JP2658223B2 - Manufacturing method of multilayer ceramic electronic component - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a multilayer ceramic electronic component such as a multilayer ceramic capacitor widely used for electric products such as a video tape recorder, a liquid crystal television, and OA equipment. In addition, the present invention can be widely used when manufacturing multilayer ceramic electronic components such as a multilayer ceramic substrate, a multilayer varistor, and a multilayer piezoelectric element.

2. Description of the Related Art In recent years, in the field of electronic components, with the increase in the density of circuit components, further miniaturization and higher performance of multilayer ceramic capacitors and the like have been desired. Here, a multilayer ceramic capacitor will be described as an example.

FIG. 7 is a diagram showing a cross section of a part of the multilayer ceramic capacitor. In FIG. 7, 1 is a ceramic dielectric layer, 2 is an internal electrode, and 3 is an external electrode. The internal electrodes 2 are alternately connected to two external electrodes 3.

In recent years, the chipping of electronic components has been remarkable, and miniaturization of such a multilayer ceramic capacitor is desired as described above. In this multilayer ceramic capacitor, a mere reduction in area directly leads to a decrease in electric capacity. For this reason, it is necessary to increase the capacity at the same time as miniaturization of the multilayer ceramic capacitor.

As a method for increasing the capacitance of the multilayer ceramic capacitor, in addition to increasing the dielectric constant of the dielectric, it is conceivable to reduce the thickness of the dielectric layer and increase the number of layers of the dielectric layer and the internal electrodes.

FIG. 8 is a cross-sectional view of the multilayer ceramic capacitor when multiple layers are stacked. It can be seen that the thickness B of the peripheral portion (the number of laminated internal electrodes 2 is small) is smaller than the thickness A of the central portion (the number of laminated internal electrodes 2 is large) of the multilayer ceramic capacitor.

FIG. 9 is a diagram for explaining a difference in thickness between a central portion and a peripheral portion with respect to the number of stacked layers. Here, the thickness of the green ceramic sheet used was 20 microns, and the thickness of the internal electrodes was 4 microns. From FIG. 9, it can be seen that when the number of layers exceeds 10 layers, the difference in thickness between the central portion and the peripheral portion exceeds 20 microns, that is, exceeds the thickness of the ceramic green sheet used.

Traditionally, several approaches have been taken to address this problem.

First, as disclosed in JP-A-58-106244, there is a method in which only an electrode is first formed on a base film by printing, and then a ceramic green sheet is formed thereon by a casting method. Also, as disclosed in Japanese Patent Publication No. 40-19975, a method of obtaining a ceramic unsintered thin film with electrodes by applying an electrode paint, drying and then continuously applying a dielectric slurry and peeling the slurry from the support. There is. However, when the film thickness of the ceramic electrode-embedded ceramic raw sheet made by these methods is reduced to about 5 to 20 microns, the mechanical strength is extremely reduced, so that it can no longer be handled by itself. For this reason, it was difficult to reduce the thickness to 20 microns or less.

Further, simply embedding the electrodes in the ceramic green sheet causes irregularities due to the electrodes to be generated on the surface of the ceramic green sheet, which is very difficult when, for example, 30 or more layers are to be stacked at a high level.

Hereinafter, this content will be described with reference to FIGS. 10 to 12. FIG. 10 is a diagram for explaining an example of a method for producing a ceramic raw sheet with embedded electrodes. In FIG. 10, 4 is a base film, 5 is an electrode, 6 is an applicator, and 7 is a dielectric slurry, which is set in the applicator 6. 8 is an embedded electrode. Arrows indicate the direction in which the base film 4 moves. In FIG. 10, the base film 4 on which the electrodes 5 are formed in advance
However, the dielectric slurry 7 is applied to the surface by the applicator 6 on which the dielectric slurry 7 is set. Here, the applicator 6 is preferably capable of forming a coating film of about 5 to 20 microns. Also, base film 4
May be fixed, and the applicator 6 may be moved.

