JPH0494408U - - Google Patents

Info

Publication number
JPH0494408U
JPH0494408U JP40253690U JP40253690U JPH0494408U JP H0494408 U JPH0494408 U JP H0494408U JP 40253690 U JP40253690 U JP 40253690U JP 40253690 U JP40253690 U JP 40253690U JP H0494408 U JPH0494408 U JP H0494408U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP40253690U
Other languages
Japanese (ja)
Other versions
JPH0742660Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990402536U priority Critical patent/JPH0742660Y2/ja
Publication of JPH0494408U publication Critical patent/JPH0494408U/ja
Application granted granted Critical
Publication of JPH0742660Y2 publication Critical patent/JPH0742660Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
JP1990402536U 1990-12-28 1990-12-28 半導体ウエハの洗浄機構を備えた保持装置 Expired - Lifetime JPH0742660Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990402536U JPH0742660Y2 (ja) 1990-12-28 1990-12-28 半導体ウエハの洗浄機構を備えた保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990402536U JPH0742660Y2 (ja) 1990-12-28 1990-12-28 半導体ウエハの洗浄機構を備えた保持装置

Publications (2)

Publication Number Publication Date
JPH0494408U true JPH0494408U (enExample) 1992-08-17
JPH0742660Y2 JPH0742660Y2 (ja) 1995-10-04

Family

ID=31880437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990402536U Expired - Lifetime JPH0742660Y2 (ja) 1990-12-28 1990-12-28 半導体ウエハの洗浄機構を備えた保持装置

Country Status (1)

Country Link
JP (1) JPH0742660Y2 (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01110105A (ja) * 1987-10-23 1989-04-26 Sumitomo Metal Ind Ltd 硬脆材料の切断方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01110105A (ja) * 1987-10-23 1989-04-26 Sumitomo Metal Ind Ltd 硬脆材料の切断方法

Also Published As

Publication number Publication date
JPH0742660Y2 (ja) 1995-10-04

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term