JPH0742660Y2 - 半導体ウエハの洗浄機構を備えた保持装置 - Google Patents

半導体ウエハの洗浄機構を備えた保持装置

Info

Publication number
JPH0742660Y2
JPH0742660Y2 JP1990402536U JP40253690U JPH0742660Y2 JP H0742660 Y2 JPH0742660 Y2 JP H0742660Y2 JP 1990402536 U JP1990402536 U JP 1990402536U JP 40253690 U JP40253690 U JP 40253690U JP H0742660 Y2 JPH0742660 Y2 JP H0742660Y2
Authority
JP
Japan
Prior art keywords
semiconductor wafer
holding
diffusion layer
holding plate
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990402536U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0494408U (enExample
Inventor
成夫 大島
勉 佐藤
Original Assignee
直江津電子工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 直江津電子工業株式会社 filed Critical 直江津電子工業株式会社
Priority to JP1990402536U priority Critical patent/JPH0742660Y2/ja
Publication of JPH0494408U publication Critical patent/JPH0494408U/ja
Application granted granted Critical
Publication of JPH0742660Y2 publication Critical patent/JPH0742660Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
JP1990402536U 1990-12-28 1990-12-28 半導体ウエハの洗浄機構を備えた保持装置 Expired - Lifetime JPH0742660Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990402536U JPH0742660Y2 (ja) 1990-12-28 1990-12-28 半導体ウエハの洗浄機構を備えた保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990402536U JPH0742660Y2 (ja) 1990-12-28 1990-12-28 半導体ウエハの洗浄機構を備えた保持装置

Publications (2)

Publication Number Publication Date
JPH0494408U JPH0494408U (enExample) 1992-08-17
JPH0742660Y2 true JPH0742660Y2 (ja) 1995-10-04

Family

ID=31880437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990402536U Expired - Lifetime JPH0742660Y2 (ja) 1990-12-28 1990-12-28 半導体ウエハの洗浄機構を備えた保持装置

Country Status (1)

Country Link
JP (1) JPH0742660Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01110105A (ja) * 1987-10-23 1989-04-26 Sumitomo Metal Ind Ltd 硬脆材料の切断方法

Also Published As

Publication number Publication date
JPH0494408U (enExample) 1992-08-17

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