JPH08203023A - Production of magnetic head - Google Patents

Abstract

PURPOSE: To improve the magnetic characteristics by suppressing the generation of foam generated in a glass part constituting magnetic head and sufficiently obtaining the insulation between the magnetic films of magnetic core formed by laminating plural magnetic metallic films via insulating films. CONSTITUTION: Magnetic core grooves 1a are first formed on a substrate 1 and the working surfaces of these grooves are etched. Next, magnetic layers 2 to constitute the magnetic cores are formed on this substrate 1. Winding grooves 1b and separating grooves 1c are then formed and the working surfaces of these grooves are etched. Glass 3 is packed into the magnetic core grooves 1a, the winding grooves 1b and the separating grooves 1c. Thin-film coils 4 are formed so that the winding grooves 1b pass the glass 3 parts to form a magnetic core half body block.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a magnetic head suitable for a video tape recorder, a video cassette recorder, a magnetic disk device and the like, and more particularly to a method of manufacturing a magnetic head in which a coil is formed by a thin film process.

[0002]

2. Description of the Related Art In recent years, high density recording of information signals has been advanced in the field of magnetic recording such as video tape recorders, video cassette recorders, magnetic disk devices, etc. Therefore, for a magnetic head that is responsible for recording and reproduction, high efficiency is achieved by downsizing the magnetic core,
Low inductance is required by thinning the coil,
Along with this, processing of the magnetic head has become complicated and precise.

When manufacturing a small magnetic head using such a thin film coil, for example, first, a groove (hereinafter referred to as a magnetic core groove) along the shape of a magnetic core is formed on a substrate made of a non-magnetic material. ) Is ground with a grindstone or the like to form a magnetic core forming surface. Next, a magnetic layer to be a magnetic core is formed on the substrate on which the magnetic core groove is formed. Here, the magnetic layer is not limited to a single magnetic film, and may have a laminated structure in which a plurality of metal magnetic films are laminated with an insulating film interposed therebetween in order to reduce eddy current loss. . Next, a groove for forming a thin film coil (hereinafter referred to as a winding groove) and a groove for separating the magnetic layer for each magnetic core (hereinafter referred to as a separation groove) are formed on the substrate on which the magnetic layer is formed. And) are formed by a grindstone or the like. Next, the magnetic core groove, the winding groove, and the separation groove are melt-filled with glass having a low melting point to smooth the surface,
A thin film coil is formed so as to pass through the winding groove in the glass portion. As described above, the magnetic head half body in which the magnetic core and the thin film coil are formed on the substrate is manufactured. And
After joining the pair of magnetic head halves thus produced, through the magnetic gap so that the magnetic cores face each other,
A magnetic head is manufactured by processing it into a predetermined shape.

[0004]

By the way, in the magnetic head as described above, the magnetic core groove, the winding groove and the separation groove are formed by a grindstone or the like. It is difficult to do so, and the processed surface becomes rough. Therefore, it is preferable to perform mirror finishing on the machined surface after machining with a grindstone or the like.
However, it is very difficult to mirror-finish the processed surface of the groove,
At present, after forming these grooves, cleaning is only performed with an organic solvent or the like. Therefore, the processed surfaces of these grooves are not smooth and are in a state where roughness remains.

However, if such roughness remains,
When glass is filled into these grooves, bubbles are generated in the glass due to the roughness of the processed surface of the grooves. Then, such bubbles may cause a short circuit or disconnection during the formation of the thin film coil, or may cause the sliding surface to be rough or the durability to deteriorate when the magnetic head is formed.

Further, in the case where the magnetic layer has a laminated structure in which a plurality of metal magnetic films are laminated with an insulating film interposed, if the processed surface of the separation groove or the winding groove is rough, the separation groove or the winding groove is formed. The cross-section of the magnetic layer, which is part of the processed surface of, becomes rough,
In the cross-section of the magnetic layer, the metal magnetic film may cross the adjacent insulating film and be electrically connected to another metal magnetic film. Then, when the metal magnetic film is electrically conducted beyond the adjacent insulating film, there arises a problem that the effect of reducing the eddy current loss due to the laminated structure is reduced.

