JPH0766248A - Thermocompression bonding device for electronic part - Google Patents
Thermocompression bonding device for electronic partInfo
- Publication number
- JPH0766248A JPH0766248A JP21365293A JP21365293A JPH0766248A JP H0766248 A JPH0766248 A JP H0766248A JP 21365293 A JP21365293 A JP 21365293A JP 21365293 A JP21365293 A JP 21365293A JP H0766248 A JPH0766248 A JP H0766248A
- Authority
- JP
- Japan
- Prior art keywords
- pieces
- pressing force
- thermocompression
- thermocompression bonding
- member pieces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3511—Warping
Landscapes
- Wire Bonding (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、フィルムキャリヤを打
抜いて製造された電子部品のリードを基板の電極に熱圧
着してボンディングするための電子部品の熱圧着装置に
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermocompression bonding apparatus for electronic components, which is used to bond the leads of an electronic component manufactured by punching a film carrier to the electrodes of a substrate by thermocompression bonding.
【0002】[0002]
【従来の技術】電子部品として、TAB(Tape A
utomated Bonding)法により製造され
るものが知られている。TAB法とは、合成樹脂フィル
ムにより作られたフィルムキャリヤの上面にリードやチ
ップを貼着し、リード部分を金型により打抜いて電子部
品を製造する方法である。2. Description of the Related Art As electronic parts, TAB (Tape A
Those manufactured by the automated bonding method are known. The TAB method is a method in which a lead or a chip is attached to the upper surface of a film carrier made of a synthetic resin film, and the lead portion is punched with a mold to manufacture an electronic component.
【0003】TAB法により作られた電子部品を基板に
搭載する方法としては、熱圧着子によりリードを基板の
電極に押し付けて熱圧着する方法が知られている。As a method for mounting an electronic component manufactured by the TAB method on a substrate, a method is known in which a lead is pressed against an electrode on the substrate by a thermocompression bonding element to perform thermocompression bonding.
【0004】図11は従来の電子部品の熱圧着装置の要
部斜視図である。この熱圧着装置は、熱圧着子1と受体
2から成っている。熱圧着子1は、4個の部材片11,
12,13,14から成る4角形の枠体10を主体とし
ている。この枠体10の互いに対向する2つの部材片1
2,14の中央部上には柱体16,17が結合されてお
り、柱体16,17の上部には水平なアーム18,19
が形成されている。このアーム18,19が図示しない
熱圧着ヘッドの本体に取り付けられ、またこのアーム1
8,19や柱体16,17を通じて、4個の部材片11
〜14に電流が流される(破線矢印参照)。電流が流さ
れると、これらの部材片11〜14は内部抵抗により発
熱する。また部材片11〜14の下面にはダイヤモンド
などの摩擦係数の小さい超硬片15が装着されている。
この超硬片15は、部材片11〜14の摩耗を防止する
とともに、伝熱性を向上させる。FIG. 11 is a perspective view of a main part of a conventional thermocompression bonding apparatus for electronic parts. This thermocompression bonding apparatus comprises a thermocompression bonding element 1 and a receiving body 2. The thermocompressor 1 has four member pieces 11,
The main body is a quadrangular frame body 10 composed of 12, 13, and 14. Two member pieces 1 of this frame body 10 facing each other
Columns 16 and 17 are connected to the central portions of the rods 2 and 14, and horizontal arms 18 and 19 are provided above the columns 16 and 17, respectively.
Are formed. The arms 18 and 19 are attached to the body of a thermocompression bonding head (not shown), and the arm 1
4 pieces 11 through 8 and 19 and columns 16 and 17
A current is passed through -14 (see dashed arrow). When a current is applied, these member pieces 11-14 generate heat due to internal resistance. Further, a cemented carbide piece 15 having a small friction coefficient, such as diamond, is attached to the lower surface of each of the member pieces 11 to 14.
The superhard pieces 15 prevent wear of the member pieces 11 to 14 and improve heat transfer properties.
【0005】受体2は、基台20の上面に4個のリブ片
21,22,23,24を突設して構成されている。上
記部材片11〜14が押し付けられるように、リブ片2
1〜24は4角形の枠型に形成されている。The receiving body 2 is constructed by projecting four rib pieces 21, 22, 23, 24 on the upper surface of the base 20. The rib pieces 2 are pressed so that the member pieces 11 to 14 are pressed.
