JPH0791712A - Controlling equipment of room temperature of clean room - Google Patents

Abstract

PURPOSE:To obtain controlling equipment of a room temperature of a clean room which can control the room temperature of the clean room to be a set temperature without consuming an unnecessary carrying power in the case when a thermal load of the clean room is small. CONSTITUTION:An indoor temperature Ti is detected by a room temperature sensor 45, and an output frequency of an inverter 35i is changed to adjust the quantity of circulating air in the case when a cold water valve 40 or a hot water valve 41 is fully opened when there is a difference between the indoor temperature Ti and a set temperature To, while the opening of the cold water valve 40 or the hot water valve 41 is regulated in the case when the cold water valve 40 or the hot water valve 41 is not fully opened. Thereby the indoor temperature Ti of a clean room 32 is controlled to be the set temperature To.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a room temperature control device for a clean room which controls the room temperature of the clean room so as to keep it at a preset temperature.

[0002]

2. Description of the Related Art For example, in a clean room in which a semiconductor manufacturing apparatus is installed, in order to maintain the accuracy of a semiconductor manufactured by the semiconductor manufacturing apparatus, the room temperature of the clean room is kept at a constant temperature. And, it is necessary to maintain the cleanliness of the clean room. Here, in order to maintain the cleanliness, it is necessary to replace the air in the clean room, and the amount of air replaced in a unit time is defined as the circulating air flow (m ³ / h). Circulating air volume was decided.

That is, the circulating air volume is obtained by back-calculating from the heat load calculation of the device installed in the clean room, while the circulating air volume for maintaining the cleanliness is obtained, and the larger of the two circulating air volumes is obtained. One was set as the circulating air flow rate, and this circulating air flow rate was kept constant, and the apparatus shown in FIG. 7 kept the room temperature of the clean room at a constant temperature and maintained the cleaning degree.

A conventional room temperature control device for a clean room will be described below with reference to FIGS. In FIG. 7, 11 is a duct for introducing outside air. The duct 11 is joined with a circulation duct 13 that guides the air circulated from the clean room 12 on the way, and is then connected to a room temperature controller 14.

In the room temperature control unit 14, the duct 11 is connected to the suction port of the blower fan 15, and the cooling coil 1 goes downstream from the discharge port of the fan 15.
6 and the heating coil 17 are installed in this order.

Cold water (for example, 7 ° C.) supplied through the pipe 18 is introduced into the cooling coil 16, and hot water (for example, 7 ° C.) is supplied through the pipe 19 to the heating coil 17 (for example,
40 ° C) has been introduced.

A cold water valve 20 for controlling the amount of cold water to be supplied is provided in the middle of the pipe 18, and a hot water valve 21 for controlling the amount of hot water to be supplied is provided in the middle of the pipe 19. The openings of the cold water valve 20 and the hot water valve 21 are the controller 22.
It is controlled continuously by the signal from. This cold water valve 20
By increasing or decreasing the opening degree of the hot water valve 21 and the pipe 18
It is possible to independently increase or decrease the amount of cold water and the amount of hot water supplied via 19 and 19, respectively. For example, if the opening degree of the cold water valve 20 is increased / decreased, the amount of cold water supplied via the pipe 18 is increased / decreased, so that the air blown from the outlet of the fan 15 (that is, from the outside air and the clean room 12). The degree of cooling the mixed air of the circulating air) increases or decreases. Further, if the opening degree of the hot water valve 21 is increased or decreased, the piping 19
Since the amount of hot water circulating through the fan increases and decreases, the air blown out from the blowout port of the fan 15 (that is, the outside air and the cleaner).
The degree to which the air mixed with the circulating air from the room 12 is heated increases or decreases.

The air supplied from the room temperature adjusting section 14 is blown into the clean room 12 through the duct 23 and the blow-out port 24 provided at the ceiling of the clean room 12.

A room temperature sensor 25 for detecting the room temperature Ti of the clean room 12 is installed in the clean room 12, and the room temperature Ti detected by the temperature sensor 25 is as described above. It is output to the controller 22.

