JPH0795435B2 - Electron gun heating type steam generator - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to an electron gun heating type steam generator, and in particular, to generate steam by irradiating a metal to be heated with an electron beam to generate steam. The present invention relates to an electron gun heating type steam generator provided with a device capable of appropriately controlling an irradiation position, an irradiation region shape and a trajectory so as to match a target.

[Conventional technology]

As an example of a conventional application of an electron gun heating type steam generator, there is an apparatus described in the item of 143rd Laser Society Research Report RTM-88-10. Also in the electron gun heating type steam generator described in this document, it is expected that the metal to be heated housed in the crucible is irradiated with the electron beam and the focusing property of the electron beam is improved. Therefore, for the purpose of measuring the trajectory and shape of the electron beam, a wire net is installed on the electron beam orbit, and the electron beam is irradiated to observe the melting trace of the wire net.

[Problems to be Solved by the Invention]

In the above conventional electron gun heating type steam generator, although trying to measure the trajectory and shape of the electron beam,
No consideration is given to detecting the irradiation position and irradiation region shape of the electron beam and controlling the irradiation position and irradiation region shape of the electron beam to an appropriate one that matches the target by using this detection data. Therefore, when the electron gun heating type steam generator is used for a long time and the irradiation position of the electron beam and the shape of the irradiation region change with time, there arises a problem that the steam generation efficiency decreases. Further, when the irradiation position of the electron beam is largely changed, there is a problem that the crucible is damaged.

An object of the present invention is to have a configuration capable of detecting and controlling the irradiation position, irradiation region shape, and trajectory of an electron beam in a heating target, and when the irradiation position, irradiation region shape, and trajectory of the electron beam fluctuates from the target, An object of the present invention is to provide an electron gun heating type steam generator having a control system capable of adjusting the state.

[Means for Solving the Problems]

A first electron gun heating type steam generator according to the present invention outputs an electron beam from an electron gun, and irradiates an electron beam on an evaporant by determining an irradiation position of the electron beam by an irradiation position setting means. In an electron gun heating type steam generator for generating steam, a detection means which is arranged at a position where an irradiation region of an electron beam in an evaporant is expected, and which detects a spatial radiation intensity distribution of X-rays emitted from the evaporant, An image processing unit which has information on a target irradiation position with respect to the electron beam, inputs a detection signal of the detection unit and compares it with the target irradiation position, and obtains information on the difference between the irradiation positions, As a characteristic point, an electron beam irradiation position control means is provided for operating the irradiation position setting means so that the difference between the irradiation positions obtained by the image processing means becomes zero based on the difference information.

A second electron gun heating type steam generator according to the present invention outputs an electron beam from an electron gun, the irradiation position of the electron beam is determined by the irradiation position setting means, and the irradiation area shape is determined by the irradiation area shape setting means. In an electron gun heating type steam generator that irradiates an electron beam onto an evaporative substance to generate vapor, a space for an X-ray radiated from the evaporative substance is provided at a position where the irradiation region of the electron beam on the evaporative substance is expected. Detecting means for detecting the target radiation intensity distribution, and information on the target irradiation position and irradiation area shape with respect to the electron beam, and by inputting the detection signal of the detection means, the target irradiation position and irradiation area shape An image processing unit that compares each of the irradiation position and the irradiation region shape to obtain each information, and the irradiation position difference obtained by the image processing unit based on the information about the irradiation position difference is set to 0. The irradiation area shape setting means is operated so that the difference between the irradiation area shapes obtained by the image processing means becomes 0 based on the electron beam irradiation position control means for operating the irradiation position setting means and the information on the difference between the irradiation area shapes. It is characterized in that it is provided with an electron beam irradiation area shape control means.

In the second electron gun heating type steam generator, an electrostatic lens is used as the irradiation area shape setting means.

A third electron gun heating type steam generator according to the present invention outputs an electron beam from an electron gun, and determines an irradiation position of this electron beam by an irradiation position setting means, thereby irradiating an electron beam on an evaporative substance to generate steam. In an electron gun heating-type vapor generator for generating a gas, at least two detection elements arranged at positions where an irradiation area of an electron beam in an evaporate is expected and a slit member that defines an observation area of each detection element are provided. The observation area of the detection element inputs the X-ray detection means which is set symmetrically with respect to the target electron beam irradiation position in the direction of controlling the electron beam, and the detection signals of the respective detection elements of the X-ray detection means. And the differential amplification means for obtaining information on the irradiation position variation of the electron beam from the intensity of the detection signal, and the irradiation position variation obtained by the differential amplification means based on the information on the irradiation position variation becomes zero. Having a point comprising the electronic beam irradiation position control means for operating the sea urchin irradiation position setting means.

