JP2609362B2 - Dielectric ceramic material for microwave - Google Patents

Dielectric ceramic material for microwave

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Publication number
JP2609362B2
JP2609362B2 JP2400354A JP40035490A JP2609362B2 JP 2609362 B2 JP2609362 B2 JP 2609362B2 JP 2400354 A JP2400354 A JP 2400354A JP 40035490 A JP40035490 A JP 40035490A JP 2609362 B2 JP2609362 B2 JP 2609362B2
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Japan
Prior art keywords
dielectric
component
ceo
microwave
catio
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JP2400354A
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Japanese (ja)
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JPH04209411A (en
Inventor
朗 山田
清 斉藤
俊久 本多
良和 内海
久男 渡井
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、マイクロ波領域での使
用において、高い比誘電率と実用上充分に高いQ値(誘
電損失の逆数)および小さく安定な温度特性を有するマ
イクロ波用誘電体磁器材料に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microwave dielectric having a high relative dielectric constant, a sufficiently high Q value (reciprocal of dielectric loss) and a small and stable temperature characteristic for practical use in the microwave region. Related to porcelain materials.

【0002】[0002]

【従来の技術】マイクロ波用誘電体は、通信機器におい
て共振器、フィルター、分波器、マイクロ波集積回路基
板(MIC基板)などに広く使用されており、その誘電
体特性の向上は、送受信周波数の安定化、フィルター特
性の向上、そして最近特に要求の高い通信装置、回路の
小型化に極めて有効である。このような誘電体に要求さ
れる特性としては、マイクロ波周波数域において、高
い比誘電率を有すること(誘電体応用部品に必要とされ
る誘電体の大きさは、比誘電率の平方根に反比例するた
め、装置あるいは部品小型化に対し極めて有効であ
る。)、低い誘電損失を有すること、共振周波数の
温度安定性が優れていることなどをあげることができ
る。
2. Description of the Related Art Microwave dielectrics are widely used in resonators, filters, duplexers, microwave integrated circuit boards (MIC boards) and the like in communication equipment. It is very effective for stabilizing the frequency, improving the filter characteristics, and miniaturizing communication devices and circuits that have recently been particularly demanded. The characteristics required for such a dielectric include a high dielectric constant in the microwave frequency range (the size of the dielectric required for a dielectric application component is inversely proportional to the square root of the dielectric constant). Therefore, it is extremely effective for miniaturization of devices or components.), Low dielectric loss, and excellent temperature stability of resonance frequency.

【0003】従来、前記のような特性を持つ誘電体材料
としては、特公昭59-37526号公報の一般式:xBaO−
yTiO2−zSm23(ただし、モル分率として5≦
x≦23、57≦y≦82.5、2.5≦z≦37.5、x+y+z=1
00)で表わされる材料、あるいは特開昭63-294609号公
報の一般式:xBaO−yTiO2−z{(1−m−
n)Sm23−m(SrO・CeO2)−n(CaO・
CeO2)}(ただし、モル分率として0.1≦x≦0.25、
0.6≦y≦0.85、0.05≦z≦0.30、0≦m≦0.80、0≦
n≦0.8、x+y+z=1.0、0<m+n≦0.8)で表わ
される材料などをあげることができる。
[0003] Conventionally, as a dielectric material having the above-mentioned characteristics, there is a general formula: xBaO-
yTiO 2 -zSm 2 O 3 (provided that the molar fraction is 5 ≦
x ≦ 23, 57 ≦ y ≦ 82.5, 2.5 ≦ z ≦ 37.5, x + y + z = 1
00) or the general formula of JP-A-63-294609: xBaO-yTiO 2 -z {(1-m-
n) Sm 2 O 3 -m (SrO.CeO 2 ) -n (CaO.
CeO 2 )} (provided that the molar fraction is 0.1 ≦ x ≦ 0.25,
0.6 ≦ y ≦ 0.85, 0.05 ≦ z ≦ 0.30, 0 ≦ m ≦ 0.80, 0 ≦
n ≦ 0.8, x + y + z = 1.0, 0 <m + n ≦ 0.8).

