JP5637120B2 - Vapor deposition equipment - Google Patents

Description

  The present invention relates to a vapor deposition apparatus used for manufacturing a semiconductor device, for example.

  When deposition is repeated, the deposition material of the deposition apparatus decreases. Therefore, an operation of adding a vapor deposition material to the vapor deposition apparatus at a predetermined cycle is performed. Patent Document 1 discloses a technique for adding a pellet, which is a small vapor deposition material, to a predetermined position on an ingot, which is a large vapor deposition material. In this technique, pellets are fixed with a jig so that pellets added on the ingot do not roll on the ingot.

JP 2008-223117 A

  In the technique of Patent Document 1, the jig is removed from the pellet after the pellet is fixed with the jig. Therefore, after removing the jig from the pellet, the pellet may roll on the ingot and go out of the predetermined position. In addition, a mechanism for moving the jig up and down relative to the ingot is required, and the work of adding the vapor deposition material (pellet) becomes complicated.

  The present invention has been made to solve the above-described problems, and an object thereof is to provide a vapor deposition apparatus that can prevent pellets from rolling on an ingot by a simple method.

  The vapor deposition apparatus according to the invention of the present application includes an ingot formed of a vapor deposition material, a plurality of pellets formed on the ingot and formed of the same material as the ingot, and formed of the same material as the ingot. And a fixing pellet that surrounds the plurality of pellets so that the plurality of pellets do not roll on the ingot.

  According to the vapor deposition apparatus of the present invention, the pellets can be prevented from rolling on the ingot by a simple method.

It is the schematic of the vapor deposition apparatus which concerns on Embodiment 1 of this invention. It is the figure which expanded the pellet for fixation of FIG. 1, and its periphery. It is a figure which shows the modification of the vapor deposition apparatus which concerns on Embodiment 1 of this invention. It is a figure which shows the modification of the pellet for fixation of Embodiment 1 of this invention. It is a figure which shows a part of vapor deposition apparatus which concerns on Embodiment 2 of this invention. It is a figure which shows the modification of the vapor deposition apparatus which concerns on Embodiment 2 of this invention.

Embodiment 1 FIG.
FIG. 1 is a schematic diagram of a vapor deposition apparatus according to Embodiment 1 of the present invention. The vapor deposition apparatus 10 includes an ingot 12 accommodated in the hearth 11. The ingot 12 is made of a vapor deposition material such as Al. A plurality of pellets 14 are supplied on the ingot 12. The plurality of pellets 14 are supplied to add a deposition material to the deposition apparatus 10. Therefore, the plurality of pellets 14 are formed of the same material as the ingot 12. Each of the plurality of pellets 14 has a cylindrical shape whose bottom surface is in contact with the ingot 12.

  A fixing pellet 16 is formed above the ingot 12. The fixing pellet 16 prevents a plurality of pellets from rolling on the ingot. The fixing pellet 16 is made of the same material as the ingot 12. FIG. 2 is an enlarged view of the fixing pellet of FIG. 1 and its periphery. The fixing pellets 16 surround the plurality of pellets 14 so that the plurality of pellets 14 do not roll on the ingot 12. The fixing pellet 16 according to Embodiment 1 of the present invention is formed in a ring shape, and a plurality of pellets 14 are set up in the ring.

  By the way, the plurality of pellets 14 must be supplied to a place (referred to as a heating position) on the ingot 12 where an electron beam or a laser hits. However, when the deposition is repeated, the shape of the upper surface of the ingot changes and becomes a curved surface, so that a plurality of pellets supplied on the ingot may roll on the ingot and go out of the heating position. The pellets that had come out of the heating position had to be returned to the heating position, and the operation of adding the pellets was complicated.

