JPH0755512Y2 - ファラデ―カップモニタ - Google Patents

ファラデ―カップモニタ

Info

Publication number
JPH0755512Y2
JPH0755512Y2 JP1989013610U JP1361089U JPH0755512Y2 JP H0755512 Y2 JPH0755512 Y2 JP H0755512Y2 JP 1989013610 U JP1989013610 U JP 1989013610U JP 1361089 U JP1361089 U JP 1361089U JP H0755512 Y2 JPH0755512 Y2 JP H0755512Y2
Authority
JP
Japan
Prior art keywords
cup
charged particle
metal cup
particle beam
monitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989013610U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02105171U (enrdf_load_stackoverflow
Inventor
博文 田中
哲也 中西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1989013610U priority Critical patent/JPH0755512Y2/ja
Publication of JPH02105171U publication Critical patent/JPH02105171U/ja
Application granted granted Critical
Publication of JPH0755512Y2 publication Critical patent/JPH0755512Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1989013610U 1989-02-09 1989-02-09 ファラデ―カップモニタ Expired - Lifetime JPH0755512Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989013610U JPH0755512Y2 (ja) 1989-02-09 1989-02-09 ファラデ―カップモニタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989013610U JPH0755512Y2 (ja) 1989-02-09 1989-02-09 ファラデ―カップモニタ

Publications (2)

Publication Number Publication Date
JPH02105171U JPH02105171U (enrdf_load_stackoverflow) 1990-08-21
JPH0755512Y2 true JPH0755512Y2 (ja) 1995-12-20

Family

ID=31224062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989013610U Expired - Lifetime JPH0755512Y2 (ja) 1989-02-09 1989-02-09 ファラデ―カップモニタ

Country Status (1)

Country Link
JP (1) JPH0755512Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5679275A (en) * 1979-12-03 1981-06-29 Fujitsu Ltd Measuring method for electron beam diameter
JPS592356A (ja) * 1982-06-28 1984-01-07 Fujitsu Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH02105171U (enrdf_load_stackoverflow) 1990-08-21

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term