JPH081467Y2 - 半導体圧力センサ - Google Patents
半導体圧力センサInfo
- Publication number
- JPH081467Y2 JPH081467Y2 JP12811890U JP12811890U JPH081467Y2 JP H081467 Y2 JPH081467 Y2 JP H081467Y2 JP 12811890 U JP12811890 U JP 12811890U JP 12811890 U JP12811890 U JP 12811890U JP H081467 Y2 JPH081467 Y2 JP H081467Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sensor chip
- anodic bonding
- support portion
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 14
- 239000000758 substrate Substances 0.000 claims description 52
- 239000002184 metal Substances 0.000 claims description 9
- 239000011521 glass Substances 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 238000005259 measurement Methods 0.000 description 9
- 230000002950 deficient Effects 0.000 description 4
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000005297 pyrex Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000032683 aging Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12811890U JPH081467Y2 (ja) | 1990-11-30 | 1990-11-30 | 半導体圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12811890U JPH081467Y2 (ja) | 1990-11-30 | 1990-11-30 | 半導体圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0485243U JPH0485243U (enrdf_load_stackoverflow) | 1992-07-24 |
| JPH081467Y2 true JPH081467Y2 (ja) | 1996-01-17 |
Family
ID=31875592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12811890U Expired - Lifetime JPH081467Y2 (ja) | 1990-11-30 | 1990-11-30 | 半導体圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH081467Y2 (enrdf_load_stackoverflow) |
-
1990
- 1990-11-30 JP JP12811890U patent/JPH081467Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0485243U (enrdf_load_stackoverflow) | 1992-07-24 |
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