JPH0754917Y2 - イオン注入装置 - Google Patents

イオン注入装置

Info

Publication number
JPH0754917Y2
JPH0754917Y2 JP2676790U JP2676790U JPH0754917Y2 JP H0754917 Y2 JPH0754917 Y2 JP H0754917Y2 JP 2676790 U JP2676790 U JP 2676790U JP 2676790 U JP2676790 U JP 2676790U JP H0754917 Y2 JPH0754917 Y2 JP H0754917Y2
Authority
JP
Japan
Prior art keywords
substrate
beam current
ion
trigger signal
current measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2676790U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03118546U (cs
Inventor
潤一 立道
靖典 安東
秀樹 西出
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP2676790U priority Critical patent/JPH0754917Y2/ja
Publication of JPH03118546U publication Critical patent/JPH03118546U/ja
Application granted granted Critical
Publication of JPH0754917Y2 publication Critical patent/JPH0754917Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP2676790U 1990-03-16 1990-03-16 イオン注入装置 Expired - Lifetime JPH0754917Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2676790U JPH0754917Y2 (ja) 1990-03-16 1990-03-16 イオン注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2676790U JPH0754917Y2 (ja) 1990-03-16 1990-03-16 イオン注入装置

Publications (2)

Publication Number Publication Date
JPH03118546U JPH03118546U (cs) 1991-12-06
JPH0754917Y2 true JPH0754917Y2 (ja) 1995-12-18

Family

ID=31529647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2676790U Expired - Lifetime JPH0754917Y2 (ja) 1990-03-16 1990-03-16 イオン注入装置

Country Status (1)

Country Link
JP (1) JPH0754917Y2 (cs)

Also Published As

Publication number Publication date
JPH03118546U (cs) 1991-12-06

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