1 to 24 are formed in a rectangular frame shape.
【0006】3はTAB法により製造された電子部品で
あって、フィルムキャリヤ31上にリード32とチップ
33を貼着して作られている。4は基板であり、その電
極41にリード32を熱圧着してボンディングする。Reference numeral 3 denotes an electronic component manufactured by the TAB method, which is made by attaching a lead 32 and a chip 33 on a film carrier 31. Reference numeral 4 denotes a substrate, and the lead 32 is bonded to the electrode 41 by thermocompression bonding.
【0007】図12は押圧中の正面図、図13は同側面
図である。受体2の各リブ片21〜24上に基板4と電
子部品3を搭載し、図示しない手段により熱圧着子1を
下降させることにより、各部材片11〜14をリード3
2に押し付けるとともに、電流を流して発熱させてリー
ド32を電極41にボンディングする。FIG. 12 is a front view during pressing, and FIG. 13 is a side view of the same. The board 4 and the electronic component 3 are mounted on the rib pieces 21 to 24 of the receiving body 2, and the thermocompressor 1 is lowered by a means (not shown), so that the member pieces 11 to 14 are connected to the leads 3.
While being pressed against 2, the lead 32 is bonded to the electrode 41 by applying an electric current to generate heat.
【0008】[0008]
【発明が解決しようとする課題】ところが上記従来手段
には、次のような問題点があった。すなわち、押圧力は
柱体16,17を介して各部材片11〜14に伝達され
るので、図12において鎖線Aで示すように、部材片1
2,14の下面は下凸状に変形しやすく、したがって柱
体16,17が結合された部材片12,14の中央部で
は押圧力F1が大きく成り、また両端部では押圧力F2
は小さくなり、このため押圧力が不均一になってしま
う。However, the above-mentioned conventional means have the following problems. That is, since the pressing force is transmitted to each of the member pieces 11 to 14 via the pillars 16 and 17, as shown by the chain line A in FIG.
The lower surfaces of 2 and 14 are likely to be deformed in a downward convex shape, and therefore the pressing force F1 is large at the center of the member pieces 12 and 14 to which the pillars 16 and 17 are joined, and the pressing force F2 is at both ends.
Becomes smaller, which results in uneven pressing force.
【0009】また同様の理由により、図13の側面図の
部材片11,13の場合は両側部の柱体16,17から
押圧力が加えられるので、部材片11,13の下面は鎖
線Bで示すように上凸状に変形しやすいので、柱体1
6,17の直下の両側部での押圧力F3が大きくなり、
また中央部では押圧力F4が小さくなるので押圧力が不
均一になってしまう。なお図12,13において、鎖線
A,Bで示すわん曲線は理解しやすいように誇張してわ
ん曲させているが、わん曲量は通常は数ミクロンであ
る。For the same reason, in the case of the member pieces 11 and 13 shown in the side view of FIG. 13, since the pressing force is applied from the pillars 16 and 17 on both sides, the lower surface of the member pieces 11 and 13 is indicated by the chain line B. As shown in the figure, it is easy to deform into a convex shape, so
The pressing force F3 on both sides directly under 6 and 17 increases,
Further, since the pressing force F4 becomes small in the central portion, the pressing force becomes non-uniform. 12 and 13, the curved lines indicated by the chain lines A and B are exaggerated for easy understanding, but the curved amount is usually several microns.
【0010】このように押圧力が不均一になると、電子
部品3のすべてのリード32を基板4の電極41に均一
な押圧力で押圧することはできず、熱圧着状態がばらつ
いてしまうという問題点があった。しかも近年は、電子
部品3の寸法は大形化してリード32の本数は増大する
傾向にあることから、この問題点は増々顕著化してい
た。When the pressing force becomes non-uniform in this way, it is impossible to press all the leads 32 of the electronic component 3 against the electrodes 41 of the substrate 4 with a uniform pressing force, and the thermocompression bonding state varies. There was a point. Moreover, in recent years, the size of the electronic component 3 has become larger and the number of the leads 32 has tended to increase, so this problem has become more prominent.
