JPH08118720A - Manufacture of ion flow electrostatic recording head - Google Patents

Abstract

PURPOSE: To prevent the deterioration of a dielectric layer due to discharging by laminating the conductor paste of a first electrode on a first sheet having a thickness of a specific range to form an insulating board and simultaneously burning the laminate of the state that the opposite surface of a second sheet to the laminated surface of the second electrode is superposed on the first electrode. CONSTITUTION: The conductor paste of a first electrode of an electrode pattern 12 is laminated on a first sheet 11 made of a ceramic material having a thickness of 15 to 100μm to form an insulating board 1. The conductor paste of a second electrode 4 of an electrode pattern 14 is laminated on a second sheet 13 for forming a dielectric layer 3 having the same composition and thickness as those of the sheet 11. The laminate of the state that the opposite surface of the sheet 13 to the laminated surface of the electrode 4 is superposed on the electrode 2 of the sheet 11 is simultaneously burned. Thus, the electrode 4 and the layer 3 can be rigidly fixed therebetween without deterioration of the layer 3 due to discharging.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing an ion flow electrostatic recording head used for electrostatic printing and copying.

[0002]

2. Description of the Related Art Generally, for example, in electrostatic printing,
There is known an electrostatic recording apparatus in which ions having a high current density are generated, which are extracted and selectively applied to a member to be charged to charge the member to be charged on an image.

As shown in FIGS. 3A and 3B, an ion flow electrostatic recording head used in this electrostatic recording apparatus is extended substantially linearly in the same direction on an insulating substrate 1 as shown in FIGS. A plurality of first electrodes 2 arranged in parallel are provided. These first electrodes 2 are fixed to one surface of the dielectric layer 3.

A plurality of second electrodes 4 extending in a direction different from the extending direction of the first electrode 2 are fixed to the other surface of the dielectric layer 3. The plurality of first electrodes 2 ... And the plurality of second electrodes 4 ... Form a matrix.
Further, an opening 4a for ion generation is formed in a portion of the second electrode 4 corresponding to the matrix.

Further, a third electrode 6 is provided on the opposite side of the second electrode 4 from the first electrode 2 with an insulator layer 5 interposed therebetween. Openings 5a and 6a corresponding to the openings 4a of the second electrode 4 are formed in the insulator layer 5 and the third electrode 6, and the ion flow passage opening 7 is formed by these openings 5a and 6a. Has been done.

Then, by alternately applying a high voltage between the first electrode 2 and the second electrode 4 corresponding to the selected portion of the matrix between the first electrode 2 and the second electrode 4, Positive and negative ions are generated in the vicinity of the opening 4a of the second electrode 4 facing the portion.

A bias voltage is applied between the second electrode 4 and the third electrode 6, and only ions determined by the polarity thereof are selectively extracted from the generated ions and passed through the ion flow passage port 7. The member to be charged, which is arranged so as to face the third electrode 6, can be partially charged. Therefore, electrostatic recording by dots can be performed by selectively driving the electrodes having the matrix structure.

By the way, it is required that the dielectric material forming the dielectric layer 3 used in the ion flow electrostatic recording head does not cause dielectric breakdown even with a high voltage applied for ion generation. Further, since the dielectric layer 3 needs to have a thickness sufficient to efficiently generate ions and withstand dielectric breakdown, a layer having a high dielectric constant is suitable.

Therefore, for example, in Japanese Patent Laid-Open No. 2-153760, titanium oxide fine powder is dispersed in an organic polymer material such as silicone-modified polyester-alkyd resin as a material for the dielectric layer 3 of the ion flow electrostatic recording head. It is shown that a paste-like product is used. Further, a photo solder resist film is used for the insulator layer 5.

[0010]

By the way, it is known that ions such as ozone and heat are generated when the ion flow electrostatic recording head is discharged. Therefore, the dielectric layer 3
When an organic polymer-based material is used as disclosed in JP-A-2-153760, the dielectric layer 3 is aged from the surface with time due to ions such as ozone and heat generated during discharge. Therefore, there is a problem that the electrical characteristics of the entire ion flow electrostatic recording head also change, and the image quality of an electrostatically recorded image also deteriorates.

Further, in order to fix the second electrode 4 to the dielectric layer 3, a silicone type pressure sensitive adhesive 8 is generally used. However, since the silicone-based pressure-sensitive adhesive 8 has a characteristic that it is strong in peeling force but weak in shearing force, in order to fix the second electrode 4 to the dielectric layer 3, the silicone-based pressure-sensitive adhesive is used. When using, the silicone-based pressure-sensitive adhesive 8 between the second electrode 4 and the dielectric layer 3 cannot sufficiently withstand post-processing, heat during use, or shear force due to mechanical stress, There is a problem that a displacement occurs between the first electrode 2 and the second electrode 4 and the image quality deteriorates.

Further, the adhesive area of each surface of the dielectric layer 3 and the second electrode 4 is as small as several square millimeters. Therefore, this minute area is fixed to the surface of the dielectric layer 3 only by the adhesive force of the adhesive 8 so that the displacement of the second electrode 4 does not occur, and the thermal and mechanical post-processing steps are performed. In addition, since it is necessary to use the adhesive 8 having a stronger adhesive force in order to withstand the thermal aging during use, there is a problem that the cost becomes high.