By the way, the controller 22 is mainly composed of a microcomputer, and has a clear structure.
The operating unit for setting the set temperature To of the room 12 is provided, and the memory for storing the control program shown in the flowchart of FIG. 8 is provided.

Next, the operation will be described with reference to the flowchart of FIG. First, the room temperature Ti of the clean room 12 detected by the room temperature sensor 25 is controlled.
It is read by LA 22 (step S1) and this room temperature T
It is determined whether i is higher or lower than the set temperature To (step S2).

In step S2, the "indoor temperature Ti
Is higher than the set temperature To ”, the opening degree of the cold water valve 20 is adjusted by a signal from the controller 22 (step S3).

On the other hand, in step S2, the "indoor temperature T
When it is determined that “i is lower than the set temperature To”, the opening degree of the hot water valve 21 is adjusted by the signal from the controller 22 (step S4).

If it is determined that "the room temperature Ti is equal to the set temperature To", the steps S3 and S4 are skipped and the process returns to the step S1. In this way, the opening degree of the cold water valve 20 or the hot water valve 21 is controlled depending on whether or not the room temperature Ti is higher than the set temperature To, and the fan that obtains the circulating air volume described above by rotating at a constant rotation speed. Fresh air and clean air sent from 15
The circulating air from the chamber 12 is cooled by the cooling coil 16, heated by the heating coil 17, and then blown into the clean room 12. The amount of air cooled in the cooling coil 16 is proportional to the opening of the cold water valve 20, the amount of air heated in the heating coil 17 is proportional to the opening of the hot water valve 21, and the indoor temperature Ti is In order to maintain the room temperature Ti at the set temperature To as shown in FIG. 9 by controlling the opening degree of the cold water valve 20 or the hot water valve 21 according to the comparison between the room temperature Ti and the set temperature To by performing a feedback. Have control over.

[0015]

However, the conventional clear
The room temperature control device of the room determines the circulating air volume as described above, controls the rotation of the fan 15 at a constant rotational speed to obtain this circulating air volume, and controls the opening degree of the cold water valve 20 or the hot water valve 21. As a result, the room temperature Ti is controlled to reach the set temperature To.

Therefore, even if the heat load on the clean room 12 is small, the circulating air volume is constant, so that there is a problem that the transport power is unnecessarily consumed by obtaining an unnecessarily large circulating air volume. It was

The present invention has been made in view of the above points, and an object thereof is to keep room temperature of the clean room without consuming unnecessary carrying power when the clean load of the clean room is small. It is an object of the present invention to provide a room temperature control device of a clean room which can control a set temperature.

[0018]

SUMMARY OF THE INVENTION The present invention is directed to outside air and clean.
After mixing the circulating air from the room through the fan,
A room temperature control device for the clean room, which is appropriately cooled by a cooling coil or heated by a heating coil, and then blown to the clean room to control the room temperature Ti of the clean room at a set temperature To. In, a cold water valve for controlling the amount of cold water supplied to the cooling coil, a hot water valve for controlling the amount of hot water supplied to the heating coil, and the rotation speed N of the fan
Rotation speed varying means for controlling f, temperature detecting means for detecting the room temperature Ti of the clean room, and comparing means for comparing the room temperature Ti detected by the temperature detecting means with the set temperature To. And the indoor temperature Ti
Is higher than the set temperature To, if the chilled water valve is fully opened, the rotation speed varying means controls the rotation speed of the fan to control the amount of air blown to the clean room. The first temperature control means for controlling the room temperature of the clean room by means of the above, and the room temperature Ti by means of the comparison means.
Is higher than the set temperature To, if the chilled water valve is not fully opened, the opening degree of the chilled water valve is controlled to control the amount of chilled water flowing through the cooling coil, thereby controlling the interior of the clean room. When the room temperature Ti is lower than the set temperature To by the second temperature control means for controlling the temperature and the comparison means, if the hot water valve is fully opened, the rotation speed varying means causes the fan speed of the fan to change. Third temperature control means for controlling the room temperature of the clean room by controlling the rotation speed to control the amount of air blown to the clean room, and the room temperature Ti is set to the set temperature To by the comparing means. If it is determined that the temperature is lower, the indoor temperature of the clean room is controlled by controlling the opening degree of the warm water valve to control the amount of warm water flowing through the warm water coil unless the warm water valve is fully opened. Fourth temperature control hand It is composed of a.