【0011】そこで本発明は、上記のような押圧力のば
らつきを解消して、電子部品のすべてのリードを基板の
電極に均一な力で熱圧着してボンディングできる電子部
品の熱圧着装置を提供することを目的とする。Therefore, the present invention provides a thermocompression bonding apparatus for an electronic component, which eliminates the above-mentioned variation in pressing force and can bond all the leads of the electronic component to the electrodes of the substrate by thermocompression bonding with a uniform force. The purpose is to do.
【0012】[0012]
【課題を解決するための手段】このために本発明の電子
部品の熱圧着装置は、熱圧着子の部材片の下面や受体の
リブ片の上面を、下凹状あるいは上凸状にわん曲させた
ものである。To this end, in the thermocompression bonding apparatus for electronic parts of the present invention, the lower surface of the member piece of the thermocompressor and the upper surface of the rib piece of the receiver are bent in a downward concave shape or an upward convex shape. It was made.
【0013】[0013]
【作用】上記構成によれば、熱圧着子の各部材片を受体
のリブ片上に載置された電子部品のリードに押し付けた
状態で、すべてのリードに加えられる押圧力は等しくな
って、すべてのリードを均一な押圧力で熱圧着して基板
の電極にボンディングできる。According to the above construction, in the state where each member piece of the thermocompression-bonding member is pressed against the leads of the electronic component placed on the rib piece of the receiving body, the pressing force applied to all the leads becomes equal, All leads can be bonded to the electrodes on the substrate by thermocompression bonding with a uniform pressing force.
【0014】[0014]
【実施例】次に、図面を参照しながら本発明の実施例を
説明する。Embodiments of the present invention will now be described with reference to the drawings.
【0015】図1は電子部品の熱圧着装置の正面図であ
る。50は熱圧着ヘッドであり、熱圧着子1を備えてい
る。51はリード線であり、熱圧着子1にパルス的に給
電することにより熱圧着子1を発熱させる。熱圧着ヘッ
ド50の下方には受体2が設けられている。FIG. 1 is a front view of a thermocompression bonding apparatus for electronic parts. The thermocompression bonding head 50 includes the thermocompression bonding element 1. Reference numeral 51 denotes a lead wire, which heats the thermocompressor 1 by supplying electric power to the thermocompressor 1 in a pulsed manner. The receiver 2 is provided below the thermocompression bonding head 50.
【0016】図2は熱圧着子1、受体2、電子部品3、
基板4の斜視図である。この熱圧着子1と受体2は、リ
ブ21〜22の上面形状以外は図11に示す従来例と同
一であり、したがって同一符号を付すことにより説明は
省略する。FIG. 2 shows a thermocompressor 1, a receiver 2, an electronic component 3,
3 is a perspective view of the substrate 4. FIG. The thermocompression-bonding element 1 and the receiving body 2 are the same as the conventional example shown in FIG. 11 except for the top shapes of the ribs 21 to 22, and therefore, the explanation is omitted by giving the same reference numerals.
【0017】熱圧着子1の柱体16,17に結合された
2つの部材片12,13が押圧される受体2のリブ片2
2,24の各々の上面22a,24aは下凹状にわん曲
している。また柱体16,17が結合されていない他の
2つの部材片11,13が押圧される受体2のリブ片2
1,23の各々の上面21a,23aは上凸状にわん曲
している。The rib piece 2 of the receiving body 2 against which the two member pieces 12 and 13 coupled to the pillar bodies 16 and 17 of the thermocompression-bonding element 1 are pressed.
The upper surfaces 22a and 24a of the Nos. 2 and 24 are bent downward. Also, the rib piece 2 of the receiving body 2 against which the other two member pieces 11 and 13 to which the pillars 16 and 17 are not joined are pressed.
The upper surfaces 21a and 23a of the Nos. 1 and 23 are bent in an upward convex shape.