Further, since the second electrode 4 is formed with several thousands of openings 4a each having a hole diameter of about 100 μm, the adhesive 8 is selectively applied to a place other than the opening 4a of the small hole. Applying and bonding is extremely difficult. Therefore, the second
After the electrode 4 and the dielectric layer 3 are bonded together, it is necessary to clean and remove the excess adhesive 8 remaining in the small holes of the opening 4a of the second electrode 4.

However, it is difficult to remove the adhesive 8 from all of the large number of openings 4a by cleaning, the adhesive easily remains in the openings 4a of the second electrode 4, and the periphery of the openings 4a. Second part on the first electrode 2 side in the part
There may be a place where the metal surface is exposed on the surface of the electrode 4. In this case, between the exposed portion of the metal surface of the second electrode 4 and the portion covered with the adhesive 8,
Since the current density contributing to the discharge is different, each opening 4a
There is a problem in that the amount of generated ions from the inside varies and uniform image quality and durability cannot be obtained.

Further, in order to provide a few thousands of small-diameter openings 4a with a hole diameter of about 100 μm in a stainless foil having a thickness of about several tens of μm, which is a material for forming the second electrode 4, with high accuracy and without variation. However, there is a problem that a high etching technique is required, the yield is deteriorated, and the manufacturing cost is inevitably increased.

When an ordinary photosolder resist film is used as the insulator layer 5 after curing, the organic component of the insulator layer 5 is generated by the ion group generated by the long-time discharge of the ion flow electrostatic recording head. Since it is gradually eroded, it is difficult to improve durability.

The present invention has been made in view of the above circumstances, and an object thereof is to firmly fix the second electrode and the dielectric layer without deterioration of the dielectric layer due to discharge.
It does not cause misalignment due to thermal and mechanical post-processing or thermal changes during use, the amount of discharge ions in each opening of the second electrode is uniform, and it is easy to handle high-precision processing. An object of the present invention is to provide a method of manufacturing an ion flow electrostatic recording head which has high image quality, high durability, and is inexpensive.

[0018]

According to a first aspect of the present invention, a conductive paste is laminated in an electrode pattern of a first electrode on a first sheet made of a ceramic material having a thickness of 15 μm or more and 100 μm or less forming an insulating substrate. A first sheet laminating step, and a second sheet laminating step in which a conductor paste is laminated with an electrode pattern of a second electrode on a second sheet forming a dielectric layer having the same composition and thickness as the first sheet, And a firing step of simultaneously firing a laminate having a state in which a surface of the second sheet opposite to the lamination surface of the second electrode is superposed on the first electrode of the first sheet. And a method of manufacturing an ion flow electrostatic recording head.

According to a second aspect of the present invention, there is provided a first ceramic material having a thickness of 15 μm or more and 100 μm or less which forms an insulating substrate.
The first electrode laminating step in which the conductor paste is laminated on the sheet in the electrode pattern of the first electrode, and the second electrode on the second sheet forming the dielectric layer having the same composition and thickness as the first sheet. Second, the conductor paste is laminated with the electrode pattern of
A sheet laminating step, a third sheet laminating step of laminating a conductor paste with an electrode pattern of a third electrode on a third sheet forming an insulator layer having the same composition and thickness as the first sheet, The first electrode of one sheet is overlaid with the surface of the second sheet opposite to the laminated surface of the second electrode, and the second electrode of the second sheet is overlaid with the above-mentioned third sheet. A method of manufacturing an ion flow electrostatic recording head, comprising a firing step of simultaneously firing a laminated body in which a surface opposite to the laminated surface of the third electrode is superposed.

According to a third aspect of the present invention, there is provided a first ceramic material having a thickness of 15 μm or more and 100 μm or less for forming an insulating substrate.
The first electrode laminating step in which the conductor paste is laminated on the sheet in the electrode pattern of the first electrode, and the second electrode on the second sheet forming the dielectric layer having the same composition and thickness as the first sheet. Second, the conductor paste is laminated with the electrode pattern of
A sheet laminating step and on the first electrode of the first sheet,
A firing step of simultaneously firing a laminated body in which the surface opposite to the laminated surface of the second electrode in the second sheet is superposed, and a paste made of an insulating material containing at least a photocurable organic binder and ceramic powder. An insulating layer forming step of photo-curing the paste, removing the uncured portion, and baking the paste in a state of being applied on the second electrode in a predetermined pattern corresponding to the insulating layer. And a method of manufacturing an ion flow electrostatic recording head.

[0021]

According to the invention of claim 1, the thickness 1 for forming the insulating substrate
On the second sheet, which is obtained by laminating the conductor paste with the electrode pattern of the first electrode on the first sheet made of a ceramic material of 5 μm or more and 100 μm or less and similarly forming the dielectric layer having the same composition and thickness as the first sheet. A laminated body in which a conductor paste is laminated with the electrode pattern of the second electrode, and then the surface of the second sheet opposite to the laminated surface of the second electrode is superposed on the first electrode of the first sheet. By co-firing the conductor paste pattern printed on the ceramic material sheet by firing at the same time, the pattern of the line spacing, line width, and hole diameter that takes into account the shrinkage rate during firing from the set dimensions of the electrode pattern required after firing By making it possible to set in advance, and by bonding the bonding portion of the surface of the ceramic material sheet and each electrode at the atomic level, and by firmly fixing it than the pressure sensitive adhesive of silicone type, Adhesion between the insulating substrate and each ceramic material sheet of the dielectric layer is ensured, and the adhesion between the surface of the ceramic material sheet and each electrode is unstable electrically and mechanically like a pressure sensitive adhesive. Without using a foreign layer
By forming the electrode directly on the surface of the ceramic material sheet, the residual adhesive after cleaning remains in the opening of the second electrode, or the surface of the second electrode around the opening when cleaning or removing the adhesive in the opening. In addition, it is possible to prevent occurrence of a place where the metal surface is exposed and variation in the current density that contributes to discharge.