【0004】[0004]

【発明が解決しようとする課題】最近のマイクロ波通信
機器の小型・軽量化に伴い、通信機器を構成する個々の
部品からの小型化が必要となっている。誘電体応用部品
においては、前述の理由から、従来より高い比誘電率を
持つ材料を用いることが小型化には必須となる。マイク
ロ波用誘電体磁器材料において、高い比誘電率、低い誘
電損失、小さく安定な温度特性をすべて同時に実現する
ことは、極めて難しいことである。前記従来の誘電体
は、比誘電率が84と高い値を示しながら、Q値(1/誘
電損失)、温度係数共に良好な値を示す優れた材料であ
った。しかしながら、よりいっそうの誘電体応用部品の
小型化を推し進めるためには、従来材料の比誘電率では
充分ではなく、より高い値を示す材料が必要となる。そ
して前記従来材料より高い比誘電率を示す実用可能な材
料は、極めて少ないのが現状である。
With the recent miniaturization and weight reduction of microwave communication equipment, it is necessary to reduce the size of individual components constituting the communication equipment. For the dielectric application parts, for the above-mentioned reason, it is essential to use a material having a higher relative permittivity than the conventional one for downsizing. It is extremely difficult to simultaneously achieve high relative dielectric constant, low dielectric loss, and small and stable temperature characteristics in a microwave dielectric ceramic material. The above-mentioned conventional dielectric material is an excellent material which shows a good value for both the Q value (1 / dielectric loss) and the temperature coefficient while showing a high relative dielectric constant of 84. However, in order to further reduce the size of dielectric application parts, the relative permittivity of conventional materials is not sufficient, and materials having higher values are required. At present, there are very few practical materials exhibiting higher dielectric constants than the conventional materials.

【0005】本発明は、前記のような問題点を解消する
ためになされたものであり、マイクロ波周波数領域にお
いて、従来より高い比誘電率、実用上充分なQ値および
小さく安定な温度特性を有するマイクロ波用誘電体磁器
材料を供給することを目的とする。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and in the microwave frequency region, has a higher relative dielectric constant, a sufficiently high Q value, and a small and stable temperature characteristic. It is an object of the present invention to supply a microwave dielectric ceramic material having the same.

【0006】[0006]

【課題を解決するための手段】本発明は、前記問題点を
解決するため、一般式:(1−a)[xBaO−yTi
2−z{(1−m−n)Sm23−m(SrO・Ce
2)−n(CaO・CeO2)}]−a・CaTiO3
により表わされる組成式において、モル分率で、 0.1≦x≦0.25 0.6≦y≦0.85 0.05≦z≦0.3 0≦m≦0.8 0≦n≦0.8 x+y+z=1 0<m+n≦0.8 0<a≦0.60 なる組成範囲にあり、また副成分としてMn23が全重
量に対して3重量%以下添加含有されてなる誘電体磁器
材料である。
In order to solve the above-mentioned problems, the present invention has a general formula: (1-a) [xBaO-yTi
O 2 -z {(1-mn) Sm 2 O 3 -m (SrO · Ce
O 2 ) -n (CaO.CeO 2 )}]-a.CaTiO 3
In the composition formula represented by the following formula, the molar fraction is 0.1 ≦ x ≦ 0.25 0.6 ≦ y ≦ 0.85 0.05 ≦ z ≦ 0.30 ≦ m ≦ 0.80 ≦ n ≦ 0.8 x + y + z = 1 0 <m + n ≦ 0.80 <a ≦ 0.60 This is a dielectric porcelain material having a composition range as shown below and containing Mn 2 O 3 as an auxiliary component in an amount of 3% by weight or less based on the total weight.

【0007】[0007]

【作用】本発明は、前記組成の材料を用いることにより
所期目的を達成することができ、BaO−TiO2−S
23系磁器材料に含有されるSm23の一部を成分
(SrO・CeO2)および(CaO・CeO2)で置換
したことによりQ値を、成分CaTiO3を含有させた
ことにより比誘電率を大きく増加させ、さらにMn23
の添加含有により焼結性を改善したものである。
According to the present invention, the intended object can be achieved by using the material having the above composition, and BaO-TiO 2 -S
By replacing a part of Sm 2 O 3 contained in the m 2 O 3 ceramic material with the components (SrO.CeO 2 ) and (CaO.CeO 2 ), the Q value was changed to include the component CaTiO 3. Greatly increases the relative permittivity, and further increases Mn 2 O 3
The sinterability is improved by the addition and addition of.

【0008】[0008]

【実施例】以下、本発明の一実施例について説明する。An embodiment of the present invention will be described below.