【0018】図3は押圧前の正面図、図4は押圧中の正
面図である。図3に示すように、受体2のリブ片21〜
24上に基板4と電子部品3を載置して熱圧着子1を下
降させ、部材片11〜14をリード32に押し付ける。
部材片12,14はリブ片22,24の上面22a,2
4aに沿うように変形しながらリード32を押圧する。
この時、部材片12,14の両側部では、部材片12,
14が元の形状に復元しようとする力が両側部のリード
32に作用するので、両側部の押圧力F2は、中央部の
押圧力F1と均しくなり、すべてのリード32は均一な
力で基板4の電極41に押し付けられる。FIG. 3 is a front view before pressing, and FIG. 4 is a front view during pressing. As shown in FIG. 3, the rib pieces 21 to 21 of the receiving body 2
The substrate 4 and the electronic component 3 are placed on 24, the thermocompression bonding element 1 is lowered, and the member pieces 11 to 14 are pressed against the leads 32.
The member pieces 12 and 14 are the upper surfaces 22a and 2 of the rib pieces 22 and 24, respectively.
The lead 32 is pressed while deforming along 4a.
At this time, on both sides of the member pieces 12, 14, the member pieces 12,
Since the force of 14 to restore to the original shape acts on the leads 32 on both sides, the pressing force F2 on both sides becomes even with the pressing force F1 on the central part, and all the leads 32 have uniform force. It is pressed against the electrode 41 of the substrate 4.
【0019】また図5は押圧前の側面図、図6は押圧中
の側面図である。部材片11,13は、リブ片21,2
3の上面21a,23aに沿って変形しながらリード3
2を押圧する。この時、部材片11,13の中央部では
部材片11,13が元の形状に復元しようとする力が中
央部のリード32に作用するので、中央部の押圧力F4
は、両側部の押圧力F3(押圧力F3と押圧力F2は同
じ大きさ)と均しくなる。従ってすべてのリード32は
均等な力で基板4の電極41に押し付けられてボンディ
ングされる。図7はこのようにして電子部品3がボンデ
ィングされた基板4の斜視図である。FIG. 5 is a side view before pressing, and FIG. 6 is a side view during pressing. The member pieces 11 and 13 are rib pieces 21 and 2.
The lead 3 is deformed along the upper surfaces 21a and 23a of the lead 3
Press 2. At this time, in the central portion of the member pieces 11 and 13, the force of the member pieces 11 and 13 to restore to the original shape acts on the lead 32 in the central portion, so that the pressing force F4 in the central portion is increased.
Becomes even with the pressing force F3 on both sides (the pressing force F3 and the pressing force F2 have the same magnitude). Therefore, all the leads 32 are pressed and bonded to the electrodes 41 of the substrate 4 with a uniform force. FIG. 7 is a perspective view of the substrate 4 to which the electronic component 3 is bonded in this way.
【0020】次に、図8,図9,図10を参照しなが
ら、本発明の他の実施例を説明する。図8において、熱
圧着子1の部材片11〜14のうち、柱体16,17に
結合された部材片12,14の各々の下面12a,14
aは上凹状にわん曲しており、また他の2つの部材片1
1,13の下面11a,13aは下凸状にわん曲してい
る。受体2のリブ片21〜24の上面はすべてフラット
である。Next, another embodiment of the present invention will be described with reference to FIGS. 8, 9 and 10. In FIG. 8, among the member pieces 11 to 14 of the thermocompression-bonding element 1, the lower surfaces 12 a and 14 of the member pieces 12 and 14 coupled to the pillars 16 and 17, respectively.
a is curved in an upward concave shape, and the other two member pieces 1
The lower surfaces 11a and 13a of the reference numerals 1 and 13 are bent downwardly. The upper surfaces of the rib pieces 21 to 24 of the receiver 2 are all flat.
【0021】したがって図9および図10に示すよう
に、熱圧着子1を下降させて電子部品3のリード32に
押し付けると、その押圧力のために各部材片11〜14
の下面11a〜14aはリブ片21〜24の上面21a
〜24aに沿うようにすべてフラットに変形し(同図鎖
線参照)、図4および図6に示す場合と同様にすべての
リード32には均一な押圧力が加えられ、すべてのリー
ド32を基板4の電極41に均一にボンディングでき
る。Therefore, as shown in FIGS. 9 and 10, when the thermocompressor 1 is lowered and pressed against the leads 32 of the electronic component 3, each of the member pieces 11 to 14 is pressed due to the pressing force.
Lower surfaces 11a to 14a of the ribs are upper surfaces 21a of the rib pieces 21 to 24.