According to the second aspect of the present invention, the conductor paste is laminated in the electrode pattern of the first electrode on the first sheet made of a ceramic material having a thickness of 15 μm or more and 100 μm or less to form the insulating substrate. Third, a conductor paste is laminated with an electrode pattern of a second electrode on a second sheet forming a dielectric layer having the same composition and thickness, and an insulating layer having the same composition and thickness as the first sheet is further formed. After laminating the conductor paste with the electrode pattern of the third electrode on the sheet, the surface opposite to the laminating surface of the second electrode on the second sheet is superposed on the first electrode of the first sheet, and 2 of 2 sheets
The conductor paste pattern printed on the sheet made of a ceramic material is fired by simultaneously firing a laminate in which a surface of the third sheet opposite to the lamination surface of the third electrode is superposed on the electrodes. From the set dimensions of the electrode pattern required later, it is possible to preset the pattern of line spacing, line width, and hole diameter that takes into account the shrinkage rate during firing, and also the adhesion part between the surface of the ceramic material sheet and each electrode. Is bonded at the atomic level and is more firmly fixed than the silicone-based pressure-sensitive adhesive, thereby ensuring the adhesion between the insulating substrate, the dielectric layer, and the ceramic material sheets of the insulating layer. By constructing the dielectric layer and the insulating layer entirely of ceramic, the initial electrical characteristics are maintained without deterioration even by long-time discharge under a high voltage, and long-term durability with high image quality is secured. Furthermore, the electrodes should be formed directly on the surface of the ceramic material sheet without using a foreign material layer such as a pressure-sensitive adhesive that is unstable electrically and mechanically for bonding the surface of the ceramic material sheet and each electrode. As a result, the residual adhesive after cleaning remains in the opening of the second electrode, or the metal surface is exposed on the surface of the second electrode around the opening when cleaning and removing the adhesive in the opening. It is intended to prevent variations in the current density that contributes to the discharge.

According to the third aspect of the present invention, the conductor paste is laminated with the electrode pattern of the first electrode on the first sheet made of a ceramic material having a thickness of 15 μm or more and 100 μm or less forming the insulating substrate. After laminating the conductor paste with the electrode pattern of the second electrode on the second sheet forming the dielectric layer having the same composition and thickness, the second electrode of the second sheet is formed on the first electrode of the first sheet. After co-firing the laminated body in which the surface opposite to the laminated surface is laminated, a paste made of an insulating material containing at least a photocurable organic binder and ceramic powder is provided on the second electrode to correspond to the insulating layer. After the paste is photo-cured in a state where it is applied in a predetermined pattern, the uncured portion is removed and fired, so that the conductor paste pattern printed on the ceramic material sheet is required after firing. From the required dimensions of the electrode pattern,
In addition to enabling presetting of the line spacing, line width, and hole diameter patterns that take into consideration the shrinkage rate during firing, the surface of the ceramic material sheet and the bonding part of each electrode are bonded at the atomic level, and By fixing it more firmly than the pressure-sensitive adhesive, the adhesion between the insulating substrate and the ceramic material sheets of the dielectric layer is secured, and the surface of the ceramic material sheet and each electrode are pressure-sensitive. By forming the electrode directly on the surface of the ceramic material sheet without using an electromechanically unstable foreign substance layer such as an agent, the residual adhesive after cleaning remains in the opening of the second electrode. It is possible to prevent occurrence of a place where the metal surface is exposed on the surface of the second electrode around the opening when cleaning or removing the adhesive in the opening, and variation in current density contributing to discharge. Further, the insulating layer is formed by using a photo-curable organic binder and a paste containing ceramic powder so that the conventional photo solder resist process can be used as it is.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of a method of manufacturing an ion flow electrostatic recording head according to the present invention will be described below with reference to FIGS.
Will be described with reference to. In this embodiment, FIG. 3 (A), (B)
The insulating substrate 1 of the ion flow electrostatic recording head shown in FIG.
It is formed by the first sheet 11 made of a ceramic material shown in FIG. This first sheet 11 has a thickness of 30
μm, relative permittivity of 7.8, shrinkage rate of XY direction (two directions orthogonal to the plate surface of insulating substrate 1) 13.2%, shrinkage rate of Z direction (thickness direction of insulating substrate 1) It is formed by a ceramic green sheet made of a 30% lead borosilicate glass-based ceramic material.

This ceramic green sheet is manufactured as follows. That is, for example, various kinds of glass, alumina, zirconia, a mixture of ceramic powders such as barium titanate and the like, an organic binder such as an acrylic resin, a plasticizer such as dibutyl phthalate, a solvent such as toluene and butanol. Etc. are mixed well with a ball mill and then formed into a sheet by the doctor blade method. Then, the ceramic green sheet is formed by evaporating the solvent from the sheet-shaped molded body.