【0009】出発原料には、化学的に高純度のBaCO
3、TiO2、Sm23、CaCO3、SrCO3、CeO
2、Mn23、CaTiO3を用いた。これらの原料を組
成式:(1−a)[xBaO−yTiO2−z{(1−
m−n)Sm23−m(SrO・CeO2)−n(Ca
O・CeO2)}]−a・CaTiO3における成分組成
が、モル分率で表1に示す値となるように各試料別に、
CaTiO3以外の成分を秤量して混合し、空気中で105
0℃で2時間反応、仮焼成した。ついで、えられた仮焼
品を乳鉢、ボールミルなどで粉砕したのち、所定量のC
aTiO3成分を同様にして混合した。このようにして
作成した混合粉末を、成形圧力800Kg/cm2で直径12mm、
高さ15mmの円柱状および直径12mm、高さ5mmの円板状に
プレス成形した。えられた成形体を、酸素雰囲気中、約
1250〜1450℃に4〜50時間保持、焼成して誘電体磁器を
えた。えられた誘電体磁器には、それぞれ研削加工を施
し、平行導体板型誘電体円柱共振器法により6GHzで比
誘電率とQ値を、ついで1MHzで温度係数(比誘電率の
温度係数:τ)を−10〜50℃の温度範囲で測定した。
The starting material used is BaCO of high chemical purity.
3, TiO 2, Sm 2 O 3, CaCO 3, SrCO 3, CeO
2 , Mn 2 O 3 and CaTiO 3 were used. These raw materials are represented by the composition formula: (1-a) [xBaO-yTiO 2 -z} (1-
m-n) Sm 2 O 3 -m (SrO · CeO 2) -n (Ca
O · CeO 2 )}]-a · CaTiO 3 , for each sample, so that the component composition in mole fraction is the value shown in Table 1.
They were weighed and mixed components other than CaTiO 3, 105 in the air
The reaction was performed at 0 ° C. for 2 hours and calcined. Then, the obtained calcined product is pulverized with a mortar, a ball mill, etc.
The aTiO 3 component was similarly mixed. The mixed powder thus produced was molded at a molding pressure of 800 kg / cm 2 and a diameter of 12 mm.
It was press-formed into a cylindrical shape with a height of 15 mm and a disk shape with a diameter of 12 mm and a height of 5 mm. The obtained molded body is placed in an oxygen atmosphere for about
It was kept at 1250-1450 ° C. for 4-50 hours and fired to obtain dielectric porcelain. The obtained dielectric porcelain was subjected to grinding processing, and the relative permittivity and the Q value were measured at 6 GHz by a parallel conductor plate type dielectric cylinder resonator method, and then the temperature coefficient was calculated at 1 MHz (temperature coefficient of relative permittivity: τ). k ) was measured in the temperature range from -10 to 50 ° C.

【0010】その結果を表1に示した。表1中の比誘電
試料番号1〜7は、本発明の範囲外のもので、比較例と
してあげたものである。それ以外はすべて本発明の範囲
内のものである。なお、比較試料番号7はQ値が小さい
ため、温度係数(τk)の測定を行っていない。
The results are shown in Table 1. The relative dielectric samples Nos. 1 to 7 in Table 1 are out of the scope of the present invention and are listed as comparative examples. All others are within the scope of the present invention. Note that the temperature coefficient (τ k ) of Comparative Sample No. 7 was not measured because the Q value was small.

【0011】[0011]

【表1】 [Table 1]

