JPH0735397Y2 - 半導体ウエハ収納箱 - Google Patents

半導体ウエハ収納箱

Info

Publication number
JPH0735397Y2
JPH0735397Y2 JP1989148182U JP14818289U JPH0735397Y2 JP H0735397 Y2 JPH0735397 Y2 JP H0735397Y2 JP 1989148182 U JP1989148182 U JP 1989148182U JP 14818289 U JP14818289 U JP 14818289U JP H0735397 Y2 JPH0735397 Y2 JP H0735397Y2
Authority
JP
Japan
Prior art keywords
box
storage box
semiconductor wafer
carrier box
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989148182U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0388344U (enrdf_load_html_response
Inventor
晃次 中川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP1989148182U priority Critical patent/JPH0735397Y2/ja
Publication of JPH0388344U publication Critical patent/JPH0388344U/ja
Application granted granted Critical
Publication of JPH0735397Y2 publication Critical patent/JPH0735397Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1989148182U 1989-12-22 1989-12-22 半導体ウエハ収納箱 Expired - Lifetime JPH0735397Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989148182U JPH0735397Y2 (ja) 1989-12-22 1989-12-22 半導体ウエハ収納箱

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989148182U JPH0735397Y2 (ja) 1989-12-22 1989-12-22 半導体ウエハ収納箱

Publications (2)

Publication Number Publication Date
JPH0388344U JPH0388344U (enrdf_load_html_response) 1991-09-10
JPH0735397Y2 true JPH0735397Y2 (ja) 1995-08-09

Family

ID=31694643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989148182U Expired - Lifetime JPH0735397Y2 (ja) 1989-12-22 1989-12-22 半導体ウエハ収納箱

Country Status (1)

Country Link
JP (1) JPH0735397Y2 (enrdf_load_html_response)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6021497U (ja) * 1983-07-22 1985-02-14 モリヨシ株式会社 鮮魚等の輸送用保冷コンテナ−
JPS60160539U (ja) * 1984-04-02 1985-10-25 ソニー株式会社 半導体ウエハ等収納容器
JPS61119345U (enrdf_load_html_response) * 1985-01-10 1986-07-28
JPH0411964Y2 (enrdf_load_html_response) * 1986-09-29 1992-03-24

Also Published As

Publication number Publication date
JPH0388344U (enrdf_load_html_response) 1991-09-10

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