FIG. 11 is a diagram for explaining the appearance of FIG. 10 in a cross section. FIG. 11 illustrates a state in which a dielectric slurry 7 is applied on an electrode 5 by an applicator 6 and an embedded electrode 8 is formed.

FIGS. 12 (A), (B) and (C) are views for explaining a state where the dielectric slurry 7 applied on the electrode 8 dries. In FIG. 12, (A), (B), (C)
As the dielectric slurry 7 dries, the appearance of unevenness due to the electrode 8 is clearly understood.

Problems to be Solved by the Invention A conventional electrode is embedded in a ceramic raw sheet, and in the method of manufacturing a multilayer ceramic capacitor using this electrode embedded ceramic raw sheet, the electrode embedded ceramic sheet is peeled off from a support and used. There was a limit to thinning. In addition, in the case where the dielectric layers and the internal electrodes are multi-layered, there is a problem that a step caused by the internal electrodes cannot be removed between the central portion and the peripheral portion of the multilayer ceramic capacitor. .

In view of the above problems, the present invention, by embedding the electrodes in a ceramic raw sheet in a form with reduced irregularities, even when used when manufacturing a multilayer ceramic capacitor having a multilayer dielectric layer and internal electrodes, Multi-layer ceramic electronic devices that reduce the level difference caused by the internal electrodes between the center and the periphery of the monolithic ceramic capacitor and can handle and transfer thin ceramic green sheets of about 20 microns or less while maintaining mechanical strength. A method of manufacturing a part is provided.

Means for Solving the Problems In order to solve the above-mentioned problems, a method for manufacturing a multilayer ceramic electronic component according to the present invention comprises the steps of: And after applying so as to cover the ink portion of the ceramics, the slurry of the ceramics is dried to form a ceramic raw sheet with embedded electrodes on the support, and then the raw ceramic sheet with embedded electrodes is peeled from the support. Without thermocompression bonding on another ceramic raw sheet or another electrode, only the support is peeled off, and the electrode-embedded ceramic raw sheet is transferred onto the other ceramic raw sheet or another electrode. It is provided with such a configuration.

Effect The present invention has the above-described structure, and even when used in the manufacture of a multilayer ceramic capacitor having a multilayer structure, the unevenness of the electrode is filled with the ceramic ink and then applied with the ceramic slurry, whereby the step generated by the electrode is reduced. Can be reduced. Further, after the ceramic raw sheet having the electrodes embedded therein is thermocompression-bonded onto another ceramic raw sheet or another electrode without peeling from the support, only the support is peeled off, and the electrode embedded ceramic green sheet is peeled off. The sheet will be transferred.

EXAMPLES Hereinafter, a method for manufacturing a multilayer ceramic capacitor and a method for laminating the same according to one embodiment of the present invention will be described with reference to the drawings.

1 (A), 1 (B), and 1 (C) are views for explaining how to manufacture a raw ceramic sheet with embedded electrodes in one embodiment of the present invention. In FIG. 1, 11 is an electrode, 12 is a base film as a support, 13 is a ceramic ink, and 14 is a ceramic slurry. First, description will be made with reference to FIGS. 1 (A) to 1 (C). First, the electrodes 11 are printed on the base film 12 at regular intervals as shown in FIG. Next, a ceramic ink 13 is printed between the electrodes 11 as shown in FIG.
As a result, the electrode portion and the ink portion of the ceramic are formed on the base film 12 with portions that do not overlap each other. Finally, as shown in FIG. 1C, a ceramic slurry 14 is placed on the electrode 11 and the ceramic ink 13.
Is applied uniformly.

Hereinafter, a lamination method using the electrode-embedded sheet manufactured as described above will be described.