[0019]

The present invention is configured as described above, and when there is a difference between the room temperature Ti and the set temperature To and the cold water valve or the hot water valve is fully opened, the air volume is adjusted, and the cold water valve or the hot water valve is adjusted. When is not fully opened, the indoor temperature of the clean room is controlled by adjusting the opening degree of the cold water valve or the hot water valve.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A room temperature control device for a clean room according to a first embodiment of the present invention will be described below with reference to the drawings.
FIG. 1 is a block diagram showing the construction of a room temperature control device for a clean room, and FIG. 2 is a flow chart showing the operation of the first embodiment.

In FIG. 1, reference numeral 31 is a duct for introducing outside air. This duct 31 is clean
After being joined with a circulation duct 33 that guides the air that has been circulated from the frame 32, it is connected to a room temperature control unit 34.

In the room temperature control section 34, the duct 31 is connected to the suction port of the blower fan 35, and the cooling coil 3 goes downstream from the blowout port of the fan 35.
6. The heating coil 37 is installed in this order. The rotation frequency of the fan 35 is controlled by the inverter 35i. That is, the rotation frequency of the fan 35 is controlled by the output frequency of the inverter 35i.

Cold water (for example, 7 ° C.) supplied through the pipe 38 is introduced into the cooling coil 36, and hot water (for example, 7 ° C.) is supplied through the pipe 39 to the heating coil 37 (for example,
40 ° C) has been introduced.

A cold water valve 40 for controlling the amount of cold water to be supplied is provided in the middle of the pipe 38, and a hot water valve 41 for controlling the amount of hot water to be supplied is provided in the middle of the pipe 39. The openings of the cold water valve 40 and the hot water valve 41 are the controller 42.
It is controlled continuously by the signal from. This cold water valve 40
By increasing or decreasing the opening degree of the hot water valve 41 and the pipe 38
It is possible to independently increase or decrease the amount of cold water and the amount of hot water supplied via 39 and 39, respectively. For example, if the opening degree of the cold water valve 40 is increased / decreased, the amount of cold water supplied through the pipe 38 is increased / decreased, so that the air blown out from the blowout port of the fan 35 (that is, the outside air and the clean room 32). The degree of cooling the air mixed with the circulating air) increases or decreases. Further, if the opening degree of the hot water valve 41 is increased or decreased, the amount of hot water supplied through the pipe 39 is increased or decreased, so that the air blown out from the outlet of the fan 35 (that is, the outside air and the clean room 32) is discharged. The degree to which (air mixed with circulating air) is heated increases or decreases.

The air supplied from the room temperature adjusting section 34 is blown into the clean room 32 through the duct 43 and the blow-out port 44 provided at the ceiling of the clean room 42.

A room temperature sensor 45 for detecting the room temperature Ti of the clean room 32 is installed in the clean room 32. The room temperature Ti detected by the temperature sensor 45 is as described above. It is output to the controller 42.

By the way, the controller 42 is mainly composed of a microcomputer, and has a clear structure.
An operating unit for setting the set temperature To of the room 32 is provided, and a memory for storing the control program shown in the flowchart of FIG. 8 is provided.

Next, the operation of the first embodiment of the present invention constructed as above will be described with reference to FIG. First, the room temperature Ti of the clean room 32 detected by the room temperature sensor 45.
(Step S11), room temperature Ti and set temperature T
It is compared and judged with o (step S12).

