JPH075526Y2 - 露光用マスク - Google Patents
露光用マスクInfo
- Publication number
- JPH075526Y2 JPH075526Y2 JP1989092485U JP9248589U JPH075526Y2 JP H075526 Y2 JPH075526 Y2 JP H075526Y2 JP 1989092485 U JP1989092485 U JP 1989092485U JP 9248589 U JP9248589 U JP 9248589U JP H075526 Y2 JPH075526 Y2 JP H075526Y2
- Authority
- JP
- Japan
- Prior art keywords
- exposure
- mask
- pattern
- groove
- exposure mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 12
- 229910000859 α-Fe Inorganic materials 0.000 claims description 11
- 239000013078 crystal Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 238000005530 etching Methods 0.000 description 5
- 229910000702 sendust Inorganic materials 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989092485U JPH075526Y2 (ja) | 1989-08-08 | 1989-08-08 | 露光用マスク |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989092485U JPH075526Y2 (ja) | 1989-08-08 | 1989-08-08 | 露光用マスク |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0331736U JPH0331736U (enrdf_load_html_response) | 1991-03-27 |
| JPH075526Y2 true JPH075526Y2 (ja) | 1995-02-08 |
Family
ID=31641908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989092485U Expired - Lifetime JPH075526Y2 (ja) | 1989-08-08 | 1989-08-08 | 露光用マスク |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH075526Y2 (enrdf_load_html_response) |
-
1989
- 1989-08-08 JP JP1989092485U patent/JPH075526Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0331736U (enrdf_load_html_response) | 1991-03-27 |
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