FIG. 2 and FIG. 2 are views for explaining a state of laminating the ceramic raw sheets with embedded electrodes of the present invention.
2 and 3, reference numeral 20 denotes a base, 21 and 21a are base films, 22 is a ceramic green laminate, 23 and 23a are electrodes, 24 is a ceramic raw sheet, and 25 is made as shown in FIG. Electrode embedded ceramic raw sheet
And a ceramic raw sheet 24. 26 is a heater, 27 is a hot plate, 28 is a transferred electrode, 29 is a transferred ceramic raw sheet with embedded electrodes, 30 is a transferred raw ceramic sheet with embedded electrodes, and the transferred electrode 28 and the transferred ceramic It is composed of a raw sheet 29. Arrows indicate the direction in which the hot platen 27 moves.

First, a description will be given with reference to FIG. First, a hot platen 27 heated by a heater 26 is placed on the side of the base film 21a on which the electrode-embedded ceramic raw sheet 25 is not formed. On the other hand, the base film 21 and the ceramic laminate 22 fixed to the base 20 are placed on the side of the base film 21a on which the electrode-embedded ceramic raw sheet 25 is formed. At this time,
The electrode 23 is formed on the surface of the ceramic green laminate 22 by an appropriate method such as transfer or printing. Here, the electrode 23 does not necessarily need to be formed on the surface of the ceramic green laminate 22. Next, from the state shown in FIG.
Electrode embedded ceramic raw sheet 2 formed on the surface of a
5 is heat-pressed.

Next, a description will be given with reference to FIG. This FIG.
FIG. 4 is a view after the electrode embedded ceramic raw sheet 25 shown in the figure has been transferred. That is, as shown in FIG. 3, the electrode embedded ceramic raw sheet 25 on the base film 21a is transferred to the surface of the ceramic raw laminate 22 by the hot platen 27,
As a result, a transferred electrode-embedded ceramic raw sheet 30 composed of the transferred electrode 28 and the transferred ceramic raw sheet 29 is formed.

FIGS. 4 and 5 show a modification of the embodiment shown in FIGS. 2 and 3. FIG. 4 and 5, a ceramic green sheet 24a formed on a base film 21b is heated and pressed on the surface of the ceramic green laminate 22 on which the electrodes 23 are formed, and a transferred ceramic green sheet 29a is formed. A state in which the electrode-embedded ceramic raw sheet 25 is heat-pressed after formation is shown. Here, FIG.
By repeating the steps of FIG. 3 and the steps of FIGS. 4 and 5, it is also possible to laminate multiple layers.

Next, a more detailed description will be given. First, an electrode ink using palladium powder was prepared as an electrode ink for forming an electrode. It consists of 500 parts by weight of 0.3 micron particle size palladium powder and ethyl cellulose as resin.
To 5.0 parts by weight and 0.1 part by weight of the dispersant, butyl carbitol was added as a solvent so as to obtain an appropriate viscosity, and then 3
The mixture was sufficiently dispersed using this roll mill, butyl carbitol was added again on a three-roll mill, and the mixture was diluted while being dispersed until the viscosity became 100 poise.

Next, as a base film 21a for the electrode 23a (and the ceramic raw sheet 24), a film width of 200 mm,
Film thickness 75 microns, center core diameter 3 inches, length about
Using a 100-meter roll-shaped polyethylene terephthalate film (hereinafter referred to as a PET film), the above-mentioned electrode ink was applied at regular intervals by a screen printing method using a stainless steel screen with an emulsion thickness of 10 microns and 400 mesh. Printing was performed continuously while opening. here,
The shape of the electrode was 3.5 × 1.0 mm. Then, drying of the electrode ink after printing is about 12
A far-infrared belt furnace heated to 5 ° C. was connected to evaporate the solvent in the electrode ink, and this was used as an electrode 23a.