Further, the thickness of the ceramic green sheet is set to 15 μm or more and 100 μm or less. Here, the thickness of the ceramic green sheet is 30 μm.
If less than, there is a problem in film thickness uniformity and handling,
If it is less than 15 μm, molding itself is impossible. Further, when the thickness of the ceramic green sheet exceeds 50 μm, the applied voltage required for generating ions becomes high, so that it is difficult to obtain a material having an appropriate dielectric constant suitable for this.
If it exceeds 00 μm, the load on the drive circuit for generating ions becomes too large.

A conductor paste is laminated on the first sheet 11 with the electrode pattern 12 of the first electrode 2 (first sheet laminating step). Here, as the conductor paste, a silver-palladium-based conductor paste in which the weight ratio of silver and palladium is 95: 5 is used. Then, this conductor paste is formed on one surface of the first sheet 11 so as to have a space L between the lines.
₁ is an electrode pattern 12 of the first electrode 2 having a width of 200 μm and a line width L ₂ of 100 μm, and a thickness t of about 5 μm is printed by means of screen printing or the like. Further, after printing the electrode pattern 12 of the first electrode 2, it is dried at 80 ° C. for 10 minutes.

Next, as shown in FIG. 1B, the second electrode is formed on the second sheet 13 forming the dielectric layer 3 made of the ceramic green sheet having the same composition and thickness as the first sheet 11. The conductor paste is laminated with the electrode pattern 14 of No. 4 (second sheet laminating step). As the conductor paste, the same silver-palladium-based conductor paste used for forming the electrode pattern 12 of the first electrode 2 is used. Then, this conductor paste is printed on one surface of the second sheet 13 with the electrode pattern 14 of the second electrode 4 by means such as screen printing. In this electrode pattern 14, a pattern 14a of an opening 4a formed of a small hole having a hole diameter of about 60 μm is formed in each second electrode 4. Then, after the electrode pattern 14 of the second electrode 4 is printed, it is dried under the same conditions as the electrode pattern 12 of the first electrode 2.

Further, after drying, the first sheet 11 of the first
The surface of the second sheet 13 opposite to the laminated surface of the second electrode 4 is aligned and superposed on the electrode 2.
Here, as a method of aligning the first sheet 11 and the second sheet 13, for example, the sheets 11 and 13 are overlapped with each other as a reference, or the sheets 11 and 1 are aligned with each other.
Positioning holes are preliminarily formed in 3 and positioning pins (not shown) are passed through the positioning holes of both sheets 11 and 13 to sequentially stack them.

Next, as shown in FIG. 1C, the third electrode is formed on the third sheet 15 forming the insulator layer 5 made of the ceramic green sheet having the same composition and thickness as the first sheet 11. The conductor paste is laminated on the electrode patterns 16 of No. 6 (third sheet laminating step). As the conductor paste, a silver-palladium-based conductor paste in which the weight ratio of silver and palladium is 80:20 is used. Then, this conductor paste is printed on one surface of the third sheet 15 with the electrode pattern 16 of the third electrode 6 by means such as screen printing. Further, the electrode pattern 16 of the third electrode 6
After being printed, the electrode pattern 12 of the first electrode 2 is dried under the same conditions.

After drying the electrode pattern 16 of the third electrode 6, as shown in FIG. 1D, an opening is formed at a position corresponding to the opening 14a of the electrode pattern 14 of the second electrode 4 on the third sheet 15. The portion 15a is formed by laser processing.

Thereafter, as shown in FIG. 1 (E), with the opening 14a of the second electrode 4 and the opening 16a of the third electrode 6 aligned with each other, the second electrode 4 on the second sheet 13 is placed on the second electrode 4. Then, the surface of the third sheet 15 opposite to the laminated surface of the third electrode 16 is overlapped. Here, the second sheet 13 and the third sheet
As a method of aligning the sheet 15 with the sheet 15, for example, the sheets 13 and 15 are overlapped with each other on the basis of the peripheral edge portions, or holes for aligning the sheets 13 and 15 are preliminarily formed, and a position not shown is aligned. Pin both sheets 13,1
Pass them through the positioning holes in 5 and stack them one by one.

Next, the first to third sheets 11, 13, 1
5 is placed in a hot water isotropic laminator in a state of being aligned and subjected to a pressure treatment at a pressure of 200 kg / cm ² at 100 ° C. to integrally laminate and pressure-bond the laminate 17.
Is formed. When laminating and pressing the ceramic green sheets on which the conductor paste is printed, a mechanical press may be used, but the shape of the pattern may collapse depending on the conductor pattern. It is preferable to use an isotropic press.

After that, the first to third sheets 11, 13,
The laminated body 17 of 15 is simultaneously fired (degreasing and sintering) (firing step). In this firing step, a program-controlled furnace (not shown) whose heating temperature is program controllable is used, and the following heating process is performed by program control. That is, with the laminated body 17 inserted in the program-controlled furnace, the temperature was raised to 500 ° C. at a heating rate of 15 ° C./hour, and subsequently to 870 ° C. at a heating rate of 100 ° C./hour, and then 2 It is held for a period of time and then gradually cooled to room temperature.

After the firing process is completed, the first electrode 2 is wired on the insulating substrate 1, and the dielectric layer 3 and the second electrode 4 positioned on the first electrode 2 are further disposed on the insulating substrate 1. A laminate (completed product) of an ion flow electrostatic recording head in which the insulator layer 5, the opening 4a of the second electrode 4 and the third electrode 6 in which the opening 6a is positioned are sequentially laminated and integrated To be The space L ₁ between the lines of the first electrode 2 of this finished product was 174 μm, the line width L ₂ was 87 μm, and the hole diameter of the opening 4 a of the second electrode 4 was 52 μm. The thickness of the dielectric layer 3 between the first electrode 2 and the second electrode 4 was 21 μm.

