JPH0765163B2 - Hearth liner and vapor deposition method - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hearth liner used during vacuum vapor deposition with an electron gun and a vapor deposition method using the hearth liner.

[0002]

2. Description of the Related Art As a film forming apparatus for forming a thin film on optical parts, electronic parts, etc., a vacuum evaporation apparatus is widely used, and an electron beam heating evaporation apparatus is often used as its evaporation source. The electron beam heating vapor deposition apparatus is generally called an electron gun,
The vapor deposition material is irradiated with an electron beam and heated to evaporate the vapor ("Thin Film Engineering Handbook", Ohmsha, p101-105, December 10, 1983).

Compared with the resistance heating method, the electron gun can obtain a high temperature relatively easily and can easily deposit a high-melting point material, does not wear like a resistance heating boat, and keeps the vapor deposition conditions constant. It has excellent characteristics such as easy continuity of equipment and no pollution due to boat evaporation.

The electron beam heating vapor deposition apparatus generally comprises a plurality of water-cooled hearths (crucibles), which are filled with vapor deposition materials and which are rotated as necessary to change the hearth to be used. The vapor deposition can be performed by directly irradiating the vapor deposition material with the beam. However, on the other hand, instead of directly filling the vapor deposition material into the hearth, an inner container called a hearth liner that almost completely fits into the hearth is used and the vapor deposition material is often filled into the hearth liner.

The use of the hearth liner has the following advantages. (1) When cleaning dirt after vapor deposition, only the small hearth liner needs to be cleaned. Further, since the hearth liner can be taken out and cleaned, it is easy to clean.

(2) When different vapor deposition materials are used, only the liner needs to be replaced, which can sufficiently prevent contamination during vapor deposition. However, according to the study by the present inventor, the vapor deposition material also has various evaporation characteristics, and the size and shape of the vapor deposition material that can be obtained are naturally limited, and a hearth liner of the same shape is simply used. It turns out that there are many problems.

FIGS. 5-8 show a conventional hearth liner 17, which has a shape that fits snugly inside a hearth 21 made of copper. FIG. 5 shows the vapor deposition material 33.
Is a granular material, and the vapor deposition material 33 is filled in the necessary amount in the hearth liner 17 and evaporated regardless of the shape of the hearth liner 17, so that the standard size hearth liner 17 can be used. In addition, FIG.
Shows the case where the liquefies once and then evaporates. In such a case, regardless of the shape and size of the vapor deposition material used, the liquefied vapor deposition material 35 uniformly fills the hearth liner 17 prior to vaporization. Therefore, in the above case, the vapor deposition materials 33 and 35 do not move in the hearth liner 17 and are unevenly distributed due to vibration or the like when the hearth 21 is rotated in order to change the position of the hearth to be used. Therefore, even if such a standard type hearth liner 17 is used in an automatic vapor deposition apparatus, the electron beam is surely emitted from the vapor deposition materials 33, 35 inside the hearth liner 17.
Is irradiated.

FIG. 7 is a sectional view showing a case where a vapor deposition material composed of the tablet 31 is used. This tablet 31
Is a solid material that sublimates or evaporates in a semi-molten state that does not substantially go into a molten state or is substantially in an external shape. Therefore, if only the irradiation position of the electron beam on the tablet 31 is selectively consumed and the irradiation position of the electron beam is constant as in the automatic vapor deposition apparatus, many parts of the tablet 31 are wasted. Furthermore, as shown in FIG. 7, a tablet 31 having an inner size that is the same as the outer size of the hearth liner 17 is not always available.

FIG. 8 is an explanatory view showing the above case, in which the vapor deposition material tablet 31 has a diameter considerably smaller than the inner diameter of the hearth liner 17. Therefore, the tablet 31
Even when is set at the center of the hearth liner 17, it can be assumed that the tablet 31 cannot be efficiently irradiated with the electron beam because the vapor deposition material moves due to the vibration of the device during the work and the rotation of the hearth 21. Particularly, in the automatic vapor deposition apparatus, the irradiation position of the electron beam is set to a fixed location, and the operator does not confirm each time, so the situation is serious. In some cases, the inside of the hearth liner 17 in which the tablet 31 does not exist is used. It is conceivable that an electron beam will be irradiated to the place.

[0010]

DISCLOSURE OF THE INVENTION The present invention is applicable to the shape and size of a tablet as a vapor deposition material, and
It is intended to provide a hearth liner and a vapor deposition method which are easy in vapor deposition operation and have good vapor deposition efficiency.

[0011]

A hearth liner of the present invention is a hearth liner inserted and used in a hearth filled with a vapor deposition material in an electron beam vapor deposition apparatus, wherein a tablet made of the vapor deposition material is provided on a side wall of the hearth liner.
The inner surface of the bottom wall portion is provided with a recess having a size smaller than the inner diameter of the hearth liner for inserting into the hearth liner in a non-contact state .

