JPH0738305Y2 - 真空吸着プレート - Google Patents

真空吸着プレート

Info

Publication number
JPH0738305Y2
JPH0738305Y2 JP7200788U JP7200788U JPH0738305Y2 JP H0738305 Y2 JPH0738305 Y2 JP H0738305Y2 JP 7200788 U JP7200788 U JP 7200788U JP 7200788 U JP7200788 U JP 7200788U JP H0738305 Y2 JPH0738305 Y2 JP H0738305Y2
Authority
JP
Japan
Prior art keywords
suction
suction plate
plate
vacuum suction
exhaust path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7200788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01174385U (en:Method
Inventor
幸男 久郷
哲 岡田
洋司 鈴木
寛 鍋島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP7200788U priority Critical patent/JPH0738305Y2/ja
Publication of JPH01174385U publication Critical patent/JPH01174385U/ja
Application granted granted Critical
Publication of JPH0738305Y2 publication Critical patent/JPH0738305Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Load-Engaging Elements For Cranes (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP7200788U 1988-05-31 1988-05-31 真空吸着プレート Expired - Lifetime JPH0738305Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7200788U JPH0738305Y2 (ja) 1988-05-31 1988-05-31 真空吸着プレート

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7200788U JPH0738305Y2 (ja) 1988-05-31 1988-05-31 真空吸着プレート

Publications (2)

Publication Number Publication Date
JPH01174385U JPH01174385U (en:Method) 1989-12-12
JPH0738305Y2 true JPH0738305Y2 (ja) 1995-08-30

Family

ID=31297185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7200788U Expired - Lifetime JPH0738305Y2 (ja) 1988-05-31 1988-05-31 真空吸着プレート

Country Status (1)

Country Link
JP (1) JPH0738305Y2 (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2569175Y2 (ja) * 1991-08-31 1998-04-22 山形日本電気株式会社 ベローズ形ウェーハ真空チャック
KR102556368B1 (ko) * 2020-10-30 2023-07-18 세메스 주식회사 반송 핸드 및 기판 처리 장치

Also Published As

Publication number Publication date
JPH01174385U (en:Method) 1989-12-12

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