-4以下にならないという問題があっ
た。However, in practice, even if a high-purity alumina raw material (purity of about 99.999%) was used, there was a problem that the dielectric loss did not always become 1 × 10 −4 or less.
【０００８】また、特開平１−２１３９１０号公報に開
示されるアルミナ質焼結体では、アルカリ金属酸化物以
外の不純物含有量も減少させ、全体的に磁器を高純度化
させる必要があるため、生産性が低下するという問題が
あった。さらに焼成温度が高くなりがちであった。Further, in the alumina-based sintered body disclosed in Japanese Patent Application Laid-Open No. 1-213910, it is necessary to reduce the content of impurities other than alkali metal oxides and to highly purify the porcelain as a whole. There was a problem that productivity fell. Further, the firing temperature tends to be high.
【０００９】さらに、特開平４−３５６９２２号公報に
開示されるアルミナ質焼結体では、低誘電損失化させる
ためアルカリ金属（Ｎａ2 Ｏ、Ｋ2 Ｏ）総量を抑制して
いるが、この場合でも必ずしも１×１０-4以下の誘電損
失を達成できるとは限らないという問題があった。Further, in the alumina sintered body disclosed in Japanese Patent Laid-Open No. 4-356922, the total amount of alkali metals (Na 2 O, K 2 O) is suppressed in order to reduce the dielectric loss. In this case, However, there is a problem that it is not always possible to achieve a dielectric loss of 1 × 10 −4 or less.
【００１０】本発明は、高純度アルミナ原料を用いるこ
となく、誘電損失を確実に１×１０-4以下とすることが
できるとともに、生産性および焼結性を向上することが
できるアルミナ質焼結体を提供することを目的とする。The present invention makes it possible to reliably reduce the dielectric loss to 1 × 10 −4 or less without using a high-purity alumina raw material, and to improve the productivity and the sinterability. Intended to provide the body.
【００１１】[0011]
【問題点を解決するための手段】本発明者は、上記問題
を解決すべく鋭意検討した結果、アルミナ質焼結体中に
生成する粒界相には様々な結晶相があり、そのすべてが
誘電損失を増加させているわけではなく、誘電損失増加
の原因としてはＮａ含有量だけでなく、粒界相中の析出
結晶相のうちＣａＯ・６Ａｌ2 Ｏ3 の存在も、アルミナ
質焼結体の誘電損失を増加させていることを見出した。
また、Ｃａはアルミナに殆ど固溶せず、粒界にＣａＯ・
６Ａｌ2 Ｏ3 として析出するため、アルミナ質焼結体の
誘電損失を低下させるためには、Ｃａ量を減少させ、粒
界相中におけるＣａＯ・６Ａｌ2 Ｏ3 の析出量を少なく
すれば良いことを見出した。さらに、ＭｇＯは、微量添
加（０．０３〜１０重量％）で粒界にＭｇＡｌ2 Ｏ4 を
生成し、アルミナの焼結性を促進する効果があることが
知られている。しかし、ＣａＯを添加せず、粒界にＣａ
Ｏ・６Ａｌ2 Ｏ3 が生成しないと、緻密化が阻害され、
焼成温度が高くなり生産上好ましくない。このため、ア
ルミナ焼結体の粒界相中にＭｇＡｌ2 Ｏ4 とＣａＯ・６
Ａｌ2 Ｏ3 を析出させるとともに、Ｎａ含有量を一定以
下に抑制することにより、アルミナ質焼結体の誘電損失
を確実に１×１０-4以下とすることができるとともに、
生産性および焼結性を向上することができることを見出
し、本発明に至った。As a result of intensive studies to solve the above problems, the present inventor has found that there are various crystal phases in the grain boundary phase formed in the alumina-based sintered body, all of which are This does not mean that the dielectric loss is increased, and the cause of the increase in the dielectric loss is not only the content of Na but also the presence of CaO.6Al 2 O 3 in the precipitated crystal phase in the grain boundary phase. It has been found that the dielectric loss of is increased.
In addition, Ca hardly forms a solid solution in alumina, and CaO
Since 6Al 2 O 3 precipitates, in order to reduce the dielectric loss of the alumina-based sintered body, the amount of Ca should be decreased and the amount of CaO · 6Al 2 O 3 precipitated in the grain boundary phase should be reduced. Found. Furthermore, it is known that MgO produces MgAl 2 O 4 at grain boundaries when added in a small amount (0.03 to 10 wt%), and has the effect of promoting the sinterability of alumina. However, Ca was not added to the grain boundary without adding CaO.
