KR0162873B1 - Dielectric ceramic composition for high frequency - Google Patents

Dielectric ceramic composition for high frequency

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KR0162873B1
KR0162873B1 KR1019960032976A KR19960032976A KR0162873B1 KR 0162873 B1 KR0162873 B1 KR 0162873B1 KR 1019960032976 A KR1019960032976 A KR 1019960032976A KR 19960032976 A KR19960032976 A KR 19960032976A KR 0162873 B1 KR0162873 B1 KR 0162873B1
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ceramic composition
dielectric ceramic
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high frequency
dielectric
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KR19980014130A (en
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김대준
정형진
오현상
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박원훈
한국과학기술연구원
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    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
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    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
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Abstract

본 발명은 더욱 향상된 품질계수(Q), 유전율(K)과 공진주파수의 온도계수(τf)를 얻기 위하여, 90에서 99몰%의 (ZrxSny)TizO4(x+y+z=2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4)를 주성분으로 하는 유전체 자기 조성물에 0.5에서 5.0몰%의 산화마그네슘 및 0.5에서 5.0몰%의 산화탄탈륨 또는 0.5에서 5.0몰%의 산화니오비늄의 복합물이 첨가되고 이에 부가하여 0.75에서 1.5중량%의 산화아연이 가해져 소결된 고주파용 유전체 자기 조성물을 제공한다.In order to obtain a further improved quality factor (Q), dielectric constant (K) and temperature coefficient (τ f ) of the resonant frequency, 90 to 99 mol% of (Zr x Sn y ) Ti z O 4 (x + y + z = 2, 0.6 ≦ x ≦ 1.0, 0 ≦ y ≦ 0.4, 0.6 ≦ z ≦ 1.4) in a dielectric ceramic composition of 0.5 to 5.0 mol% magnesium oxide and 0.5 to 5.0 mol% tantalum oxide or 0.5 to A 5.0 mol% composite of niobium oxide is added and in addition 0.75 to 1.5 wt% zinc oxide is added to provide a sintered dielectric ceramic composition for high frequency.

Description

고주파용 유전체 자기 조성물High Frequency Dielectric Magnetic Composition

본 발명은 고주파용 유전체 자기 조성물에 관한 것으로, 더욱 상세하게는 RF 및 마이크로파의 필터와 진동자에 사용되는 유전체 공진기의 재료인 고주파용 유전체 자기 조성물에 관한 것이다.The present invention relates to a dielectric ceramic composition for high frequency, and more particularly, to a dielectric ceramic composition for high frequency which is a material of a dielectric resonator used for filters and vibrators of RF and microwaves.

이동통신 및 위성방송 등 고주파를 이용하는 통신체계의 보급이 활발하게 진척됨에 따라 주파수 대역 300MHz에서 300GHz에서 작동하는 부품, 즉 공진기 소자, 대역통과(또는 저지)필터 및 마이크로파 집적회로(MIC:Microwave Integrated CircuitAs the use of high frequency communication systems such as mobile communication and satellite broadcasting is actively progressing, components operating in the frequency band 300 MHz to 300 GHz, such as resonator elements, band pass (or stop) filters, and microwave integrated circuits (MIC)

)등의 산업적 중요성이 부각되고 있으며 고주파용 유전체 세라믹스의 응용이 크게 증대되고 있다.The importance of high-temperature dielectric ceramics is increasing.

마이크로파를 이용한 통신 시스템에 사용되는 고주파용 유전체는,High frequency dielectrics used in microwave communication systems,

1) 유전체내에서 마이크로파의 파장은 유전율의 1/2승에 반비례하므로 부품의 소형화를 위해서는 유전상수(K)가 커야 하며,1) Since the wavelength of microwaves in the dielectric is inversely proportional to the half power of the dielectric constant, the dielectric constant (K) must be large for the miniaturization of components.

2) 유전손실은 주파수에 비례하여 증가되므로 고성능화를 위해서는 유전손실 tanδ의 역수인 품질계수 Q값이 높아야 하고,2) Dielectric loss increases in proportion to frequency, so for high performance, quality factor Q, which is the inverse of dielectric loss tanδ, must be high.