Therefore, the ion flow electrostatic recording head manufactured by the above method has the following effects. That is, during the manufacturing process of the ion flow electrostatic recording head, a metal conductive paste is screen-printed on the ceramic green sheets of the first to third sheets 11, 13, and 15 to screen the first electrode 2 and the second electrode 4. , The electrode patterns 12, 1 of the third electrode 6
After forming 4 and 16, respectively, the laminated body 17 of the ion flow electrostatic recording head is formed through a firing process in which degreasing and sintering are performed simultaneously with the first to third sheets 11, 13 and 15 being laminated. The pattern of the conductor paste printed on the ceramic green sheet is degreased and
From the set dimensions of the electrode patterns 12, 14, 16 required after sintering, the pattern of line spacing, line width and hole diameter (from the set dimensions of the electrode pattern after degreasing and sintering) in consideration of the shrinkage ratio during degreasing and sintering Can be set in advance). Therefore, the patterns of the conductor pastes 12, 14 and 16 printed on the ceramic green sheets may be used in terms of dimensional accuracy, line spacing, line width, hole diameter, line edge sharpness, etc. , 16
It can be set to a slightly larger specification than
Screen printing is performed before sintering, and shrinking is performed in the firing process of degreasing and sintering to form a fine pattern, which is not possible with the method of screen-printing a conductive paste on a ceramic substrate after normal sintering to form electrodes. It is possible to form the finely structured electrode patterns 12, 14 and 16 which are possible.

Therefore, the high-definition and fine electrode patterns 12, 14, 16 of the first electrode 2, the second electrode 4, and the third electrode 6 can be formed by inexpensive screen printing.
The cost can be reduced compared to the case where the electrode patterns 12, 14, 16 are formed by photoetching after printing the conductor paste in a solid coating state on the entire surface of the ceramic substrate as in the conventional printing method.

The first to third sheets 11, 13 and 1 in which the conductor paste is printed on the ceramic green sheet
After laminating and pressing 5 layers, degreasing and sintering, each sheet 1
Surfaces of 1, 13, 15 and electrode patterns 12, 14, 1
Since the metal film (electrode patterns 12, 14, 16) is formed by drawing out the bond at the atomic level on the joint surface with 6, the first to third sheets 11 and 1 made of ceramic material are formed.
The ceramic material sheets 11, 13, 1 do not use an electromechanically unstable foreign substance layer such as a pressure-sensitive adhesive to bond the surfaces of the electrodes 3 and 15 to the electrode patterns 12, 14 and 16.
The electrode patterns 12, 14, 16 can be firmly fixed directly to the surface of the electrode 5. Therefore, as in the conventional case, the adhesive remaining after cleaning remains in the opening 4a of the second electrode 4, or the opening 4a
It is possible to prevent the occurrence of a place where the metal surface is exposed on the surface of the second electrode 4 around the opening 4a and the variation in the current density that contributes to the discharge when cleaning and removing the adhesive inside. Therefore, the amount of discharged ions from each opening 4a of the second electrode 4 can be made uniform.

Further, between the first electrode 2 and the dielectric layer 3,
By co-firing between the second electrode 4 and the dielectric layer 3, between the second electrode 4 and the insulator layer 5, and between the insulator layer 5 and the third electrode 6, without using an adhesive, respectively. Since it can be firmly fixed, it does not cause positional displacement between each electrode even with thermal and mechanical post-processing and thermal aging during use, stabilizing the operation of the ion flow electrostatic recording head, It is possible to obtain a highly accurate and high-quality electrostatically recorded image.

In addition, the insulating substrate 1 to the upper dielectric layer 3,
Since the insulator layer 5 can be made of ceramic, the insulator layer 5 is formed by the ions generated even at a high voltage for a long time discharge.
It is possible to maintain the initial electrical characteristics and ensure high image quality long-term durability without deterioration.

In this embodiment, the silver-palladium-based conductor paste was used as the metal material of the conductor paste for forming the first electrode 2, the second electrode 4, and the third electrode 6, but gold, platinum or the like may be used. Of course, a metal that can be used as a conductor paste can be used according to the specifications. In particular, when a gold resinate-based paste is used, the contraction in the Z direction in the conductor layer also increases. Therefore, if the pressure applied during degreasing is increased slightly to cope with this, a thinner electrode and a highly accurate electrode pattern can be obtained. To be
In addition, since the firing process (degreasing / sintering) affects the denseness of each layer of the ion flow electrostatic recording head, it is necessary to control at an appropriate heating rate and step.

Further, the first to third sheets 11, 13,
When the 15 ceramic green sheets were laminated, the compositions and thicknesses of the sheets 11, 13 and 15 were set to be the same, so that the melting points of the sheets 11, 13 and 15 and the difference in the coefficient of thermal expansion and the difference in rigidity were set. As a result, it is possible to prevent the laminated body 17 from being deformed or damaged, and it is difficult for the laminated ceramic body 17 to be thermally deformed due to the same composition and thickness of the ceramic used, even with respect to the thermal history during use.