【0012】所期特性を示す各成分の効果および限界量
は、複合的かつ相乗的に現れ、決定されるため成分個々
の多少で特定することは難しい。しかし、基本的には表
1における試料番号4と比較試料番号3との比較から、
成分(SrO・CeO2)、(CaO・CeO2)の含有
によってQ値が向上し、試料番号5、6、7、9、10と
比較試料番号3との比較から成分CaTiO3 の含有
によって、非誘電率が大きく増加することがわかる。ま
た、試料番号2、3、4、9、10、11と比較試料番号3
との比較から成分(SrO・CeO2)の含有はτkをマ
イナス側に、成分(CaO・CeO2)の含有はτkをプ
ラス側に、そして成分CaTiO3 の含有はτkをマイ
ナス側にそれぞれ移行させることがわかる。すなわち、
前記三成分(SrO・CeO2)、(CaO・Ce
2)、CaTiO3により任意に温度係数を調整でき
る。さらに、試料番号5と12との比較から副成分Mn2
3の添加含有により比誘電率がわずかに増加すること
がわかる。このように本発明の誘電体磁器は、マイクロ
波周波数帯において、誘電率およびQ値が大きく、誘電
率の温度係数を容易に補償することができる。成分Ba
Oのモル分率xが0.25より大きくなるか、あるいは、成
分TiO2のモル分率yが0.60より小さくなると比誘電
率、Q値が低下し、成分CaTiO3のモル分率が0.00
のばあいには比誘電率が低下し、マイクロ波用誘電体磁
器材料として不適当になる。この比誘電率とQ値の低下
は、成分(SrO・CeO2)と成分(CaO・Ce
2)のモル分率の和(m+n)が0.8より大きいばあ
い、また副成分Mn23が3重量%を超えて添加含有さ
れたばあいにも生ずる。また、成分BaOのモル分率x
が0.1より小さく、成分TiO2のモル分率yが0.85より
大きいばあい、あるいは、成分CaTiO3のモル分率
が0.6を超えたばあいには、τkの絶対値が大きくなり、
部品としての応用が難しくなり、工業材料として不適当
になる。
[0012] The effect and the limit amount of each component exhibiting the desired characteristics appear in a complex and synergistic manner and are determined, so that it is difficult to specify the amount of each component. However, basically, from the comparison between Sample No. 4 and Comparative Sample No. 3 in Table 1,
The Q value is improved by the inclusion of the components (SrO.CeO 2 ) and (CaO.CeO 2 ). From the comparison between Sample Nos. 5, 6, 7, 9, and 10 and Comparative Sample No. 3, the inclusion of the component CaTiO 3 It can be seen that the non-dielectric constant greatly increases. Sample Nos. 2, 3, 4, 9, 10, 11 and Comparative Sample No. 3
From the comparison with, the content of the component (SrO.CeO 2 ) has τ k on the minus side, the content of the component (CaO.CeO 2 ) has τ k on the plus side, and the content of the component CaTiO 3 has τ k on the minus side. It can be seen that they are respectively shifted to. That is,
The three components (SrO. CeO 2 ), (CaO. Ce)
The temperature coefficient can be arbitrarily adjusted by O 2 ) and CaTiO 3 . Further, from the comparison between Sample Nos. 5 and 12, the auxiliary component Mn 2
It can be seen that the relative dielectric constant slightly increases with the addition of O 3 . As described above, the dielectric ceramic of the present invention has a large dielectric constant and a large Q value in a microwave frequency band, and can easily compensate for the temperature coefficient of the dielectric constant. Component Ba
When the mole fraction x of O is larger than 0.25 or the mole fraction y of the component TiO 2 is smaller than 0.60, the relative dielectric constant and the Q value are reduced, and the mole fraction of the component CaTiO 3 is 0.00
In such a case, the relative dielectric constant decreases, and the material becomes unsuitable as a dielectric ceramic material for microwaves. The decrease in the relative permittivity and the Q value is caused by the component (SrO.CeO 2 ) and the component (CaO.Ce
It also occurs when the sum (m + n) of the molar fractions of O 2 ) is greater than 0.8 and when the minor component Mn 2 O 3 is added in excess of 3% by weight. Also, the molar fraction x of the component BaO
Is less than 0.1 and the molar fraction y of the component TiO 2 is greater than 0.85, or when the molar fraction of the component CaTiO 3 exceeds 0.6, the absolute value of τ k becomes larger,
It becomes difficult to apply as a part and becomes unsuitable as an industrial material.

【0013】なお、前記実施例では、出発原料としてB
aCO3、TiO2、Sm23、CaCO3、SrCO3
CeO2、Mn23、CaTiO3を用いたが、特にこれ
らの原料に限定される必要はなく、必要に応じて各金属
成分を含有する化合物、BaTiO3などの複合酸化物
を用いてもよい。
In the above embodiment, B was used as a starting material.
aCO 3 , TiO 2 , Sm 2 O 3 , CaCO 3 , SrCO 3 ,
Although CeO 2 , Mn 2 O 3 , and CaTiO 3 were used, they are not particularly limited to these raw materials, and if necessary, a compound containing each metal component or a composite oxide such as BaTiO 3 may be used. Good.

【0014】以上、表1からも分かるように、この実施
例によれば、比誘電率85〜93を示す組成の誘電体磁器材
料がえられるとともに、BaO−TiO2−Sm23
磁器における成分Sm23の一部を成分(SrO・Ce
2)および(CaO・CeO2)で置換し、さらに、成
分CaTiO3を含有させることにより、従来より高い
比誘電率、実用上充分なQ値、0ppm/℃を中心に調整
可能な温度係数を有する誘電体磁器がえられ、また、M
23が添加含有されることにより、焼結性を改善する
と共に、より大きな比誘電率の誘電体磁器をうることが
できる。
[0014] Thus, as can be seen from Table 1, according to this embodiment, along with dielectric ceramic materials of compositions shown relative dielectric constant 85 to 93 will be obtained, BaO-TiO 2 -Sm 2 O 3 based ceramic A part of the component Sm 2 O 3 in the component (SrO · Ce)
O 2 ) and (CaO · CeO 2 ), and further containing CaTiO 3 to provide a higher relative dielectric constant, a practically sufficient Q value, and a temperature coefficient that can be adjusted around 0 ppm / ° C. And a dielectric porcelain having
By adding and containing n 2 O 3 , sinterability can be improved and a dielectric ceramic having a higher relative dielectric constant can be obtained.

