JPH079380Y2 - 半導体ウェハー検査装置 - Google Patents

半導体ウェハー検査装置

Info

Publication number
JPH079380Y2
JPH079380Y2 JP12223389U JP12223389U JPH079380Y2 JP H079380 Y2 JPH079380 Y2 JP H079380Y2 JP 12223389 U JP12223389 U JP 12223389U JP 12223389 U JP12223389 U JP 12223389U JP H079380 Y2 JPH079380 Y2 JP H079380Y2
Authority
JP
Japan
Prior art keywords
performance board
test head
semiconductor wafer
prober
wafer inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12223389U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0361339U (enExample
Inventor
昭夫 塚原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP12223389U priority Critical patent/JPH079380Y2/ja
Publication of JPH0361339U publication Critical patent/JPH0361339U/ja
Application granted granted Critical
Publication of JPH079380Y2 publication Critical patent/JPH079380Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP12223389U 1989-10-20 1989-10-20 半導体ウェハー検査装置 Expired - Lifetime JPH079380Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12223389U JPH079380Y2 (ja) 1989-10-20 1989-10-20 半導体ウェハー検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12223389U JPH079380Y2 (ja) 1989-10-20 1989-10-20 半導体ウェハー検査装置

Publications (2)

Publication Number Publication Date
JPH0361339U JPH0361339U (enExample) 1991-06-17
JPH079380Y2 true JPH079380Y2 (ja) 1995-03-06

Family

ID=31670243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12223389U Expired - Lifetime JPH079380Y2 (ja) 1989-10-20 1989-10-20 半導体ウェハー検査装置

Country Status (1)

Country Link
JP (1) JPH079380Y2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007322372A (ja) * 2006-06-05 2007-12-13 Yokogawa Electric Corp Ｉｃテスタ
JP5277827B2 (ja) * 2008-09-22 2013-08-28 東京エレクトロン株式会社 プローブ装置
JP4746153B1 (ja) * 2010-12-27 2011-08-10 忠 岩田 揺動式介護ベッド装置

Also Published As

Publication number Publication date
JPH0361339U (enExample) 1991-06-17

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