In the determination of step S12, "Ti>T"
If it is determined to be "o", it is determined whether the cold water valve 40 is fully opened (step S13). If the determination in step S13 is "YES", the inverter 3
The output frequency of 5i is increased or decreased and the fan 35
The circulation speed is controlled to increase or decrease by increasing or decreasing the rotation speed of (No. 1) (first temperature control means) (step S14). In this way, the cold water valve 40
Is fully open, the temperature of the clean room 32 is adjusted by increasing / decreasing the amount of circulating air.

On the other hand, if "NO" is determined in the determination in step S13, the opening degree of the cold water valve 40 is adjusted and the amount of cold water supplied via the cooling coil 36 is controlled to be increased / decreased. Temperature control means) (step S15).

By the way, if "Ti <To" is determined in the determination in step S12, it is determined whether the hot water valve 41 is fully opened (step S16). If "YES" is determined in the determination in step S16, the output frequency of the inverter 35i is increased or decreased to control the rotation speed of the fan 35 to increase or decrease, thereby increasing or decreasing the circulating air volume. It is controlled (third temperature control means) (step S17). In this way, when the hot water valve 41 is fully opened, the circulating air volume is increased or decreased to adjust the temperature of the clean room 32.

On the other hand, if "NO" is determined in the determination in step S16, the opening degree of the hot water valve 41 is adjusted and the amount of cold water supplied via the heating coil 37 is controlled to be increased / decreased (fourth). Temperature control means) (step S18). Thus, when the cold water valve 40 is fully opened, the temperature of the clean room 32 is adjusted by increasing or decreasing the circulating air flow rate.

As described above, when there is a difference between the indoor temperature Ti and the set temperature To and the cold water valve or the hot water valve is fully opened, the air volume is adjusted, and when the cold water valve or the hot water valve is not fully opened. The indoor temperature of the clean room is controlled by adjusting the opening degree of the cold water valve or the hot water valve.

Next, a room temperature control device for a clean room according to a second embodiment of the present invention will be described. The second embodiment has the same configuration as that of FIG.
2 stores the control program shown in FIGS. 3 and 4.

Next, the operation of the second embodiment of the present invention will be described with reference to FIGS. First, as initialization, areas A to D in the memory of the controller 42 are cleared to zero (step S21). Then, the room temperature Ti detected by the room temperature sensor 45 is read (step S22), and the room temperature Ti and the set temperature To are compared and determined (first comparing means) (step S23). When it is determined in step S23 that "Ti>To", the difference A between the room temperature Ti and the set temperature To is calculated (step S24).

Then, in step S25, A and B
And are compared and determined (second comparing means). Here, B is the room temperature Ti and the set temperature To calculated in the previous control cycle.
And B is set to "0" which is set by the initial setting when the step S25 is first reached.

Therefore, since "A>0","A≥B" is determined in the determination in step S25, and step S26
Go to judgment of. In this step S26, the cold water valve 4
Determine whether 0 is fully open. This step S2
If the result of the determination of 6 is "YES", the invert
The output frequency of the fan 35i is increased and the rotation speed of the fan 35 is increased, whereby the circulating air flow is increased (third temperature control means) (step S27). In this way, when the cold water valve 40 is fully opened, the amount of circulating air is increased to adjust the temperature of the clean room 32.

On the other hand, when the result of the determination in step S26 is "NO", the opening degree of the cold water valve 40 is adjusted and the amount of cold water supplied to the cooling coil 36 via the pipe 38 is controlled to be increased ( Fourth temperature control means) (step S2)
8).

By the way, in the determination of step S25, "A <
When it is determined to be "B", it is determined whether or not the circulation air volume sent by the rotation of the fan 35 has become the minimum circulation air volume (step S29). Here, this minimum circulating air volume is set to the minimum circulating air volume necessary to maintain the cleanliness of the clean room 32, and the inverter 2
When the output frequency of 5i reaches the set frequency, it is determined to be the minimum circulating air volume.

If "NO" is determined in the step S29, the circulation frequency is reduced by reducing the rotation speed of the fan 35 by controlling the output frequency of the inverter 35i. (First temperature control means) (step S30).