Also, when the magnetic layer is formed, the surface property of the substrate on which the magnetic core groove is formed is very important, and if the processed surface of the magnetic core groove, that is, the magnetic core formation surface is rough, The magnetic layer is not uniformly formed, and the magnetic characteristics of the magnetic core deteriorate.

Therefore, the present invention has been proposed in view of such a conventional situation, and bubbles are not generated much in the glass when the magnetic head half body is manufactured, and the defects due to the bubbles in the glass are not generated. It is an object of the present invention to provide a method of manufacturing a magnetic head in which the occurrence of the magnetic field is less likely to occur, and a method of manufacturing a magnetic head in which insulation between metal magnetic films is sufficiently achieved when a magnetic layer has a laminated structure. Another object of the present invention is to provide a method of manufacturing a magnetic head, which can form a magnetic layer uniformly and can manufacture a magnetic head having excellent magnetic characteristics.

[0009]

In order to achieve the above-mentioned object, a method of manufacturing a magnetic head according to the present invention is a method of manufacturing a magnetic head comprising a pair of magnetic head halves joined together.
A magnetic core groove was ground to form a magnetic core forming surface on a substrate made of a non-magnetic material, and a magnetic layer serving as a magnetic core was formed on the magnetic core forming surface, and the magnetic layer was formed. On the substrate, a winding groove for arranging the thin film coil and a separation groove for separating the magnetic layer for each magnetic core are formed, and the processed surface of the winding groove and the separation groove is etched to form the magnetic core groove, It is characterized in that the winding groove and the separation groove are filled with glass, and a thin film coil is formed in the glass portion so as to pass through the winding groove to produce a magnetic head half body.

Here, the etching of the processed surface of the winding groove and the separation groove is performed by, for example, ion etching, wet etching, or powder beam etching in which fine particles are jetted toward the material to be etched to perform etching processing. Just go.

The magnetic core forming surface should also be etched by, for example, ion etching, wet etching or powder beam etching.

The magnetic layer may have a laminated structure in which a plurality of metallic magnetic films are laminated with an insulating film interposed therebetween.

[0013]

According to the present invention, after the magnetic core grooves are formed by machining or the winding grooves and the separation grooves are formed, the processed surfaces of these grooves are etched to smooth the processed surfaces of these grooves. Is made. Therefore, the generation of bubbles generated when filling these grooves with glass is suppressed.

When the magnetic layer has a laminated structure in which a plurality of metal magnetic films are laminated with an insulating film interposed, the cross-section of the magnetic layer, which is a part of the processed surface of the separation groove or the winding groove, is also included. Since it is smoothed, insulation between the metal magnetic films is sufficiently achieved.

Further, by etching the magnetic core forming surface which is the processed surface of the magnetic core groove, the magnetic core forming surface is smoothed. Therefore, the magnetic layer formed on the magnetic core formation surface is uniformly formed.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments to which the present invention is applied will be described in detail below with reference to the drawings.

The magnetic head manufactured in this embodiment is a magnetic head used in a video tape recorder, a video cassette recorder, etc., and as shown in FIGS. 1 and 2, a pair of magnetic head halves 10a and 10b are used. , Magnetic gap g
They are joined and integrated so as to abut each other. Here, the magnetic head halves 10a and 10b are the substrate 1
A magnetic layer 2 formed on the substrate 1 to function as a magnetic core; a glass 3 filled on the magnetic layer 2; and a thin film coil 4 formed on the glass 3 portion by a thin film forming process.
And. Then, in the pair of magnetic core half blocks 10a and 10b, the respective magnetic layers 2 are abutted with each other, and a front gap fg and a back gap bg are formed between the respective magnetic layers 2, with a non-magnetic material interposed therebetween. To be joined.