3) 유전체 공진기의 공진주파수의 온도계수(τf)가 작아서 0ppm/℃에 가까운 특성을 가져야 하며,3) The temperature coefficient (τ f ) of the resonant frequency of the dielectric resonator is small and should have characteristics close to 0 ppm / ℃,

부수적으로, 경시변화가 작고, 열전도율이 크며, 기계적 강도가 높을 것이 요구된다.Incidentally, it is required that the change over time is small, the thermal conductivity is high, and the mechanical strength is high.

고주파용 유전체 자기 조성물은 일반적으로 다음과 같은 것들이 제공되어져 왔다.The dielectric ceramic composition for high frequency has been generally provided with the following.

일본 공개특허공보 평3-75268호에서는 주성분으로 xTiO2-yZrO2-zSnO2(0.3≤x≤0.6, 0.25≤y≤0.6, 0.025≤z≤0.2)에 중량비로 5% 이하의 Co와 Nb를 첨가하여 제조되는 유전체 자기 조성물을 개시하면서, 그 품질계수(Q)가 9,300이고 유전상수(K)가 39.4인 유전 특성을 갖는다고 하나 측정 주파수 대역과 공진주파수의 온도계수가 기재되어 있지 않다.Japanese Patent Laid-Open No. 3-75268 describes xTiO 2 -yZrO 2 -zSnO 2 (0.3≤x≤0.6, 0.25≤y≤0.6, 0.025≤z≤0.2) as a main component, and 5% or less of Co and Nb in weight ratio. Disclosing the dielectric ceramic composition prepared by addition, it has a dielectric property with a quality factor (Q) of 9,300 and a dielectric constant (K) of 39.4, but the temperature coefficients of the measurement frequency band and the resonance frequency are not described.

일본 공개특허공보 평4-106807호에서는 주성분으로 xTiO2-yZrO2-zSnO2(0.3≤x≤0.6, 0.25≤y≤0.6, 0.025≤z≤0.2)에 MnO, Al2O3, CuO, Li2O를 중량비로 5% 이하로 첨가하고, Nb2O5를 중량비로 10% 이하인 조성을 갖는 유전체 자기 조성물을 개시하면서, 그 품질계수가 8,500이고 유전상수가 37.0이며 공진주파수의 온도계수가 10ppm/℃의 유전특성을 갖는다고 하였다. 그러나, 실제 사용할 수 있는 온도계수는 ±5ppm/℃의 범위내에 있어야 하므로 온도계수가 너무 높은 단점이 있다.Japanese Patent Application Laid-Open No. 4-106807 discloses MnO, Al 2 O 3 , CuO, Li in xTiO 2 -yZrO 2 -zSnO 2 (0.3≤x≤0.6, 0.25≤y≤0.6, 0.025≤z≤0.2) as main components. the 2 O ratio by weight is added to less than 5%, Nb 2 O and discloses a dielectric ceramic composition having a composition 10% or less to 5 ratio by weight, the quality factor is 8500 and the dielectric constant is 37.0 and the temperature coefficient of resonant frequency 10ppm / ℃ It has a dielectric characteristic of. However, since the actual usable temperature coefficient should be in the range of ± 5ppm / ℃ has a disadvantage that the temperature coefficient is too high.

일본 공개특허공보 평5-117024호는 (Zr,Sn)TiO4를 주성분으로 하고 CaO의 함유량을 300ppm 이하로 첨가하는 유전체 자기 조성물을 개시하였다. 상기 유전체 자기 조성물의 유전특성은 3GHz에서 품질계수가 15,000이고 유전상수가 37.0이며, 공진주파수의 온도계수가 -2ppm/℃라고 하였으나, TiO2-ZrO2-SnO2계 유전체의 응용 주파수의 범위가 7GHz이므로 이 주파수 대역에서는 훨씬 낮은 값을 나타낼 것으로 예측된다.Japanese Laid-Open Patent Publication No. 5-117024 discloses a dielectric ceramic composition containing (Zr, Sn) TiO 4 as a main component and adding CaO content at 300 ppm or less. The dielectric properties of the dielectric ceramic composition is the quality factor of 15,000 and a dielectric constant of 37.0 at 3GHz, temperature coefficient of resonance frequency, but that -2ppm / ℃, TiO 2 -ZrO 2 -SnO 2 based applications in a range of frequencies of the dielectric 7GHz Therefore, it is expected to show much lower value in this frequency band.