On the other hand, "YES" in the determination in step S29
When it is determined that the opening degree of the cold water valve 40 is adjusted, the amount of cold water supplied to the cooling coil 36 through the pipe 38 is controlled to be reduced (second temperature control means) (step S3).
1).

Then, the above-mentioned steps S27 and S2.
8. After the processes of Steps S30 and S31, the difference A between the room temperature Ti and the set temperature To is set to B (Step S3).
2). As a result, the room temperature T in the previous control cycle
The difference between i and the set temperature To is stored in B.

By the way, in step S23, "Ti
If it is determined to be <To, the set temperature To and the room temperature T
The difference C from i is calculated (step S33). Then, in step S34, C and D are compared and determined. Here, D is the set temperature To calculated in the previous control cycle.
Means the difference between room temperature Ti and room temperature Ti, and when this step S34 is reached for the first time, D is "0" which is set by the initial setting.
Is set to.

Therefore, since "C>0","C≥D" is determined in the determination in step S34, and step S35 is performed.
Go to judgment of. In this step S35, the hot water valve 4
It is determined whether 1 is fully open. This step S3
If the result of judgment 5 is "YES", the
The output frequency of the fan 35i is increased and the rotation speed of the fan 35 is increased, whereby the circulating air volume is increased (seventh temperature control means) (step S36). In this way, when the hot water valve 41 is fully opened, the circulating air volume is increased to adjust the temperature of the clean room 32.

On the other hand, when the result of the determination in step S36 is "NO", the opening of the hot water valve 41 is adjusted and the amount of hot water supplied to the heating coil 37 via the pipe 39 is controlled to be increased ( Eighth temperature control means) (step S3)
7).

By the way, in the determination of step S34, "C <
When it is determined to be "D", it is determined whether the circulation air volume sent by the rotation of the fan 35 has become the minimum circulation air volume (step S38).

If "NO" is determined in this step S38, the circulation frequency is reduced by reducing the output frequency of the inverter 35i to reduce the rotation speed of the fan 35. (Fifth temperature control means) (step S39).

On the other hand, "YES" in the determination in step S38.
If it is determined that the opening of the hot water valve 41 is adjusted, the amount of hot water supplied to the heating coil 37 via the pipe 39 is controlled to be reduced (sixth temperature control means) (step S4).
0).

Then, the above-mentioned steps S36 and S3.
7, after the processing of steps S39 and S40, set temperature T
The difference C between o and room temperature Ti is set to D (step S4).
1). As a result, the difference between the set temperature To and the room temperature Ti in the previous control cycle is stored in D.

That is, in the region where the heat load is larger than Qo, the temperature is controlled by increasing / decreasing the circulating air amount as shown by the arrow A, and in the region where the heat load is smaller than Qo, the circulating air amount is constant (cleaning degree is To maintain the minimum necessary amount of circulating air), as shown in FIG.
When i is higher than the set temperature To, the opening degree of the cold water valve 40 is controlled, and when the room temperature Ti is lower than the set temperature To, the opening degree of the hot water valve 41 is controlled to control the temperature. There is. For example, if the circulating air volume that was conventionally constant is the air volume shown by C in FIG. 5, temperature control can be performed with a circulating air volume that is smaller than in the conventional case in the low heat load region of the D region, and therefore unnecessary conveyance power is required. It is possible to control the room temperature of the clean room to a set temperature without consuming.

Further, the previous room temperature Ti and the set temperature T
The difference with o is stored for each control cycle, and the difference A (= Ti-To) tends to increase (A> B) and decreases (A <B). By making the control different, it is possible to perform fine temperature control.

Similarly, the difference between the previous set temperature To and the room temperature Ti is stored for each control cycle, and the difference C (= To-Ti) tends to increase (C>
Fine temperature control can be performed by differentiating the temperature control between the case of D) and the decreasing tendency (C <D). In the above embodiment, the cold water supplied through the pipe 38 or the hot water supplied through the pipe 39 may not be water but may be a cold fluid or a warm fluid.