Next, a second embodiment of the present invention will be described with reference to FIG.
This will be described with reference to (A) to (D). In this embodiment, as in the first embodiment, the electrode pattern 16 of the third electrode 6 is screen-printed on the ceramic green sheet of the insulator layer 5, laminated and pressure-bonded with the other ceramic green sheet below, and simultaneously degreasing and firing. Instead of forming the laminated body 17 by doing so, an "NTP paste" (trade name), which is an insulating paste manufactured by NEC, for example, is a mixture of a photocurable organic binder, a ceramic powder such as glass-alumina powder, and a solvent. The insulating layer 5 is formed by using the above, and then the stainless foil is patterned by photoetching in the conventional manner.
The electrode 6 is formed by pasting it on the insulator layer 5. The other parts are the same as those in the first embodiment.

That is, as shown in FIG. 1A, a conductor paste is laminated on the first sheet 11 of the ceramic green sheet with the electrode pattern 12 of the first electrode 2 and is dried, and then, as shown in FIG. As shown in B), the second sheet 13 is formed on the second sheet 13 forming the dielectric layer 3 made of the ceramic green sheet having the same composition and thickness as the first sheet 11.
The conductor paste is laminated on the electrode pattern 14 of the electrode 4,
In the dried state, the surface of the second sheet 13 opposite to the laminated surface of the second electrode 4 is aligned and overlapped on the first electrode 2 of the first sheet 11, and the first electrode 2 is further laminated. As shown in FIG. 2 (A), the first sheet 11 and the second sheet 13 are pressure-treated by the hot water isotropic laminator while the sheet 11 and the second sheet 13 are aligned with each other. The laminated body 21 (insulating substrate 1
The first electrode 2 is wired on the dielectric layer 3, and the dielectric layer 3,
The second electrode 4 positioned with respect to the first electrode 2 is laminated) and is integrally pressure-bonded.

After the lamination pressure bonding and degreasing firing of the laminated body 21 from the insulating substrate 1 to the second electrode 4 are completed, the insulating layer 5 is formed as follows. Here, as shown in FIG. 2B, the NTP paste 22 is uniformly screen-printed on the laminated body 21 in a solid coating state. Then, the applied NTP paste 22 is leveled for about 10 minutes, and then dried at 100 ° C. for 20 minutes.

Next, as shown in FIG. 2C, a photomask 23 for patterning the insulating layer 5 is set on the applied NTP paste 22. This photo mask 2
3 is a mask portion 23 corresponding to the opening 5a of the insulator layer 5.
a and a light transmitting portion 23b having a light transmitting property are provided. Then, after the NTP paste 22 is exposed to parallel light through the photomask 23, unnecessary unexposed portions such as the openings 5a are formed of 1,1,1, -trichloroethane as shown in FIG.
As shown in FIG.

Here, after the remaining portion of the paste 22 is post-cured by light, the temperature is raised to 400 ° C. at a temperature rising rate of 30 ° C./min in a belt baking furnace, and is held as it is for 5 minutes for degreasing. . At this time, exhaust of 40 liters / minute is performed. Then, after gradually cooling to 300 ° C., the temperature was raised to 920 ° C. at a heating rate of 50 ° C./min, and the temperature was maintained for 7 minutes and baked to form a patterned inorganic insulator layer 5 with a film thickness of 30 μm. It

The third electrode 6 is formed by applying a thin adhesive to a patterned stainless steel foil and sticking the adhesive on the insulator layer 5, and then pressing the periphery of the third electrode 6 with a tape to form an insulator. It is fixed on the layer 5.

Therefore, the ion flow electrostatic recording head manufactured by the above method has the following effects. That is, in the present embodiment, it is possible to form an electrode layer of the electrode pattern 12 of the first electrode 2 and the electrode pattern 14 of the second electrode 4 in a high-definition fine pattern by using an inexpensive printing method, so that the first electrode 2 and the dielectric layer The body layer 3 and the second electrode 4 and the dielectric layer 3 can be simultaneously fired without an adhesive, and the second electrode 4 and the insulator layer 5 can be post-processed by post-processing. Can be firmly fixed. Therefore, the electrodes 2, 4, 6 are not affected by thermal and mechanical post-processing and thermal aging during use.
It is possible to make it difficult to cause positional deviation between them, and to make the amount of discharged ions from each opening 4a of the second electrode 4 uniform, so that it is possible to obtain an electrostatic recording image with high accuracy and high image quality.

Furthermore, since the insulating substrate 1 to the upper dielectric layer 3 and the insulating layer 5 can be made of ceramic, the initial electrical characteristics can be maintained without deterioration even under long-term discharge under high voltage. High-quality long-term durability can be secured.

Further, in this embodiment, since the insulating layer 5 is formed by using the photo-curable organic binder and the paste containing the ceramic powder, the same process as the conventional photo solder resist can be utilized as it is, and the ceramic green It can be cheaper than using a sheet. Further, even with a fine pattern that cannot be formed on the ceramic green sheet due to the film forming ability, the method of this embodiment can be used.

Next, a third embodiment of the present invention will be described. In this embodiment, as in the first embodiment, the electrode pattern 16 of the third electrode 6 is screen-printed on the ceramic green sheet of the insulator layer 5, laminated and pressure-bonded with the other ceramic green sheet below, and simultaneously degreasing and firing. By doing so, instead of forming the laminated body 17, the insulator layer 5 is formed by using a photo solder resist film, and then the third electrode 6 formed by patterning a stainless steel foil by photoetching as in the conventional case is formed as an insulator. It is formed by pasting on the layer 5. The other parts are the same as those in the first embodiment.