그리고, 현재 시판 중인 일본 무라타(Murata)사의 유전체 재료의 Q·f는 7GHz에서 44,380이고 유전상수는 37.55이다.The commercially available dielectric material of Murata, Japan, has a Qf of 44,380 and a dielectric constant of 37.55 at 7 GHz.

따라서, 본 발명은 현재 고주파용 유전체 자기 조성물에 있어서 사용주파수의 증가와 함께 요구되는 더욱 향상된 품질계수(Q), 유전상수(K)와 공진주파수의 온도계수(τf)를 얻는 것을 목적으로 하며, 이와 같은 목적을 달성하기 위하여 본 발명은 ZrO2-SnO2-TiO2계의 유전체 자기 조성물에 기존의 5가 첨가 산화물 Ta2O5, Nb2O5대신에, 상기 첨가 산화물 Ta2O5또는 Nb2O5와 함께 2가의 산화물 Mgo를 첨가한 신규의 고주파용 유전체 자기 조성물을 제공한다.Accordingly, an object of the present invention is to obtain a further improved quality factor (Q), dielectric constant (K) and temperature coefficient (τ f ) of the resonant frequency required for increasing the use frequency in dielectric ceramic compositions for high frequency. In order to achieve the above object, the present invention replaces the existing pentavalent addition oxides Ta 2 O 5 and Nb 2 O 5 in the ZrO 2 -SnO 2 -TiO 2 -based dielectric ceramic composition, and the addition oxides Ta 2 O 5 Alternatively, a novel high frequency dielectric ceramic composition is obtained in which divalent oxide Mgo is added together with Nb 2 O 5 .

이에 본 발명은 90에서 99몰%의 (ZrxSny)TizO4(x+y+z=2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4), 0.5에서 5.0몰%의 산화마그네슘, 0.5에서 5.0몰%의 산화탄탈륨 및 0.75에서 1.5중량%의 산화아연으로 이루어지는 고주파용 유전체 자기 조성물을 제공한다.Therefore, the present invention is 90 to 99 mol% (Zr x Sn y ) Ti z O 4 (x + y + z = 2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4), 0.5 at A dielectric ceramic composition for high frequency, comprising 5.0 mol% magnesium oxide, 0.5 to 5.0 mol% tantalum oxide, and 0.75 to 1.5 wt% zinc oxide.

상기 조성범위 중 98.5에서 98몰%의 (ZrxSny)TizO4(x+y+z=2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4)를 주성분으로 하는 유전체 자기 조성물에 1.0에서 1.5몰%의 산화마그네슘과 1.0에서 1.5몰%의 산화탄탈륨의 복합물을 첨가하고, 0.75에서 1.5중량%의 산화아연을 추가적으로 첨가하여 제조한 유전체 자기 조성물의 특성이 특히 우수하다.98.5 to 98 mol% of (Zr x Sn y ) Ti z O 4 (x + y + z = 2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4) as the main components in the composition range. The dielectric ceramic composition prepared by adding a composite of 1.0 to 1.5 mol% magnesium oxide and 1.0 to 1.5 mol% tantalum oxide, and additionally adding 0.75 to 1.5 wt% zinc oxide to the dielectric ceramic composition is particularly excellent. Do.

또한, 상기 (ZrxSny)TizO4(x+y+z=2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4)의 화합물에서 x=0.8, y=0.2 및 z=1.0인 (Zr0.8Sn0.2)TiO4의 경우, 가장 바람직한 결과가 나온다.Further, in the compound of (Zr x Sn y ) Ti z O 4 (x + y + z = 2, 0.6 ≦ x ≦ 1.0, 0 ≦ y ≦ 0.4, 0.6 ≦ z ≦ 1.4), x = 0.8, y = 0.2 And for (Zr 0.8 Sn 0.2 ) TiO 4 with z = 1.0, most preferred results are obtained.

또, 본 발명은 90에서 99몰%의 (ZrxSny)TizO4(x+y+z=2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4), 0.5에서 5.0몰%의 산화마그네슘, 0.5에서 5.0몰%의 산화니오비늄 및 0.75에서 1.5중량%의 산화아연으로 이루어지는 고주파용 유전체 자기 조성물을 제공한다.In addition, the present invention is 90 to 99 mol% (Zr x Sn y ) Ti z O 4 (x + y + z = 2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4), 0.5 At 5.0 mol% magnesium oxide, 0.5 to 5.0 mol% niobium oxide, and 0.75 to 1.5 weight% zinc oxide.