If O · 6Al 2 O 3 is not generated, densification is hindered,
The firing temperature becomes high, which is not preferable in production. Therefore, in the grain boundary phase of the alumina sintered body, MgAl 2 O 4 and CaO.
By precipitating Al 2 O 3 and suppressing the Na content to a certain level or less, the dielectric loss of the alumina-based sintered body can be reliably reduced to 1 × 10 −4 or less, and
They have found that productivity and sinterability can be improved, and have reached the present invention.
【００１２】即ち、本発明のアルミナ質焼結体は、主成
分としてのアルミナに、Ｎａ含有量がＮａ2 Ｏ換算で１
００ｐｐｍ以下、ＣａがＣａＯ換算で０．５重量％以
下、ＭｇがＭｇＯ換算で０．０３重量％以上含有し，か
つ、粒界相をＸ線回折測定した場合に、ＣａＯ・６Ａｌ
2 Ｏ3 とＭｇＡｌ2 Ｏ4 のピークが存在するものであ
り、測定周波数１４ＧＨｚにおける誘電損失ｔａｎδが
１×１０-4以下であることが望ましい。That is, in the alumina sintered body of the present invention, the content of Na in the alumina as the main component is 1 in terms of Na 2 O.
In the case of containing less than 00 ppm, Ca of 0.5 wt% or less in terms of CaO, Mg of 0.03 wt% or more in terms of MgO, and measuring the grain boundary phase by X-ray diffraction, CaO · 6Al
2 O 3 and MgAl 2 O 4 have peaks, and it is desirable that the dielectric loss tan δ at a measurement frequency of 14 GHz is 1 × 10 −4 or less.
【００１３】本発明のアルミナ質焼結体では、Ｎａ含有
量をＮａ2 Ｏ換算で１００ｐｐｍ以下としたのは、Ｎａ
含有量がＮａ2 Ｏ換算で１００ｐｐｍよりも大きくなる
と、誘電損失が１×１０-4よりも大きくなるからであ
る。Ｎａ含有量は少ない方が良く、Ｎａを含む結晶相の
ピークは、Ｘ線回折測定ではピークが実質的に存在しな
いことが望ましい。In the alumina sintered body of the present invention, the Na content is 100 ppm or less in terms of Na 2 O because
This is because if the content is greater than 100 ppm in terms of Na 2 O, the dielectric loss will be greater than 1 × 10 −4 . The Na content is preferably as low as possible, and the peak of the crystal phase containing Na is preferably substantially absent in the X-ray diffraction measurement.
【００１４】また、ＣａをＣａＯ換算で０．５重量％以
下としたのは、０．５重量％よりも多い場合にはＣａＯ
・６Ａｌ2 Ｏ3 の析出量が多く、誘電損失が１×１０-4
よりも大きくなるからである。ＣａはＣａＯ換算で０．
０００１〜０．５重量％、特には０．０５〜０．１重量
％が望ましい。Further, Ca is set to 0.5% by weight or less in terms of CaO because CaO is more than 0.5% by weight.
・ A large amount of 6Al 2 O 3 is deposited, resulting in a dielectric loss of 1 × 10 -4
Because it will be larger than. Ca is 0 in terms of CaO.
0001 to 0.5% by weight, particularly 0.05 to 0.1% by weight is desirable.
【００１５】さらに、ＭｇをＭｇＯ換算で０．０３重量
％以上としたのは、０．０３重量％よりも少ない場合に
は焼成温度が高くなり、誘電損失が１×１０-4以上とな
るからである。ＭｇはＭｇＯ換算で０．０３〜１０重量
％であることが誘電損失の点から望ましい。Further, the reason why Mg is 0.03% by weight or more in terms of MgO is that if it is less than 0.03% by weight, the firing temperature becomes high and the dielectric loss becomes 1 × 10 −4 or more. Is. From the viewpoint of dielectric loss, it is desirable that Mg be 0.03 to 10 wt% in terms of MgO.