In the first to third electron gun heating type steam generators,
Braking X-rays can be used as the X-rays detected by the detecting means.

A fourth electron gun heating type steam generator according to the present invention is the X-ray radiated from evaporant in the first or second configuration.
Instead of the X-rays, the spatial radiant intensity distribution of the X-rays emitted by the vapor is measured in the electron beam orbit by the excitation by the electron beam, the information of the electron beam orbit is obtained from the measured radiant intensity distribution, and the image processing means and the electron The feature is that the trajectory of the electron beam is controlled by the beam irradiation position control means and the irradiation position setting means.

In the first to fourth electron gun heating type steam generators,
An electron beam deflecting device or an electron beam accelerating device is used as the irradiation position setting means.

Further, in the first to fourth electron gun heating type steam generators, a detecting means for detecting light can be used instead of the detecting means for detecting X-rays.

[Action]

In the first electron gun heating type steam generator according to the present invention, the spatial radiant intensity distribution of the X-rays emitted by the electron beam with which the surface of the evaporated material is irradiated is detected by the detection means, and the distribution of the distribution is detected by the image processing means. The peak position is compared with a preset target position to find the difference, and the electron beam irradiation position control means operates the electron beam irradiation position setting means so that the difference becomes 0, and the irradiation position is always set to the target position. adjust.

In the second electron gun heating type vapor generator according to the present invention, the spatial radiant intensity distribution of the X-rays emitted by the electron beam with which the surface of the vaporized material is irradiated is detected by the detection means, and the distribution is detected by the image processing means. Of the peak position and the distribution width of each of them are compared with a preset target position and target width to obtain the difference, and the electron beam irradiation position control means operates the electron beam irradiation position setting means so that the respective differences become zero. In addition, the irradiation area shape control means operates the irradiation area shape setting means to constantly adjust the irradiation position and the irradiation area shape of the electron beam on the surface of the evaporated material to the target state.

In the third electron gun heating type steam generator according to the present invention, the deviation of the X-ray radiation intensity distribution with respect to the center position is detected by using the detection means including at least two detection elements and the differential amplification means, and this deviation is detected. The electron beam irradiation position control means operates the electron beam irradiation position setting means so as to eliminate the error, and always adjusts the irradiation position to the target position.

In the fourth electron gun heating type steam generator according to the present invention, the X-ray generated by the collision between the steam and the electron beam in the air is further detected by using the above-mentioned first or second device configuration. By configuring, the trajectory of the electron beam is detected, and this electron beam is adjusted to the target trajectory.

In each of the above electron gun heating type steam generators, the spatial radiation intensity distribution of the X-rays emitted on or near the surface of the vaporized substance is used, but the light emitted in the same manner is used. It is also possible to configure a signal processing system and a control system to have the same control function as in the case of using X-rays.

〔Example〕

Embodiments of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 is a first view of an electron gun heating type steam generator according to the present invention.
It is a block diagram of an Example. A metal crucible 1 is shown in a vertical cross section. The crucible 1 has an elongated shape in the direction perpendicular to the drawing sheet. A vaporized substance 2 such as a metal to be vaporized is partially accommodated in the crucible 1 by being heated by an electron beam 3 in a molten state. The electron beam 3 is normally set to irradiate the central position of the evaporated material 2 in the Y direction. The center position of the evaporated material 2 is set as the target position. Reference numeral 4 denotes a vapor flow of the evaporated material 2 which is evaporated by being heated by the electron beam 3. Reference numeral 5 denotes an electron gun, and the electron gun 5 is arranged near the crucible 1. As the electron gun 5, for example, one having a linear filament is used, and the electron gun 5 is arranged so that the linear filament is parallel to the longitudinal direction of the crucible 1. At the electron beam output part of the electron gun 1, an electron beam deflection coil 6 for determining the irradiation position of the electron beam 3 on the surface of the vaporized substance 2 and the shape of the irradiation region of the electron beam on the surface of the vaporized substance 2 are determined. And an electrostatic lens 7 for

The peripheral portion of the crucible of the electron gun heating type steam generator having the above structure is housed in the evaporation chamber 8. Although the upper part of the evaporation chamber 8 is omitted in the figure, a device for recovering a desired component from the vapor stream 4 is usually arranged.