상기 조성범위 중 98.5에서 98몰%의 (ZrxSny)TizO4(x+y+z=2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4)를 주성분으로 하는 유전체 자기 조성물에 0.75에서 1.25몰%의 산화마그네슘과 0.75에서 1.25몰%의 산화니오비늄의 복합물을 첨가하고, 0.75에서 1.5중량%의 산화아연을 추가적으로 첨가하여 제조한 유전체 자기 조성물의 특성이 특히 우수하다.98.5 to 98 mol% of (Zr x Sn y ) Ti z O 4 (x + y + z = 2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4) as the main components in the composition range. The dielectric ceramic composition prepared by adding a composite of 0.75 to 1.25 mol% magnesium oxide and 0.75 to 1.25 mol% niobium oxide to 0.75 to 1.5 wt% zinc oxide was added to the dielectric ceramic composition. Especially excellent.

또한, 상기 (ZrxSny)TizO4(x+y+z=2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4) 화합물에서 x=0.8, y=0.2 및 z=1.0인 (Zr0.8Sn0.2)TiO4의 경우 가장 바람직한 결과가 나온다.Further, in the compound (Zr x Sn y ) Ti z O 4 (x + y + z = 2, 0.6 ≦ x ≦ 1.0, 0 ≦ y ≦ 0.4, 0.6 ≦ z ≦ 1.4), x = 0.8, y = 0.2 and The most desirable result is obtained for (Zr 0.8 Sn 0.2 ) TiO 4 with z = 1.0.

상기 시료는 통상의 유전체 자기 조성물의 제조방법으로 제조되었는데 이를 간략하게 설명하면 다음과 같다.The sample was prepared by a conventional method for preparing a dielectric ceramic composition, which will be briefly described as follows.

고순도의 각 시료를 원하는 비율로 평량한 후, 분산매로 유기용매를 사용하면서 볼 밀로 혼합한다. 상기 혼합된 슬러리는 건조된 후, 하소된다. 다시 분산매로 유기 용매를 사용하면서 어트리션 밀로 분쇄 및 혼합을 행하고 건조한 뒤, 몰드로 프레스하여 등압성형을 행한다. 그후 상기 성형된 시편을 대기 분위기에서 소성한다.After each sample of high purity is weighed in a desired ratio, it is mixed with a ball mill, using an organic solvent as a dispersion medium. The mixed slurry is dried and then calcined. Then, using an organic solvent as a dispersion medium, the mixture is pulverized and mixed with an attrition mill, dried, pressed into a mold, and subjected to isostatic molding. The molded specimen is then fired in an atmospheric atmosphere.

후술하는 실시예의 결과들은 ZrO2-SnO2-TiO2계 유전체 자기 조성물에 2가의 산화물과 5가의 산화물을 복합으로 첨가한 본 발명에 의한 고주파용 유전체 자기 조성물이 종래의 유전체 자기 조성물과 비교하여 그 특성이 개선된 값을 갖는다는 것을 알 수 있는데, 구체적으로는 7GHz에서 Q·f가 44,830보다 크고 52,808에 이르고(첨부한 표에서의 Q값에 7GHz에서의 값이므로 7을 곱하면 됨), 유전상수가 38.48에 이르며, 공진 주파수의 온도계수가 -10ppm/℃∼10ppm/℃인 극히 우수한 유전특성을 갖음을 알 수 있다.The results of the embodiments described below are inferred from those of the high frequency dielectric ceramic composition according to the present invention in which a divalent oxide and a pentavalent oxide are added to the ZrO 2 —SnO 2 —TiO 2 based dielectric ceramic composition in comparison with the conventional dielectric ceramic composition. It can be seen that the characteristic has an improved value. Specifically, at 7 GHz, the Qf is greater than 44,830 and reaches 52,808 (multiplying the value of 7 in the attached table by the value at 7 GHz), The constant reaches 38.48 and the temperature coefficient of the resonance frequency is -10ppm / ℃ ~ 10ppm / ℃ it can be seen that the very excellent dielectric properties.