[0053]

As described above in detail, according to the present invention, when the heat load of the clean room is small, the rotation speed of the fan is required to maintain the cleanliness of the clean room. Since the minimum number of rotations required to achieve a sufficient amount of circulating air is set, the room temperature of the clean room can be controlled to the set temperature without consuming unnecessary carrier power.
A room temperature room temperature control device can be provided.

[Brief description of drawings]

FIG. 1 is a cleaning rule common to the first and second embodiments.
FIG. 3 is a block diagram showing the configuration of a room temperature control device for a computer.

FIG. 2 is a flowchart showing the operation of the first embodiment.

FIG. 3 is a part of a flowchart showing the operation of the second embodiment.

FIG. 4 is a part of a flowchart showing the operation of the second embodiment.

FIG. 5 is a diagram showing the relationship between the heat load of the clean room and the amount of circulating air.

FIG. 6 is a diagram showing room temperature Ti, the opening degree of a cold water valve or a hot water valve, and an inverter rotation speed.

FIG. 7 is a block diagram showing the configuration of a conventional room temperature control device for a clean room.

FIG. 8 is a flowchart showing the operation of the conventional device.

FIG. 9 is a diagram showing an operation of a conventional device.

[Explanation of symbols]

31 ... Duct, 32 ... Clean room, 33 ... Circulation duct, 34 ... Room temperature adjusting part, 35 ... Fan, 35i ... Inverter, 36 ... Cooling coil, 37 ... Heating coil, 38, 3
9 ... Piping, 40 ... Cold water valve, 41 ... Hot water valve, 42 ... Controller.

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Isao Konno 2-25-2 Kandasuda-cho, Chiyoda-ku, Tokyo 2 Toshiba Air Conditioning Co., Ltd. (72) Inventor Yoshiaki Arai 2-25-2 Kandasuda-cho, Chiyoda-ku, Tokyo In Toshiba Air Conditioning Co., Ltd. (72) Inventor Mitsuro Harada 4-4-2 Nihonbashi Honishicho, Chuo-ku, Tokyo Inside Nihonbashi Air-conditioning Co., Ltd. (72) Inventor Akira Sumida 4-4-2 Nihonbashi Honishicho, Chuo-ku, Tokyo No. Shin-Nippon Air Conditioning Co., Ltd. (72) Inventor Toshio Sasaki 1-1-1, Shibaura, Minato-ku, Tokyo Inside Toshiba Head Office

Claims (4)