A communication part 9 is provided on a part of the side wall of the evaporation chamber 8, and a detector box 10 is provided via the communication part 9. An X-ray two-dimensional detector 11 is arranged at a predetermined position inside the detector box 10 in such a posture as to face the irradiation area of the electron beam 3 in the evaporated material 2. The X-ray two-dimensional detector 11 functions as an X-ray camera, and is composed of a large number of detection elements arranged in an array in a two-dimensional manner. It is for detecting emitted X-rays. The field of view 14 of the X-ray two-dimensional detector 11 is defined by a pinhole 12 arranged in front of it. The pinhole 12 determines the area on the surface of the vaporized substance 2 that the X-ray two-dimensional detector 11 expects. A filter 13 has a function of setting the wavelength region of the X-ray detected by the detector 11 to a predetermined region. The transmission characteristic of the filter 13 can be arbitrarily changed, and in this case, the change is performed by selecting a filter having an appropriate transmission characteristic.

The above-described detector configuration is configured to detect X-rays emitted when the surface of the evaporation material 2 is irradiated with the electron beam 3. The radiation intensity of X-rays generated by irradiation with an electron beam is proportional to the electron beam intensity. Therefore, by measuring the X-ray radiation intensity distribution around the irradiation portion on the surface of the evaporated material 2, information on the irradiation position of the electron beam 3 and the irradiation region shape can be obtained. The emitted X-rays include X-rays generated by exciting the evaporation element with electrons and bremsstrahlung X-rays generated when the electrons are decelerated on the surface of the evaporation material 2. Since all of these X-rays are generated in proportion to the intensity of the electron beam 3, the emitted X-rays detected as a whole are proportional to the intensity of the irradiated electron beam. It is also possible to focus on only the braking X-ray and detect only this and use it as the measurement data for the subsequent control.

Although the X-ray detector is used as the detector in the above configuration, the irradiation position and irradiation region shape of the electron beam 3 can be measured by using the light generated together with the X-ray when the electron beam 3 is irradiated. Is also possible. A photodetector will be used as the detector in this case, but the basic configuration is X
The same as in the case of the line detector.

Next, the signal processing system and the control system will be described. X-ray 2
The detection signal output from the dimensional detector 11 is input to the detector control device 15, where signal processing is performed, and an X-ray radiation intensity distribution in the Y direction is obtained. X-ray detector controller 15
The radiation intensity distribution obtained in step 1 is sent to the image processing device 16. In the image processing device 16, the input measured radiation intensity distribution is compared with a preset target reference radiation position (usually the center position of the crucible 1 in the Y direction) and the reference radiation intensity distribution, and the reference radiation position is compared. A difference ΔW between the center position deviation ΔY of the measured radiant intensity distribution and the nominal width of the reference radiant intensity distribution and the nominal value width of the measured radiant intensity distribution is calculated and output as an error signal. The error signal ΔY regarding the deviation of the center position of the measured radiation intensity distribution from the reference radiation position is given to the electron beam deflection coil controller 17. Further, ΔW is given to the electrostatic lens control device 18 as an error signal relating to the difference between the judgment width of the reference radiation intensity distribution and the judgment width of the measured radiation intensity distribution. The electron beam deflection coil control device 17 determines the irradiation position of the electron beam based on the input error signal ΔY so that the error signal ΔY output from the image processing device 16 becomes 0. Operate the operation of. The electrostatic lens control device 18 receives the error signal Δ
The error signal Δ output from the image processing apparatus based on W
The operation of the electrostatic lens 7 that determines the irradiation area of the electron beam is operated so that W becomes 0.

Here, the control of the irradiation position and the irradiation region shape of the electron beam 3 on the surface of the evaporated material 2 will be specifically described.

As control of the irradiation position, first, in the image processing device 16, the measured X-ray radiation intensity distribution provided from the detector control device 15 is used, and as shown in FIG.
The position P _{2 in the} Y direction where the peak is obtained is calculated, and the deviation from the center position P ₁ of the target crucible 1, that is, the position difference is calculated as the error signal ΔY. Next, the electron beam deflection coil control device 17 changes the trajectory of the electron beam 3 by increasing or decreasing the magnetic field generated by the electron beam deflection coil 6 based on the input error signal ΔY, and the error calculated by the image processing device 16 is changed. The control is performed so that the signal ΔY becomes 0.

Further, by controlling the shape of the irradiation region, first, using the measured X-ray intensity distribution given from the detector control device 15 in the image processing device 16 as in the above, as shown in FIG. The difference between the 20 threshold width W ₀ and the measured threshold width W of the X-ray intensity distribution 19 is calculated as an error signal ΔW (= W−W ₀ ). Next, the electrostatic lens control device 18 operates the electrostatic lens 7 based on the input error signal ΔW,
The electron beam is controlled so that the error signal ΔW calculated by the image processing device 16 becomes 0, and the judgment width W of the irradiation area is made to coincide with the target judgment width W ₀ . Thus, the shape of the irradiation area of the electron beam 3 is controlled.

