JPS62127515U - - Google Patents

Info

Publication number
JPS62127515U
JPS62127515U JP1553186U JP1553186U JPS62127515U JP S62127515 U JPS62127515 U JP S62127515U JP 1553186 U JP1553186 U JP 1553186U JP 1553186 U JP1553186 U JP 1553186U JP S62127515 U JPS62127515 U JP S62127515U
Authority
JP
Japan
Prior art keywords
laser mirror
island
fixing device
workpiece fixing
guideway
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1553186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0753059Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986015531U priority Critical patent/JPH0753059Y2/ja
Publication of JPS62127515U publication Critical patent/JPS62127515U/ja
Priority to US07/368,150 priority patent/US4953965A/en
Application granted granted Critical
Publication of JPH0753059Y2 publication Critical patent/JPH0753059Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Mounting And Adjusting Of Optical Elements (AREA)
JP1986015531U 1985-12-26 1986-02-05 高精度移動テーブル装置 Expired - Lifetime JPH0753059Y2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1986015531U JPH0753059Y2 (ja) 1986-02-05 1986-02-05 高精度移動テーブル装置
US07/368,150 US4953965A (en) 1985-12-26 1989-06-15 High-accuracy traveling table apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986015531U JPH0753059Y2 (ja) 1986-02-05 1986-02-05 高精度移動テーブル装置

Publications (2)

Publication Number Publication Date
JPS62127515U true JPS62127515U (enrdf_load_stackoverflow) 1987-08-13
JPH0753059Y2 JPH0753059Y2 (ja) 1995-12-06

Family

ID=30806550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986015531U Expired - Lifetime JPH0753059Y2 (ja) 1985-12-26 1986-02-05 高精度移動テーブル装置

Country Status (1)

Country Link
JP (1) JPH0753059Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62151783A (ja) * 1985-12-26 1987-07-06 東芝機械株式会社 高精度移動テ−ブル装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62151783A (ja) * 1985-12-26 1987-07-06 東芝機械株式会社 高精度移動テ−ブル装置

Also Published As

Publication number Publication date
JPH0753059Y2 (ja) 1995-12-06

Similar Documents

Publication Publication Date Title
JPS5898193U (ja) 工業用ロボツトア−ムの多点停止装置
JPS62127515U (enrdf_load_stackoverflow)
JPS6335990U (enrdf_load_stackoverflow)
JPS63107538U (enrdf_load_stackoverflow)
JPS6367041U (enrdf_load_stackoverflow)
JPH0418304U (enrdf_load_stackoverflow)
JPH0181287U (enrdf_load_stackoverflow)
JPS60194455U (ja) ワ−ク支持装置
JPH0266803U (enrdf_load_stackoverflow)
JPH02135243U (enrdf_load_stackoverflow)
JPS61187654U (enrdf_load_stackoverflow)
JPS5866662U (ja) レ−ザ−発振器のミラ−調整装置
JPS6426150U (enrdf_load_stackoverflow)
JPH0247174U (enrdf_load_stackoverflow)
JPH01117615U (enrdf_load_stackoverflow)
JPH0170340U (enrdf_load_stackoverflow)
JPS63101803U (enrdf_load_stackoverflow)
JPH0223935U (enrdf_load_stackoverflow)
JPS60146585U (ja) レ−ザ加工機
JPH03129403U (enrdf_load_stackoverflow)
JPS6126105U (ja) 三次元測定機のベ−スロツク装置
JPS62155940U (enrdf_load_stackoverflow)
JPS61157355U (enrdf_load_stackoverflow)
JPH01132901U (enrdf_load_stackoverflow)
JPH0225146U (enrdf_load_stackoverflow)