【0015】[0015]

【発明の効果】以上のように、本発明は、一般式:(1
−a)[xBaO−yTiO2−z{(1−m−n)S
23−m(SrO・CeO2)−n(CaO・Ce
2)}]−a・CaTiO3(式中、モル分率で、0.1
≦x≦0.25、0.6≦y≦0.85、0.05≦z≦0.3、0≦m≦
0.8、0≦n≦0.8、x+y+z=1、0<m+n≦0.
8、0<a≦0.60)で示されるものを用いることによ
り、マイクロ波周波数域において従来より高い比誘電
率、実用上充分に高いQ値および小さく安定な温度係数
を有する優れたマイクロ波用誘電体磁器材料がえられ
る。またMn23を添加含有せしめることにより、焼結
性を改善すると共に、より大きな比誘電率の誘電体磁器
をえることができる。たとえば、この発明の誘電体磁器
の使用により誘電体共振器等のマイクロ波応用部品の小
型化、高性能化を促すことができる。
As described above, the present invention provides a compound represented by the general formula: (1)
-A) [xBaO-yTiO 2 -z {(1-mn) S
m 2 O 3 -m (SrO.CeO 2 ) -n (CaO.Ce
O 2 )}]-a · CaTiO 3 (wherein, by mole fraction, 0.1
≦ x ≦ 0.25, 0.6 ≦ y ≦ 0.85, 0.05 ≦ z ≦ 0.3, 0 ≦ m ≦
0.8, 0 ≦ n ≦ 0.8, x + y + z = 1, 0 <m + n ≦ 0.
8, 0 <a ≦ 0.60), an excellent microwave dielectric having a higher relative dielectric constant, a sufficiently high Q value for practical use, and a small and stable temperature coefficient in the microwave frequency range. A body porcelain material is obtained. Further, by adding and containing Mn 2 O 3 , sinterability is improved and a dielectric ceramic having a higher relative dielectric constant can be obtained. For example, the use of the dielectric porcelain of the present invention can promote the miniaturization and high performance of microwave application parts such as a dielectric resonator.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 渡井 久男 尼崎市塚口本町8丁目1番1号 三菱電 機株式会社材料研究所内 審査官 佐藤 智康 (56)参考文献 特開 昭63−294609(JP,A) ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Hisao Watai 8-1-1, Tsukaguchi-Honmachi, Amagasaki-shi Examiner, Materials Research Laboratory, Mitsubishi Electric Corporation Tomoyasu Sato (56) References JP-A-63-294609 (JP, A)

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】一般式: (1−a)[xBaO−yTiO2−z{(1−m−
n)Sm23−m(SrO・CeO2)−n(CaO・
CeO2)}]−a・CaTiO3により表わされる組成
式において、モル分率で、 0.1≦x≦0.25 0.6≦y≦0.85 0.05≦z≦0.3 0≦m≦0.8 0≦n≦0.8 x+y+z=1 0<m+n≦0.8 0<a≦0.60 なる組成範囲にあり、また副成分としてMn23が全重
量に対して3重量%以下添加含有されてなることを特徴
とするマイクロ波用誘電体磁器材料。
1. The general formula: (1-a) [xBaO-yTiO 2 -z {(1-m-
n) Sm 2 O 3 -m (SrO.CeO 2 ) -n (CaO.
CeO 2 )}]-a · CaTiO 3 In the composition formula, 0.1 ≦ x ≦ 0.25 0.6 ≦ y ≦ 0.85 0.05 ≦ z ≦ 0.30 ≦ m ≦ 0.80 ≦ n ≦ 0.8 x + y + z = 1 0 <m + n ≦ 0.8 0 <a ≦ 0.60 In the composition range, Mn 2 O 3 is added as an auxiliary component in an amount of 3% by weight or less based on the total weight, and is a dielectric ceramic for microwaves. material.
JP2400354A 1990-12-04 1990-12-04 Dielectric ceramic material for microwave Expired - Fee Related JP2609362B2 (en)

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