Further, in the vapor deposition method of the present invention, a tablet made of a solid vapor deposition material that sublimates or evaporates in a semi-molten state that does not substantially go through a molten state or is capable of substantially maintaining the outer shape is used as the hearth liner It is characterized in that it is placed in the recessed portion and is irradiated with an electron beam to be vapor-deposited.

FIG. 1 is a partially cutaway explanatory perspective view showing an embodiment of a hearth liner 11 of the present invention, and FIG. 2 is a sectional view showing a tablet (vapor deposition material) 31 set.
A recess 13 having a diameter smaller than the inner diameter of the hearth liner 11 is provided on the bottom wall surface of the hearth liner 11 attached to the hearth 21, and a tablet 31 of a vapor deposition material is fitted in the recess 13. Therefore, if the concave portion 13 is formed in the hearth liner 11 according to the shape of the tablet 31, the tablet 31 can be reliably held at a predetermined position (center position) of the hearth liner 11, and the tablet 31 moves due to vibration during work. There is nothing to do. Therefore,
The electron beam can be safely introduced and is particularly effective in an automatic vapor deposition device. In addition, the tablet 31 can be effectively used.

According to an experiment conducted by the present inventors, a solid material that does not substantially go through a molten state and sublimates or evaporates in a semi-molten state where the outer shape can be maintained is used as the material of the tablet 31. In this case, it was found that stable evaporation characteristics can be obtained with a small amount of input power. This is presumably because, as shown in FIG. 1, most of the side wall portion of the tablet 31 is not in contact with the hearth liner 11, so that the heat diffusion is small.

In this experiment, for example, the wall thickness is 4 mm and the inner diameter is 2
12 mm in height with a recess of 1 mm in depth and 19 mm in inner diameter on the bottom wall surface of a copper hearth liner of 5 mm in height and 12 mm in height
The above zirconium dioxide tablet was heated by electron beam evaporation.

Examples of such vapor deposition materials include silicon monoxide, silicon dioxide, zirconia-titania solid solution, aluminum dioxide, and cerium dioxide.
Copper is used as the material for the hearth liner 11, and
Carbon, tungsten, molybdenum, tantalum, boron nitride, composite, etc. can be used.

The recess 13 in the bottom wall of the hearth liner 11 is
It can be transformed according to the shape of the tablet 31,
For example, as shown in FIG. 3, a concave portion 13 having a slightly deep central portion is formed.
Can also be formed. The planar shape of the concave portion 13 is not limited to a circle, and may be a square shape or the like according to the shape of the tablet 31.

Further, as shown in FIG. 4, a ring member 15 which is a separate body from this is fitted to an ordinary hearth liner 11 having a flat bottom surface or a smooth curved surface.
The concave portion 13 may be formed by the hole portion. In this case, if the ring member 15 is made of copper, it may evaporate. Therefore, a high melting point material such as tantalum or tungsten is preferable.

[0019]

According to the present invention, a tab made of a vapor deposition material is used.
Insert the lett without contact with the side wall of the hearth liner
Therefore, by using the hearth liner small recesses than an inner diameter formed in its bottom wall, depending on the shape and size of the tablet can be held tablet in place by the recess, reliably electrons tablet Beam can be emitted. Therefore, the vapor deposition operation is easy, and it is particularly suitable for an automatic vapor deposition apparatus. In addition, the evaporation material that evaporates in the sublimated or semi-molten state can be efficiently evaporated, and the material waste is small.

[Brief description of drawings]

FIG. 1 is a partially cutaway, partially omitted perspective view showing an embodiment of a hearth liner of the present invention (tablet separated state).

FIG. 2 is a cross-sectional view showing a state when the tablet of the embodiment of FIG. 1 is attached.

FIG. 3 is a sectional view showing another embodiment of the present invention.

FIG. 4 is a sectional view showing still another embodiment of the present invention.

FIG. 5 is a sectional view showing a conventional hearth liner.

FIG. 6 is a cross-sectional view showing a conventional hearth liner.

FIG. 7 is a sectional view showing a conventional hearth liner.

FIG. 8 is a cross-sectional view showing a conventional hearth liner.

[Explanation of symbols]

 11 Heart Liner 13 Recess 15 Ring Member 17 Heart Liner 21 Heart 31 Tablet (Vapor Deposition Material) 33 Vapor Deposition Material 35 Vapor Deposition Material

Claims (2)

[Claims] 1. A hearth liner inserted and used in a hearth filled with a vapor deposition material in an electron beam vapor deposition apparatus, wherein a tablet made of the vapor deposition material is used.
Insert it into the hearth liner without contacting the side wall
A hearth liner having a concave portion, which has a size smaller than the inner diameter of the hearth liner, on the inner surface of the bottom wall . 2. A tablet made of a solid vapor deposition material that sublimates or evaporates in a semi-molten state that does not substantially go through a molten state or that can substantially maintain the outer shape is provided in the concave portion of the hearth liner according to claim 1. A vapor deposition method which comprises inserting and irradiating an electron beam to vapor deposit.