WO2009069770A1 - Aluminous sinter, process for producing the same, member for semiconductor production apparatus, member for liquid-crystal-panel production apparatus, and member for dielectric resonator - Google Patents

Aluminous sinter, process for producing the same, member for semiconductor production apparatus, member for liquid-crystal-panel production apparatus, and member for dielectric resonator Download PDF

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Publication number
WO2009069770A1
WO2009069770A1 PCT/JP2008/071699 JP2008071699W WO2009069770A1 WO 2009069770 A1 WO2009069770 A1 WO 2009069770A1 JP 2008071699 W JP2008071699 W JP 2008071699W WO 2009069770 A1 WO2009069770 A1 WO 2009069770A1
Authority
WO
WIPO (PCT)
Prior art keywords
sinter
aluminous
crystal
production apparatus
alumina
Prior art date
Application number
PCT/JP2008/071699
Other languages
French (fr)
Japanese (ja)
Inventor
Tatsuji Furuse
Shinya Yokomine
Hiroaki Seno
Original Assignee
Kyocera Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2008278133A external-priority patent/JP5371372B2/en
Priority claimed from JP2008278134A external-priority patent/JP5371373B2/en
Priority to US12/745,246 priority Critical patent/US8247337B2/en
Priority claimed from JP2008301038A external-priority patent/JP5435932B2/en
Application filed by Kyocera Corporation filed Critical Kyocera Corporation
Priority to KR1020107010888A priority patent/KR101200385B1/en
Publication of WO2009069770A1 publication Critical patent/WO2009069770A1/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C04B35/111—Fine ceramics

Abstract

[PROBLEMS] To provide: an aluminous sinter capable of lowering dielectric dissipation factor in the megahertz to gigahertz bands; a process for producing the sinter; a member for semiconductor production apparatuses; a member for liquid-crystal-panel production apparatuses; and a member for dielectric resonators. [MEANS FOR SOLVING PROBLEMS] The aluminous sinter comprises at least 99.3 mass% aluminum in terms of Al2O3 and other elements including at least 0.05 mass% silicon in terms of SiO2 and at least 0.01 mass% strontium in terms of SrO, is constituted of alumina crystal grains (1) as main crystal grains, and has a crystal phase at triple points (2) constituted of alumina grain particles (1), the crystal phase containing the elements Si, Al, Sr, and O. This aluminous sinter can retain the excellent corrosion resistance, mechanical properties, and electrical properties of alumina. In addition, since the crystal phase comprising a compound containing the elements Si, Al, Sr, and O and having a low loss is present at the triple points (2) constituted of alumina crystal grains (1), the aluminous sinter can have a lower loss than conventional ones in the megahertz to gigahertz bands.
PCT/JP2008/071699 2007-11-28 2008-11-28 Aluminous sinter, process for producing the same, member for semiconductor production apparatus, member for liquid-crystal-panel production apparatus, and member for dielectric resonator WO2009069770A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/745,246 US8247337B2 (en) 2007-11-28 2008-11-11 Alumina sintered article
KR1020107010888A KR101200385B1 (en) 2007-11-28 2008-11-28 Aluminous sinter, process for producing the same, member for semiconductor production apparatus, member for liquid-crystal-panel production apparatus, and member for dielectric resonator

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP2007-307350 2007-11-28
JP2007307350 2007-11-28
JP2008-080842 2008-03-26
JP2008080842 2008-03-26
JP2008-278133 2008-10-29
JP2008278133A JP5371372B2 (en) 2008-03-26 2008-10-29 Alumina sintered body, semiconductor manufacturing apparatus member, liquid crystal panel manufacturing apparatus member, and dielectric resonator member
JP2008278134A JP5371373B2 (en) 2008-10-29 2008-10-29 Alumina sintered body, semiconductor manufacturing apparatus member, liquid crystal panel manufacturing apparatus member, and dielectric resonator member
JP2008-278134 2008-10-29
JP2008-301038 2008-11-26
JP2008301038A JP5435932B2 (en) 2007-11-28 2008-11-26 Alumina sintered body, manufacturing method thereof, member for semiconductor manufacturing apparatus, member for liquid crystal panel manufacturing apparatus, and member for dielectric resonator

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12745246 Continuation 2010-05-27

Publications (1)

Publication Number Publication Date
WO2009069770A1 true WO2009069770A1 (en) 2009-06-04

Family

ID=40678659

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/071699 WO2009069770A1 (en) 2007-11-28 2008-11-28 Aluminous sinter, process for producing the same, member for semiconductor production apparatus, member for liquid-crystal-panel production apparatus, and member for dielectric resonator

Country Status (1)

Country Link
WO (1) WO2009069770A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011116615A (en) * 2009-11-02 2011-06-16 Kyocera Corp Alumina sintered compact
WO2017220888A1 (en) * 2016-06-22 2017-12-28 Imerys Fused Minerals Beyrède Sintered abrasive particle comprising oxides present in bauxite

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05301762A (en) * 1992-04-27 1993-11-16 Mitsubishi Materials Corp Production of cutting tool with high toughness made of aluminum oxide-based ceramic
JPH0616469A (en) * 1992-06-30 1994-01-25 Kyocera Corp Alumina porcelain composition
JPH08208317A (en) * 1995-01-31 1996-08-13 Kyocera Corp Alumina sintered body and production thereof
JPH08235933A (en) * 1995-02-28 1996-09-13 Kyocera Corp Alumina sintered body
JP2003238249A (en) * 2002-02-19 2003-08-27 Kyocera Corp Glass ceramics and wiring board
JP2005050875A (en) * 2003-07-29 2005-02-24 Kyocera Corp Ceramic package
JP2007254273A (en) * 2006-02-24 2007-10-04 Kyocera Corp Alumina sintered compact, and member for treatment apparatus using the same, treatment apparatus, and treatment method

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05301762A (en) * 1992-04-27 1993-11-16 Mitsubishi Materials Corp Production of cutting tool with high toughness made of aluminum oxide-based ceramic
JPH0616469A (en) * 1992-06-30 1994-01-25 Kyocera Corp Alumina porcelain composition
JPH08208317A (en) * 1995-01-31 1996-08-13 Kyocera Corp Alumina sintered body and production thereof
JPH08235933A (en) * 1995-02-28 1996-09-13 Kyocera Corp Alumina sintered body
JP2003238249A (en) * 2002-02-19 2003-08-27 Kyocera Corp Glass ceramics and wiring board
JP2005050875A (en) * 2003-07-29 2005-02-24 Kyocera Corp Ceramic package
JP2007254273A (en) * 2006-02-24 2007-10-04 Kyocera Corp Alumina sintered compact, and member for treatment apparatus using the same, treatment apparatus, and treatment method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011116615A (en) * 2009-11-02 2011-06-16 Kyocera Corp Alumina sintered compact
WO2017220888A1 (en) * 2016-06-22 2017-12-28 Imerys Fused Minerals Beyrède Sintered abrasive particle comprising oxides present in bauxite
FR3052993A1 (en) * 2016-06-22 2017-12-29 Alteo Arc SINTERED ABRASIVE PARTICLE BASED ON OXIDES PRESENT IN BAUXITE

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