JPH079402Y2 - エキシマレ−ザ装置 - Google Patents
エキシマレ−ザ装置Info
- Publication number
- JPH079402Y2 JPH079402Y2 JP1986161820U JP16182086U JPH079402Y2 JP H079402 Y2 JPH079402 Y2 JP H079402Y2 JP 1986161820 U JP1986161820 U JP 1986161820U JP 16182086 U JP16182086 U JP 16182086U JP H079402 Y2 JPH079402 Y2 JP H079402Y2
- Authority
- JP
- Japan
- Prior art keywords
- excimer laser
- electrode
- laser device
- carbon content
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986161820U JPH079402Y2 (ja) | 1986-10-21 | 1986-10-21 | エキシマレ−ザ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986161820U JPH079402Y2 (ja) | 1986-10-21 | 1986-10-21 | エキシマレ−ザ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6367275U JPS6367275U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-05-06 |
| JPH079402Y2 true JPH079402Y2 (ja) | 1995-03-06 |
Family
ID=31088492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986161820U Expired - Lifetime JPH079402Y2 (ja) | 1986-10-21 | 1986-10-21 | エキシマレ−ザ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH079402Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4370175A (en) * | 1979-12-03 | 1983-01-25 | Bernard B. Katz | Method of annealing implanted semiconductors by lasers |
| JPS6190485A (ja) * | 1984-10-09 | 1986-05-08 | Mitsubishi Electric Corp | パルスレ−ザ発振器 |
-
1986
- 1986-10-21 JP JP1986161820U patent/JPH079402Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6367275U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-05-06 |
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