  However, according to the vapor deposition apparatus 10 which concerns on Embodiment 1 of this invention, it can prevent that the pellet 14 goes out of a heating position. That is, it is possible to prevent the plurality of pellets 14 from rolling out of the heating position because the fixing pellets 16 surround the plurality of pellets 14. Therefore, it is possible to prevent the pellets from rolling on the ingot by a simple method. Moreover, since the fixing pellet 16 is made of the same material as the ingot 12, the fixing pellet 16 can be heated to add a vapor deposition material.

  FIG. 3 is a diagram showing a modification of the vapor deposition apparatus according to Embodiment 1 of the present invention. As many pellets as possible are arranged in the annular fixing pellet 16. That is, the inside of the annular fixing pellet 16 is filled with a plurality of pellets 14. Thereby, the plurality of pellets 14 are fixed by the fixing pellets 16 and cannot be moved, and the plurality of pellets 14 and the fixing pellets 16 are integrated. If an object in which a plurality of pellets 14 and fixing pellets 16 are integrated (referred to as a “bonded pellet 18”) is prepared in advance, the addition of pellets can be completed simply by placing the combined pellet 18 on the ingot 12. .

  FIG. 4 is a view showing a modification of the fixing pellet according to the first embodiment of the present invention. The fixing pellet is not particularly limited as long as it can surround the plurality of pellets so that they do not go out of the heating position. For example, as shown to FIG. 4A, you may make it the shape which processed the prism into the cyclic | annular form. Moreover, as shown to FIG. 4B, you may form so that it may become an unbroken circular shape.

  The vapor deposition material is not limited to Al, and is not particularly limited as long as it is formed of a metal used for vapor deposition. Each of the plurality of pellets is not limited to a cylindrical shape.

Embodiment 2. FIG.
The vapor deposition apparatus according to Embodiment 2 of the present invention will be described focusing on differences from the vapor deposition apparatus according to Embodiment 1. FIG. 5 is a diagram showing a part of the vapor deposition apparatus according to Embodiment 2 of the present invention. A plurality of polyhedral pellets 20 are formed at the heating position on the ingot 12. The polyhedral pellet 20 is a polyhedron formed of the same material as the ingot 12. The surface having the largest area of the polyhedron is in contact with the ingot 12.

  Since the polyhedral pellet 20 is supplied on the ingot 12 so that the surface having the largest area is in contact with the ingot 12, the polyhedral pellet 20 does not roll out of the heating position. Therefore, it is possible to prevent the pellets from rolling on the ingot by a simple method. The polyhedral pellet 20 is a hexahedron, but is not particularly limited as long as it is a polyhedron.

  FIG. 6 is a view showing a modification of the vapor deposition apparatus according to Embodiment 2 of the present invention. A plurality of cylindrical pellets 22 are formed at the heating position on the ingot 12. The cylindrical pellet 22 is a cylinder formed of the same material as the ingot 12. The diameter of the cylindrical pellet 22 is larger than the height of the cylindrical pellet 22. The bottom surface of the cylindrical pellet 22 is in contact with the ingot 12. Since the cylindrical pellet 22 has a shape that does not easily roll on the ingot 12, the pellet can be prevented from rolling on the ingot by a simple method.

  10 evaporation apparatus, 11 hearth, 12 ingot, 14 multiple pellets, 16 fixing pellet, 18 bonded pellet, 20 polyhedral pellet, 22 columnar pellet

Claims (4)

An ingot formed of a vapor deposition material;
A plurality of pellets supplied on the ingot and formed of the same material as the ingot;
An evaporation apparatus comprising: a fixing pellet formed of the same material as the ingot, and surrounding the plurality of pellets so that the plurality of pellets do not roll on the ingot.   The vapor deposition apparatus according to claim 1, wherein the fixing pellet is formed in an annular shape.   The vapor deposition apparatus according to claim 2, wherein the fixing pellet and the plurality of pellets are integrated by filling the inside of the fixing pellet with the plurality of pellets.   4. The vapor deposition apparatus according to claim 1, wherein each of the plurality of pellets has a cylindrical shape whose bottom surface is in contact with the ingot. 5.

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