JPH0735382Y2 - 薄膜気相成長装置 - Google Patents
薄膜気相成長装置Info
- Publication number
- JPH0735382Y2 JPH0735382Y2 JP10170589U JP10170589U JPH0735382Y2 JP H0735382 Y2 JPH0735382 Y2 JP H0735382Y2 JP 10170589 U JP10170589 U JP 10170589U JP 10170589 U JP10170589 U JP 10170589U JP H0735382 Y2 JPH0735382 Y2 JP H0735382Y2
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- wafer
- wafer tray
- temperature
- tray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title claims description 12
- 238000007740 vapor deposition Methods 0.000 title claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 10
- 238000001947 vapour-phase growth Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 description 14
- 239000000498 cooling water Substances 0.000 description 8
- 239000010453 quartz Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 230000004043 responsiveness Effects 0.000 description 5
- 230000003247 decreasing effect Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000010574 gas phase reaction Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 241000255925 Diptera Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000002500 effect on skin Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10170589U JPH0735382Y2 (ja) | 1989-08-30 | 1989-08-30 | 薄膜気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10170589U JPH0735382Y2 (ja) | 1989-08-30 | 1989-08-30 | 薄膜気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0339835U JPH0339835U (enrdf_load_stackoverflow) | 1991-04-17 |
| JPH0735382Y2 true JPH0735382Y2 (ja) | 1995-08-09 |
Family
ID=31650641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10170589U Expired - Fee Related JPH0735382Y2 (ja) | 1989-08-30 | 1989-08-30 | 薄膜気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0735382Y2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20070056154A (ko) | 2004-10-19 | 2007-05-31 | 캐논 아네르바 가부시키가이샤 | 기판 지지·반송용 트레이 |
| JP2007211336A (ja) * | 2006-01-12 | 2007-08-23 | Sharp Corp | 気相成長装置および気相成長方法 |
-
1989
- 1989-08-30 JP JP10170589U patent/JPH0735382Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0339835U (enrdf_load_stackoverflow) | 1991-04-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |