JPH0753059Y2 - 高精度移動テーブル装置 - Google Patents
高精度移動テーブル装置Info
- Publication number
- JPH0753059Y2 JPH0753059Y2 JP1986015531U JP1553186U JPH0753059Y2 JP H0753059 Y2 JPH0753059 Y2 JP H0753059Y2 JP 1986015531 U JP1986015531 U JP 1986015531U JP 1553186 U JP1553186 U JP 1553186U JP H0753059 Y2 JPH0753059 Y2 JP H0753059Y2
- Authority
- JP
- Japan
- Prior art keywords
- laser mirror
- workpiece
- laser
- table device
- moving table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 11
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 230000008602 contraction Effects 0.000 description 11
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000002542 deteriorative effect Effects 0.000 description 2
- 230000036316 preload Effects 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Mounting And Adjusting Of Optical Elements (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986015531U JPH0753059Y2 (ja) | 1986-02-05 | 1986-02-05 | 高精度移動テーブル装置 |
| US07/368,150 US4953965A (en) | 1985-12-26 | 1989-06-15 | High-accuracy traveling table apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986015531U JPH0753059Y2 (ja) | 1986-02-05 | 1986-02-05 | 高精度移動テーブル装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62127515U JPS62127515U (enrdf_load_stackoverflow) | 1987-08-13 |
| JPH0753059Y2 true JPH0753059Y2 (ja) | 1995-12-06 |
Family
ID=30806550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986015531U Expired - Lifetime JPH0753059Y2 (ja) | 1985-12-26 | 1986-02-05 | 高精度移動テーブル装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0753059Y2 (enrdf_load_stackoverflow) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62151783A (ja) * | 1985-12-26 | 1987-07-06 | 東芝機械株式会社 | 高精度移動テ−ブル装置 |
-
1986
- 1986-02-05 JP JP1986015531U patent/JPH0753059Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62127515U (enrdf_load_stackoverflow) | 1987-08-13 |
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