A method of manufacturing such a magnetic head will be described in detail below.

First, as shown in FIG. 3, MnO--NiO.
A substrate 1 made of a non-magnetic material such as a system is prepared. Here, the size of the substrate 1 is, for example, about 30 mm in length and about 30 m in width.
m and the thickness is about 2 mm.

Next, as shown in FIG. 4, in order to form an inclined surface on which a magnetic core is formed, that is, a magnetic core forming surface, a plurality of magnetic core grooves 1a are formed on the substrate 1. It is formed in parallel and at equal intervals so that one of the inner surfaces becomes an inclined surface. The magnetic core groove 1a has a depth of about 130, for example, using a grinding wheel having one surface molded at about 45 degrees.
Dozens of them are formed so that the width is about 150 μm, the inclination of the inclined surface is about 45 degrees. Here, the inclination of the inclined surface is
The angle need not be 45 degrees, but is preferably about 45 degrees in consideration of the pseudo gap and the track width accuracy.

At this time, since the magnetic core groove 1a is formed by a grinding wheel or the like, the processed surface of the magnetic core groove 1a is in a rough state as shown in FIG. In particular, in the case of a MnO—NiO-based substrate having excellent wear resistance, the workability is poor, and therefore the work surface of a grinding wheel or the like is likely to become extremely rough. When such roughness exists, it becomes impossible to uniformly form the magnetic layer 2 in the subsequent step, and bubbles tend to be generated in the glass 3 when the glass 3 is filled in the subsequent step. It is preferable to smooth the processed surface of the magnetic core groove 1a. However, since the substrate 1 on which the magnetic core groove 1a is formed has a complicated shape, it is very difficult to smooth the processed surface of the magnetic core groove 1a by a normal mirror surface treatment.

Therefore, in this embodiment, the surface of the substrate 1 is etched to smooth the processed surface of the magnetic core groove 1a.

Specifically, for example, on the entire surface of the substrate 1, A
Ion etching is performed in an r gas atmosphere for about 1 hour.
However, it goes without saying that the ion etching time and the type of gas may be appropriately changed depending on the type and shape of the substrate and the surface roughness. Alternatively, for example, powder is injected toward the surface of the substrate 1 at high speed over the entire surface of the substrate 1 in the atmosphere for about 1 hour to perform powder beam etching. Here, the size of the powder is preferably about 100 to 500 μm. However, it goes without saying that the time for powder beam etching and the type of powder may be appropriately changed depending on the type and shape of the substrate 1 and the surface roughness. The etching is not limited to such ion etching or powder beam etching, but may be wet etching or the like.

By etching the surface of the substrate 1 in this manner, the surface of the substrate 1 is smoothed as shown in FIG. 6, so that the magnetic layer 2 can be uniformly formed in a later step. At the same time, bubbles are less likely to be generated in the glass 3 when the glass 3 is filled in the subsequent step.

Next, the substrate 1 on which the magnetic core groove 1a is formed
As shown in FIG. 7, the magnetic layer 2 is formed thereon. Here, the magnetic layer 2 may be composed of a single magnetic film, but in order to have high sensitivity in a high frequency region, a plurality of metal magnetic films are laminated by interposing an insulating film. You had better. However, in the case where the magnetic layer 2 has a laminated structure as described above, the thickness of the insulating film needs to be such that a sufficient insulating effect can be obtained, and is made as thin as possible so that the insulating film does not act as a pseudo gap. There is a need.

Therefore, in this embodiment, the magnetic layer 2 is made of sendust (Fe-Al-Si alloy) and has a thickness of about 5 μm.
Made of alumina and a metal magnetic film of about 0.15 μm thick
And the insulating film of No. 1 were alternately laminated so that the metal magnetic film had three layers. As described above, by forming the magnetic layer 2 into a laminated structure, eddy current loss is reduced, and higher sensitivity can be obtained especially in a high frequency region.