Next, how to make the dielectric slurry and the ceramic ink will be described. First, 6.0 parts by weight of a polyvinyl butyral resin (BL-2 butyral resin, manufactured by Sekisui Chemical Co., Ltd.) was added to a resin solution comprising 0.6 parts by weight of dibutyl phthalate, 25.0 parts by weight of ethyl alcohol, and 36.0 parts by weight of toluene, and a particle size of 1 wt. Added together with 31.0 parts by weight of micron barium titanate powder and stirred well. Next, this was put in a polyethylene bottle, zirconian beads were added, and mixed and dispersed until an appropriate dispersion state was obtained. Next, this was temporarily filtered, and then subjected to pressure filtration using a 10-micron membrane filter to obtain a dielectric slurry. The ceramic ink was manufactured in the same manner as the electrode ink.

Next, as shown in FIG. 1 (B), the ceramic ink is applied between the electrodes 11 in a reverse pattern of the electrodes (a negative / positive relationship).
And dried.

Next, the dielectric slurry is applied to the base film on which the electrodes and ceramic ink are printed using an applicator.
Coated continuously on 21a. Next, this was dried to form an electrode-embedded ceramic raw sheet 25, and the film thickness was measured with a micrometer.
18 microns.

Next, a method of manufacturing a multilayer ceramic capacitor using the electrode-embedded ceramic raw sheet 25 will be described. First, the ceramic green laminate 22 having a thickness of 200 μm and having no electrodes formed thereon was fixed together with the base film 21 on the table 20 shown in FIG. First, the ceramic raw sheet 24a is transferred as shown in FIG.
As shown in the figure, the required number of laminated ceramic raw sheets 25 with electrodes were transferred. Here, the transfer is performed using a hot platen 27 from the side of the base film 21a under the conditions of a temperature of 180 ° C. and a pressure of 15 kilograms per square centimeter, and after transferring the electrode embedded ceramic raw sheet 25, the base film 21a is peeled off. went. At this time, while the electrodes 23 and 23a were shifted by a certain pitch, the next ceramic raw sheet with embedded electrodes was transferred by heating from the base film 21a side using the hot platen 27.

Hereinafter, this is repeated so that the electrodes are alternately shifted as shown in FIG. 7, so that the electrodes have 51 layers. And
Finally, in order to increase warpage and mechanical strength during firing,
A ceramic green sheet without a 200-micron electrode was transferred. 2.4 × 1.6
It was cut into millimeter chips to obtain a laminate according to the method of the present invention.

For comparison, ceramic ink was not printed while the electrode ink was printed as a conventional electrode-embedded ceramic raw sheet, and a ceramic slurry was applied on this to produce an electrode-embedded ceramic raw sheet. Similarly, laminated by transfer, cut into chips,
The laminate was formed by a conventional method. The conditions such as pressure and cutting during lamination were all the same as described above.

Here, the number of samples was n = 100. Next, the thickness difference between the central part and the peripheral part of the laminate is measured using a thickness gauge (surface roughness meter).
It measured using. The results are shown in Table 1 below.

As described above, when the method for manufacturing a multilayer ceramic electronic component according to the present invention is used, the difference in thickness between the central portion and the peripheral portion of the completed laminate is greatly improved as compared with the conventional method. I understand. This is because, in the ceramic raw sheet with embedded electrodes according to the present invention, the occurrence of unevenness due to the electrodes is prevented. Further, in the case of the conventional method, the difference in thickness between the central portion and the peripheral portion of the laminate becomes large, and lamination failure (the electrode-embedded sheet cannot be transferred) has occurred. When these laminates were fired at 1300 ° C., almost no delamination (delamination) was observed in the case of the method of the present invention as compared with the case of the conventional method.

Here, the ceramic raw sheet part of the electrode-embedded ceramic raw sheet used in the present invention has heat transferability due to the property of the polyvinyl butyral resin contained therein. In addition, the transferability due to the heat, the less the polyvinyl butyral resin (hereinafter referred to as PVB resin) contained in the raw ceramic sheet, the worse the transferability, and conversely, the amount of PVB resin contained The larger the number, the better the transferability. As for the PVB resin contained in the raw ceramic sheet used here, the transferability was good when the PVB resin contained about 20 g per 100 g of the ceramic powder. However, the amount of PVB resin required for transfer here varies depending on the particle size of the ceramic powder of the slurry raw material, the degree of polymerization and type of the PVB resin, or the temperature at the time of transfer. It is thought that. When the amount of resin is insufficient, it is necessary to increase the transfer temperature.