【００１６】そして、粒界相をＸ線回折測定した場合
に、ＣａＯ・６Ａｌ2 Ｏ3 とＭｇＡｌ2 Ｏ4 のピークを
存在させた理由は、上記したように誘電損失を１×１０
-4以下にし、さらにアルミナ質焼結体の焼結性を向上す
るためである。ＣａＯ・６Ａｌ2 Ｏ3 が多いと誘電損失
が高くなるため、なるべく少なくする必要がある。Ｘ線
回折測は、例えば、波長λ＝１．５４１８ÅのＣｕＫα
線により行う。The reason why the peaks of CaO.6Al 2 O 3 and MgAl 2 O 4 exist when the grain boundary phase is measured by X-ray diffraction is that the dielectric loss is 1 × 10 as described above.
-4 or less, in order to further improve the sinterability of the alumina-based sintered body. If CaO.6Al 2 O 3 is large, the dielectric loss becomes high, so it is necessary to reduce it as much as possible. X-ray diffraction measurement is, for example, CuKα with a wavelength λ = 1.5418Å
Do by lines.
【００１７】本発明のアルミナ質焼結体は、例えば、高
純度アルミナ粉末にＭｇ（ＯＨ）2粉末およびＣａＣＯ
3 粉末を所定量添加し、イソプロピルアルコール（ＩＰ
Ａ）と混合し、アルミナボールで粉砕混合する。混合後
のスラリーを乾燥し、仮焼して得られた粉末を、例え
ば、金型プレスで成形し、焼結助剤によっても異なる
が、例えば、大気中において１５００〜１６００℃で
０．５〜４時間焼成することにより、本発明のアルミナ
質焼結体が得られる。The alumina-based sintered body of the present invention comprises, for example, high-purity alumina powder, Mg (OH) 2 powder and CaCO.
Add a certain amount of 3 powder, and add isopropyl alcohol (IP
Mix with A) and crush with an alumina ball. The mixed slurry is dried, and the powder obtained by calcination is molded by, for example, a die press, and varies depending on the sintering aid, but is, for example, 0.5 to 1600 ° C. in the air at 1500 to 1600 ° C. By firing for 4 hours, the alumina-based sintered body of the present invention is obtained.
【００１８】[0018]
【作用】本発明のアルミナ質焼結体では、Ｎａ含有量を
Ｎａ2 Ｏ換算で１００ｐｐｍ以下、ＣａをＣａＯ換算で
０．５重量％以下、ＭｇをＭｇＯ換算で０．０３重量％
以上とし、粒界相にＣａＯ・６Ａｌ2 Ｏ3 とＭｇＡｌ2
Ｏ4 を存在させることにより、焼結体の誘電損失を１×
１０-4以下とすることが可能となる。In the alumina sintered body of the present invention, the Na content is 100 ppm or less in terms of Na 2 O, Ca is 0.5 wt% or less in terms of CaO, and Mg is 0.03 wt% in terms of MgO.
As described above, CaO.6Al 2 O 3 and MgAl 2 are contained in the grain boundary phase.
The presence of O 4 reduces the dielectric loss of the sintered body to 1 ×.
It is possible to make it 10 −4 or less.
【００１９】また、本発明のアルミナ質焼結体では、高
純度のアルミナ原料を用いなくてもよく、アルミナ純度
９９．９％程度の汎用原料を用いても１×１０-4以下の
誘電損失が得られるため、適切な焼結助剤を用いて焼成
温度を低下させることが可能となり、焼結性および生産
性を向上することができる。Further, in the alumina sintered body of the present invention, it is not necessary to use a high-purity alumina raw material, and even if a general-purpose raw material having an alumina purity of about 99.9% is used, a dielectric loss of 1 × 10 -4 or less is obtained. Therefore, the firing temperature can be lowered by using an appropriate sintering aid, and the sinterability and the productivity can be improved.
【００２０】[0020]
【実施例】Ｎａ2 Ｏ含有量の異なるアルミナ原料（純度
９９．９％）と、ＣａＣＯ3 及びＭｇ（ＯＨ）2 を、表
１の組成となるように秤量し、この混合粉末を、純度９
９．９％のアルミナボール、イソプロピルアルコール
（ＩＰＡ）と共に１リットルポリポットに投入し、４２
時間回転ミル台にて混合した。混合後のスラリーにバイ
ンダーとしてパラフィンワックスを６重量％加え混合攪
拌した。このスラリーを８０℃大気中にて乾燥し、評価
粉末得た。尚、表１では、ＣａＣＯ3 はＣａＯに換算
し、また、Ｍｇ（ＯＨ）2 はＭｇＯに換算して記載し
た。[Examples] Alumina raw materials having different Na 2 O contents (purity 99.9%), CaCO 3 and Mg (OH) 2 were weighed so as to have the composition shown in Table 1, and the mixed powder was purified to have a purity of 9%.