All of the leads 32 are deformed to be flat along the lines 24a to 24a (see the chain line in the figure), and uniform pressing force is applied to all the leads 32 as in the case shown in FIGS. The electrode 41 can be bonded uniformly.
【0022】本発明は、第1実施例のように、リブ片2
1〜24の上面21a〜24aを下凹状や上凸状にわん
曲加工する方法と、第2実施例のように部材片11〜1
4の下面11a〜14aを上凹状や下凸状にわん曲加工
する方法があるが、部材片11〜14の下面にはダイヤ
モンドなどの超硬片15が設けられているのでわん曲加
工は困難である。したがって第1実施例のようにリブ片
21〜24の上面21a〜24aをわん曲加工する方が
実用上有利である。According to the present invention, as in the first embodiment, the rib piece 2 is used.
Method for bending upper surfaces 21a-24a of Nos. 1-24 into a downward concave shape or an upward convex shape, and member pieces 11-1 as in the second embodiment.
There is a method of bending the lower surfaces 11a to 14a of No. 4 into an upward concave shape or a downward convex shape. However, since the superhard pieces 15 such as diamond are provided on the lower surfaces of the member pieces 11 to 14, the bending processing is difficult. Is. Therefore, it is practically advantageous to bend the upper surfaces 21a to 24a of the rib pieces 21 to 24 as in the first embodiment.
【0023】[0023]
【発明の効果】以上説明したように本発明の電子部品の
熱圧着装置によれば、熱圧着子の各部材片を受体のリブ
片上に載置された電子部品のリードに押し付けた状態
で、すべてのリードに加えられる押圧力は等しくなっ
て、すべてのリードを均一な押圧力で熱圧着して基板の
電極にボンディングできる。As described above, according to the thermocompression bonding apparatus for an electronic component of the present invention, each component piece of the thermocompression bonding element is pressed against the lead of the electronic component mounted on the rib piece of the receiving body. The pressing force applied to all the leads becomes equal, and all the leads can be thermocompression bonded with a uniform pressing force to bond to the electrodes on the substrate.
【図1】本発明の一実施例における電子部品の熱圧着装
置の正面図FIG. 1 is a front view of a thermocompression bonding apparatus for electronic components according to an embodiment of the present invention.
【図2】本発明の一実施例における熱圧着子と受体の斜
視図FIG. 2 is a perspective view of a thermocompressor and a receiver according to an embodiment of the present invention.
【図3】本発明の一実施例における熱圧着子と受体の正
面図FIG. 3 is a front view of a thermocompression-bonding element and a receiver according to an embodiment of the present invention.
【図4】本発明の一実施例における熱圧着子と受体の熱
圧着中の正面図FIG. 4 is a front view of the thermocompression bonding element and the receiver during thermocompression bonding according to an embodiment of the present invention.
【図5】本発明の一実施例における熱圧着子と受体の熱
圧着中の側面図FIG. 5 is a side view during thermocompression bonding of the thermocompressor and the receiver according to the embodiment of the present invention.
【図6】本発明の一実施例における熱圧着子と受体の熱
圧着中の側面図FIG. 6 is a side view during thermocompression bonding of the thermocompressor and the receiver in one embodiment of the present invention.
【図7】本発明の一実施例における基板の斜視図FIG. 7 is a perspective view of a substrate according to an embodiment of the present invention.
【図8】本発明の他の実施例における熱圧着子と受体の
斜視図FIG. 8 is a perspective view of a thermocompressor and a receiver according to another embodiment of the present invention.
【図9】本発明の他の実施例における熱圧着子と受体の
熱圧着中の正面図FIG. 9 is a front view of another embodiment of the present invention during thermocompression bonding of a thermocompressor and a receiver.
【図10】本発明の他の実施例における熱圧着子と受体
の熱圧着中の側面図FIG. 10 is a side view of another embodiment of the present invention during thermocompression bonding of a thermocompressor and a receiver.
【図11】従来の熱圧着子と受体の斜視図FIG. 11 is a perspective view of a conventional thermocompressor and a receiver.
【図12】従来の熱圧着子と受体の熱圧着中の正面図FIG. 12 is a front view of a conventional thermocompression bonding element and a receiving member during thermocompression bonding.
【図13】従来の熱圧着子と受体の熱圧着中の側面図FIG. 13 is a side view of a conventional thermocompression bonder and a receiver during thermocompression bonding.