Next, with respect to the barium titanate powder having the particle size used in the experiment, the amount of resin contained in the green ceramic sheet and the results of experiments on the transferability of the green ceramic sheet are shown in Table 2 below. Here, the ceramic green sheet is made of barium titanate powder, dibutyl phthalate as a plasticizer, and PVB resin as described above, and the transferability when the weight percentage of the PVB resin contained here is changed. Examined. Here, the amount of dibutyl phthalate added to the green ceramic sheet was fixed at 10% by weight of the PVB resin. The transferability of the ceramic green sheet was tested by transferring the ceramic raw sheet with embedded electrodes onto a ceramic green laminate having electrodes formed on the surface as shown in FIG. In addition, transfer is from the base film side,
With a transfer pressure of 15 kilograms per square centimeter,
This was performed by pressing a hot plate heated to a temperature of 180 ° C.
Further, the amount of the PVB resin was represented by% by weight in the raw ceramic sheet.

Next, a multilayer ceramic capacitor was manufactured in the same manner as in the example of Table 1 using the ceramic raw sheet of Table 2. Table 3 below shows the relationship between the amount of PVB resin contained in the green ceramic sheet and the rate of delamination.

From Table 3, it can be seen that those having an amount of PVB resin of about 10% by weight to 40% by weight hardly cause delamination. From the above, it can be understood that the amount of the PVB resin is from 10% by weight to 40% by weight, particularly about 15% by weight of the raw ceramic sheet, which has good transferability and less occurrence of delamination.

Here, as a resin having a transfer property such as a PVB resin, there are other thermoplastic resins such as an acrylic resin, a vinyl resin, and a cellulose derivative resin. Also, in addition to the thermoplastic resin, curable resin, even if it is a polymerizable resin, the curing conditions, polymerization conditions are appropriate, for example, by making a rubber,
It can be transferred by providing the surface with tackiness and can be used as a resin for a ceramic green sheet.

Further, as shown in FIG. 4 and FIG. 5, a ceramic raw sheet 24a containing only about 5 parts by weight of a resin with respect to 100 parts by weight of barium titanate and having no transferability is used. Even if it is used, it can be laminated by alternately using the electrode-embedded sheet having excellent transferability of the present invention.

Further, in lamination of the electrode-embedded sheet, the sixth
As shown in the drawing, a ceramic raw sheet with embedded electrodes may be transferred using a heat roller. FIG. 6 is a view for explaining a state of transfer of a ceramic raw sheet with embedded electrodes using a heat roller. In FIG. 6, reference numeral 31 denotes a heat roller, which is set at a constant temperature by a heater 26a. Then, when the electrode embedded ceramic raw sheet 25 passes between the ceramic raw laminate 22 and the heat roller 31, the electrode embedded ceramic raw sheet 25 is transferred to the surface of the ceramic raw laminate 22 and the transferred electrode embedded ceramic raw sheet 22 is transferred. It will be 30. According to this method, the transfer of the electrode-embedded ceramic raw sheet can be continuously performed.

In the present invention, heat, light, electron beam,
The transfer may be performed using microwaves and X-rays. Transfer at room temperature is also possible by changing the type of PVB resin, the type and amount of plasticizer added. Also, paper,
Transfer can also be performed on the surface of a ceramic substrate, a metal plate, or the like. Also, other resins can be used. Furthermore, in the ceramic ink to be printed between the electrodes, if the component ratio of the ceramic ink after drying (such as the ratio of resin to ceramic) is adjusted to the component ratio of the ceramic slurry after drying, a problem may occur during firing. Hateful. Further, the order of printing the electrodes and printing of the ceramic ink on the base film may be either first or simultaneously. Further, the printing of the ceramic ink between the electrodes does not need to be performed for all the layers, but may be performed for only a few layers or a part thereof as necessary. Also, there was no particular problem even if the printing of the ceramic ink and the printing of the electrode partially overlapped.