Put it in a 1 liter polypot with 9.9% alumina balls and isopropyl alcohol (IPA),
The mixture was mixed on a time rotary mill stand. 6% by weight of paraffin wax as a binder was added to the mixed slurry and mixed and stirred. This slurry was dried in the air at 80 ° C. to obtain an evaluation powder. In Table 1, CaCO 3 is converted into CaO and Mg (OH) 2 is converted into MgO.
【００２１】この粉末を金型プレスにて１０００ｋｇ／
ｃｍ2 で直径１２ｍｍ、厚み８ｍｍに成形した。成形体
は、大気中において４００℃で２時間脱脂を行い、その
後、表１に示す焼成温度で２時間保持して焼成した。焼
結体は、直径１０ｍｍ、厚み５ｍｍに加工研磨した。こ
の試料の高周波誘電損失を測定周波数１４ＧＨｚで測定
した。また、波長λ＝１．５４１８ÅのＣｕＫα線によ
るＸ線回折測により試料の結晶相を同定した。これらの
結果を表１に示す。This powder was pressed with a die press at 1000 kg /
It was molded to have a diameter of 12 mm and a thickness of 8 mm in cm 2 . The molded body was degreased in the air at 400 ° C. for 2 hours, and then held at the firing temperature shown in Table 1 for 2 hours for firing. The sintered body was processed and polished to have a diameter of 10 mm and a thickness of 5 mm. The high frequency dielectric loss of this sample was measured at a measurement frequency of 14 GHz. Further, the crystal phase of the sample was identified by X-ray diffraction measurement with CuKα ray having a wavelength λ = 1.5418Å. Table 1 shows the results.
【００２２】[0022]
【表１】 [Table 1]
【００２３】この表１から、粒界相中にＣａＯ・６Ａｌ
2 Ｏ3 の他に、ＭｇＡｌ2 Ｏ4 が析出した本発明の試料
については、１×１０-4以下の低誘電損失を示すことが
判る（試料Ｎo.２〜５，８〜１１）。また、本発明の試
料では、焼成温度が１６００℃以下となっており、従来
よりも低温で焼成できることが判る。さらに、ＣａＯの
添加量が増加するにしたがって誘電損失が増加し、Ｍｇ
Ｏ添加量が増加するに伴い焼成温度が低下することが判
る。From Table 1, CaO.6Al was found in the grain boundary phase.
It is found that the samples of the present invention in which MgAl 2 O 4 is precipitated in addition to 2 O 3 exhibit low dielectric loss of 1 × 10 −4 or less (Samples No. 2 to 5, 8 to 11). Further, in the sample of the present invention, the firing temperature is 1600 ° C. or lower, and it can be seen that the sample can be fired at a lower temperature than before. Furthermore, the dielectric loss increases as the amount of CaO added increases, and
It can be seen that the firing temperature decreases as the amount of O added increases.
【００２４】[0024]
【発明の効果】以上のように、本発明のアルミナ質焼結
体ではＮａ含有量をＮａ2 Ｏ換算で１００ｐｐｍ以下と
し、ＣａおよびＭｇを所定量含有させ、さらに、粒界相
にＣａＯ・６Ａｌ2 Ｏ3 とＭｇＡｌ2 Ｏ4 を存在させる
ことにより、焼結体の誘電損失を確実に１×１０-4以下
とすることができるとともに、高純度のアルミナ原料を
用いなくても、純度９９．９％程度の汎用原料を用いて
も１×１０-4以下の誘電損失を得ることができるため、
焼結性および生産性を向上することができる。As described above, in the alumina-based sintered body of the present invention, the Na content is set to 100 ppm or less in terms of Na 2 O, Ca and Mg are contained in a predetermined amount, and further CaO · 6Al is contained in the grain boundary phase. The presence of 2 O 3 and MgAl 2 O 4 ensures that the dielectric loss of the sintered body is 1 × 10 −4 or less, and the purity is 99.000 even without using a high-purity alumina raw material. Since a dielectric loss of 1 × 10 −4 or less can be obtained even if a general-purpose raw material of about 9% is used,
Sinterability and productivity can be improved.
