JPH081467Y2 - 半導体圧力センサ - Google Patents

半導体圧力センサ

Info

Publication number
JPH081467Y2
JPH081467Y2 JP12811890U JP12811890U JPH081467Y2 JP H081467 Y2 JPH081467 Y2 JP H081467Y2 JP 12811890 U JP12811890 U JP 12811890U JP 12811890 U JP12811890 U JP 12811890U JP H081467 Y2 JPH081467 Y2 JP H081467Y2
Authority
JP
Japan
Prior art keywords
substrate
sensor chip
anodic bonding
support portion
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12811890U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0485243U (en, 2012
Inventor
克哉 斎藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP12811890U priority Critical patent/JPH081467Y2/ja
Publication of JPH0485243U publication Critical patent/JPH0485243U/ja
Application granted granted Critical
Publication of JPH081467Y2 publication Critical patent/JPH081467Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP12811890U 1990-11-30 1990-11-30 半導体圧力センサ Expired - Lifetime JPH081467Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12811890U JPH081467Y2 (ja) 1990-11-30 1990-11-30 半導体圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12811890U JPH081467Y2 (ja) 1990-11-30 1990-11-30 半導体圧力センサ

Publications (2)

Publication Number Publication Date
JPH0485243U JPH0485243U (en, 2012) 1992-07-24
JPH081467Y2 true JPH081467Y2 (ja) 1996-01-17

Family

ID=31875592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12811890U Expired - Lifetime JPH081467Y2 (ja) 1990-11-30 1990-11-30 半導体圧力センサ

Country Status (1)

Country Link
JP (1) JPH081467Y2 (en, 2012)

Also Published As

Publication number Publication date
JPH0485243U (en, 2012) 1992-07-24

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