As a method for forming the magnetic layer 2, sputtering is preferable, but vapor deposition or molecular beam epitaxy (MB
A physical film forming method (PVD) other than sputtering such as E) or a chemical film forming method (CVD) may be used.

The material of the metal magnetic film is preferably sendust, but other metal magnetic materials such as an alloy similar to sendust, a nitriding type soft magnetic alloy, and a carbonizing type soft magnetic alloy can also be used. . Also, the insulating film is not limited to alumina, and SiO ₂ , SiO, or a mixture thereof can be used.

Next, as shown in FIG. 8, the magnetic core groove 1a is formed.
Winding groove 1 for arranging thin film coil 4 at right angles to
b and a separation groove 1c for separating the magnetic layer 3 for each magnetic core are formed.

Here, as shown in FIG. 2, the winding groove 1b is formed such that the magnetic layer 2 on the front gap side is slanted toward the front gap fg.
For example, the front gap side of the winding groove 1b is formed by a grindstone having a slope of about 45 degrees. As described above, when the magnetic layer 2 on the front gap side is narrowed toward the front gap fg, the magnetic flux is concentrated and high recording sensitivity is obtained. However, if the shape of the winding groove 1b is such that the magnetic layer 2 on the front gap side is narrowed toward the front gap fg, the angle of the slope on the front gap side of the winding groove 1b is not 45 degrees. Further, the shape of the winding groove 1b on the front gap side may be an arc shape or a polygonal shape. Further, the depth of the winding groove 1b may be a depth that does not divide the magnetic layer 2,
If it is too deep, the magnetic path length increases and the magnetic flux transmission efficiency decreases. Therefore, in this embodiment, the winding groove 1b is formed to a depth of about 20 μm from the apex of the slope of the magnetic core groove 1a. The width of the winding groove 1b is determined by the width of the thin-film coil 4 and the number of windings to be formed in a later step, and in this embodiment, it is set to about 140 μm.

On the other hand, the separation groove 1c may have any shape as long as the magnetic layer 2 is divided, and has, for example, a rectangular shape that can be easily processed. The depth of the separation groove 1c needs to be such that the magnetic layer 2 is completely divided. In the present embodiment, the separation groove 1c extends from the bottom of the magnetic core groove 1a to a depth of about 150 μm.
c was formed. The width of the separation groove 1c is determined by the desired balance between the length of the front gap fg and the length of the back gap bg of the magnetic head. However, the length of the magnetic layer 2 on the front gap side is longer than the finally desired length of the front gap fg because the medium sliding surface is lapped when the magnetic head is finally processed into a predetermined shape. And the separation groove 1c is formed. Therefore, in this example, the separation groove 1c is formed so that the length of the magnetic layer 2 on the front gap side is about 300 μm and the length of the magnetic layer 2 on the back gap side is about 85 μm.

Since the winding groove 1b and the separation groove 1c thus formed are also formed by a grinding wheel or the like like the magnetic core groove 1a, the processed surface is rough. When such a roughness exists, for example, the winding groove 1b
As shown in the enlarged view of FIG. 9, the cross-section 1d of the magnetic layer 2 which is a part of the processed surface is also in a rough state, and the metal magnetic film is adjacent to the cross-section 1d of the magnetic layer 2 as described above. There is a possibility that it will pass over the insulating film and be electrically connected to another metal magnetic film, and bubbles will easily occur in the glass when the glass 3 is filled in a later step. Therefore, it is preferable to smooth the processed surface of the winding groove 1b and the separation groove 1c. However, the winding groove 1b and the separation groove 1
Since the substrate 1 on which c is formed has a complicated shape, it is very difficult to smooth the processed surface of the winding groove 1b and the separation groove 1c by a normal mirror surface treatment.

