JPH0810398Y2 - 回転塗布装置 - Google Patents

回転塗布装置

Info

Publication number
JPH0810398Y2
JPH0810398Y2 JP2584490U JP2584490U JPH0810398Y2 JP H0810398 Y2 JPH0810398 Y2 JP H0810398Y2 JP 2584490 U JP2584490 U JP 2584490U JP 2584490 U JP2584490 U JP 2584490U JP H0810398 Y2 JPH0810398 Y2 JP H0810398Y2
Authority
JP
Japan
Prior art keywords
resist
opening
spin
spin head
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2584490U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03119472U (en, 2012
Inventor
俊光 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Inc filed Critical Toppan Inc
Priority to JP2584490U priority Critical patent/JPH0810398Y2/ja
Publication of JPH03119472U publication Critical patent/JPH03119472U/ja
Application granted granted Critical
Publication of JPH0810398Y2 publication Critical patent/JPH0810398Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Circuit Boards (AREA)
  • Coating Apparatus (AREA)
JP2584490U 1990-03-14 1990-03-14 回転塗布装置 Expired - Lifetime JPH0810398Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2584490U JPH0810398Y2 (ja) 1990-03-14 1990-03-14 回転塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2584490U JPH0810398Y2 (ja) 1990-03-14 1990-03-14 回転塗布装置

Publications (2)

Publication Number Publication Date
JPH03119472U JPH03119472U (en, 2012) 1991-12-10
JPH0810398Y2 true JPH0810398Y2 (ja) 1996-03-29

Family

ID=31528764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2584490U Expired - Lifetime JPH0810398Y2 (ja) 1990-03-14 1990-03-14 回転塗布装置

Country Status (1)

Country Link
JP (1) JPH0810398Y2 (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3380663B2 (ja) * 1995-11-27 2003-02-24 大日本スクリーン製造株式会社 基板処理装置
JP3679695B2 (ja) * 1999-08-12 2005-08-03 東京エレクトロン株式会社 現像装置、基板処理装置及び現像方法
JP6789155B2 (ja) * 2017-03-15 2020-11-25 東京エレクトロン株式会社 塗布処理装置及びカップ

Also Published As

Publication number Publication date
JPH03119472U (en, 2012) 1991-12-10

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term