According to the above-described embodiment, the irradiation position and the irradiation region shape of the electron beam 3 on the surface of the evaporated material 2 can be controlled so as to match the preset target, and the electron beam 3 can be controlled in an optimum state.
Can be controlled. Regarding the control of the irradiation position of the electron beam, it is possible to control the acceleration voltage by operating the electron beam accelerator in the electron gun controller (not shown) of the electron gun 5. Further, in the configuration of the control device shown in FIG. 1, the electron beam irradiation position and the irradiation region shape are controlled to the target state, but it is not necessary to provide two control systems, and the irradiation position control It is sufficient to provide a system.

Further, in the explanation of the apparatus configuration according to the above-mentioned embodiment, the evaporation material 2
Although it has been described from the viewpoint of controlling the irradiation position of the electron beam 3 and the shape of the irradiation region on the surface, the control according to the present invention can control the trajectory of the electron beam 3 to be the target trajectory. However, in this case, the target to be detected by the X-ray two-dimensional detector 11 is not the X-rays radiated on the surface of the vaporized substance 2 and its vicinity, but the electrons and the vapor 4 collide on the orbit of the electron beam 3. Is configured to detect and measure X-rays generated by the image processing device 16 and
Also, target reference data for the electron beam must be stored.

A second embodiment of the electron gun heating type steam generator of the present invention will be described. 2, the same elements as those shown in FIG. 1 are designated by the same reference numerals. In this embodiment, the configuration of the detector is changed. In the X-ray two-dimensional detector 11 used in the above-mentioned embodiment, the detection elements are arranged in an array in two dimensions, whereas in the case of this embodiment, two detection elements 21A, I am using 21B. 22 is a detection element 21A, 21B
Is a slit member for inputting X-rays at predetermined expected positions. The slit member 22 defines the visual field 23A of the detection element 21A and the visual field 23B of the detection element 21B.
The detection signals output by the respective detection elements 22A and 22B are respectively X
It is processed by the line detector controllers 15A and 15B, and then input to the differential amplifier 24. Each of the X-ray detector control devices 15A and 15B has a field of view 2 of each of the corresponding detection elements 19A and 19B.
The signal of the X-ray radiation intensity detected by 3A and 23B can be obtained. The differential amplifier 24 takes the difference between the output signals of the detector control devices 15A and 15B and supplies this to the electron beam deflection coil control device 17 as an error signal. Here, if the respective visual fields 23A and 23B of the detection elements 21A and 21B are set symmetrically with respect to the target irradiation position, the error signal corresponds to the deviation of the irradiation position. The electron beam deflection coil controller 17 controls the operation of the electron beam deflection coil 6 based on this error signal. The control method is the same as that of the first embodiment, and the electron beam deflection coil 6 is operated so that the error signal becomes zero. Further, as in the case of the above embodiment, by providing the electron gun control device 25 as shown by the imaginary line in FIG. 2, the acceleration voltage of the electron beam accelerator is controlled to control the irradiation position of the electron beam. You can also do it. According to the present embodiment, the electron beam irradiation position on the surface of the evaporated material 2 can be controlled to the target position.

Further, in each of the above-described embodiments, the irradiation state of the electron beam is detected based on the spatial radiation intensity distribution of the X-rays or light generated on the surface of the vaporized substance 2 or in the region near the upper portion thereof, and the radiation position of the electron beam is detected. Although at least one of the radiation region shapes is configured to be controlled to a target state, the detection target is an X-ray or light generated by collision between vapor in the air and an electron beam, and is set as a target. It is also possible to adjust the electron beam trajectory by setting the reference information as the electron beam trajectory.

〔The invention's effect〕

As is apparent from the above description, according to the present invention, in the electron gun heating type steam generator, the spatial radiation intensity distribution of X-rays or light generated from the evaporant by the irradiation of the electron beam is detected to obtain the target. By presetting the information on the radiation position and the radiation area shape of the electron beam to be matched, the radiation position and the radiation area shape of the electron beam are made to match the target,
Optimal electron beam irradiation can be realized. Further, in the electron gun heating type steam generator according to the present invention, the trajectory of the electron beam can be controlled. It is also possible to control the emission position of the electron beam by detecting the symmetry with respect to the emission center position and adjusting so as to eliminate the deviation by using a simple detection element.