Therefore, in this embodiment, the substrate 1 and the magnetic layer 2 are etched to smooth the processed surfaces of the winding groove 1b and the separation groove 1c.

Specifically, for example, after the substrate 1 is tilted by about 30 degrees from the ion irradiation direction, ion etching is performed on the entire surfaces of the substrate 1 and the magnetic layer 2 for about 1 hour in an Ar gas atmosphere. Etching about 1 μm. However, it goes without saying that the angle between the ion irradiation direction and the substrate 1, the time for ion etching, and the type of gas may be appropriately changed depending on the types and shapes of the substrate 1 and the magnetic layer 2, and the surface roughness. Alternatively, for example, after the substrate 1 is tilted by about 30 degrees from the powder irradiation direction in the atmosphere for about 1 hour, the powder is injected at high speed toward the surfaces of the substrate 1 and the magnetic layer 2, and the powder beam is emitted. Etching is performed on the entire surfaces of the substrate 1 and the magnetic layer 2, and etching is performed by about 1 μm. Here, the size of the powder is 100 to 500
A size of about μm is suitable. However, it goes without saying that the angle between the powder irradiation direction and the substrate 1, the time for powder beam etching, and the type of powder may be appropriately changed depending on the types and shapes of the substrate 1 and the magnetic layer 2, and the surface roughness. . The etching is not limited to such ion etching or powder beam etching, but may be wet etching or the like.

Then, by etching the surfaces of the substrate 1 and the magnetic layer 2 in this manner, the substrate 1 and the magnetic layer 2 are etched.
The surface of is smoothed. Therefore, the glass
As shown in FIG. 10 in which bubbles are less likely to be generated in the glass 3 when the powder is filled, and the winding groove 1b is enlarged,
The cross-section 1d of the magnetic layer 2 which is a part of the processed surface of the winding groove 1b and the separation groove 1c is also smoothed, the cross-section of the laminated structure of the magnetic layer 2 is clarified, and the insulation of the cross-section 1d of the magnetic layer 2 is improved. The defect is eliminated, and the insulation between the metal magnetic films is sufficiently achieved.

Next, as shown in FIG. 11, the magnetic core groove 1
A, the winding groove 1b, and the separation groove 1c are melt-filled with the glass 3 having a low melting point, and then the surface is smoothed. At this time, in this embodiment, since the processed surfaces of the magnetic core groove 1a, the winding groove 1b, and the separation groove 1c are smoothed, bubbles are hardly generated on the glass 3.

Next, as shown in FIG. 12, a thin film coil 4 is formed on the glass 3 portion so as to pass through the winding groove 1b by a thin film forming process.

Next, as shown in FIG. 13, the magnetic head half blocks 11a and 11 are cut by cutting one row for each magnetic core.
b is produced, and the pair of magnetic head half blocks 11a and 11b produced in this way are joined by gold joining so that the magnetic layers 2 are butted. However, the magnetic head half blocks 11a and 11b may be joined by a chemical joining method using an adhesive or the like.

Finally, the magnetic cores are cut one by one, processed into a predetermined shape, and a pair of magnetic head halves 10a and 10b as shown in FIG. 1 are joined. A magnetic head is manufactured.

In this embodiment, the thin film coil is formed on both the pair of magnetic head halves, but the thin film coil may be formed on only one of the magnetic head halves.

In the present embodiment, the magnetic head half block is prepared by cutting the substrate on which the magnetic layer, the thin film coil, etc. are formed one by one for each magnetic core, and joining the magnetic head half blocks. After that, each magnetic core was cut one by one, but the substrate on which the magnetic layer, the thin film coil, etc. were formed was previously cut one by one for each magnetic core to prepare a magnetic head half body. The head halves may be bonded to each other, or the substrates on which the magnetic layers and the thin film coils are formed may be bonded as they are, and then the magnetic cores may be cut one by one.