이하의 실시예에서 본 발명은 더욱 상세하게 설명될 것이다. 그러나, 본 발명이 후술하는 실시예에 의해서 한정되는 것은 아니다.In the following examples the invention will be explained in more detail. However, the present invention is not limited to the examples described below.

[실시예]EXAMPLE

[실시예 1]Example 1

99.9% 이상의 순도를 가지는 (ZrxSny)TizO4(x+y+z=2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4), 산화마그네슘, 산화탄탈륨 및 산화아연을 표 1에 따른 비율로 평량한 후, 나이론 자와 지르코니아 볼을 사용하여 볼 밀로 24시간 동안 혼합하였다. 이 때 분산매로 에틸 알콜이 사용되었으며, 상기 혼합된 슬러리는 건조된 후 1150℃에서 5시간 동안 하소되었다. 다시 에틸 알콜을 분산매로 사용하고 어트리션 밀을 이용하여 2시간 동안 분쇄 및 혼합한 후 건조하여 직경이 12.0mm인 몰드로 프레스한 후 등압성형을 행하였다. 그후 상기 성형된 시편을 1300에서 1450℃의 온도, 대기 분위기에서 소성하였다.(Zr x Sn y ) Ti z O 4 (x + y + z = 2, 0.6 ≦ x ≦ 1.0, 0 ≦ y ≦ 0.4, 0.6 ≦ z ≦ 1.4) with a purity of at least 99.9%, and magnesium oxide, tantalum oxide and After zinc oxide was weighed in a ratio according to Table 1, the mixture was mixed with a ball of nylon and a zirconia ball for 24 hours. Ethyl alcohol was used as a dispersion medium, and the mixed slurry was dried and then calcined at 1150 ° C. for 5 hours. Ethyl alcohol was again used as a dispersion medium, pulverized and mixed for 2 hours using an Attrition Mill, dried, pressed into a mold having a diameter of 12.0 mm, and then subjected to isostatic molding. Thereafter, the molded specimen was fired in an atmosphere of air at a temperature of 1300 to 1450 ° C.

그 소결온도, 유전상수 및 품질계수가 표 1에 역시 나와 있다.Its sintering temperature, dielectric constant and quality factor are also shown in Table 1.

[실시예 2]Example 2

99.9% 이상의 순도를 가지는 (ZrxSny)TizO4(x+y+z=2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4), 산화마그네슘, 산화니오비늄 및 산화아연을 표 2의 비율로 평량한 후, 나이론 자와 지르코니아 볼을 사용하여 볼 밀로 24시간 동안 혼합하였다. 이때 분산매로 에틸 알콜이 사용되었으며, 상기 혼합된 슬러리는 건조된 후 1150℃에서 5시간 동안 하소되었다. 다시 에틸 알콜을 분산매로 사용하고 어트리션 밀을 이용하여 2시간 동안 분쇄 및 혼합한 후 건조하여 직경이 12.0mm인 몰드로 프레스한 후 등압성형을 행하였다. 그 후 상기 성형된 시편을 1300에서 1450℃의 온도, 대기 분위기에서 소성하였다.(Zr x Sn y ) Ti z O 4 (x + y + z = 2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4) with purity of 99.9% or more, magnesium oxide, niobium oxide After chromium and zinc oxide were weighed in the ratios of Table 2, they were mixed with a ball of nylon and zirconia for 24 hours in a ball mill. Ethyl alcohol was used as a dispersion medium, and the mixed slurry was dried and calcined at 1150 ° C. for 5 hours. Ethyl alcohol was again used as a dispersion medium, pulverized and mixed for 2 hours using an Attrition Mill, dried, pressed into a mold having a diameter of 12.0 mm, and then subjected to isostatic molding. Thereafter, the molded specimen was fired in an atmosphere of air at a temperature of 1300 to 1450 ° C.

그 소결온도, 유전상수 및 품질계수가 표 2에 역시 나와 있다.Its sintering temperature, dielectric constant and quality factor are also shown in Table 2.