Here, as in the second embodiment, a laminated body 21 in which the first sheet 11 and the second sheet 13 are laminated (the first electrode 2 is wired on the insulating substrate 1, The dielectric layer 3 and the second electrode 4 positioned with respect to the first electrode 2 are laminated thereon, and they are integrally laminated and pressure-bonded to laminate the laminated body 21 from the insulating substrate 1 to the second electrode 4. After the pressure bonding and the degreasing firing are completed, the insulator layer 5 is formed as follows.

That is, the insulator layer 5 is formed on the laminate 21 from the insulating substrate 1 to the second electrode 4 which has been laminated and pressure-bonded and degreased and fired, for example, a photocurable acrylic resin photosolder resist film manufactured by Electro Materials. "Dyn
“Amask KM4.0” (trade name) is vacuum laminated at 60 ° C. for 1 minute, subjected to predetermined exposure and development, and post-cured with light to form an insulating layer 5 having a film thickness of 100 μm.

The third electrode 6 is formed by applying a thin adhesive to a patterned stainless steel foil and applying the adhesive on the insulator layer 5, and then pressing the periphery of the third electrode 6 with a tape. It is fixed on the layer 5.

Therefore, the ion flow electrostatic recording head manufactured by the above method has the following effects. That is, in the present embodiment, the electrode pattern 1 of the first electrode 2 having a high-definition fine pattern is formed by using the inexpensive printing method as in the second embodiment.
Since the electrode layers of the electrode patterns 14 of the second and second electrodes 4 can be formed, an adhesive is not used between the first electrode 2 and the dielectric layer 3 and between the second electrode 4 and the dielectric layer 3. It can be fired at the same time, and the second electrode 4 and the insulator layer 5 can be firmly fixed by post-processing. Therefore, it is possible to prevent positional displacement between the electrodes 2, 4, and 6 from occurring easily due to thermal and mechanical post-processing and thermal changes during use. It is possible to obtain a highly accurate and high-quality electrostatically recorded image because the amount of discharged ions is uniform.

Furthermore, the dielectric layer 3 above the insulating substrate 1
Since the above can be made of ceramic, it is possible to secure high image quality and long-term durability while maintaining initial electrical characteristics without deterioration even under long-term discharge under high voltage.

Further, since the insulating layer 5 is an organic compound type photo-curing type, the same steps as those of the conventional photo solder resist can be utilized. Therefore, by applying this embodiment when the durability is not so high that the ion control part is made of ceramic, it can be made much cheaper than the case of using the ceramic green sheet. Further, since the photo solder resist film is an alkali development type film, it is easy to handle. Furthermore, even with a fine pattern that cannot be formed on the ceramic green sheet due to its film forming ability,
The method of this embodiment is possible.

The present invention is not limited to the above embodiment. For example, as the conductor paste to be screen-printed on the ceramic green sheet of the ion flow electrostatic recording head used in the present invention, besides silver-palladium-based conductor paste, metals such as silver, copper, platinum, gold, palladium, tungsten, molybdenum, etc. You may use what mixed the powder well with the organic binders, such as ethyl cellulose and acrylic resin, and the solvent, such as terpineol. In this case, the binder used in the conductor paste is of the same type as that used in the ceramic green sheet as much as possible or in the post-process because it undergoes a step of degreasing and firing at the same time in the state where a plurality of ceramic green sheets are stacked. The same type is preferable.

The conductive paste printed on the ceramic green sheet preferably has a film thickness of about 5 μm, although it depends on the pattern to be formed. Here, if the thickness of the conductor paste to be printed is too thick, the laminated body 17 is subjected to degreasing and sintering.
May become uneven or deform, resulting in poor accuracy. Further, if the thickness of the printed conductor paste is too thin, the electrical resistance after degreasing and sintering may increase.

Further, it goes without saying that various modifications can be made without departing from the scope of the present invention. Next, other characteristic technical matters of the present application will be additionally described as follows.

(Additional Item 1) A plurality of first electrodes extending in one direction and parallel to each other on an insulating substrate, and the first electrodes extending in a direction intersecting with the first electrodes. Together with a plurality of second electrodes each having an opening formed in a portion corresponding to the matrix, and arranged on the side opposite to the first electrode with respect to the second electrode. A third electrode having an opening formed at a corresponding portion; a dielectric layer provided between the first electrode and the second electrode; and a second electrode and a third electrode. A method for manufacturing an ion generating device for electrostatic recording, comprising: an insulating layer provided between and having an opening formed in a region corresponding to the matrix, wherein a first ceramic green sheet having a thickness of 15 μm or more and 100 μm or less The conductor pattern on the first electrode pattern. Strokes are printed and dried, and a second electrode pattern is printed and dried on the second ceramic green sheet having the same composition and thickness as the first ceramic green sheet, and the resultant is laminated. A method of manufacturing an ion generator for electrostatic recording, which comprises press-bonding and simultaneously firing.

