JPH0737317Y2 - ウエハ搬送フォーク - Google Patents

ウエハ搬送フォーク

Info

Publication number
JPH0737317Y2
JPH0737317Y2 JP1989118264U JP11826489U JPH0737317Y2 JP H0737317 Y2 JPH0737317 Y2 JP H0737317Y2 JP 1989118264 U JP1989118264 U JP 1989118264U JP 11826489 U JP11826489 U JP 11826489U JP H0737317 Y2 JPH0737317 Y2 JP H0737317Y2
Authority
JP
Japan
Prior art keywords
wafer
transfer fork
wafer transfer
lower plate
upper plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989118264U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0357942U (zh
Inventor
史郎 塩尻
茂久 田村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1989118264U priority Critical patent/JPH0737317Y2/ja
Publication of JPH0357942U publication Critical patent/JPH0357942U/ja
Application granted granted Critical
Publication of JPH0737317Y2 publication Critical patent/JPH0737317Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989118264U 1989-10-06 1989-10-06 ウエハ搬送フォーク Expired - Lifetime JPH0737317Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989118264U JPH0737317Y2 (ja) 1989-10-06 1989-10-06 ウエハ搬送フォーク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989118264U JPH0737317Y2 (ja) 1989-10-06 1989-10-06 ウエハ搬送フォーク

Publications (2)

Publication Number Publication Date
JPH0357942U JPH0357942U (zh) 1991-06-05
JPH0737317Y2 true JPH0737317Y2 (ja) 1995-08-23

Family

ID=31666441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989118264U Expired - Lifetime JPH0737317Y2 (ja) 1989-10-06 1989-10-06 ウエハ搬送フォーク

Country Status (1)

Country Link
JP (1) JPH0737317Y2 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005050855A (ja) * 2003-07-29 2005-02-24 Lintec Corp 吸着搬送装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6236247A (ja) * 1985-08-05 1987-02-17 Toshiba Mach Co Ltd ウエハ搬送装置

Also Published As

Publication number Publication date
JPH0357942U (zh) 1991-06-05

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