1 熱圧着子 2 受体 3 電子部品 4 基板 11 部材片 12 部材片 13 部材片 14 部材片 11a 部材片の下面 12a 部材片の下面 13a 部材片の下面 14a 部材片の下面 21 リブ片 22 リブ片 23 リブ片 24 リブ片 21a リブ片の上面 22a リブ片の上面 23a リブ片の上面 24a リブ片の上面 DESCRIPTION OF SYMBOLS 1 Thermocompressor 2 Receiver 3 Electronic component 4 Board 11 Member piece 12 Member piece 13 Member piece 14 Member piece 11a Lower surface of member piece 12a Lower surface of member piece 13a Lower surface of member piece 14a Lower surface of member piece 21 Rib piece 22 Rib piece 23 rib piece 24 rib piece 21a rib piece upper surface 22a rib piece upper surface 23a rib piece upper surface 24a rib piece upper surface
Claims (2)
この枠体の互いに対向する2つの部材片の中央部上に結
合されてこの枠体に押圧力を伝達する柱体とから成る熱
圧着子と、この熱圧着子の下方にあって前記各部材片が
押圧される4個のリブ片が枠型に突設された受体とを備
え、 前記柱体に結合された前記2つの部材片が押圧される前
記2つのリブ片の上面を下凹状にわん曲させ、 また前記柱体に結合されていない前記2つの部材片が押
圧される前記2つのリブ片の上面を上凸状にわん曲させ
たことを特徴とする電子部品の熱圧着装置。1. A quadrangular frame body composed of four member pieces and a column body coupled to the central portions of two member pieces of the frame body facing each other to transmit a pressing force to the frame body. A thermocompression-bonding member and a receiving body provided below the thermocompression-bonding member and having four rib pieces projecting in a frame shape and pressing each of the member pieces. The upper surfaces of the two rib pieces that are pressed by the two member pieces are bent downwardly, and the upper surfaces of the two rib pieces that are pressed by the two member pieces that are not joined to the pillar are turned up. A thermocompression bonding device for electronic parts, characterized by being bent in a convex shape.
この枠体の互いに対向する2つの部材片の中央部上に結
合されてこの枠体に押圧力を伝達する柱体とから成る熱
圧着子と、この熱圧着子の下方にあって前記各部材片が
押圧される4個のリブ片が枠型に突設された受体とを備
え、 前記柱体に結合された前記2つの部材片の下面を上凹状
にわん曲させ、 また前記柱体に結合されていない前記2つの部材片の下
面を下凸状にわん曲させたことを特徴とする電子部品の
熱圧着装置。2. A quadrangular frame body composed of four member pieces and a column body coupled to the central portions of two member pieces of the frame body facing each other and transmitting a pressing force to the frame body. A thermocompression-bonding member and a receiving body provided below the thermocompression-bonding member and having four rib pieces projecting in a frame shape and pressing each of the member pieces. A thermocompression bonding apparatus for electronic parts, characterized in that the lower surfaces of the two member pieces are bent in an upward concave shape, and the lower surfaces of the two member pieces that are not joined to the pillars are bent in a downward convex shape. .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP05213652A JP3097410B2 (en) | 1993-08-30 | 1993-08-30 | Thermocompression bonding equipment for electronic components |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP05213652A JP3097410B2 (en) | 1993-08-30 | 1993-08-30 | Thermocompression bonding equipment for electronic components |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0766248A true JPH0766248A (en) | 1995-03-10 |
JP3097410B2 JP3097410B2 (en) | 2000-10-10 |
Family
ID=16642716
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP05213652A Expired - Fee Related JP3097410B2 (en) | 1993-08-30 | 1993-08-30 | Thermocompression bonding equipment for electronic components |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3097410B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006066566A (en) * | 2004-08-26 | 2006-03-09 | Casio Comput Co Ltd | Bonding device |
-
1993
- 1993-08-30 JP JP05213652A patent/JP3097410B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006066566A (en) * | 2004-08-26 | 2006-03-09 | Casio Comput Co Ltd | Bonding device |
Also Published As
Publication number | Publication date |
---|---|
JP3097410B2 (en) | 2000-10-10 |
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LAPS | Cancellation because of no payment of annual fees |