Further, if necessary, a calendering process (smoothing the surface by applying pressure or heat to a metal plate or the like on the surface) may be performed.

The method of the present invention can be applied not only to the multilayer ceramic capacitor described in the above embodiment but also to other multilayer ceramic electronic components such as a multilayer ceramic substrate and a multilayer varistor.

Effect of the Invention As described above, the present invention is to apply a slurry of ceramic slurry on a support having an electrode portion and a ceramic ink portion formed thereon so as to cover the electrode portion and the ceramic ink portion, The ceramic slurry is dried to form an electrode-embedded ceramic raw sheet on the support, and then, without peeling the electrode-embedded ceramic raw sheet from the support, on another ceramic raw sheet or another electrode. After the thermocompression bonding, only the support is peeled off, and the electrode-embedded ceramic raw sheet is transferred onto the other ceramic raw sheet or another electrode, so that the electrode ink is dried. In order to minimize the adverse effects of the solvent contained therein and to handle the ceramic raw sheet together with the support, It will not be damaged. Furthermore, by embedding the electrodes with ceramic slurry after printing a ceramic ink between the electrodes, the occurrence of unevenness on the surface of the ceramic sheet with embedded electrodes is reduced, and the yield of multilayer ceramic electronic components such as multilayer ceramic capacitors is improved. Can be manufactured.

[Brief description of the drawings]

1 (A), 1 (B) and 1 (C) are views for explaining the production of an electrode-embedded ceramic raw sheet according to one embodiment of the present invention, and FIGS. 2 and 3 are electrodes of the present invention. FIGS. 4 and 5 are views for illustrating a modified example of the embodiment of FIGS. 2 and 3, and FIGS. FIGS. 7A and 7B are views for explaining a state of transfer of a ceramic raw sheet with embedded electrodes using a heat roller in the embodiment of FIG. 7, FIG. FIG. 9 is a cross-sectional view of a laminated ceramic capacitor when laminated, FIG. 9 is a view for explaining a difference in thickness between a central portion and a peripheral portion with respect to the number of laminated layers, and FIG. Diagram for explaining an example, eleventh FIGS. 12A, 12B, and 12C are views for explaining a state in which FIG. 10 is viewed in cross section, and FIGS. 12A, 12B, and 12C illustrate a conventional example in which a dielectric slurry applied on an electrode is dried. It is a figure for explaining a situation that it does. 11 ... electrode, 12 ... base film, 13 ... ceramic ink, 14 ... ceramic slurry, 20 ...
Base, 21, 21a, 21b Base film, 22 Ceramic raw laminate, 23, 23a Electrode, 24, 24a Ceramic raw sheet, 25 Electrode embedded ceramic raw sheet, 26, 26a
... heater, 27 ... hot platen, 28 ... transferred electrode, 29,2
9a: transferred ceramic raw sheet, 30: transferred electrode embedded ceramic raw sheet, 31: heat roller.

Claims (2)

(57) [Claims] 1. A support comprising an electrode portion and a ceramic ink portion having portions which do not overlap each other,
After applying the ceramic slurry so as to cover the electrode portion and the ink portion of the ceramic, the ceramic slurry is dried to form an electrode-embedded ceramic raw sheet on the support, and then the electrode-embedded ceramic raw sheet. Without peeling from the support,
After thermocompression bonding onto another ceramic raw sheet or another electrode, only the support is peeled off, and the electrode-embedded ceramic raw sheet is transferred onto the other ceramic raw sheet or another electrode. Of manufacturing a multilayer ceramic electronic component. 2. The method for manufacturing a multilayer ceramic electronic component according to claim 1, wherein the ceramic slurry is blended so that the thermoplastic resin content after drying is 10% by weight or more and 40% by weight or less.