(Additional Item 2) A plurality of first electrodes extending in one direction and parallel to each other on an insulating substrate, and a plurality of first electrodes extending in a direction intersecting with the first electrodes, together with the first electrodes. A plurality of second electrodes that form a matrix and have openings formed at portions corresponding to the matrix, and are arranged on the side opposite to the first electrode with respect to the second electrodes and correspond to the matrix. A third opening having an opening formed
The electrode, the dielectric layer provided between the first electrode and the second electrode, and the dielectric layer provided between the second electrode and the third electrode, and at a site corresponding to the matrix. A method of manufacturing an ion generator for electrostatic recording, comprising: an insulating layer having openings formed therein, wherein a conductor paste is printed on a first electrode pattern on a first ceramic green sheet having a thickness of 15 μm or more and 100 μm or less. -Drying, and then laminating the second ceramic green sheet having the same composition and thickness as the first ceramic green sheet, printing and drying the conductor paste on the second electrode pattern, and further laminating it. A third ceramic green sheet having the same composition and thickness as that of the first ceramic green sheet and having an opening corresponding to the opening of the second electrode is laminated and pressure-bonded thereon and simultaneously fired. A method of manufacturing an ion generator for electrostatic recording, comprising:

(Additional Item 3) A plurality of first electrodes extending in one direction and parallel to each other on an insulating substrate, and a plurality of first electrodes extending in a direction intersecting with the first electrodes, together with the first electrodes. A plurality of second electrodes that form a matrix and have openings formed at portions corresponding to the matrix, and are arranged on the side opposite to the first electrode with respect to the second electrodes and correspond to the matrix. A third opening having an opening formed
The electrode, the dielectric layer provided between the first electrode and the second electrode, and the dielectric layer provided between the second electrode and the third electrode, and at a site corresponding to the matrix. In the method of manufacturing an ion generator for electrostatic recording, comprising an insulating layer having an opening formed therein, the insulating layer disposed on the second electrode is an insulating paste containing at least a photocurable organic binder and ceramic powder. A method for manufacturing an ion generator for electrostatic recording, which is formed by photo-curing into a predetermined pattern, removing an uncured portion, degreasing and firing.

[0065]

According to the present invention, there is no deterioration of the dielectric layer due to discharge, and the second electrode and the dielectric layer can be firmly fixed to each other. It does not cause positional displacement due to thermal aging in the interior, and the amount of discharge ions in each opening of the second electrode is uniform, making it easy to handle high-precision machining, high image quality, high durability, and inexpensive. Naion flow
An electrostatic recording head can be manufactured.

[Brief description of drawings]

FIG. 1 is an explanatory view showing a manufacturing process of an ion flow electrostatic recording head according to a first embodiment of the invention.

FIG. 2 is an explanatory diagram showing a main part of a manufacturing process of a second electrode according to a second embodiment of the present invention.

3A is a vertical cross-sectional view of a main part showing a schematic configuration of an ion flow electrostatic recording head, and FIG. 3B is a cross-sectional perspective view of the ion flow electrostatic recording head.

[Explanation of symbols]

1 ... Insulating substrate, 2 ... First electrode, 3 ... Dielectric layer, 4 ... Second
Electrodes, 5 ... Insulator layer, 6 ... Third electrode, 11 ... First sheet, 12, 14, 16 ... Electrode pattern, 13 ... Second sheet, 15 ... Third sheet.

Claims (3)

[Claims] 1. A thickness of 15 μm or more for forming an insulating substrate 1
A first paste in which a conductor paste is laminated with an electrode pattern of a first electrode on a first sheet made of a ceramic material having a size of 00 μm or less.
A sheet laminating step; a second sheet laminating step in which a conductor paste is laminated with an electrode pattern of a second electrode on a second sheet forming a dielectric layer having the same composition and thickness as the first sheet; And a firing step of simultaneously firing a laminated body in which the surface of the second sheet opposite to the laminated surface of the second electrode is superposed on the first electrode of one sheet. Ion flow electrostatic recording head manufacturing method. 2. A thickness of 15 μm or more for forming an insulating substrate 1.
A first paste in which a conductor paste is laminated with an electrode pattern of a first electrode on a first sheet made of a ceramic material having a size of 00 μm or less.
A sheet laminating step; a second sheet laminating step in which a conductor paste is laminated with an electrode pattern of a second electrode on a second sheet forming a dielectric layer having the same composition and thickness as the first sheet; A third sheet laminating step in which a conductor paste is laminated with an electrode pattern of a third electrode on a third sheet forming an insulator layer having the same composition and thickness as one sheet; and a first electrode of the first sheet The surface opposite to the laminated surface of the second electrode in the second sheet is superposed on the upper surface,
And a firing step of simultaneously firing a laminated body on the second electrode of the second sheet, in which the surface of the third sheet opposite to the laminated surface of the third electrode is superposed. A method for manufacturing a featured ion flow electrostatic recording head. 3. A thickness of 15 μm or more for forming an insulating substrate 1
A first paste in which a conductor paste is laminated with an electrode pattern of a first electrode on a first sheet made of a ceramic material having a size of 00 μm or less.
A sheet laminating step; a second sheet laminating step in which a conductor paste is laminated with an electrode pattern of a second electrode on a second sheet forming a dielectric layer having the same composition and thickness as the first sheet; A firing step of simultaneously firing a laminated body in which the surface of the second sheet opposite to the laminated surface of the second electrode is superposed on the first electrode of one sheet, and at least a photocurable organic binder Insulator that is made by applying a paste made of an insulating material containing ceramic powder on the second electrode in a predetermined pattern corresponding to the insulator layer, photocuring the paste, removing the uncured portion, and firing the paste. A method of manufacturing an ion flow electrostatic recording head, comprising a layer forming step.