[Claims] 1. A fresh air and a circulating air from a clean room are mixed by a fan, and then cooled by a cooling coil or heated by a heating coil, and then blown to the clean room to clean the room. In a room temperature controller of a clean room for controlling the temperature of the room temperature Ti of the room to keep the set temperature To, a cold water valve for controlling the quantity of cold water supplied to the cooling coil, and a quantity of hot water supplied to the heating coil. A hot water valve for controlling the rotation speed, a rotation speed varying means for controlling the rotation speed Nf of the fan, a temperature detecting means for detecting the indoor temperature Ti of the clean room, and an indoor temperature detected by the temperature detecting means. If the indoor temperature Ti is judged to be higher than the set temperature To by the comparing means for comparing Ti with the set temperature To, and if the cold water valve is fully opened, the rotation speed varying means is used. By controlling the rotation speed of the fan to control the amount of air blown to the clean room.
When the room temperature Ti is higher than the set temperature To by the first temperature control means for controlling the room temperature of the room and the comparison means, if the cold water valve is not fully opened, the cold water valve If the indoor temperature Ti is lower than the set temperature To by the second temperature control means for controlling the indoor temperature of the clean room by controlling the opening degree to control the amount of cold water flowing in the cooling coil, If it is determined, if the hot water valve is fully opened, the rotation speed varying means controls the rotation speed of the fan to control the amount of air blown to the clean room.
When the room temperature Ti is lower than the set temperature To by the third temperature control means for controlling the room temperature of the room and the comparison means, if the hot water valve is not fully opened, the hot water valve The room temperature of the clean room is provided with a fourth temperature control means for controlling the room temperature of the clean room by controlling the opening degree to control the amount of hot water flowing through the hot water coil. Control device. 2. The outside air and the circulating air from the clean room are mixed through a fan, and then are appropriately cooled by a cooling coil or heated by a heating coil and then blown to the clean room to clean the room. In a room temperature controller of a clean room for controlling the temperature of the room temperature Ti of the room to keep the set temperature To, a cold water valve for controlling the quantity of cold water supplied to the cooling coil, and a quantity of hot water supplied to the heating coil. A hot water valve for controlling the rotation speed, a rotation speed varying means for controlling the rotation speed Nf of the fan, a temperature detecting means for detecting the indoor temperature Ti of the clean room, and an indoor temperature detected by the temperature detecting means. The first comparison means for comparing Ti with the set temperature To and the first comparison means change the room temperature Ti to the set temperature To.
When it is determined that the difference is larger than the difference, the deviation A between the room temperature Ti and the set temperature To and the deviation B between the room temperature Ti and the set temperature To in the previous control cycle are compared. When the deviation A is determined to be smaller than the deviation B in the previous control cycle by the comparison means 2 and the rotation speed Nf of the fan is larger than the set rotation speed No, the rotation speed varying means changes the rotation speed of the fan. If the deviation A is smaller than the deviation B in the previous control cycle by the first temperature control means for controlling the indoor temperature of the clean room by performing the reduction control to reduce the air flow rate, and the second comparison means. If it is determined and the rotation speed Nf of the fan reaches the set rotation speed No, control is performed to reduce the opening degree of the cold water valve to reduce the amount of cold water flowing to the cooling coil. If the deviation A is judged to be larger than the deviation B in the previous control cycle by the second temperature control means for controlling the indoor temperature of the clean room and the second comparison means, and the cold water valve is If it is fully opened, a third temperature control means for controlling the indoor speed of the clean room by controlling the rotation speed of the fan by the rotation speed varying means, and the deviation A by the second comparison means last time. If it is determined that the deviation is larger than the deviation B in the control cycle and the cold water valve is not fully opened, the fourth temperature control for controlling the indoor temperature of the clean room by increasing the opening degree of the cold water valve. Means and the first comparing means, the room temperature Ti is set to the set temperature To.
Third comparing means for comparing the deviation C between the set temperature To and the room temperature Ti and the deviation D between the set temperature To and the room temperature Ti in the previous control cycle when it is determined to be lower. If the deviation C is determined to be smaller than the deviation D in the previous control cycle by the comparison means 3 and the rotation speed Nf of the fan is larger than the set rotation speed No, the rotation speed varying means changes the rotation speed of the fan. If the deviation C is smaller than the deviation D in the previous control cycle by the fifth temperature control means for controlling the indoor temperature of the clean room by reducing the air flow rate and the third comparison means. If it is determined and the rotation speed Nf of the fan reaches the set rotation speed No, control is performed to reduce the opening degree of the hot water valve to reduce the amount of hot water flowing to the hot water coil. If the deviation C is judged to be larger than the deviation D in the previous control cycle by the sixth temperature control means for controlling the indoor temperature of the recleaning room and the third comparison means, and the hot water valve is If it is fully open, the rotation speed varying means controls the rotation speed of the fan to control the indoor temperature of the clean room, and the third comparing means causes the deviation C to be the last time. Eighth temperature control for controlling the room temperature of the clean room by increasing the opening degree of the hot water valve when it is determined that the deviation is larger than the deviation D in the control cycle and the hot water valve is not fully opened. A room temperature control device for a clean room, comprising: 3. The cleaner according to claim 2, wherein the set number of revolutions is a number of revolutions required to obtain a circulating air flow required to maintain the cleanliness of the cleaner. −
Room temperature control device. 4. The rotation speed varying means is an inverter for driving the fan, and is required to maintain the cleanliness of the cream by setting the frequency of the inverter to a set frequency. 3. The room temperature control device for a clean room according to claim 2, wherein the minimum rotation number of the fan required to obtain a sufficient amount of circulating air is obtained.