JPH074421Y2 - 空気調和装置の隔壁構造体 - Google Patents

空気調和装置の隔壁構造体

Info

Publication number
JPH074421Y2
JPH074421Y2 JP1988170483U JP17048388U JPH074421Y2 JP H074421 Y2 JPH074421 Y2 JP H074421Y2 JP 1988170483 U JP1988170483 U JP 1988170483U JP 17048388 U JP17048388 U JP 17048388U JP H074421 Y2 JPH074421 Y2 JP H074421Y2
Authority
JP
Japan
Prior art keywords
air
area
panel
lower panel
maintenance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988170483U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0293633U (https=
Inventor
敏雄 小野寺
芳宏 木元
修一 海上
繁幸 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP1988170483U priority Critical patent/JPH074421Y2/ja
Publication of JPH0293633U publication Critical patent/JPH0293633U/ja
Application granted granted Critical
Publication of JPH074421Y2 publication Critical patent/JPH074421Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1988170483U 1988-12-29 1988-12-29 空気調和装置の隔壁構造体 Expired - Lifetime JPH074421Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988170483U JPH074421Y2 (ja) 1988-12-29 1988-12-29 空気調和装置の隔壁構造体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988170483U JPH074421Y2 (ja) 1988-12-29 1988-12-29 空気調和装置の隔壁構造体

Publications (2)

Publication Number Publication Date
JPH0293633U JPH0293633U (https=) 1990-07-25
JPH074421Y2 true JPH074421Y2 (ja) 1995-02-01

Family

ID=31461471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988170483U Expired - Lifetime JPH074421Y2 (ja) 1988-12-29 1988-12-29 空気調和装置の隔壁構造体

Country Status (1)

Country Link
JP (1) JPH074421Y2 (https=)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61291848A (ja) * 1985-06-19 1986-12-22 Hitachi Ltd クリ−ンル−ム

Also Published As

Publication number Publication date
JPH0293633U (https=) 1990-07-25

Similar Documents

Publication Publication Date Title
EP2812637B1 (de) Lüftungsgerät für reinraumanwendungen
KR930009610B1 (ko) 클리인 루움 구축 시스템
US5462484A (en) Clean-room ceiling module
EP0250596B1 (en) Clean room
JPS6071830A (ja) 組替式局所環境制御室
US6514137B1 (en) Modular clean room plenum
CN101274327A (zh) 通风橱和通风橱的操作方法
JPH074421Y2 (ja) 空気調和装置の隔壁構造体
JP7102032B2 (ja) クリーンブース
JP3516507B2 (ja) クリーンルームシステム
CN220152888U (zh) 一种中低温分体式的空气处理机构及洁净厂房温湿度控制系统
KR20200097431A (ko) 드라이룸의 부스 장치
JP2008157607A (ja) 層流形クリーンルームの気流供給システム
JP2597853B2 (ja) クリーンルーム
JP2536188B2 (ja) 空気清浄装置
JPS62147249A (ja) クリ−ンル−ム
JPH0668408B2 (ja) クリ−ンル−ム用空気吹出装置およびこれを利用した高天井クリ−ンル−ム
JP2612199B2 (ja) 空気調和装置および空気清浄化装置
JPS62268941A (ja) クリ−ンル−ム
CN222447645U (zh) 洁净室
JPH0515934B2 (https=)
JP2007178065A (ja) クリーンルーム用還気装置
JPS62178824A (ja) クリ−ンル−ム
JPH11253732A (ja) クリーンルーム
JP7102033B2 (ja) クリーンブース

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term