Claims (10)

90에서 99몰%의 (ZrxSny)TizO4(x+y+z=2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4), 0.5에서 5.0몰%의 산화마그네슘, 0.5에서 5.0몰%의 산화탄탈륨 및 0.75에서 1.5중량%의 산화아연으로 이루어지는 고주파용 유전체 자기 조성물.90 to 99 mol% of (Zr x Sn y ) Ti z O 4 (x + y + z = 2, 0.6 ≦ x ≦ 1.0, 0 ≦ y ≦ 0.4, 0.6 ≦ z ≦ 1.4), and 0.5 to 5.0 mol% A high-frequency dielectric ceramic composition comprising magnesium oxide, 0.5 to 5.0 mol% tantalum oxide and 0.75 to 1.5 wt% zinc oxide. 제1항에 있어서, 상기 (ZrxSny)TizO4(x+y+z=2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4)의 양이 98.5에서 98몰%인 고주파용 유전체 자기 조성물.The method of claim 1, wherein the amount of (Zr x Sn y ) Ti z O 4 (x + y + z = 2, 0.6 ≦ x ≦ 1.0, 0 ≦ y ≦ 0.4, 0.6 ≦ z ≦ 1.4) is 98.5 to 98. A mole% dielectric ceramic composition for high frequency. 제1항에 있어서, 상기 산화마그네슘의 양이 1.0에서 1.5몰%인 고주파용 유전체 자기 조성물.The dielectric ceramic composition for high frequency according to claim 1, wherein the amount of magnesium oxide is 1.0 to 1.5 mol%. 제1항에 있어서, 상기 산화탄탈륨의 양이 1.0에서 1.5몰%인 고주파용 유전체 자기 조성물.The dielectric ceramic composition for high frequency according to claim 1, wherein the amount of tantalum oxide is 1.0 to 1.5 mol%. 제1항 내지 제4항 중 어느 한 항에 있어서, 상기 x, y, z가 x=0.8, y=0.2 및 z=1.0인 고주파용 유전체 자기 조성물.The dielectric ceramic composition for high frequency according to any one of claims 1 to 4, wherein x, y, z are x = 0.8, y = 0.2 and z = 1.0. 90에서 99몰%의 (ZrxSny)TizO4(x+y+z=2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4), 0.5에서 5.0몰%의 산화마그네슘, 0.5에서 5.0몰%의 산화니오비늄 및 0.75에서 1.5중량%의 산화아연으로 이루어지는 고주파용 유전체 자기 조성물.90 to 99 mol% of (Zr x Sn y ) Ti z O 4 (x + y + z = 2, 0.6 ≦ x ≦ 1.0, 0 ≦ y ≦ 0.4, 0.6 ≦ z ≦ 1.4), and 0.5 to 5.0 mol% A high frequency dielectric ceramic composition comprising magnesium oxide, 0.5 to 5.0 mol% niobium oxide, and 0.75 to 1.5 wt% zinc oxide. 제6항에 있어서, 상기 (ZrxSny)TizO4(x+y+z=2, 0.6≤x≤1.0, 0≤y≤0.4, 0.6≤z≤1.4)의 양이 98.5에서 98몰%인 고주파용 유전체 자기 조성물.The method according to claim 6, wherein the amount of (Zr x Sn y ) Ti z O 4 (x + y + z = 2, 0.6 ≦ x ≦ 1.0, 0 ≦ y ≦ 0.4, 0.6 ≦ z ≦ 1.4) is 98.5 to 98. A mole% dielectric ceramic composition for high frequency. 제6항에 있어서, 상기 산화마그네슘의 양이 0.75에서 1.25몰%인 고주파용 유전체 자기 조성물.7. The dielectric ceramic composition for high frequency according to claim 6, wherein the amount of magnesium oxide is 0.75 to 1.25 mol%. 제6항에 있어서, 상기 산화니오비늄의 양이 0.75에서 1.25몰%인 것을 특징으로 하는 고주파용 유전체 자기 조성물.7. The dielectric ceramic composition for high frequency according to claim 6, wherein the amount of niobium oxide is 0.75 to 1.25 mol%. 제6항 내지 제9항 중 어느 한 항에 있어서, 상기 x, y, z가 x=0.8, y=0.2 및 z=1.0인 고주파용 유전체 자기 조성물.The dielectric ceramic composition for high frequency according to any one of claims 6 to 9, wherein x, y, and z are x = 0.8, y = 0.2 and z = 1.0.
KR1019960032976A 1996-08-08 1996-08-08 Dielectric ceramic composition for high frequency KR0162873B1 (en)

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