Claims (2)
Ｎａ2 Ｏ換算で１００ｐｐｍ以下、ＣａがＣａＯ換算で
０．５重量％以下、ＭｇがＭｇＯ換算で０．０３重量％
以上含有し、かつ、粒界相をＸ線回折測定した場合に、
ＣａＯ・６Ａｌ2 Ｏ3 とＭｇＡｌ2 Ｏ4 のピークが存在
することを特徴とするアルミナ質焼結体。1. Alumina, which is a main component, has a Na content of 100 ppm or less in terms of Na 2 O, Ca of 0.5 wt% or less in terms of CaO, and Mg 0.03 wt% in terms of MgO.
When the above is contained and the grain boundary phase is measured by X-ray diffraction,
An alumina-based sintered body having peaks of CaO · 6Al 2 O 3 and MgAl 2 O 4 .
ａｎδが１×１０-4以下であることを特徴とする請求項
１記載のアルミナ質焼結体。2. A dielectric loss t at a measurement frequency of 14 GHz.
The alumina sintered body according to claim 1, wherein an δ is 1 × 10 −4 or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03979395A JP3454957B2 (en) | 1995-02-28 | 1995-02-28 | Alumina sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03979395A JP3454957B2 (en) | 1995-02-28 | 1995-02-28 | Alumina sintered body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08235933A true JPH08235933A (en) | 1996-09-13 |
| JP3454957B2 JP3454957B2 (en) | 2003-10-06 |
Family
ID=12562841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP03979395A Expired - Fee Related JP3454957B2 (en) | 1995-02-28 | 1995-02-28 | Alumina sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3454957B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001155546A (en) * | 1999-11-29 | 2001-06-08 | Ngk Spark Plug Co Ltd | Insulator for spark plug and spark plug having the same |
| JP2007254273A (en) * | 2006-02-24 | 2007-10-04 | Kyocera Corp | Alumina sintered compact, and member for treatment apparatus using the same, treatment apparatus, and treatment method |
| WO2009069770A1 (en) * | 2007-11-28 | 2009-06-04 | Kyocera Corporation | Aluminous sinter, process for producing the same, member for semiconductor production apparatus, member for liquid-crystal-panel production apparatus, and member for dielectric resonator |
| US8247337B2 (en) | 2007-11-28 | 2012-08-21 | Kyocera Corporation | Alumina sintered article |
| JP2015163569A (en) * | 2014-01-30 | 2015-09-10 | 京セラ株式会社 | Alumina sintered body and member for semiconductor manufacturing apparatus, and member for liquid crystal panel manufacturing apparatus |
| JP2016184513A (en) * | 2015-03-26 | 2016-10-20 | 京セラ株式会社 | Window member for high frequency, member for semiconductor manufacturing apparatus, and member for flat panel display (fpd) manufacturing apparatus |
-
1995
- 1995-02-28 JP JP03979395A patent/JP3454957B2/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001155546A (en) * | 1999-11-29 | 2001-06-08 | Ngk Spark Plug Co Ltd | Insulator for spark plug and spark plug having the same |
| US6559579B2 (en) | 1999-11-29 | 2003-05-06 | Ngk Spark Plug Co., Ltd. | Alumina-based sintered body insulator for spark plugs |
| JP2007254273A (en) * | 2006-02-24 | 2007-10-04 | Kyocera Corp | Alumina sintered compact, and member for treatment apparatus using the same, treatment apparatus, and treatment method |
| WO2009069770A1 (en) * | 2007-11-28 | 2009-06-04 | Kyocera Corporation | Aluminous sinter, process for producing the same, member for semiconductor production apparatus, member for liquid-crystal-panel production apparatus, and member for dielectric resonator |
| US8247337B2 (en) | 2007-11-28 | 2012-08-21 | Kyocera Corporation | Alumina sintered article |
| JP2015163569A (en) * | 2014-01-30 | 2015-09-10 | 京セラ株式会社 | Alumina sintered body and member for semiconductor manufacturing apparatus, and member for liquid crystal panel manufacturing apparatus |
| JP2016184513A (en) * | 2015-03-26 | 2016-10-20 | 京セラ株式会社 | Window member for high frequency, member for semiconductor manufacturing apparatus, and member for flat panel display (fpd) manufacturing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3454957B2 (en) | 2003-10-06 |
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