Next, as described above, in order to evaluate the effect of etching performed for smoothing the processed surface of the magnetic core groove, the winding groove and the separation groove, the case where no etching was performed, Powder beam etching after formation of winding groove and separation groove, ion etching after formation of winding groove and separation groove, formation of magnetic core groove and formation of winding groove and separation groove It was examined how much bubbles were generated in the glass when the glass was filled, both when the latter was subjected to ion etching.

The results are shown in FIGS. 14 to 17. here,
FIG. 14 shows the case where no etching is performed.
FIG. 15 shows a case where powder beam etching is performed after forming the winding groove and the separation groove, FIG. 16 shows a case where ion etching is performed after forming the winding groove and the separation groove, and FIG. 17 shows a case where the magnetic core groove is formed. And the case where ion etching is performed both after forming the winding groove and the separation groove.

14 to 17, "defective" means that bubbles are generated in the glass and there is a high possibility that short-circuiting or disconnection between the coils will occur when the thin film coil is formed due to the bubbles. , "Good" is a case where bubbles are generated in the glass, but there is no bubbles in the vicinity of the magnetic layer, and it is considered that the formation of the magnetic head is not affected so much,
"No bubbles" is when the glass has no bubbles.

As is clear from this result, by performing etching after forming the winding groove and the separation groove, bubbles generated in the glass are significantly reduced. Then, by performing etching even after the formation of the separation groove, bubbles generated in the glass are further reduced.

Next, as described above, in order to evaluate the effect of the etching for smoothing the magnetic core groove, the magnetic layer formed on the mirror-finished substrate and the magnetic core on the substrate were evaluated. Regarding the magnetic layer formed after forming the groove and subjected to ion etching, and the magnetic layer formed after forming the magnetic core groove on the substrate and not performing etching,
The magnetic properties were investigated. Here, the magnetic characteristics are maintained for the case where the magnetic layer is a single-layer film composed of a single metal magnetic film and the case where the magnetic film is a laminated film formed by laminating a plurality of metallic magnetic films with an insulating film interposed therebetween. Magnetic force Hc [Oe] and frequency 1MHz
And the magnetic permeability at a frequency of 10 MHz were measured. The measurement result of coercive force Hc [Oe] is shown in FIG.
FIG. 19 shows the measurement results of magnetic permeability.

As is clear from these results, the magnetic layer formed by etching the substrate has a small coercive force and a large magnetic permeability, and thus the magnetic layer is formed on the mirror-finished substrate. It has an excellent soft magnetic property, which is close to that of a film formed.

[0048]

As is apparent from the above description, according to the present invention, such as a machined surface of a magnetic core groove, a winding groove or a separation groove, which has a complicated shape and is difficult to be mirror-finished by machining. Even if it is a part, by applying etching,
It can be smoothed by eliminating scratches and fine irregularities that occur during machining.

Therefore, it is possible to suppress the generation of bubbles when filling these grooves with glass, to reduce the short-circuiting and disconnection of the thin-film coil and to greatly improve the yield, and to reduce the roughness of the sliding surface. It is possible to manufacture a magnetic head having excellent durability.

When the magnetic layer has a laminated structure in which a plurality of metal magnetic films are laminated with an insulating film interposed, the cross-section of the magnetic layer, which is a part of the processed surface of the separation groove or the winding groove, is also included. Since it is smoothed, insulation between the metal magnetic films is sufficiently achieved. Therefore, it is possible to reduce the eddy current loss and manufacture a magnetic head having high sensitivity, especially in a high frequency region.

Further, since the processed surface of the magnetic core groove is smoothed, the magnetic layer formed on the groove can be uniformly formed. Therefore, since the soft magnetic characteristics of the magnetic layer are improved, it is possible to manufacture a magnetic head having excellent magnetic characteristics.

[Brief description of drawings]

FIG. 1 is a perspective view showing a configuration example of a magnetic head manufactured by applying the present invention.