[Brief description of drawings]

FIG. 1 is a block diagram showing the first embodiment, FIG. 2 is a block diagram showing the second embodiment, FIG. 3 is a graph showing the deviation of the center position of the measured radiation intensity distribution, and FIG. 4 is the measurement. It is a graph which shows the difference of the shape of the radiated intensity distribution and the target shape. [Explanation of Codes] 1 …… Cut collar 2 …… Evaporation material 3 …… Electron beam 4 …… Steam 5 …… Electron gun 6 …… Electron beam deflection coil 7 …… Electrostatic lens 8 …… Evaporation chamber 10 …… Detector box 11 …… X-ray two-dimensional detector 12 …… Pinhole 15,15A, 15B …… Detector controller 16 …… Image processor 17 …… Deflecting coil controller 18 …… Electrostatic lens controller 21A , 21B …… Detecting element 22 …… Slit member 24 …… Differential amplifier 25 …… Electron gun controller

Claims (9)

[Claims] 1. An electron gun heating type steam generator for outputting an electron beam from an electron gun, and irradiating the electron beam onto an evaporated material to generate vapor by determining an irradiation position of the electron beam by an irradiation position setting means. In, in the evaporate is disposed at a position to look at the irradiation region of the electron beam,
Detecting means for detecting a spatial radiant intensity distribution of X-rays emitted from the vaporized material, and information on a target irradiation position with respect to the electron beam, and inputting a detection signal of the detecting means to input the target. Image processing means for obtaining the information on the difference between the irradiation positions and the irradiation position so that the difference between the irradiation positions obtained by the image processing means is 0 based on the information about the difference between the irradiation positions. An electron gun heating type steam generator comprising electron beam irradiation position control means for operating a setting means. 2. An electron beam is output from an electron gun, the irradiation position of this electron beam is determined by irradiation position setting means, and the irradiation area shape is determined by irradiation area shape setting means, so that the evaporation material is irradiated with the electron beam. In an electron gun heating-type vapor generator for generating vapor by means of an electron gun, the spatially radiant intensity distribution of X-rays radiated from the vaporized substance is detected at a position where the electron beam irradiation region of the vaporized substance is expected. The detection means, having information on the target irradiation position and irradiation area shape with respect to the electron beam, inputs the detection signal of the detection means and compares it with the target irradiation position and irradiation area shape to determine the irradiation position. The image processing means for obtaining each information of the difference and the difference of the irradiation area shape, and the illumination so that the difference of the irradiation position obtained by the image processing means becomes 0 based on the information of the difference of the irradiation position. The electron beam irradiation position control means for operating the position setting means, and the irradiation area shape setting means so that the difference between the irradiation area shapes obtained by the image processing means becomes 0 based on the information on the difference in the irradiation area shape. An electron gun heating type steam generator, comprising: an electron beam irradiation area shape control unit to be operated. 3. An electron gun heating type steam generator according to claim 2, wherein the irradiation area shape setting means is an electrostatic lens. 4. An electron gun heating type steam generator for outputting an electron beam from an electron gun, and irradiating the electron beam to an evaporate to generate vapor by determining an irradiation position of the electron beam by an irradiation position setting means. In the above, at least two detection elements arranged at positions where the irradiation area of the electron beam in the evaporate is expected and a slit member that defines the observation area of each detection element are provided, and the observation area of each detection element is The X-ray detection means set at symmetrical positions with respect to the target electron beam irradiation position in the direction of controlling the electron beam, and the detection signals of the respective detection elements of the X-ray detection means are input to determine the intensity of the detection signal. Differential amplification means for obtaining information on the irradiation position variation of the electron beam, and so that the irradiation position variation obtained by the differential amplification means becomes zero based on the information on the irradiation position variation. Serial irradiation position setting means electron gun heating type steam generator, characterized in that it comprises an electron beam irradiation position control means for operating the. 5. The electron gun heating type steam generator according to claim 1, wherein the X-ray detected by the detecting means is a braking X-ray. Gun heated steam generator. 6. The electron gun heating type steam generator according to claim 1, wherein instead of the X-rays emitted from the vaporized substance, the X-rays emitted from the vapor by excitation by an electron beam in an electron beam orbit. Of the electron beam trajectory from the measured radiation intensity distribution by measuring the spatial radiation intensity distribution of the electron beam trajectory, and the electron beam trajectory by the image processing means, the electron beam irradiation position control means, and the irradiation position setting means. An electron gun heating type steam generator characterized by controlling the. 7. The electron gun heating type vapor generator according to claim 1, wherein the irradiation position setting means is an electron beam deflector. Heating type steam generator. 8. The electron gun heating type steam generator according to claim 1, wherein the irradiation position setting means is an electron beam accelerator. Heating type steam generator. 9. The electron gun heating type steam generator according to claim 1, wherein a detecting means for detecting light is used instead of the detecting means for detecting the X-ray. Electron gun heating type steam generator.