FIG. 2 is an enlarged perspective view of an essential part showing an enlarged vicinity of a magnetic gap of the magnetic head shown in FIG.

FIG. 3 is a perspective view showing an example of a substrate.

FIG. 4 is a perspective view showing an example of a state in which a magnetic core groove is formed on a substrate.

FIG. 5 is a side view schematically showing a state of a processed surface of a magnetic core groove formed by a grinding wheel.

FIG. 6 is a side view schematically showing a state of a processed surface of a magnetic core groove after etching.

FIG. 7 is a perspective view showing an example of a state in which a magnetic layer is formed on a substrate.

FIG. 8 is a perspective view showing an example of a state where winding grooves and separation grooves are formed on a substrate and a magnetic layer.

FIG. 9 is an enlarged perspective view of an essential part schematically showing a state of a processed surface of a winding groove formed by a grinding wheel.

FIG. 10 is an enlarged perspective view of an essential part schematically showing the state of the processed surface of the winding groove after etching.

FIG. 11 is a perspective view showing an example of a state where glass is filled in the magnetic core groove, the winding groove, and the separation groove.

FIG. 12 is a perspective view showing an example of a state in which a thin film coil is formed.

FIG. 13 is a perspective view showing an example of how a pair of magnetic head half blocks are joined together.

FIG. 14 is a diagram showing measurement results of bubbles generated on glass when no etching is performed.

FIG. 15 is a diagram showing measurement results of bubbles generated in glass when powder beam etching was performed after formation of magnetic core grooves.

FIG. 16 is a diagram showing measurement results of bubbles generated in glass when ion etching is performed after formation of magnetic core grooves.

FIG. 17 is a diagram showing the measurement results of bubbles generated in glass when ion etching was performed both after formation of the magnetic core groove and after formation of the winding groove and the separation groove.

FIG. 18 is a diagram showing measurement results of coercive force Hc [Oe].

FIG. 19 is a diagram showing the measurement results of magnetic permeability.

[Explanation of symbols]

 1 Substrate 1a Magnetic Core Groove 1b Winding Groove 1c Separation Groove 2 Magnetic Layer 3 Glass 4 Thin Film Coil 10a, 10b Magnetic Head Half 11a, 11b Magnetic Head Half Block g Magnetic Gap fg Front Gap bg Back Gap

Claims (7)

[Claims] 1. A method of manufacturing a magnetic head comprising a pair of magnetic head halves joined together, wherein a magnetic core groove is formed on a substrate made of a non-magnetic material to form a magnetic core forming surface. A magnetic layer serving as a magnetic core is formed on the formation surface, and a winding groove for arranging the thin film coil on the substrate on which the magnetic layer is formed and a separation groove for separating the magnetic layer for each magnetic core. And etching the processed surface of the winding groove and the separation groove, filling the magnetic core groove, the winding groove and the separation groove with glass, and passing through the winding groove into the glass portion. And forming a magnetic head half body. 2. The method of manufacturing a magnetic head according to claim 1, wherein etching of the processed surface of the winding groove and the separation groove is performed by ion etching. 3. The method of manufacturing a magnetic head according to claim 1, wherein the processing surface of the winding groove and the separation groove is etched by powder beam etching. 4. The method of manufacturing a magnetic head according to claim 1, wherein the surface on which the magnetic core is formed is etched after forming the magnetic core groove. 5. A method of manufacturing a magnetic head according to claim 4, wherein the etching of the magnetic core formation surface is performed by ion etching. 6. The method of manufacturing a magnetic head according to claim 4, wherein the etching of the magnetic core formation surface is performed by powder beam etching. 7. The magnetic according to claim 1, 2, 3, 4, 5 or 6, wherein the magnetic layer has a laminated structure in which a plurality of metal magnetic films are laminated with an insulating film interposed therebetween. Head manufacturing method.